EP1806773A4 - Belichtungseinrichtung, belichtungsverfahren und bauelemente-herstellungsverfahren - Google Patents
Belichtungseinrichtung, belichtungsverfahren und bauelemente-herstellungsverfahrenInfo
- Publication number
- EP1806773A4 EP1806773A4 EP05793182A EP05793182A EP1806773A4 EP 1806773 A4 EP1806773 A4 EP 1806773A4 EP 05793182 A EP05793182 A EP 05793182A EP 05793182 A EP05793182 A EP 05793182A EP 1806773 A4 EP1806773 A4 EP 1806773A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- exposure
- liquid
- optical system
- device manufacturing
- projection optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
- 239000007788 liquid Substances 0.000 abstract 8
- 230000003287 optical effect Effects 0.000 abstract 5
- 238000005259 measurement Methods 0.000 abstract 2
- 238000007654 immersion Methods 0.000 abstract 1
- 239000000758 substrate Substances 0.000 abstract 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/20—Exposure; Apparatus therefor
- G03F7/2041—Exposure; Apparatus therefor in the presence of a fluid, e.g. immersion; using fluid cooling means
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
- G03F7/70—Microphotolithographic exposure; Apparatus therefor
- G03F7/70216—Mask projection systems
- G03F7/70341—Details of immersion lithography aspects, e.g. exposure media or control of immersion liquid supply
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L22/00—Testing or measuring during manufacture or treatment; Reliability measurements, i.e. testing of parts without further processing to modify the parts as such; Structural arrangements therefor
- H01L22/10—Measuring as part of the manufacturing process
- H01L22/12—Measuring as part of the manufacturing process for structural parameters, e.g. thickness, line width, refractive index, temperature, warp, bond strength, defects, optical inspection, electrical measurement of structural dimensions, metallurgic measurement of diffusions
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2004298972 | 2004-10-13 | ||
JP2004358606 | 2004-12-10 | ||
PCT/JP2005/018783 WO2006041086A1 (ja) | 2004-10-13 | 2005-10-12 | 露光装置、露光方法及びデバイス製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1806773A1 EP1806773A1 (de) | 2007-07-11 |
EP1806773A4 true EP1806773A4 (de) | 2008-12-31 |
Family
ID=36148374
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP05793182A Withdrawn EP1806773A4 (de) | 2004-10-13 | 2005-10-12 | Belichtungseinrichtung, belichtungsverfahren und bauelemente-herstellungsverfahren |
Country Status (5)
Country | Link |
---|---|
US (1) | US20090021709A1 (de) |
EP (1) | EP1806773A4 (de) |
KR (1) | KR20070068340A (de) |
TW (1) | TW200628995A (de) |
WO (1) | WO2006041086A1 (de) |
Families Citing this family (22)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP2261741A3 (de) | 2003-06-11 | 2011-05-25 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
US7050146B2 (en) | 2004-02-09 | 2006-05-23 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
US7385670B2 (en) | 2004-10-05 | 2008-06-10 | Asml Netherlands B.V. | Lithographic apparatus, cleaning system and cleaning method for in situ removing contamination from a component in a lithographic apparatus |
US7880860B2 (en) | 2004-12-20 | 2011-02-01 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP4596191B2 (ja) | 2005-05-24 | 2010-12-08 | 株式会社ニコン | 露光方法及び露光装置、並びにデバイス製造方法 |
FR2890742B1 (fr) * | 2005-09-12 | 2007-11-30 | Production Et De Rech S Appliq | Equipement et procede de surveillance d'un dispositif lithographique a immersion. |
WO2007034838A1 (ja) * | 2005-09-21 | 2007-03-29 | Nikon Corporation | 露光装置及び露光方法、並びにデバイス製造方法 |
US8125610B2 (en) | 2005-12-02 | 2012-02-28 | ASML Metherlands B.V. | Method for preventing or reducing contamination of an immersion type projection apparatus and an immersion type lithographic apparatus |
US8045135B2 (en) * | 2006-11-22 | 2011-10-25 | Asml Netherlands B.V. | Lithographic apparatus with a fluid combining unit and related device manufacturing method |
KR100830586B1 (ko) | 2006-12-12 | 2008-05-21 | 삼성전자주식회사 | 기판을 노광하는 장치 및 방법 |
JP4366407B2 (ja) * | 2007-02-16 | 2009-11-18 | キヤノン株式会社 | 露光装置及びデバイス製造方法 |
US20080198347A1 (en) * | 2007-02-16 | 2008-08-21 | Canon Kabushiki Kaisha | Immersion exposure apparatus and method of manufacturing device |
US8947629B2 (en) | 2007-05-04 | 2015-02-03 | Asml Netherlands B.V. | Cleaning device, a lithographic apparatus and a lithographic apparatus cleaning method |
US7900641B2 (en) | 2007-05-04 | 2011-03-08 | Asml Netherlands B.V. | Cleaning device and a lithographic apparatus cleaning method |
US7916269B2 (en) | 2007-07-24 | 2011-03-29 | Asml Netherlands B.V. | Lithographic apparatus and contamination removal or prevention method |
US20090025753A1 (en) | 2007-07-24 | 2009-01-29 | Asml Netherlands B.V. | Lithographic Apparatus And Contamination Removal Or Prevention Method |
NL1035942A1 (nl) | 2007-09-27 | 2009-03-30 | Asml Netherlands Bv | Lithographic Apparatus and Method of Cleaning a Lithographic Apparatus. |
SG151198A1 (en) | 2007-09-27 | 2009-04-30 | Asml Netherlands Bv | Methods relating to immersion lithography and an immersion lithographic apparatus |
NL1036273A1 (nl) | 2007-12-18 | 2009-06-19 | Asml Netherlands Bv | Lithographic apparatus and method of cleaning a surface of an immersion lithographic apparatus. |
NL1036306A1 (nl) | 2007-12-20 | 2009-06-23 | Asml Netherlands Bv | Lithographic apparatus and in-line cleaning apparatus. |
US8339572B2 (en) | 2008-01-25 | 2012-12-25 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
NL2005009A (en) * | 2009-07-27 | 2011-01-31 | Asml Netherlands Bv | Lithographic apparatus and device manufacturing method. |
Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124873A (ja) * | 1992-10-09 | 1994-05-06 | Canon Inc | 液浸式投影露光装置 |
JPH10340846A (ja) * | 1997-06-10 | 1998-12-22 | Nikon Corp | 露光装置及びその製造方法並びに露光方法及びデバイス製造方法 |
JP2002341249A (ja) * | 2001-05-11 | 2002-11-27 | Nikon Corp | 液浸系顕微鏡対物レンズ |
Family Cites Families (26)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4346164A (en) * | 1980-10-06 | 1982-08-24 | Werner Tabarelli | Photolithographic method for the manufacture of integrated circuits |
JPS57153433A (en) * | 1981-03-18 | 1982-09-22 | Hitachi Ltd | Manufacturing device for semiconductor |
US4666273A (en) * | 1983-10-05 | 1987-05-19 | Nippon Kogaku K. K. | Automatic magnification correcting system in a projection optical apparatus |
JP2753930B2 (ja) * | 1992-11-27 | 1998-05-20 | キヤノン株式会社 | 液浸式投影露光装置 |
US5874820A (en) * | 1995-04-04 | 1999-02-23 | Nikon Corporation | Window frame-guided stage mechanism |
US5528118A (en) * | 1994-04-01 | 1996-06-18 | Nikon Precision, Inc. | Guideless stage with isolated reaction stage |
JP3555230B2 (ja) * | 1994-05-18 | 2004-08-18 | 株式会社ニコン | 投影露光装置 |
US5623853A (en) * | 1994-10-19 | 1997-04-29 | Nikon Precision Inc. | Precision motion stage with single guide beam and follower stage |
JPH08316124A (ja) * | 1995-05-19 | 1996-11-29 | Hitachi Ltd | 投影露光方法及び露光装置 |
US5825043A (en) * | 1996-10-07 | 1998-10-20 | Nikon Precision Inc. | Focusing and tilting adjustment system for lithography aligner, manufacturing apparatus or inspection apparatus |
AU5067898A (en) * | 1996-11-28 | 1998-06-22 | Nikon Corporation | Aligner and method for exposure |
EP0890136B9 (de) * | 1996-12-24 | 2003-12-10 | ASML Netherlands B.V. | In zwei richtungen ausgewogenes positioniergerät, sowie lithographisches gerät mit einem solchen positioniergerät |
US6235438B1 (en) * | 1997-10-07 | 2001-05-22 | Nikon Corporation | Projection exposure method and apparatus |
US6208407B1 (en) * | 1997-12-22 | 2001-03-27 | Asm Lithography B.V. | Method and apparatus for repetitively projecting a mask pattern on a substrate, using a time-saving height measurement |
CN101382738B (zh) * | 2002-11-12 | 2011-01-12 | Asml荷兰有限公司 | 光刻投射装置 |
AU2003289272A1 (en) * | 2002-12-10 | 2004-06-30 | Nikon Corporation | Surface position detection apparatus, exposure method, and device porducing method |
US7242455B2 (en) * | 2002-12-10 | 2007-07-10 | Nikon Corporation | Exposure apparatus and method for producing device |
US7006209B2 (en) * | 2003-07-25 | 2006-02-28 | Advanced Micro Devices, Inc. | Method and apparatus for monitoring and controlling imaging in immersion lithography systems |
US6844206B1 (en) * | 2003-08-21 | 2005-01-18 | Advanced Micro Devices, Llp | Refractive index system monitor and control for immersion lithography |
US7214476B2 (en) * | 2003-09-29 | 2007-05-08 | Fujifilm Corporation | Image forming method using photothermographic material |
JP2005136374A (ja) * | 2003-10-06 | 2005-05-26 | Matsushita Electric Ind Co Ltd | 半導体製造装置及びそれを用いたパターン形成方法 |
EP1524558A1 (de) * | 2003-10-15 | 2005-04-20 | ASML Netherlands B.V. | Lithographischer Apparat und Verfahren zur Herstellung einer Vorrichtung |
JP2005236047A (ja) * | 2004-02-19 | 2005-09-02 | Canon Inc | 露光装置及び方法 |
CN103605262B (zh) * | 2004-06-09 | 2016-06-29 | 株式会社尼康 | 曝光装置及其维护方法、以及元件制造方法 |
US7324185B2 (en) * | 2005-03-04 | 2008-01-29 | Asml Netherlands B.V. | Lithographic apparatus and device manufacturing method |
JP2006319064A (ja) * | 2005-05-11 | 2006-11-24 | Canon Inc | 測定装置、露光方法及び装置 |
-
2005
- 2005-10-12 WO PCT/JP2005/018783 patent/WO2006041086A1/ja active Application Filing
- 2005-10-12 TW TW094135465A patent/TW200628995A/zh unknown
- 2005-10-12 US US11/665,073 patent/US20090021709A1/en not_active Abandoned
- 2005-10-12 EP EP05793182A patent/EP1806773A4/de not_active Withdrawn
- 2005-10-12 KR KR1020077003266A patent/KR20070068340A/ko not_active Application Discontinuation
Patent Citations (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH06124873A (ja) * | 1992-10-09 | 1994-05-06 | Canon Inc | 液浸式投影露光装置 |
JPH10340846A (ja) * | 1997-06-10 | 1998-12-22 | Nikon Corp | 露光装置及びその製造方法並びに露光方法及びデバイス製造方法 |
JP2002341249A (ja) * | 2001-05-11 | 2002-11-27 | Nikon Corp | 液浸系顕微鏡対物レンズ |
Non-Patent Citations (1)
Title |
---|
See also references of WO2006041086A1 * |
Also Published As
Publication number | Publication date |
---|---|
WO2006041086A1 (ja) | 2006-04-20 |
EP1806773A1 (de) | 2007-07-11 |
US20090021709A1 (en) | 2009-01-22 |
TW200628995A (en) | 2006-08-16 |
KR20070068340A (ko) | 2007-06-29 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
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17P | Request for examination filed |
Effective date: 20070412 |
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REG | Reference to a national code |
Ref country code: HK Ref legal event code: DE Ref document number: 1106329 Country of ref document: HK |
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A4 | Supplementary search report drawn up and despatched |
Effective date: 20081127 |
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Effective date: 20090325 |
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RAP1 | Party data changed (applicant data changed or rights of an application transferred) |
Owner name: NIKON CORPORATION |
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STAA | Information on the status of an ep patent application or granted ep patent |
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