EP1797579A4 - Mikroentladegeräte mit eingeschlossenen elektroden und herstellungsverfahren dafür - Google Patents

Mikroentladegeräte mit eingeschlossenen elektroden und herstellungsverfahren dafür

Info

Publication number
EP1797579A4
EP1797579A4 EP05858440A EP05858440A EP1797579A4 EP 1797579 A4 EP1797579 A4 EP 1797579A4 EP 05858440 A EP05858440 A EP 05858440A EP 05858440 A EP05858440 A EP 05858440A EP 1797579 A4 EP1797579 A4 EP 1797579A4
Authority
EP
European Patent Office
Prior art keywords
making
microdischarge devices
encapsulated electrodes
encapsulated
electrodes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05858440A
Other languages
English (en)
French (fr)
Other versions
EP1797579A2 (de
EP1797579B1 (de
Inventor
J Gary Eden
Sung-Jin Park
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
University of Illinois
Original Assignee
University of Illinois
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US10/958,175 external-priority patent/US7573202B2/en
Priority claimed from US10/958,174 external-priority patent/US7297041B2/en
Application filed by University of Illinois filed Critical University of Illinois
Publication of EP1797579A2 publication Critical patent/EP1797579A2/de
Publication of EP1797579A4 publication Critical patent/EP1797579A4/de
Application granted granted Critical
Publication of EP1797579B1 publication Critical patent/EP1797579B1/de
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J17/00—Gas-filled discharge tubes with solid cathode
    • H01J17/02—Details
    • H01J17/04—Electrodes; Screens
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02—Manufacture of electrodes or electrode systems

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)
  • Micromachines (AREA)
  • Manufacturing Of Electric Cables (AREA)
EP05858440.0A 2004-10-04 2005-10-04 Mikroentladegeräte mit eingeschlossenen elektroden und herstellungsverfahren dafür Not-in-force EP1797579B1 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US10/958,175 US7573202B2 (en) 2004-10-04 2004-10-04 Metal/dielectric multilayer microdischarge devices and arrays
US10/958,174 US7297041B2 (en) 2004-10-04 2004-10-04 Method of manufacturing microdischarge devices with encapsulated electrodes
PCT/US2005/035782 WO2007011388A2 (en) 2004-10-04 2005-10-04 Microdischarge devices with encapsulated electrodes and method of making

Publications (3)

Publication Number Publication Date
EP1797579A2 EP1797579A2 (de) 2007-06-20
EP1797579A4 true EP1797579A4 (de) 2009-04-15
EP1797579B1 EP1797579B1 (de) 2015-09-02

Family

ID=37669273

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05858440.0A Not-in-force EP1797579B1 (de) 2004-10-04 2005-10-04 Mikroentladegeräte mit eingeschlossenen elektroden und herstellungsverfahren dafür

Country Status (4)

Country Link
EP (1) EP1797579B1 (de)
JP (1) JP5435868B2 (de)
KR (1) KR20070060151A (de)
WO (1) WO2007011388A2 (de)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1905057B1 (de) * 2005-07-15 2016-03-09 The Board Of Trustees Of The University Of Illinois Arrays von mikrokavitäts-plasmageräten mit gekapselten dielektrischen elektroden
JP2007250284A (ja) * 2006-03-14 2007-09-27 National Univ Corp Shizuoka Univ プラズマ電極
US8456086B2 (en) * 2007-10-25 2013-06-04 The Board Of Trustees Of The University Of Illinois Microcavity plasma devices with non-uniform cross-section microcavities
US8689537B1 (en) * 2008-10-20 2014-04-08 Cu Aerospace, Llc Micro-cavity discharge thruster (MCDT)
DE102009035411B3 (de) * 2009-07-31 2010-10-28 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Plasmastempel und Verfahren zur Plasmabehandlung einer Oberfläche
JP6026079B2 (ja) * 2011-03-01 2016-11-16 マイクロプラズマ株式会社 プラズマ電極
WO2012177762A2 (en) 2011-06-24 2012-12-27 The Board Of Trustees Of The University Of Illinois Arrays of metal and metal oxide microplasma devices with defect free oxide
KR101355187B1 (ko) * 2012-03-22 2014-01-27 (주)지니아텍 공기 청정기용 플라즈마 발생모듈 및 플라즈마 발생모듈 제조방법
JP6542053B2 (ja) * 2015-07-15 2019-07-10 株式会社東芝 プラズマ電極構造、およびプラズマ誘起流発生装置
CN109196741B (zh) * 2016-06-03 2020-10-16 日本碍子株式会社 电荷产生元件以及微粒数检测器
WO2019068070A1 (en) * 2017-10-01 2019-04-04 Space Foundry Inc. MODULAR PRINT HEAD ASSEMBLY FOR PLASMA JET PRINTING

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931859A1 (de) * 1996-08-26 1999-07-28 Nippon Telegraph And Telephone Corporation Verfahren zur herstellung poröser, anodisierter aluminiumfilme
US20020153828A1 (en) * 1997-11-14 2002-10-24 Masato Yamanobe Electron-emitting device and production method thereof
US20030080688A1 (en) * 2001-10-26 2003-05-01 Eden J. Gary Microdischarge devices and arrays
US20030122466A1 (en) * 2001-12-28 2003-07-03 Ahn Seong Deok Field emission device and method of fabricating the same
JP2004178863A (ja) * 2002-11-25 2004-06-24 Toshiba Corp 電子源装置および表示装置
WO2004079056A2 (en) * 2003-03-06 2004-09-16 C.R.F. Società Consortile Per Azioni Process to make nano-structurated components

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5686789A (en) * 1995-03-14 1997-11-11 Osram Sylvania Inc. Discharge device having cathode with micro hollow array
JP3765901B2 (ja) * 1996-02-26 2006-04-12 株式会社東芝 プラズマディスプレイ及びプラズマ液晶ディスプレイ
JP3714507B2 (ja) * 1996-08-26 2005-11-09 日本電信電話株式会社 多孔性陽極酸化アルミナ膜の作製方法
US6016027A (en) * 1997-05-19 2000-01-18 The Board Of Trustees Of The University Of Illinois Microdischarge lamp
JP3754876B2 (ja) * 2000-07-03 2006-03-15 キヤノン株式会社 細孔を有する構造体の製造方法及び細孔を有する構造体
US20020030437A1 (en) * 2000-09-13 2002-03-14 Nobuhiro Shimizu Light-emitting device and backlight for flat display
JP2003100498A (ja) * 2001-09-20 2003-04-04 Japan Vilene Co Ltd 放電用電極
JP2004227990A (ja) * 2003-01-24 2004-08-12 Kunihide Tachibana プラズマ処理方法およびプラズマ処理装置
JP2004273315A (ja) * 2003-03-10 2004-09-30 Sharp Corp イオン発生装置、空気調節装置および荷電装置

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0931859A1 (de) * 1996-08-26 1999-07-28 Nippon Telegraph And Telephone Corporation Verfahren zur herstellung poröser, anodisierter aluminiumfilme
US20020153828A1 (en) * 1997-11-14 2002-10-24 Masato Yamanobe Electron-emitting device and production method thereof
US20030080688A1 (en) * 2001-10-26 2003-05-01 Eden J. Gary Microdischarge devices and arrays
US20030122466A1 (en) * 2001-12-28 2003-07-03 Ahn Seong Deok Field emission device and method of fabricating the same
JP2004178863A (ja) * 2002-11-25 2004-06-24 Toshiba Corp 電子源装置および表示装置
WO2004079056A2 (en) * 2003-03-06 2004-09-16 C.R.F. Società Consortile Per Azioni Process to make nano-structurated components

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2007011388A2 *

Also Published As

Publication number Publication date
JP2008516380A (ja) 2008-05-15
EP1797579A2 (de) 2007-06-20
JP5435868B2 (ja) 2014-03-05
EP1797579B1 (de) 2015-09-02
WO2007011388A3 (en) 2007-06-14
WO2007011388A2 (en) 2007-01-25
KR20070060151A (ko) 2007-06-12

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