EP1793080A1 - Method of operation of a vacuum pump - Google Patents

Method of operation of a vacuum pump Download PDF

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Publication number
EP1793080A1
EP1793080A1 EP06023140A EP06023140A EP1793080A1 EP 1793080 A1 EP1793080 A1 EP 1793080A1 EP 06023140 A EP06023140 A EP 06023140A EP 06023140 A EP06023140 A EP 06023140A EP 1793080 A1 EP1793080 A1 EP 1793080A1
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EP
European Patent Office
Prior art keywords
rotor
vacuum pump
stator
temperature
gap
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06023140A
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German (de)
French (fr)
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EP1793080B1 (en
Inventor
Jürgen Wagner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1793080A1 publication Critical patent/EP1793080A1/en
Application granted granted Critical
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C13/00—Adaptations of machines or pumps for special use, e.g. for extremely high pressures
    • F04C13/005—Removing contaminants, deposits or scale from the pump; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C27/00—Sealing arrangements in rotary-piston pumps specially adapted for elastic fluids
    • F04C27/005—Axial sealings for working fluid
    • F04C27/006—Elements specially adapted for sealing of the lateral faces of intermeshing-engagement type pumps, e.g. gear pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/60—Assembly methods
    • F04C2230/602—Gap; Clearance
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2230/00—Manufacture
    • F04C2230/90—Improving properties of machine parts
    • F04C2230/91—Coating
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
    • F05C2251/00—Material properties
    • F05C2251/10—Hardness

Definitions

  • the invention relates to a method for operating a vacuum pump, which has a rotor and a stator separated therefrom by a gap, wherein a pumping effect is achieved by interaction of rotor and stator and the gap is limited by surfaces on the rotor and stator.
  • Vacuum pumps usually have rotating components (rotor) and stationary components (stator), between which there is a gap.
  • this gap is of great importance for the vacuum data of the vacuum pump.
  • the affected vacuum pumps include, for example, Roots pumps, screw pumps and claw pumps.
  • the aforementioned gap is kept as small as possible in the prior art by a complex production.
  • the components of the vacuum pump are manufactured as precisely as possible. This already represents a considerable effort, which ultimately lies in the expensive processing in high-precision machines. Subsequently, the components are aligned exactly to each other, usually in manual fine work. This is time-consuming and therefore also expensive. Taken together, good splitting accuracies are achieved by these measures in an expensive manner. However, these are still set by the editing and assembly limits. In addition, the components are not matched, so that the gaps are ultimately produced only with a limited size.
  • Task is therefore to introduce a method that allows more cost-effective way to set high-precision column.
  • the process should continue allow to realize smaller gaps than in the prior art, so as to ultimately improve the performance of the vacuum pump.
  • the method according to the invention it is achieved that the last mechanical processing of the components, which causes the adjustment of the column, takes place in the vacuum pump itself. This results in an exact pairing of the components as they can not be achieved via the manufacturing techniques in the prior art. Since the size of the column is based on the thermal expansion of the components according to the invention, a high-precision adjustment of the column is possible, which is also well above the prior art. Another advantage is that the vacuum pump, which is suitable for the process, has a safe protection against overrun of the rotors at overtemperature.
  • claims 2 to 6 represent advantageous developments of the invention.
  • the accuracy of the column is increased by the measure of claim 2, while claim 3 represents a particularly effective variant of the cutting and grinding means.
  • a micro knurling is created, in which the existing Matrial of rotor or stator is processed, so there is no additional material - for example, a coating - are applied.
  • the measure according to claim 4 makes it possible to optimize the effect of the cutting and grinding agents. Since the method is based on the thermal expansion of the components, the coefficient of expansion plays an important role.
  • the embodiment according to claim 5 therefore allows to increase the efficiency of the process.
  • the embodiment according to claim 6 gives a Particularly favorable type of temperature measurement, with a highly accurate adjustment of the temperature and thus the column can be realized.
  • the first figure shows a two-shaft vacuum pump in section one plane parallel to the axes.
  • a housing 1 two rotors 2 and 3 are arranged, which each have a shaft 4 and 5.
  • the shafts are each supported by bearing means 6, for example ball bearings.
  • a drive 7 sets one of the rotors in rotation, wherein the second rotor via a synchronous transmission 8 is also rotated.
  • Between the rotors and the housing exist frontal column 9 and longitudinal column 10.
  • On the surface of the rotors cutting or grinding means 15 are provided, marked in the figure as dotted areas. The means shown in this figure are arranged so that they sweep over the entire longitudinal column 10 during a rotation.
  • the second figure shows a frontal section AA through the same vacuum pump, in addition to the suction flange 11 and the ejection flange 12 are shown. Furthermore, a gap 13 is shown, which is present between the rotors.
  • cutting or grinding means 15 and 16 are attached.
  • the means 16 are provided on the end face, while the means 15 are located on the rotor head and extend in the axis-parallel direction along the rotor.
  • the means at the front are shown as dotted stripes, ie it is not a full-surface arrangement.
  • the means during a revolution of the rotor the entire process by the frontal surface limiting gap.
  • these means on the stator instead of on the rotor. In general, one will assume for these agents of a type of coating which has a grinding or cutting action. It is also possible to provide cutting, as they are known from the tool technology.
  • an infrared measuring device 20 which measures the heat radiated by the rotors.
  • the temperature measurement can also be done via mounted on the housing sensor.
  • FIG. 3 shows the temperature profile, as it is important for the process.
  • This temperature profile shown here the temperature T over the time t, is measured by the infrared measuring device 20. It is initially assumed that there is a normal temperature T N at which the vacuum pump is operated. When determining this normal temperature, it is important to note how the temperature is measured, as the temperature inside the pump does not have to be the same everywhere.
  • the normal temperature represents the boundary between normal temperature range I and over-temperature range II.
  • the overtemperature range is in particular that which is not reached during normal operation of the vacuum pump.
  • at least part of the surfaces of the rotor and stator of the vacuum pump are provided with cutting and grinding means 15, 16.
  • the pump is operated, ie the rotors are rotated. This heats up the vacuum pump.
  • the vacuum pump is next heated to a temperature which is above the normal temperature, ie in the overtemperature range. This can be done, for example, by supplying very high gas loads. It is also possible to send a high concentration of gases with very poor heat conduction through the vacuum pump.
  • the material removal determines the dimension of the column, which are present in the normal temperature range. With high material removal wide gaps are produced, with low material removal, the gaps are narrower, it is primarily a first-class pairing of the components causes.
  • the temperature of the Materialbatrag By controlling the temperature of the Materialbatrag and thus the size of the column can be set exactly.
  • the course of the temperature in the time interval .DELTA.t is shown only qualitatively. Depending on the material pairing, a faster or slower increase in temperature may make sense. Too fast a rise may mean too much stress on the cutting or grinding means.
  • the grinding or cutting means are provided as Mikrorändelung. This means that the surface of, for example, the rotor is finely structured, in which a file-like structure is embossed. This is advantageous because only the existing material is used and the Mikerenändelung has a very high resistance to continuous operation. As a result, the safety function is permanently guaranteed.
  • the materials for rotor and stator are selected so that they have different hardness and / or different coefficients of expansion.
  • the first measure improves material removal. From the geometry of the rotor and stator relative velocities of the surfaces result, which play a role in the maximum removal. By matching the relative velocities material pairing can be obtained when designing the geometry.
  • the second measure causes a different expansion of rotor and stator. Therefore, by selecting the coefficients of expansion, the shrinkage of the gaps can be accelerated or slowed as a function of the temperature. This increases the margin when adjusting the column.

Abstract

The method involves providing a part of surfaces of rotors and stator with sharp or grounded units (15, 16). A vacuum pump is brought to a temperature in a range above a normal temperature. The vacuum pump is operated in a raised temperature range within a time internal so that the surfaces come into contact and surface material is removed for acquiring a gap (10) of desired size between the surfaces. The rotor and the stator are made of materials with different hardness.

Description

Die Erfindung betrifft ein Verfahren zum Betrieb einer Vakuumpumpe, welche einen Rotor und einen von diesem durch einen Spalt getrennten Stator aufweist, wobei durch Zusammenwirken von Rotor und Stator ein Pumpeffekt erzielt wird und der Spalt durch Oberflächen auf Rotor und Stator begrenzt ist.The invention relates to a method for operating a vacuum pump, which has a rotor and a stator separated therefrom by a gap, wherein a pumping effect is achieved by interaction of rotor and stator and the gap is limited by surfaces on the rotor and stator.

Vakuumpumpen weisen in der Regel rotierende Bauteile (Rotor) und stehende Bauteile (Stator) auf, zwischen denen ein Spalt besteht. Insbesondere bei trockenen Vakuumpumpen, d.h. solchen, in denen kein Schmiermittel zum Abdichten von Spalten und Schmieren von aufeinander gleitenden Flächen eingesetzt wird, ist dieser Spalt von großer Bedeutung für die vakuumtechnischen Daten der Vakuumpumpe. Allgemein gesprochen bestimmt dieser Spalt die der Pumpfunktion entgegen wirkende Rückströmung. Zu den betroffenen Vakuumpumpen zählen beispielsweise Wälzkolbenpumpen, Schraubenpumpen und Klauenpumpen.Vacuum pumps usually have rotating components (rotor) and stationary components (stator), between which there is a gap. Especially with dry vacuum pumps, i. in those where no lubricant is used to seal crevices and lubricate surfaces sliding on one another, this gap is of great importance for the vacuum data of the vacuum pump. Generally speaking, this gap determines the return flow acting counter to the pumping function. The affected vacuum pumps include, for example, Roots pumps, screw pumps and claw pumps.

Der vorgenannte Spalt wird im Stand der Technik durch eine aufwändige Fertigung so klein wie möglich gehalten. Zunächst werden die Bauteile der Vakuumpumpe so präzise wie möglich gefertigt. Dies stellt bereits einen erheblichen Aufwand dar, der letzlich in der teueren Bearbeitung in hochpräzisen Maschinen liegt. Anschließend werden die Bauteile exakt zueinander ausgerichtet, meist in manueller Feinarbeit. Dies ist zeitauwändig und damit ebenfalls teuer. Zusammengenommen werden durch diese Maßnahmen auf teuere Art und Weise gute Spaltgenauigkeiten erreicht. Allerdings sind diesen noch immer durch die Bearbeitung und Montage Grenzen gesetzt. Außerdem sind die Bauteile nicht aufeinander abgestimmt, so dass die Spaltmaße letztlich nur mit einer begrenzten Größe herstellbar sind.The aforementioned gap is kept as small as possible in the prior art by a complex production. First of all, the components of the vacuum pump are manufactured as precisely as possible. This already represents a considerable effort, which ultimately lies in the expensive processing in high-precision machines. Subsequently, the components are aligned exactly to each other, usually in manual fine work. This is time-consuming and therefore also expensive. Taken together, good splitting accuracies are achieved by these measures in an expensive manner. However, these are still set by the editing and assembly limits. In addition, the components are not matched, so that the gaps are ultimately produced only with a limited size.

Aufgabe ist es daher, ein Verfahren vorzustellen, welches es auf kostengünstigere Art erlaubt, hochgenaue Spalte einzustellen. Das Verfahren soll weiterhin ermöglichen, kleinere Spalte als im Stand der Technik zu realisieren, so daß letztlich die Leistungsdaten der Vakuumpumpe zu verbessern.Task is therefore to introduce a method that allows more cost-effective way to set high-precision column. The process should continue allow to realize smaller gaps than in the prior art, so as to ultimately improve the performance of the vacuum pump.

Gelöst wird dieser Aufgabe durch ein Verfahren mit den Merkmalen des ersten Anspruches.This object is achieved by a method having the features of the first claim.

Durch das erfindungsgemäße Verfahren wird erreicht, dass die letzte mechanische Bearbeitung der Bauteile, die die Einstellung der Spalte bewirkt, in der Vakuumpumpe selbst stattfindet. Dadurch ergibt sich eine exakte Paarung der Bauteile wie sie über die Herstellungstechniken im Stand der Technik nicht erreicht werden kann. Da die Größe der Spalte nach dem erfindungsgemäßen Verfahren auf der wärmebedingten Längenausdehnung der Bauteile beruht, ist eine hochpräzise Einstellung der Spalte möglich, die ebenfalls deutlich über dem Stand der Technik liegt. Ein weiterer Vorteil ist, dass die Vakuumpumpe, die für das Verfahren geeignet ist, einen sicheren Schutz vor Anlaufen der Rotoren bei Übertemperatur besitzt.By the method according to the invention it is achieved that the last mechanical processing of the components, which causes the adjustment of the column, takes place in the vacuum pump itself. This results in an exact pairing of the components as they can not be achieved via the manufacturing techniques in the prior art. Since the size of the column is based on the thermal expansion of the components according to the invention, a high-precision adjustment of the column is possible, which is also well above the prior art. Another advantage is that the vacuum pump, which is suitable for the process, has a safe protection against overrun of the rotors at overtemperature.

Die Merkmale der Ansprüche 2 bis 6 stellen vorteilhafte Weiterbildungen der Erfindung dar. So wird die Genauigkeit der Spalte durch die Maßnahme von Anspruch 2 erhöht, während Anspruch 3 eine besonders effektive Variante der schneidenden und schleifenden Mittel darstellt. Eine Mikrorändelung entsteht, in dem das bereits vorhandene Matrial von Rotor oder Stator bearbeitet wird, es muss also kein zusätzliches Material - beispielsweise eine Beschichtung - aufgebracht werden. Die Maßnahme nach Anspruch 4 erlaubt es, die Wirkung der schneidenden und schleifenden Mittel zu optimieren. Da das Verfahren auf der wärmebedingten Ausdehnung der Bauteile beruht, spielt der Ausdehnungskoeffizient eine wichtige Rolle. Die Ausführungsform nach Anspruch 5 erlaubt daher, die Effizienz des Verfahrens zu steigern. Schließlich gibt die Ausführungsform nach Anspruch 6 eine besonders günstige Art der Temperaturmessung an, mit der eine hochgenaue Einstellung der Temperatur und damit der Spalte realisiert werden kann.The features of claims 2 to 6 represent advantageous developments of the invention. Thus, the accuracy of the column is increased by the measure of claim 2, while claim 3 represents a particularly effective variant of the cutting and grinding means. A micro knurling is created, in which the existing Matrial of rotor or stator is processed, so there is no additional material - for example, a coating - are applied. The measure according to claim 4 makes it possible to optimize the effect of the cutting and grinding agents. Since the method is based on the thermal expansion of the components, the coefficient of expansion plays an important role. The embodiment according to claim 5 therefore allows to increase the efficiency of the process. Finally, the embodiment according to claim 6 gives a Particularly favorable type of temperature measurement, with a highly accurate adjustment of the temperature and thus the column can be realized.

Mit Hilfe der Abbildung soll die Erfindung an einem Ausführungsbeispiel näher erläutert und die Vorteile derselben vertieft werden. Die Abbildungen zeigen:

Fig. 1:
Achsparalleler Schnitt durch eine zweiwellige Vakuumpumpe.
Fig. 2:
Stirnschnitt durch eine zweiwellige Vakuumpumpe.
Fig. 3:
Verlauf der Temperatur der Vakuumpumpe.
With the help of the figure, the invention will be explained in more detail on an exemplary embodiment and the advantages thereof are deepened. The pictures show:
Fig. 1:
Axially parallel cut through a twin-shaft vacuum pump.
Fig. 2:
Endcut through a twin-shaft vacuum pump.
3:
Course of the temperature of the vacuum pump.

Die erste Abbildung zeigt eine zweiwellige Vakuumpumpe im Schnitt eine zu den Achsen parallele Ebene. In einem Gehäuse 1 sind zwei Rotoren 2 und 3 angeordnet, welche je eine Welle 4 und 5 besitzen. Die Wellen werden jeweils gelagert durch Lagermittel 6, beispielsweise Kugellager. Ein Antrieb 7 versetzt einen der Rotoren in Drehung, wobei der zweite Rotor über ein Synchrongetriebe 8 ebenfalls in Drehung versetzt wird. Zwischen den Rotoren und dem Gehäuse existieren stirnseitige Spalte 9 und Längsspalte 10. Auf den Oberfläche der Rotoren sind schneidende oder schleifende Mittel 15 vorgesehen, in der Abbildung als gepunktete Bereiche gekennzeichnet. Die in dieser Abbildung gezeigten Mittel sind so angeordnet, dass sie während einer Drehung die kompletten Längsspalte 10 überstreichen.The first figure shows a two-shaft vacuum pump in section one plane parallel to the axes. In a housing 1, two rotors 2 and 3 are arranged, which each have a shaft 4 and 5. The shafts are each supported by bearing means 6, for example ball bearings. A drive 7 sets one of the rotors in rotation, wherein the second rotor via a synchronous transmission 8 is also rotated. Between the rotors and the housing exist frontal column 9 and longitudinal column 10. On the surface of the rotors cutting or grinding means 15 are provided, marked in the figure as dotted areas. The means shown in this figure are arranged so that they sweep over the entire longitudinal column 10 during a rotation.

Die zweite Abbildung zeigt einen Stirnschnitt A-A durch dieselbe Vakuumpumpe, in der zusätzlich der Ansaugflansch 11 und der Ausstossflansch 12 gezeigt sind. Weiterhin ist ein Spalt 13 dargestellt, welcher zwischen den Rotoren vorliegt. Um das erfindungsgemäße Verfahren einsetzen zu können, sind schneidende oder schleifende Mittel 15 und 16 angebracht. Hier sind die Mittel 16 an der Stirnseite vorgesehen, während sich die Mittel 15 auf dem Rotorenkopf befinden und sich in achsparalleler Richtung entlang der Rotors ausdehnen. Die Mittel an der Stirnseite sind als gepunktete Streifen gezeigt, d.h. es ist keine vollflächige Anordnung. Hier wird ausgenutzt, dass die Mittel während einer Umdrehung des Rotors die gesamte den durch die stirnseitige Oberfläche begrenzenten Spalt bearbeiten. Es ist außerdem möglich, diese Mittel statt auf dem Rotor auf dem Stator anzuordnen. Im allgemeinen wird man für diese Mittel von einer Art von Beschichtung ausgehen, die eine schleifende oder schneidende Wirkung besitzt. Es ist auch möglich Schneiden vorzusehen, wie sie aus der Werkzeugtechnik bekannt sind.The second figure shows a frontal section AA through the same vacuum pump, in addition to the suction flange 11 and the ejection flange 12 are shown. Furthermore, a gap 13 is shown, which is present between the rotors. In order to use the method according to the invention, cutting or grinding means 15 and 16 are attached. Here, the means 16 are provided on the end face, while the means 15 are located on the rotor head and extend in the axis-parallel direction along the rotor. The means at the front are shown as dotted stripes, ie it is not a full-surface arrangement. Here is exploited that the means during a revolution of the rotor, the entire process by the frontal surface limiting gap. It is also possible to arrange these means on the stator instead of on the rotor. In general, one will assume for these agents of a type of coating which has a grinding or cutting action. It is also possible to provide cutting, as they are known from the tool technology.

Zur Kontrolle der Temperatur der Rotoren ist ein Infrarotmessgerät 20 gezeigt, welches die von den Rotoren abgestrahlte Wärme misst. Prinzipiell kann die Temperaturmessung auch über am Gehäuse angebrachte Messfühler erfolgen.To control the temperature of the rotors, an infrared measuring device 20 is shown which measures the heat radiated by the rotors. In principle, the temperature measurement can also be done via mounted on the housing sensor.

Abbildung 3 zeigt den Temperaturverlauf, wie er für das Verfahren wichtig ist. Dieser Temperaturverlauf, gezeigt ist hier die Temperatur T über der Zeit t, wird von dem Infrarotmessgerät 20 gemessen. Dabei wird zunächst davon ausgegangen, dass es eine Normaltemperatur TN gibt, bei der die Vakuumpumpe betrieben wird. Bei der Festlegung dieser Normaltemperatur ist zu beachten, auf welche Weise die Temperaturmessung erfolgt, da die Temperatur innerhalb der Pumpe nicht an jeder Stelle gleich sein muss. Die Normaltemperatur stellt die Grenze zwischen Normaltemperaturbereich I und Übertemperaturbereich II dar. Der Übertemperaturbereich ist insbesondere jener, welcher im normalen Betrieb der Vakuumpumpe nicht erreicht wird. Im ersten Schritt des erfindungsgemäßen Betriebsverfahrens wird wenigstens ein Teil der Oberflächen von Rotor und Stator der Vakuumpumpe mit schneidenden und schleifenden Mitteln 15, 16 versehen. Als nächstes wird die Pumpe betrieben, d.h. die Rotoren in Drehung versetzt. Hierbei erwärmt sich die Vakuumpumpe. Nun wird erfindungsgemäß als nächstes die Vakuumpumpe auf eine Temperatur erwärmt, die oberhalb der Normaltemperatur liegt, also im Übertemperaturbereich liegt. Die kann beispielsweise durch zuführen von sehr hohen Gaslasten geschehen. Es ist auch möglich, eine hohe Konzentration von Gasen mit sehr schlechter Wärmeleitung durch die Vakuumpumpe zu schicken.Figure 3 shows the temperature profile, as it is important for the process. This temperature profile, shown here the temperature T over the time t, is measured by the infrared measuring device 20. It is initially assumed that there is a normal temperature T N at which the vacuum pump is operated. When determining this normal temperature, it is important to note how the temperature is measured, as the temperature inside the pump does not have to be the same everywhere. The normal temperature represents the boundary between normal temperature range I and over-temperature range II. The overtemperature range is in particular that which is not reached during normal operation of the vacuum pump. In the first step of the operating method according to the invention, at least part of the surfaces of the rotor and stator of the vacuum pump are provided with cutting and grinding means 15, 16. Next, the pump is operated, ie the rotors are rotated. This heats up the vacuum pump. Next, according to the invention, the vacuum pump is next heated to a temperature which is above the normal temperature, ie in the overtemperature range. This can be done, for example, by supplying very high gas loads. It is also possible to send a high concentration of gases with very poor heat conduction through the vacuum pump.

Dadurch kann weniger Wärme von den Rotoren über das gepumpte Gas abgeleitet werden und diese erhitzen sich. Als Folge von der Erwärmung in den Übertemperaturbereich dehnen sich die Rotoren auf ein Maß aus, welches jenseits der Abmessungen im Normaltemperaturbereich liegt. Als nächstes wird die Vakuumpumpe in diesem Übertemperaturbereich für ein gewisses Zeitintervall Δt betrieben. In diesem Zeitintervall schrumpfen aufgrund der Ausdehnung der Rotoren die Spalte, bis schließlich die Oberflächen von Rotor und Stator in Kontakt kommen. Dieser Kontakt besteht zwischen den Rotoren untereinander und zwischen Rotor und Stator. Durch die erfindungsgemäß vorgesehenen schneidenden oder schleifenden Mittel wird Material an den den Mitteln gegenüberliegenden Oberflächen für eine Zeit tS abgetragen. Je höher die temperaturbedingte Ausdehnung ist, desto höher ist der Materialabtrag. Der Materialabtrag bestimmt das Maß der Spalte, die im Normaltemperaturbereich vorliegen. Bei hohem Materialabtrag werden weite Spalte erzeugt, bei geringem Materialabtrag sind die Spalte enger, es wird in erster Linie eine erstklassige Paarung der Bauteile bewirkt. Über die Kontrolle der Temperatur kann der Materialbatrag und damit das Maß der Spalte exakt eingestellt werden. Der Verlauf der Temperatur im Zeitintervall Δt ist nur qualitativ gezeigt. Je nach Materialpaarung kann ein schnellerer oder langsamerer Anstieg der Temperatur sinnvoll sein. Ein zu schneller Anstieg kann eine zu hohe Belastung für die schneidenden oder schleifenden Mittel bedeuten.As a result, less heat can be dissipated from the rotors via the pumped gas and these heat up. As a result of the heating in the over-temperature range, the rotors expand to a level that lies beyond the dimensions in the normal temperature range. Next, the vacuum pump is operated in this over-temperature range for a certain time interval Δt. During this time interval, the gaps shrink due to the expansion of the rotors, until finally the surfaces of the rotor and stator come into contact. This contact exists between the rotors with each other and between the rotor and the stator. By means of the cutting or grinding means provided according to the invention, material is removed on the surfaces opposite the means for a time t S. The higher the temperature-related expansion, the higher the material removal. The material removal determines the dimension of the column, which are present in the normal temperature range. With high material removal wide gaps are produced, with low material removal, the gaps are narrower, it is primarily a first-class pairing of the components causes. By controlling the temperature of the Materialbatrag and thus the size of the column can be set exactly. The course of the temperature in the time interval .DELTA.t is shown only qualitatively. Depending on the material pairing, a faster or slower increase in temperature may make sense. Too fast a rise may mean too much stress on the cutting or grinding means.

In einer vorteilhaften Ausführungsform sind die schleifenden oder schneidenden Mittel als Mikrorändelung vorgesehen. Dies heißt, dass die Oberfläche beispielsweise des Rotors fein strukturiert wird, in dem eine feilenähnlich Struktur eingeprägt wird. Dies ist vorteilhaft, da ausschließlich das bereits vorhandene Material genutzt wird und die Mikrorändelung eine sehr hohe Beständigkeit für den Dauerbetrieb aufweist. Dadurch ist auch die Sicherheitsfunktion auf Dauer gewährleistet.In an advantageous embodiment, the grinding or cutting means are provided as Mikrorändelung. This means that the surface of, for example, the rotor is finely structured, in which a file-like structure is embossed. This is advantageous because only the existing material is used and the Mikerenändelung has a very high resistance to continuous operation. As a result, the safety function is permanently guaranteed.

In weiteren Ausführungsformen werden die Materialien für Rotor und Stator so gewählt, dass sie unterschiedliche Härte und/oder unterschiedliche Ausdehnungskoeffizienten aufweisen. Die erste Maßnahme verbessert den Materialabtrag. Aus der Geometrie von Rotor und Stator ergeben sich Relativgeschwindigkeiten der Oberflächen zueinander, die beim maximalen Abtrag eine Rolle spielen. Durch eine zu den Relativgeschwindigkeiten passende Materialpaarung kann Spielraum beim Gestalten der Geometrie gewonnen werden. Die zweite Maßnahme bewirkt eine unterschiedlich starke Ausdehnung von Rotor und Stator. Daher kann über eine Wahl der Ausdehungskoeffizienten das Schrumpfen der Spalte in Abhängigkeit von der Temperatur beschleunigt oder verlangsamt werden. Hierdurch wird der Spielraum beim Einstellen der Spalte erhöht.In further embodiments, the materials for rotor and stator are selected so that they have different hardness and / or different coefficients of expansion. The first measure improves material removal. From the geometry of the rotor and stator relative velocities of the surfaces result, which play a role in the maximum removal. By matching the relative velocities material pairing can be obtained when designing the geometry. The second measure causes a different expansion of rotor and stator. Therefore, by selecting the coefficients of expansion, the shrinkage of the gaps can be accelerated or slowed as a function of the temperature. This increases the margin when adjusting the column.

Claims (6)

Verfahren zum Betrieb einer Vakuumpumpe, welche einen Rotor (2, 3) und einen von diesem durch einen Spalt (9, 10) getrennten Stator aufweist, wobei durch Zusammenwirken von Rotor und Stator ein Pumpeffekt erzielt wird und der Spalt durch Oberflächen von Rotor und Stator begrenzt ist, dadurch gekennzeichnet, dass - wenigstens ein Teil der Oberflächen mit schneidenden oder schleifenden Mitteln (15, 16) versehen werden, - die Vakuumpumpe auf eine Temperatur in einem Bereich oberhalb der Normaltemperatur gebracht wird, und - die Vakuumpumpe innerhalb eines Zeitintervalls in diesem Übertemperaturbereich betrieben wird, so dass die Oberflächen in Berührung gelangen und dort Material abgetragen wird, um den Spalt (9, 10) auf eine gewünschte Größe zu bringen. Method for operating a vacuum pump which has a rotor (2, 3) and a stator separated therefrom by a gap (9, 10), a pumping effect being achieved by cooperation of rotor and stator and the gap being achieved by surfaces of rotor and stator is limited, characterized in that at least some of the surfaces are provided with cutting or grinding means (15, 16), - The vacuum pump is brought to a temperature in a range above the normal temperature, and - The vacuum pump is operated within a time interval in this over-temperature range, so that the surfaces come into contact and material is removed there to bring the gap (9, 10) to a desired size. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass mindestens eine der Oberflächen derart mit schneidenden oder schleifenden Mitteln (15, 16) versehen ist, dass während einer Umdrehung des Rotors die gesamten Oberflächen bearbeitet werden.A method according to claim 1, characterized in that at least one of the surfaces is provided with cutting or grinding means (15, 16) such that the entire surfaces are machined during one rotation of the rotor. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass mindestens eine der Oberflächen mit einer Mikrorändelung versehen ist, welche eine Material abtragende Wirkung hat.A method according to claim 1 or 2, characterized in that at least one of the surfaces is provided with a Mikorändelung, which has a material-removing effect. Verfahren nach einem der vorgehenden Ansprüche, dadurch gekennzeichnet, dass Rotor (2, 3) und Stator aus Materialien mit unterschiedlicher Härte hergestellt sind.Method according to one of the preceding claims, characterized in that rotor (2, 3) and stator are made of materials having different hardness. Verfahren nach einem der vorgehenden Ansprüche, dadurch gekennzeichnet, dass Rotor (2, 3) und Stator aus Materialien mit unterschiedlichem Ausdehnungskoeffizienten hergestellt sind.Method according to one of the preceding claims, characterized in that rotor (2, 3) and stator are made of materials with different coefficients of expansion. Verfahren nach einem der vorgehenden Ansprüche, dadurch gekennzeichnet, dass die Temperatur des Rotors (2, 3) durch Messung seiner Infrarotstrahlung bestimmt wird.Method according to one of the preceding claims, characterized in that the temperature of the rotor (2, 3) is determined by measuring its infrared radiation.
EP06023140A 2005-12-02 2006-11-07 Method of operation of a vacuum pump Not-in-force EP1793080B1 (en)

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DE102005057618A DE102005057618A1 (en) 2005-12-02 2005-12-02 Method for operating a vacuum pump

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EP1793080B1 EP1793080B1 (en) 2012-02-29

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US11131193B2 (en) 2016-09-02 2021-09-28 Lontra Limited Rotary piston and cylinder device

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DE102005057618A1 (en) 2007-06-06
EP1793080B1 (en) 2012-02-29

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