EP1768825A1 - Procede et dispositif de replication de masques optiques finement structures - Google Patents

Procede et dispositif de replication de masques optiques finement structures

Info

Publication number
EP1768825A1
EP1768825A1 EP05785070A EP05785070A EP1768825A1 EP 1768825 A1 EP1768825 A1 EP 1768825A1 EP 05785070 A EP05785070 A EP 05785070A EP 05785070 A EP05785070 A EP 05785070A EP 1768825 A1 EP1768825 A1 EP 1768825A1
Authority
EP
European Patent Office
Prior art keywords
plate
fluid
master plate
replication
carrier substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP05785070A
Other languages
German (de)
English (en)
Inventor
Armin Schwerdtner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SeeReal Technologies GmbH
Original Assignee
SeeReal Technologies GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SeeReal Technologies GmbH filed Critical SeeReal Technologies GmbH
Publication of EP1768825A1 publication Critical patent/EP1768825A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/56—Compression moulding under special conditions, e.g. vacuum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C31/00—Handling, e.g. feeding of the material to be shaped, storage of plastics material before moulding; Automation, i.e. automated handling lines in plastics processing plants, e.g. using manipulators or robots
    • B29C31/04—Feeding of the material to be moulded, e.g. into a mould cavity
    • B29C31/042—Feeding of the material to be moulded, e.g. into a mould cavity using dispensing heads, e.g. extruders, placed over or apart from the moulds
    • B29C31/044—Feeding of the material to be moulded, e.g. into a mould cavity using dispensing heads, e.g. extruders, placed over or apart from the moulds with moving heads for distributing liquid or viscous material into the moulds
    • B29C31/045—Feeding of the material to be moulded, e.g. into a mould cavity using dispensing heads, e.g. extruders, placed over or apart from the moulds with moving heads for distributing liquid or viscous material into the moulds moving along predetermined circuits or distributing the material according to predetermined patterns
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/02—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles
    • B29C43/021—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor of articles of definite length, i.e. discrete articles characterised by the shape of the surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00269—Fresnel lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00278—Lenticular sheets
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29D—PRODUCING PARTICULAR ARTICLES FROM PLASTICS OR FROM SUBSTANCES IN A PLASTIC STATE
    • B29D11/00—Producing optical elements, e.g. lenses or prisms
    • B29D11/00009—Production of simple or compound lenses
    • B29D11/00413—Production of simple or compound lenses made by moulding between two mould parts which are not in direct contact with one another, e.g. comprising a seal between or on the edges
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/34—Feeding the material to the mould or the compression means
    • B29C2043/3488—Feeding the material to the mould or the compression means uniformly distributed into the mould
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/34—Feeding the material to the mould or the compression means
    • B29C2043/3488—Feeding the material to the mould or the compression means uniformly distributed into the mould
    • B29C2043/3494—Feeding the material to the mould or the compression means uniformly distributed into the mould using vibrating means
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29C—SHAPING OR JOINING OF PLASTICS; SHAPING OF MATERIAL IN A PLASTIC STATE, NOT OTHERWISE PROVIDED FOR; AFTER-TREATMENT OF THE SHAPED PRODUCTS, e.g. REPAIRING
    • B29C43/00—Compression moulding, i.e. applying external pressure to flow the moulding material; Apparatus therefor
    • B29C43/32—Component parts, details or accessories; Auxiliary operations
    • B29C43/36—Moulds for making articles of definite length, i.e. discrete articles
    • B29C43/3642—Bags, bleeder sheets or cauls for isostatic pressing
    • B29C2043/3644—Vacuum bags; Details thereof, e.g. fixing or clamping
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B29—WORKING OF PLASTICS; WORKING OF SUBSTANCES IN A PLASTIC STATE IN GENERAL
    • B29L—INDEXING SCHEME ASSOCIATED WITH SUBCLASS B29C, RELATING TO PARTICULAR ARTICLES
    • B29L2011/00—Optical elements, e.g. lenses, prisms
    • B29L2011/0016—Lenses
    • B29L2011/005—Fresnel lenses
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03H—HOLOGRAPHIC PROCESSES OR APPARATUS
    • G03H1/00—Holographic processes or apparatus using light, infrared or ultraviolet waves for obtaining holograms or for obtaining an image from them; Details peculiar thereto
    • G03H1/02—Details of features involved during the holographic process; Replication of holograms without interference recording
    • G03H1/0276—Replicating a master hologram without interference recording
    • G03H2001/0284—Replicating a master hologram without interference recording by moulding

Definitions

  • the invention relates to a method and a device for replicating 5 sheet-like, thin-layered and finely structured flat optics and optical masks with optics structured in this way, which are hardened from a highly viscous or viscous transparent fluid on a carrier substrate plate, wherein the fluid between a plate-shaped master plate and a movable substrate substrate plate is introduced and remains connected after curing at this substrate plate.
  • the process is carried out without rotation.
  • the mold space is not limited in the propagation direction of the fluid to be cured by side walls or the like.
  • the master plate serves as replication template and is horizontally arranged 5 rotation-free.
  • the fluid to be cured is introduced in the required amount without a controllable supply valve in the molding area between the plates.
  • optical masks comprise planar elements with different optical surface structures, such as lenticulars, lens grid plates or matrix structures. They are generally rectangular, and have a matrix-shaped, cylindrical or spherical structure. Cylindrical masks are in particular lenticular, 5 for example with a large number of adjacent parallel lenticles in the form of cylindrical lenses. A cylindrical optical mask may also be a cylindrical Fresnel lens or a prism mask or the like. Spherical optical masks are exemplified by spherical Fresnel lenses.
  • a flat optics is also characterized by a structured optical surface structure 0.
  • the carrier plate here is a self-luminous or transmissive optical element in the sense of a light modulator, such as an LCD display, an image matrix or a spatial light modulator.
  • a light modulator such as an LCD display, an image matrix or a spatial light modulator.
  • These masks are usually the size of a screen or a display monitor and are thin-layered with a thickness of the order of a few tenths of a millimeter.
  • the thickness of the patterned area of the optical mask is in the range of less than 200 microns. Structured surfaces for optical applications require not only a high dimensional accuracy but also roughness values in the range of a few nanometers.
  • One technique of filling a cavity with a fluid is described by the method of injection-filling. It consists essentially in allowing the fluid to flow through a filling opening into the mold space at ambient pressure. Alternatively, the pressure-filling, describes the fluid usually with very high pressure in the mold.
  • Simple methods are based on the principle of pumping the fluid through an inlet opening in the mold cavity until the fluid at one or more
  • Position detectors recognize that the resin has reached a sufficient level even in the peripheral areas of the mold.
  • EP 0 688 649 B1 describes the filling of a limited mold space with a flowable material through an opening.
  • an outward force transverse force
  • the force when filling the fluid, the force of gravity or a compressive force, and the transverse force are applicable independently of each other.
  • the transverse force is explained in more detail in this document as a centrifugal force and thus also describes the method of rotation method.
  • the fluid is introduced through an inlet opening into the mold space, wherein the excess amount of fluid can leave the mold space through an outlet again, the degree of filling of the mold cavity is detected and controlled by sensing elements.
  • WO 99/30886 describes, in molding processes, the use of air-permeable but liquid-impermeable seals or membranes through which the mold space is evacuated during the filling process. After the mold is filled, the cell openings of the seal are closed and the fluid is cured.
  • an economical application in the production of large quantities appears problematic here.
  • EP 0 490 580 B1 describes a process for coating glass and for producing coated glass articles.
  • the glass sheets are horizontal during the process or may also be temporarily slightly inclined.
  • resin is placed between two spaced glass sheets to be laminated one on top of the other.
  • special spacer elements are attached to the two glass panes. These spacers extend at the edge of the glass sheets and are characterized by being permeable to air but impermeable to a fluid.
  • the introduction of an appropriate amount of resin between the glass sheets is followed by an injection hose wherein the resin contacts the inner surfaces of both glasses and the introduction is controlled so that the fluid area between the disks spreads in a controlled manner.
  • the space between the glass panes is filled with the remaining amount of fluid, whereby the air displaced by the introduced resin can escape through the above-mentioned air-permeable spacers.
  • the resin is then cured and forms a layer between the glass sheets.
  • the resin is introduced into the central region of the glass sheets.
  • the resin is introduced through an injection hose between the glass plates, for which purpose an opening is provided in the peripheral air-permeable spacer element.
  • Spacers designed as a foam adhesive strips having an open-pore structure.
  • the method also includes pressing the glass plates during the filling operation of the resin to assist in filling the resin into the space between the glasses.
  • the pressing of the plates can take place in a slightly overpressure environment, during which evacuation the air can escape through the air-permeable, but fluid-impermeable spacer elements.
  • US Pat. No. 6,203,304 B1 describes a method and a device for filling a cavity between a first substrate and a second substrate with a fluid.
  • the method describes several evacuation nests, which are arranged on the outer surface of the two substrates.
  • the evacuation nests are associated with subcavities of the mold. During the filling of the mold, the evacuation nests serve to reduce the overpressure in the mold.
  • DE 36 43 765 A1 discloses a method for producing a plastic plate between two glass surfaces and an apparatus for performing this process.
  • a liquid plastic is introduced between the glass surfaces, wherein the surfaces are inclined or normal to each other.
  • surface edges are aligned parallel to each other and sealed.
  • the two glass surfaces are pressed against each other from the outside, during which a high pressure is exerted during the curing of the plastic by one or more rotating pressure rollers, which are moved along the glass surfaces.
  • DE 22 55 923 A1 discloses a method for molding optical lenses, wherein a synthetic resin between an upper and lower mold carrier plate is introduced and cured.
  • the replication device is closed with a joint seal.
  • the mold carrier plates are fastened to each other via mechanical guide elements whose length determines the spacing of the guide plates and thus the thickness of the lenses.
  • Figure description of Figure 11 shows a device consisting of a vacuum chamber with a UV source and an infrared heating element.
  • An optical element made of a sandwich composite of plastic film and thermosetting plastic is introduced between an upper and lower moldings in the vacuum chamber. By applying negative pressure, the plastic composite is pressed against the moldings, molded and finally cured.
  • JP 63307909 describes a typical rotary process for the production or molding of disks made of resin, whereby air pockets are avoided.
  • the resin is applied through a metering device, a dipenser, in the center of a rapidly rotating mold, with the resin spreading through the centrifugal force and covering the mold.
  • a metering device a dipenser
  • the resin spreading through the centrifugal force and covering the mold.
  • Rotary techniques are very robust and reliable for smaller dimension devices, however, this process may no longer be desirably used in the production of the desired rectangular optical masks for displays whose diagonal may be 20 inches or more.
  • the above-described method of mold filling that is, the "two-hole method” and the fluid-impermeable seal have the disadvantage that they tend to bend in thin-layered and large-scale impression elements due to the high forces, the walls of the mold. If, in addition, a negative pressure or a vacuum is applied to a second opening, then the danger increases that the walls of the molding space deform so that an inexactly shaped, non-dimensionally accurate end product is produced.
  • the aforementioned thin-layered and finely structured masks must be produced in the highest quality.
  • a defective optical mask for example, causes a permanently visible on the display pixel error. Any defects, such as those caused by air trapping, can rarely be repaired in the rarest of cases and thus lead to rejects.
  • the resin is usually not a significant cost factor in the manufacturing process, but the high-precision master plate as the centerpiece of the replication device is usually very expensive.
  • the resin overflowed beyond the target boundaries of the mask to be produced between the mold plates cures with the optical mask, adheres to the master plate, and thus has to be removed from the master plate by time-consuming cleaning operations.
  • This organizational downtime reduces the availability of the entire replication facility.
  • the master plate is also exposed during this cleaning work to a high degree of wear. Moreover, there is the risk of damage by the additional handling, so that the life of the expensive master plate can be significantly shortened.
  • the molded optical mask remains until sufficient curing of the fluid in the system. Nevertheless, it is desirable to shorten the cycle time of the replication process, in particular the processing time for applying the fluid and for forming the mask.
  • the simplicity of the method and the replication device should ensure a high system availability and good process reliability with uncomplicated handling.
  • the optical masks are very thin-layered and preferably have a thickness below 200 microns. From this, the correspondingly small tolerances can be derived and the high demands on the dimensional and dimensional accuracy can be seen. Such a high vertical dimensional accuracy is achieved if it is possible to avoid during replication in particular the deflections of the substrate plate.
  • both the method for replication and the device provided for this purpose are intended to ensure an economical and process-reliable production of said thin-layered and finely structured optical masks.
  • the final product must have a high dimensional and dimensional accuracy as well as a high degree of optical quality.
  • the method belongs to the group of rotation-free impressions, wherein the replication process is preferably carried out horizontally.
  • the method is used for replication of sheet-like and finely structured flat optics and optical masks, especially for autostereoscopic displays, which in this case of a viscous transparent fluid, usually a resin cured.
  • the optical masks are usually rectangular and have a cylindrical or spherical structure. Cylindrical masks are in particular lenticular, for example with a large number of adjacent parallel lenticles in the form of cylindrical lenses. A cylindrical optical mask may also be a cylindrical Fresnel or prismatic mask or the like. Spherical optical masks are exemplified by spherical Fresnel lenses.
  • These masks are usually the size of a screen or a display monitor and are thin-layered with a thickness of the order of a few tenths of a millimeter.
  • the thickness of the optical mask is in the range below 200 micrometers.
  • the replication device comprises a mold space containing a horizontally arranged plate-shaped master plate.
  • the master disk has a structured replication area in the center as a replication template as well a plane-parallel enclosing edge area.
  • the replication region is releasably connected to the master plate, preferably by vacuum.
  • a sealing ring encloses this plate.
  • On this sealing ring is a movable carrier substrate plate and closes the mold cavity airtight.
  • the replication means includes means for detecting the distance of the plates.
  • the invention is based on the idea that the distance between the plates is controllably controlled by a negative pressure in the mold space.
  • the distance of the plates is also controllable by variable spacers between the plates.
  • the method according to the invention consists of the main steps of initial dispensing and molding. In the following, these steps will be explained further.
  • a first major step (a) of the procedure is Initial Dispensing. This step includes:
  • (a1 :) Initial Point application of one or more smaller areas as initial points of the fluid to be cured.
  • a single initial point is preferably in the region of the center of the carrier substrate plate;
  • Tracking applying several tracks of fluid to the master plate.
  • the tracks preferably run from the center of the replication area to the edge area of the master disk or extend between the counterpoints.
  • the lanes are preferably continuous and radiant and / or arcuate;
  • Counterpoints wherein a counterpoint on the master plate is in each case congruent to an initial point of the carrier substrate plate.
  • the steps of the initial dispensing (a) are preferably carried out automatically, exemplarily with a dispenser and with handling technology, and can thus also take place temporally parallel or overlapping.
  • the second main step (b), the molding comprises:
  • Controlled Molding Applying a negative pressure in the mold space, wherein the Queen Substratpiatte approaches controlled to the master plate and the fluid from the initial Fluiding range from the initial and Kontrailia along the tracks continuously and completely through the replication the master plate given space between the plates fills, the negative pressure in the mold space and optionally variable spacers between the plates are used as controllable process parameters.
  • the steps of molding (b) are preferably carried out automatically with corresponding sensors and a program control of the process parameters.
  • the method according to the invention is based on the idea of transforming the transformation of the initial shape of the fluid, that is to say the initial fluid region, by means of the tracks into a rectangular end shape of the mask.
  • a first process condition is that no air bubbles may occur in the optical mask.
  • a second requirement is to achieve the horizontal end shape of the mask in an optimal manner, that is, without undersize and with as little oversize as possible.
  • a track here is preferably a coherent beam or arcuate track of the fluid.
  • the tracks can also be longitudinal surface areas molding. These longitudinal surface areas are also selected so that the fluid does not induce air pockets during the flow process.
  • tracks extend from the initial fluid region to the edge region of the master plate.
  • the course of a plurality of tracks is preferably selected so that they run in the direction of propagation of the fluid during the flow process, thus forming almost a trajectory of the flow direction. Deviation from the ideal trajectory can serve to direct the flow direction of the fluid and facilitate the transition from pitch of the mold to adjacent pitch.
  • the invention is based on the idea to create and initiate through the tracks as it were a bridge to the adjacent groove, which serves as an initiating track line for the passage of the fluid into the adjacent groove.
  • the required amount of fluid is applied to the master plate and here the initial fluiding region is formed.
  • one or more maximum vertical elevations, the counterpoints are formed on the fluid region on account of the viscous fluid. These points are according to the invention congruent with the respective initial points of the carrier substrate plate.
  • the initial fluiding region is contiguous in a simple embodiment and has a round, elliptical or approximately oval shape. This basic shape can be extended by bulges or lobed areas towards the corners of the replication area.
  • the fluiding region may also be radiating, for example meandering, but here too there is at least one counterpoint. A single counterpoint is preferably in the center of the replication area of the master disk.
  • the structuring of the optical mask as end product for example a cylindrical lenticular or a spherical field lens, essentially determines the initial shape of the initial fluid region, the course of the tracks and the position of the counterpoints.
  • the molding (b :) the idea of the invention is continued.
  • the initial contact step (b1 :) the horizontally aligned carrier substrate plate is applied, with the master plate initially touching its contrapoints and the initial points of the carrier substrate plate. If necessary, it may be necessary to intensify the counterpoints of the initial fluid area just prior to the initial merging of the plates. This can be done, for example, by adding a small amount of fluid to the respective sites of the initial fluid area.
  • the controlled molding (b2 :) a negative pressure in the mold cavity is generated, whereby the carrier substrate plate is controlled to approach the master plate.
  • the fluid continuously spreads from the meanwhile connected initial fluiding region along the tracks.
  • the negative pressure in the mold space and possibly additionally the variable spacing means are used as controllable process parameters.
  • These controllable parameters induce, according to the invention, a spreading of the fluid, wherein the deflection of the carrier-substrate plate lies within the required tolerance ranges.
  • the parameters are preferably program-controlled.
  • controllable variable spacers used in addition to the negative pressure are, for example, mechanical, for example as a worm gear or like, trained.
  • Other exemplary embodiments include pneumatic, hydraulic or particularly preferably piezoelectric elements.
  • controllable spacer means are present as a variable vertical spring force of the sealing ring, wherein the sealing ring may have a plurality of separately controllable sections.
  • the negative pressure in the molding area induces an approximation of the plates and causes the fluid to spread. Furthermore, a suction effect is exerted on the fluid area by the negative pressure, so that the fluid also spreads as a result. According to the invention, it is possible to superimpose these forces so that only a slight vertical force is exerted on the carrier plate during the controlled approach of the plates.
  • the support plate bends only very slightly during the process, remains until the curing of the fluid in the desired tolerances plan and thus ensures the desired dimensional accuracy of the final product.
  • variable distance means as further controllable process variables.
  • vibrations are induced on the fluid in the mold cavity.
  • This vibrator is preferably an ultrasonic exciter as implemented by a power sonotrode. Due to the microvibrations, the propagation of the fluid is sustainably accelerated, since the passage of the fluid from one groove to the next following groove is excited. In the following will be
  • the fluid completely fills the intermediate space of the plates given by the replication area of the master plate.
  • the final shape of the mask is homogeneous, true to size and shape in the layer thickness and is free of air bubbles.
  • the horizontal actual dimension of the final shape has a slight oversize to the desired final shape, that is to say the intended replication area of the master plate.
  • FIG. 1a and 1b is an illustration of the replication device according to the invention in oblique and front view
  • FIG. 2a is a detail view of the replication device in front view
  • FIG. and FIG. 2b a detail view of the shaping space of the replication device in an oblique view
  • the forming space R of the replication device includes a master plate M, an enclosing seal ring D, and a movable substrate substrate plate TP.
  • the master plate M has a structured replication area MF as replication template and an adjoining, plane-parallel edge area MR.
  • the process step (a) of the initial dispensing is substantially completed.
  • the initial point step (a1 :) a single initial point IP of the fluid to be cured was applied to the carrier substrate plate TP. This point IP is here in the center of the carrier substrate plate TP.
  • the tracking step (a2 :) the application of several tracks TS1.TS2, .. from fluid to the master plate M 1 which here from the center of Master plate to the edge of the replication area MF of the master plate run. The tracks run together here.
  • the required quantity of fluid here in the region of the center of the master plate M, was applied and a coherent initial fluid area IF was formed, the maximum vertical elevation of which forms a counterpoint KP.
  • the counterpoint KP is congruent with the initial point IP of the carrier substrate plate TP.
  • FIG. 2a shows the replication device similar to FIG. 1 after the molding step (b :).
  • the horizontally oriented carrier substrate plate TP was applied so that the master plate M initially touches the counterpoint KP and the initial point IP of the carrier substrate plate TP, as already apparent from FIG was.
  • the variable spacers are implemented here in the illustration on the right side, implemented in a first embodiment as a sealing ring D.
  • the sealing ring D has a variable spring force in the vertical direction.
  • Controlled Molding (b2 :), a negative pressure is created in the forming space R, with the carrier substrate plate TP approaching the master plate M in controlled manner, and the fluid from the initial fluiding region IF approaching from the initial point IP and counterpoint KP along the tracks TS1.TS2 , .. continuously distributed.
  • the fluid completely fills the intermediate space of the plates given by the replication area MF of the master plate M.
  • the fluid projects beyond this replication area MF of the master plate as desired only slightly and the horizontal actual size of the optical mask LM as the end product only slightly exceeds the replication area MF.
  • a controllable heating or cooling device without imaging, ensures a uniform temperature in the replication device and in particular in the mold cavity.
  • the substrate substrate plate TP is due to the negative pressure and the variable
  • Spacer DM as a controllable process parameter during the process step dimensionally stable plan and bends only insignificantly.
  • the optical mask LM thus fulfills as desired the vertical tolerances of the dimensional accuracy.
  • a further variant of the variable spacer DM is shown schematically on the left side of the replication device.
  • the spacer means DM are designed as piezoelectric elements. These elements allow a particularly precise control of the distance of the plates.
  • the mentioned variants of the distance means DM, on the right the sealing ring D with variable spring force and on the left the variable spacing means DM are likewise advantageously used in the step of demoulding the end product.
  • the optical mask LM is released from the master plate M.
  • the sealing ring D is inflated until the carrier substrate plate TP with the optical mask of the replication region MR of the master plate M dissolves.
  • This figure also shows a bending device BX, which allows the carrier substrate plate TP in the region of the initial point IP, especially during the intial contact step (b1 :) briefly vertically effetbiegen towards the master plate M and the initial contact of the plates on To ensure initial or counterpoint supportive.
  • the master plate M is arranged horizontally and contains the shaded replication area MF, which represents the final shape of the optical mask LM, and the plane-parallel edge area MR, which encloses the replication area MF ,
  • the master plate M here forms the bottom of the mold space R.
  • a sealing ring D rests on the master plate and surrounds the
  • Edge region MR of the master plate M For simplicity, only the left and rear portions of the sealing ring D are shown in the illustration. The sealing ring D at the same time forms the side walls of the forming space R. Finally, when the movable carrier substrate plate TP is placed on the sealing ring, the forming space R is thereby limited and closed.
  • the sealing ring D For simplicity, only the left and rear portions of the sealing ring D are shown in the illustration. The sealing ring D at the same time forms the side walls of the forming space R. Finally, when the movable carrier substrate plate TP is placed on the sealing ring, the forming space R is thereby limited and closed.
  • the sealing ring D forms the side walls of the forming space R.
  • Replication area MF a movable plate and is connected to the master plate M as a base plate exemplified by vacuum. The presentation of further spacers is omitted.
  • Another conceivable variant of the replication device is given by the fact that the two carrier substrate plate and the master plate are arranged reversed, so we executed the replication horizontally mirrored. It is also conceivable to arrange the carrier substrate plate in a fixed manner, whereas the master plate, or in particular the replication region of the master plate, can be moved.
  • FIGS. 3a to 3d illustrate in schematics the shape of the initial fluid area IP of the tracks T1, T2,... On the master plate M.
  • the replication area MF of the master plate is shown in plan view in each case.
  • the dispensing step (a3 :) the required amount of fluid is applied to the master plate, and a contiguous initial fluid region IF is formed whose maximum vertical elevation forms the counterpoint KP.
  • the more complex tracks TS1.T2,.. Are shown as arrows in more detail in the lower right area of the replication area MF.
  • the optical mask to be formed is a lenticular in these examples with vertical lenticules in this illustration.
  • the initial fluid area IF is approximately oval, the tracks T1, T2, .. extend outward along the diagonal and the counterpoint KP lies in the center of the replication area MF.
  • Fig. 3b shows curved tracks T1 and T2 extending to the edge, each in the form of a brachistrochrone.
  • Fig. 3c shows branched tracks TS2 and TS3.
  • FIG. 3d shows an initial fluid area IF with lugs in the direction of the corners of the replication area MF.
  • the area here has two counterpoints KP1 and KP2 and the tracks TS1 to TS3 run as a trajectory to the propagation direction of the fluid.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Manufacturing & Machinery (AREA)
  • Ophthalmology & Optometry (AREA)
  • Robotics (AREA)
  • Casting Or Compression Moulding Of Plastics Or The Like (AREA)
  • Moulds For Moulding Plastics Or The Like (AREA)

Abstract

L'invention concerne un procédé et un dispositif de réplication de lentilles plates et masques optiques (LM) plats, à mince couche et finement structurés ayant des optiques finement structurées et qui sont obtenus par durcissement d'un fluide transparent hautement visqueux sur une plaque substrat (TP). Le fluide est introduit entre une plaque maître (M) en forme de plaque et une plaque substrat mobile et, une fois durci, il est relié à cette plaque substrat. Le procédé est effectué sans rotation et l'empreinte n'est pas délimitée par des parois latérales ou équivalent dans la direction de propagation du fluide. Les lentilles plates ou masques optiques sont notamment des lenticulaires, des lentilles de champ ou de Fresnel. La forme finale des masques est homogène, a une épaisseur de couche de forme précise et est exempte de bulles d'air. Le procédé selon l'invention et le dispositif permettent une réplication fiable d'une grande précision et d'une grande qualité optique.
EP05785070A 2004-09-08 2005-09-07 Procede et dispositif de replication de masques optiques finement structures Withdrawn EP1768825A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004043385A DE102004043385B3 (de) 2004-09-08 2004-09-08 Verfahren und Einrichtung zur Replikation fein strukturierter Flachoptiken und optischen Masken mit derartigen strukturierten Optiken
PCT/EP2005/009590 WO2006027217A1 (fr) 2004-09-08 2005-09-07 Procede et dispositif de replication de masques optiques finement structures

Publications (1)

Publication Number Publication Date
EP1768825A1 true EP1768825A1 (fr) 2007-04-04

Family

ID=35463768

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05785070A Withdrawn EP1768825A1 (fr) 2004-09-08 2005-09-07 Procede et dispositif de replication de masques optiques finement structures

Country Status (6)

Country Link
US (1) US20080315442A1 (fr)
EP (1) EP1768825A1 (fr)
JP (1) JP2008512697A (fr)
CN (1) CN100575031C (fr)
DE (1) DE102004043385B3 (fr)
WO (1) WO2006027217A1 (fr)

Families Citing this family (19)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USD624952S1 (en) 2008-10-20 2010-10-05 X6D Ltd. 3D glasses
USRE45394E1 (en) 2008-10-20 2015-03-03 X6D Limited 3D glasses
USD666663S1 (en) 2008-10-20 2012-09-04 X6D Limited 3D glasses
USD603445S1 (en) 2009-03-13 2009-11-03 X6D Limited 3D glasses
US8542326B2 (en) 2008-11-17 2013-09-24 X6D Limited 3D shutter glasses for use with LCD displays
CA2684513A1 (fr) 2008-11-17 2010-05-17 X6D Limited Lunettes de vision tridimensionnelle ameliorees
USD646451S1 (en) 2009-03-30 2011-10-04 X6D Limited Cart for 3D glasses
USD672804S1 (en) 2009-05-13 2012-12-18 X6D Limited 3D glasses
USD650956S1 (en) 2009-05-13 2011-12-20 X6D Limited Cart for 3D glasses
USD669522S1 (en) 2010-08-27 2012-10-23 X6D Limited 3D glasses
USD671590S1 (en) 2010-09-10 2012-11-27 X6D Limited 3D glasses
USD692941S1 (en) 2009-11-16 2013-11-05 X6D Limited 3D glasses
USD662965S1 (en) 2010-02-04 2012-07-03 X6D Limited 3D glasses
USD664183S1 (en) 2010-08-27 2012-07-24 X6D Limited 3D glasses
USD711959S1 (en) 2012-08-10 2014-08-26 X6D Limited Glasses for amblyopia treatment
WO2017203888A1 (fr) * 2016-05-26 2017-11-30 アピックヤマダ株式会社 Procédé d'alimentation en résine, dispositif d'alimentation en résine, dispositif de moulage de résine, procédé de durcissement de résine et procédé de moulage de résine
KR102527262B1 (ko) * 2017-10-17 2023-04-28 매직 립, 인코포레이티드 중합체 생성물들을 주조하기 위한 방법들 및 장치들
EP4180214A1 (fr) * 2018-10-04 2023-05-17 ZKW Group GmbH Lentilles de fresnel pour projecteur de véhicule automobile
CN116021698B (zh) * 2023-03-08 2023-07-18 安徽美安密封件股份有限公司 一种橡胶油封制品生产用硫化压机及硫化方法

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2160328B1 (fr) * 1971-11-16 1976-02-13 Vergo Sa Fr
US4170616A (en) * 1978-05-30 1979-10-09 Rca Corporation Method of fabrication of a Fresnel lens
DE4313015C1 (de) * 1993-04-21 1994-05-19 Moebius & Ruppert Vorrichtung zur Herstellung eines großflächigen Kunststoffgegenstandes geringer Wanddicke
US5856211A (en) * 1996-04-10 1999-01-05 Donnelly Corporation Method for filling the cavities of cells with a chromogenic fluid
US6297911B1 (en) * 1998-08-27 2001-10-02 Seiko Epson Corporation Micro lens array, method of fabricating the same, and display device
AU2001280980A1 (en) * 2000-08-01 2002-02-13 Board Of Regents, The University Of Texas System Methods for high-precision gap and orientation sensing between a transparent template and substrate for imprint lithography
JP2004106399A (ja) * 2002-09-19 2004-04-08 Canon Inc 光学素子の成形方法及び製造装置及び光学スクリーン

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2006027217A1 *

Also Published As

Publication number Publication date
US20080315442A1 (en) 2008-12-25
WO2006027217A1 (fr) 2006-03-16
JP2008512697A (ja) 2008-04-24
CN101014455A (zh) 2007-08-08
DE102004043385B3 (de) 2006-05-18
CN100575031C (zh) 2009-12-30

Similar Documents

Publication Publication Date Title
DE102004043385B3 (de) Verfahren und Einrichtung zur Replikation fein strukturierter Flachoptiken und optischen Masken mit derartigen strukturierten Optiken
EP2427314B1 (fr) Procédé et dispositif pour fabriquer une structure
DE102013216540B4 (de) Transfervorrichtung die ein feines Transfermuster auf ein geformtes Material überträgt
EP2740585B1 (fr) Procédé et dispositif de fabrication d'une pièce moulée
DE4420996C2 (de) Verfahren und Vorrichtung zur Herstellung von mikromechanischen und mikrooptischen Bauelementen
DE102009004379B4 (de) Verfahren zum Herstellen und Beschichten eines Brillenglases und Verwendung eines Werkstoffverarbeitungsgerätes
EP2761371B1 (fr) Procédé pour la fabrication d'une matrice d'estampage de nanostructures
EP2632673B1 (fr) Procédé et dispositif pour fabriquer une pastille de lentille
AT526564B1 (de) Verfahren und Vorrichtung zum Prägen von Substraten
WO2013178263A1 (fr) Procédé et dispositif de fabrication d'une pluralité de microlentilles
DE102009019762B4 (de) Verfahren zum Herstellen von Gegenständen mit einer definiert strukturierten Oberfläche
EP3526015A1 (fr) Moule
DE102004033440A1 (de) Mikrostrukturierte Vorrichtung und Verfahren zu ihrer Herstellung
DE102010041576B4 (de) Verfahren zum Verbinden von Körpern, Verbundkörper sowie dessen Verwendung
DE102024101731B3 (de) Anordnung und Verfahren für den Bad-basierten 3D-Druck
WO2021110237A1 (fr) Procédé et dispositif pour détacher un poinçon
DE10261558B4 (de) Verfahren und Vorrichtung zum Herstellen eines diffraktiven optischen Bauteils
EP3918641B1 (fr) Système et procédé de fabrication d'un ensemble de plaques
EP3555705B1 (fr) Dispositif et procédé de réalisation de nanostructures périodiques de grande surface sur un substrat planaire au moyen d'un procédé de nano-impression
DE102009054024A1 (de) Elektronisch ansteuerbare Matrix-Maske
WO2022008033A1 (fr) Appareil et procédé de production de microstructures et/ou de nanostructures
DE102014215218A1 (de) Stereolithografieeinheit mit homogenisiertem Strahlengang
DE102015205041A1 (de) Laminiervorrichtung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20070215

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LT LU LV MC NL PL PT RO SE SI SK TR

17Q First examination report despatched

Effective date: 20070427

DAX Request for extension of the european patent (deleted)
GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20101029