EP1737762A2

EP1737762A2 - Wafer container with sealable door

Info

Publication number: EP1737762A2
Application number: EP05736957A
Authority: EP
Inventors: Anthony Mathius Tieben; John Lystad
Original assignee: Entegris Inc
Current assignee: Entegris Inc
Priority date: 2004-04-18
Filing date: 2005-04-18
Publication date: 2007-01-03
Also published as: WO2005102871A3; CN101432202A; KR20070011518A; WO2005102871A2; CN101432202B; JP2008500238A; JP4896007B2

Abstract

A wafer container (20) including an enclosure portion (22) with a door frame defining an opening for insertion and removal of wafers and a door (24) finable in the door frame to seal the enclosure portion. A continuous elastomeric seal (94) extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove (92) in the door. In cross-section, the elastomeric seal has an inset portion (96) and a sealing head (97) coupled by a bridging portion (98). The sealing head has a foot portion (108) projecting from the bridging portion toward the sealing surface of the door, and a head portion (106) extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure (112) displacing the bridging portion axiaily toward the sealing surface and causing the head of the sealing head to rotate radially and contact the seal engaging structure (118). The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door (58).

Description

WAFER CONTAINER WITH SEALABLE DOOR

RELATED APPLICATIONS

This application claims the benefit of U.S. Provisional Patent Application No. 60/563,529 entitled WAFER CONTAINER WITH SEALABLE DOOR, filed April 18, 2004, hereby fully incorporated herein by reference.

FIELD OF THE INVENTION

This invention relates to containers, and more particularly to sealable containers for semiconductor wafers.

BACKGROUND OF THE INVENTION Semiconductor wafers are subjected to numerous steps during processing. This usually entails transporting a plurality of wafers between workstations or facilities for processing. Semiconductor wafers are delicate and easily damaged by physical contact or shock and by static electricity. Further semiconductor manufacturing processes are extremely sensitive to contamination by particulates or chemical substances. Consequently, in order to reduce the deleterious effect of contaminants on wafers, specialized containers have been developed to minimize the generation of contaminants and to isolate wafers from contaminants exterior to the containers. These containers typically include a removable door with gasketing or other means for providing a tight seal of the door with the container body. As semiconductors have become smaller in scale, that is, as the number of circuits per unit area has increased, contaminants in the form of particulates have become more of an issue than previously. The size of particulates that can destroy a circuit has decreased and is approaching the molecular level. Consequently, ever better particulate control is desirable during all phases of manufacturing, processing, transporting, and storage of semiconductor wafers.

Wafer carriers are typically made from thermoplastic materials. Early containers, for example the container disclosed in U.S. Pat. No. 4,248,346, were made of highly moldable plastics such as polyethelene. Later containers, such as disclosed in U.S. Pat. No. 5,273,159, held rigid h-bar carriers, and are often made from polycarbonate with molded in slots and with softer, more resilient, covers such as disclosed in U.S. Pat. No. 5,586,658 for example. Each of U.S. Patent Nos. 4,248,346; 5,273,159; and 5,586,658 are hereby fully incorporated herein by reference. Some of the prior containers have a door to enclosure portion seal and also have the capability to sealingly engage to process equipment. Such containers have been termed "SMIF pods" (Standard Mechanical Interface) where the door closes an open bottom of the container portion, or FOUPs (Front Opening Unified Pods) and FOSBs (Front Opening Shipping Box) where the door closes an open front. These containers are subjected to very demanding structural requirements and performance requirements. For example, they must be mechanically sealably latchable by both robotic and manual means and must be hermetically sealable simply by closing and latching the door in place on the container.

Conventional seals for both SMIF pods and transport modules have typically been relatively simple elastomeric seals that are simply compressed between the door and enclosure portion in an axial direction to provide the seal. Such seals, particularly where polycarbonate material is contacted by the elastomeric seal, tend to stick excessively and provide inconsistent opening, reduced life expectancy of the seal and inadequate sealing.

More recent designs have featured seal cross-sections that feature a bridging portion that extends radially outward to a peφendicular distal portion, and provide a seal by knife edge contact with the bridging portion as well as axial compression of the distal portion. An example of such a design is found in U.S. Patent Application No. 09/998,621 entitled "SEALING ELEMENT, HERMETIC CONTAINER AND SEALING METHOD THEREOF" by Takahashi, et. al., hereby fully incorporated herein by reference. A problem with this approach, however, is "divergent column buckling" of the distal portion, wherein the free end of the distal portion buckles radially inward throughout one tangential segment of the seal, but buckles radially outward at a different tangential segment. Such a scenario allows for the seal to leak at the transition point between the inward and outward buckling. What is needed in the industry is a better performing and longer lasting seal structure for sealing a door with the enclosure of a wafer container. SUMMARY OF THE INVENTION

The present invention addresses the need of the industry for a better performing and longer lasting seal structure for a wafer container by providing an elastomeric seal that does not rely on direct compression as it seals. In accordance with the invention, a wafer container includes an enclosure portion with a door frame defining an opening for insertion and removal of wafers and a door fittable in the door frame to seal the enclosure portion. In an embodiment of the invention, a continuous elastomeric seal extends around the door inward of the periphery. The seal is positioned on a sealing surface proximate the perimeter of the door and may be partially inset in a radial groove in the door. In cross- section, the elastomeric seal has an inset portion, a bridging portion coupled therewith extending radially outward with respect to the axis of the door, and a sealing head coupled with the bridging portion. The sealing head includes a foot portion projecting from the bridging portion toward the sealing surface of the door, and a head portion extending in a direction generally opposite the foot relative to the bridging portion. The door frame has a seal engaging structure, such as a rib extending around the door frame, so that when the door is seated in the door frame, the bridging portion of the elastomeric seal contacts the seal engaging structure. The seal engaging structure displaces the bridging portion axially toward the sealing surface and causes the head of the sealing head to rotate radially and contact the seal engaging structure. The displacement action also affirmatively sets the foot of the sealing head in contact with the sealing surface of the door.

Alternatively, the frame can be dimensioned such that when the door is seated, the bridging portion of the elastomeric seal is compressed interstitiaUy between the sealing surface of the door and the sealing surface of the door frame.

An advantage of the present invention is that a dual seal is effected on each side of the elastomeric seal. With respect to the door frame and seal interface, there is a sealing line of contact between the protrusion on the frame and the bridging portion of the seal, as well as a sealing line of contact between the head of the sealing head and the tangential perimeter of the protrusion on the frame. With respect to the interface between the seal and the sealing surface on the door, there is a sealing line of contact between the foot of the sealing head and the sealing surface of the door, as well as a sealing line of contact between an outer corner of the inset portion and the sealing surface of the door. Another advantage is that the rotation action eliminates the potential of divergent column buckling because there is no axial compression of the sealing head. Rather, the sealing action of the sealing head is accomplished by the predictable and repeatable rotation of the head of the sealing head. Also, there will tend to be less sticking in absence of compression of the sealing head because the contact force between the seals and the surface is reduced.

A further advantage of preferred embodiments of the invention is that the seal can be easily replaced when it is worn out or when different sealing characteristics are desired.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a perspective view of an embodiment of a front-loading wafer container according to the invention;

FIG. 2 is an interior view of the door of the wafer container of FIG. 1;

FIG. 3 is an top perspective view of an embodiment of a bottom-loading wafer carrier according to the invention; FIG. 4 is a cross-sectional view of an embodiment of an elastomeric seal according to the invention positioned on a wafer container door;

FIG. 5 is a cross-sectional view of an alternative embodiment of an elastomeric seal according to the present invention;

FIG. 6 is a cross-sectional view of an elastomeric seal according to the present invention depicting the engagement of the seal between the door and the door frame of a wafer container;

FIG. 7 is a cross-sectional view of an elastomeric seal according to an alternative embodiment of the present invention depicting the engagement of the seal between the door and the door frame of a wafer container; FIG. 8 is a bottom perspective view of the bottom-loading wafer carrier of FIG. 3; FIG. 9 is a cross-sectional view of an alternative embodiment of the wafer carrier of the present invention, depicting the elastomeric seal and seal engaging portion in undeflected and deflected positions;

FIG. 11 is a cross-sectional view of another alternative embodiment of the wafer carrier of the present invention, depicting the elastomeric seal and seal engaging portion in undeflected and deflected positions;

FIG. 12 is a cross-sectional view of still another alternative embodiment of the wafer carrier of the present invention, depicting the elastomeric seal and seal engaging portion in undeflected and deflected positions; FIG. 13 is a cross-sectional view of yet another alternative embodiment of the wafer carrier of the present invention, depicting the elastomeric seal and seal engaging portion in undeflected and deflected positions; and

FIG. 14 is a cross-sectional view of yet another alternative embodiment of the wafer carrier of the present invention, depicting the elastomeric seal and seal engaging portion in undeflected and deflected positions.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Referring to FIGS. 1-2, a wafer container 20 commonly known as a transport module generally includes enclosure portion 22 and door 24. Enclosure portion 22 generally includes shell 26 defining interior space 28 for enclosing a plurality of wafers 30. Shell 26 has a pair of opposing side walls 32, 34, top 36, bottom 38, and back 40. Open front 42 opposes back 40 and is defined by door frame 44 which receives door 24 for hermetically sealingly enclosing interior space 28. It should be noted that, when used herein, "door frame" is not limited to a separate structure from enclosure portion 22 nor additional structure on or integral with enclosure portion 22. Rather "door frame" is defined to be simply the portion of the enclosure portion 22 which receives the door 24. Enclosure portion 22 may also include a robotic lifting flange 46 on top 36, manual handles 48 on side walls 32, 34, and a kinematic coupling having grooves 49 on the exterior surface of bottom 38. Door 24 generally includes chassis portion 50 and exterior panels 52 and presents an interior surface 54 and an exterior surface 56. Door 24 presents an axis annotated in the Figures as "Al" and the closure portion presents an axis annotated in the Figures as "A2." For proper insertion of door 24 into door frame 44, axes Al and A2 should be axially aligned. When door 24 is inserted into door frame 44, door 24 moves in an axial direction. When "radial" is used herein, it refers to direction or orientations normal to the axis Al or A2.

Door sealing surface 58 extends around a portion of door interior surface 54 adjacent perimeter 60 of door 24. Door 24 generally has one or more latching mechanisms 62 in chassis portion 50, operable through key holes 63, for latching door 24 securely in place in door frame 44. Latching mechanisms 62 may operate as disclosed in U.S. Pat. No. 5,711,427 to David L. Nyseth and owned by the owner of the instant invention, hereby fully incorporated herein by reference. Door 24 may further have door guides 64 at each corner 66 for accurately locating and positioning door 24 in door frame 44. Also, wafer cushions 68 having resilient fingers 70 for engaging one of the plurality of wafers 30 may be provided on interior surface 54 of door 24.

An alternative embodiment of a wafer container 20, known as a SMIF (Standard Mechanical Interface) pod is depicted in FIGs. 3 and 8. In this embodiment, wafer container 20 also generally includes enclosure portion 22 and door 24. Enclosure portion 22 generally includes side walls 72, 74, 76, 78, and top 80 which opposes an open bottom 82. As with open front 42 of the embodiment of FIGs. 1-2, open bottom 82 is defined by door frame 44 which receives door 24 for hermetically sealingly enclosing interior space 28.

Door 24 in the embodiment of FIGs. 3 and 8 includes chassis portion 50 and presents an interior surface 54 and an exterior surface 56. Again, door sealing surface 58 extends around a portion of the door interior surface 54 adjacent the perimeter 60 of the door 24. Door 24 generally has one or more latching mechanisms 62 in chassis portion 50 for latching door 24 securely in place in door frame 44. Door 24 may further have door guides 64 at each corner 66 for accurately locating and positioning door 24 in door frame 44. Wafer support structure 84 having a plurality of wafer receiving shelves 86 is engaged on structures 88 on interior surface 54 of door 24. FIG. 4 depicts a cross sectional view of door 24 proximate perimeter 60. Door sealing surface 58 is bounded by periphery 90 of door 24 and inset radial groove 92. Elastomeric seal 94 extends around and inward of periphery 90 over seal engaging surface 58 and presents a pair of opposing edges 95, 95a. Elastomeric seal 94 generally includes an attachment portion 96 extending along inner edge 95 and a sealing head portion 97 extending along outer edge 95a. Elastomeric seal 94 has a greater dimension ΔR in a radial direction and a lesser dimension ΔZ in an axial direction. Bridging portion 98 extends between attachment portion 96 and sealing head portion 97 and generally includes a proximal portion 100 connected with attachment portion 96 and intermediate portion 102 connected with sealing head 97. Sealing head 97 generally includes head portion 106, which extends axially and away from door sealing surface 58, and foot portion 108 that extends toward and confronts door sealing surface 58. Bridging portion 98 and sealing head 97 in this embodiment have a generally t-shaped cross-section. Attachment portion 96 of elastomeric seal 94 is received in inset radial groove 92 of door 24 as depicted. Referring now to the cross-sectional view of FIG. 6, door 24 is engaged in door frame 44. In the depicted embodiment, door frame 44 is integral with enclosure portion 22 and generally includes a standoff structure 110 and a seal engagement protrusion 112 in the form of a continuous rib extending around the periphery of the door frame and extending into the recess 114 defined by outer flange wall 116. Seal engagement protrusion 112 presents frame sealing surface 118. Standoff structure 110 engages door interior surface 54, thereby axially locating frame sealing surface 118 relative to door 24 and establishing a depth of engagement for door 24 in door frame 44. It will be appreciated that standoff structure 110 may be suitably dimensioned or shimmed to control the contact force between elastomeric seal 94 and seal engagement protrusion 112.

Significantly, elastomeric seal 94 is not substantially compressed when door 24 is engaged in door frame 44; rather seal engagement protrusion 112 deflects bridging portion 98 of elastomeric seal 94. This engagement causes four separate sealing lines of contact between elastomeric seal 94, enclosure portion 22 and door 24. Head portion 106 of sealing head 97 deflects radially inward and contacts tangential perimeter 120 of seal engagement protrusion 112, forming first line of contact 122. Second line of contact 124 is formed between intermediate portion 102 of bridging portion 98 and frame sealing face 118. Third line of contact 126 is formed between foot portion 108 of sealing head 97 and door sealing surface 58. Finally, fourth line of contact 128 is formed between corner 130 of attachment portion 96 and door sealing surface 58.

An alternative embodiment of the invention is depicted in FIG. 7. In this embodiment, door frame 44 is substantially the same except that engagement protrusion 112 has a rounded knife edge engaging portion 132. Second line of contact 124 is therefore formed between nose 134 of rounded knife edge engaging portion 132 and intermediate portion 102 of bridging portion 98 with the other lines of contact in the same positions as before. In an embodiment, elastomeric seal 94 may feature a plurality of protrusions 134, depicted in the cross-sectional view of FIG. 5. Protrusions 134 project from attachment portion 96 at pre-determined intervals. Protrusions 134 fit into thru-slots 136 defined in radially extending lip 138 which bounds inset radial groove 92, to secure elastomeric seal 94 in place in inset radial groove 92. As depicted in FIG. 3, the number and placement of the thru-slots 136 and protrusions 134 may be asymmetric with respect to adjacent sections to affect an indexed installation of elastomeric seal 94.

Various other preferred embodiments of elastomeric seal 94 according to the invention are depicted in FIGS. 9 through 14, both free standing and in engagement with various geometries for the engagement protrusions 134 and the deflected state shown in phantom.

Claims

CLAIMS What is claimed is:

1. A sealable container for holding a plurality of wafers, the container comprising: an enclosure portion defining an interior space for receiving the wafers, the enclosure portion having an open side defined by a door frame, the door frame presenting a frame periphery and having a seal engaging member disposed around the frame periphery; a door fittable in the door frame to sealingly close the open side of the enclosure portion, the door having an interior side and presenting a door periphery; and an elastomeric seal disposed on the interior side of the door around and inward of the door periphery, the elastomeric seal having a pair of opposing edges with an attachment structure extending along one of the pair of opposing edges, a sealing head structure extending along the other of the pair of opposing edges, and a bridging portion coupling the attachment structure and the sealing head structure, the seal engaging member and the elastomeric seal cooperatively positioned so that when the door is engaged in the door frame, the seal engaging member contacts the bridging portion of the elastomeric seal defining a first sealing line of contact along the door periphery, the sealing head structure contacts the seal engaging member defining a second sealing line of contact along the door periphery, and the sealing head structure contacts the door defining a third sealing line of contact along the door periphery.

2. The container of claim 1, wherein the sealing head structure comprises an outwardly extending head portion and an inwardly extending foot portion.

3. The container of claim 2, wherein the door has a door sealing surface adjacent the door periphery, and wherein the foot portion of the sealing head structure engages the door sealing surface to define the third sealing line of contact.

4. The container of claim 1, wherein the attachment structure contacts the door defining a fourth sealing line of contact along the door periphery.

5. The container of claim 1, further comprising a standoff structure on the enclosure portion for establishing a depth of engagement for the door when the door is fitted in the door frame.

6. The container of claim 1, wherein the bridging portion and the sealing head structure together have a generally t-shaped cross-section.

7. The container of claim 1 , wherein the attachment structure has a plurality of projections and wherein the door has a plurality of structures for receiving the projections to retain the elastomeric seal on the door.

8. The container of claim 1, further comprising at least one latching mechanism operably coupled with the door for latching the door in place in the door frame.

9. The container of claim 1, wherein the seal engaging member comprises a continuous rib extending around the door frame inward of the frame periphery.

10. The container of claim 1, wherein the seal engaging member has a knife edge engagmg portion.

11. A sealable container for holding a plurality of wafers, the container comprising: an enclosure portion defining an interior space for receiving the wafers, the enclosure portion having an open side defined by a door frame, the door frame presenting a frame periphery and having a seal engaging member disposed around and inward of the frame periphery; a door fittable in the door frame to sealingly close the open side of the enclosure portion, the door having an interior side and presenting a door periphery; and an elastomeric seal disposed on the interior side of the door around the door periphery, the elastomeric seal having a pair of opposing edges with an attachment structure extending along one of the pair of opposing edges, a sealing head structure extending along the other of the pair of opposing edges, and a bridging portion coupling the attachment structure and the sealing head structure, a first portion of the sealing head structure extending outwardly from the bridging portion away from the door and a second portion of the sealing head structure extending inwardly from the bridging portion toward the door, the seal engaging member and the elastomeric seal cooperatively positioned so that when the door is engaged in the door frame, the seal engaging member contacts and seals with the bridging portion of the elastomeric seal, the first portion of the sealing head contacts and seals with the seal engaging member, and the second portion of the sealing head contacts and seals with the door.

12. The container of claim 11, wherein the door has an inset radial groove extending around the door periphery for receiving the attachment structure of the elastomeric seal.

13. The container of claim 11, wherein the attachment structure of the elastomeric seal seals with the door.

14. The container of claim 11, wherein the bridging portion and the sealing head structure together have a generally t-shaped cross-section.

15. The container of claim 11, further comprising a standoff structure on the enclosure portion for establishing a depth of engagement for the door when the door is fitted in the door frame.

16. The container of claim 11, wherein the attachment structure has a plurality of projections and wherein the door has a plurality of structures for receiving the projections to retain the elastomeric seal on the door.

17. The container of claim 11, wherein the seal engaging member comprises a continuous rib extending around the door frame inward of the frame periphery.

18. The container of claim 11, wherein the seal engaging member has a knife edge engaging portion.

19. A sealable container for holding a plurality of wafers, the container comprising: an enclosure portion defining an interior space for receiving the wafers, the enclosure portion having an open side defined by a door frame; a door fittable in the door frame to sealingly close the open side of the enclosure portion, the door having an interior side and presenting a door periphery; and an elastomeric seal disposed on the interior side of the door around and inward of the door periphery, the elastomeric seal having a pair of opposing edges with a sealing head structure extending along one of the pair of opposing edges, and a bridging portion extending between the opposing edges, a first portion of the sealing head structure extending outwardly from the bridging portion away from the door and a second portion of the sealing head structure extending inwardly from the bridging portion toward the door; and means on the enclosure portion for contacting and deflecting the bridging portion when the door is engaged in the door frame, thereby forming a first sealing line of contact along and inward of the door periphery, and further forming second and third sealing lines of contact along and inward of the door periphery between the elastomeric seal and the enclosure portion and the elastomeric seal and the door respectively.

20. The container of claim 19, wherein the means on the enclosure portion for contacting and deflecting the bridging portion comprises a rib on the enclosure portion extending around the frame periphery.