EP1731766A3 - Statorscheibe für Turbomolekularpumpe - Google Patents

Statorscheibe für Turbomolekularpumpe Download PDF

Info

Publication number
EP1731766A3
EP1731766A3 EP06009899A EP06009899A EP1731766A3 EP 1731766 A3 EP1731766 A3 EP 1731766A3 EP 06009899 A EP06009899 A EP 06009899A EP 06009899 A EP06009899 A EP 06009899A EP 1731766 A3 EP1731766 A3 EP 1731766A3
Authority
EP
European Patent Office
Prior art keywords
stator disc
turbomolecular pump
vane
disc
radial rod
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP06009899A
Other languages
English (en)
French (fr)
Other versions
EP1731766A2 (de
EP1731766B1 (de
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1731766A2 publication Critical patent/EP1731766A2/de
Publication of EP1731766A3 publication Critical patent/EP1731766A3/de
Application granted granted Critical
Publication of EP1731766B1 publication Critical patent/EP1731766B1/de
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05B—INDEXING SCHEME RELATING TO WIND, SPRING, WEIGHT, INERTIA OR LIKE MOTORS, TO MACHINES OR ENGINES FOR LIQUIDS COVERED BY SUBCLASSES F03B, F03D AND F03G
    • F05B2230/00—Manufacture
    • F05B2230/10—Manufacture by removing material

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

Die Erfindung betrifft eine Statorscheibe für eine Turbomolekularpumpe, bei der die Schaufeln der Statorscheibe aus der Scheibenebene herausgestellt sind, wobei die Statorscheibe einen Innenring, einen Außenring und Verbindungsstellen zwischen Schaufel und Ringen aufweist. Um Spannungen im Material zu vermeiden, die zusätzliche Bearbeitungsschritte erfordern und die erreichbaren Maßgenauigkeiten verschlechtern, wird vorgeschlagen, zwischen den Schaufeln und den Ringen einen Steg vorzusehen.
EP06009899A 2005-06-11 2006-05-13 Statorscheibe für Turbomolekularpumpe Active EP1731766B1 (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102005027097A DE102005027097A1 (de) 2005-06-11 2005-06-11 Statorscheibe für Turbomolekularpumpe

Publications (3)

Publication Number Publication Date
EP1731766A2 EP1731766A2 (de) 2006-12-13
EP1731766A3 true EP1731766A3 (de) 2010-06-23
EP1731766B1 EP1731766B1 (de) 2012-03-28

Family

ID=36997487

Family Applications (1)

Application Number Title Priority Date Filing Date
EP06009899A Active EP1731766B1 (de) 2005-06-11 2006-05-13 Statorscheibe für Turbomolekularpumpe

Country Status (5)

Country Link
US (1) US20060280595A1 (de)
EP (1) EP1731766B1 (de)
JP (1) JP2006348935A (de)
AT (1) ATE551533T1 (de)
DE (1) DE102005027097A1 (de)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
GB0917317D0 (en) * 2009-10-02 2009-11-18 Bladon Jets Ltd Rotary structures
WO2012081287A1 (ja) * 2010-12-14 2012-06-21 エドワーズ株式会社 排気ポンプに適用可能な固定翼ブレード集合体、及びそれを備えた排気ポンプ
DE102012222230A1 (de) * 2012-12-04 2014-06-05 Pfeiffer Vacuum Gmbh Vakuumpumpe
JP6241222B2 (ja) * 2013-01-22 2017-12-06 株式会社島津製作所 真空ポンプ
DE102013213256A1 (de) * 2013-07-05 2015-01-08 Oerlikon Leybold Vacuum Gmbh Statorscheibe
EP3051140B1 (de) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Statorscheibe für eine vakuumpumpe
JP7049052B2 (ja) * 2016-09-27 2022-04-06 エドワーズ株式会社 真空ポンプ、および真空ポンプに備わる固定円板
JP6834612B2 (ja) * 2017-03-07 2021-02-24 株式会社島津製作所 真空ポンプの製造方法

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
EP0442556A1 (de) * 1990-02-16 1991-08-21 VARIAN S.p.A. Stator für eine Turbomolekularpumpe
US20040156715A1 (en) * 2003-02-03 2004-08-12 Alcatel Turbomolecular pump having multistage stator spacers

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2654055B2 (de) * 1976-11-29 1979-11-08 Kernforschungsanlage Juelich Gmbh, 5170 Juelich Rotor- und Statorscheibe für Turbomolekularpumpe
JPS6319094U (de) * 1986-07-21 1988-02-08
DE3722164C2 (de) * 1987-07-04 1995-04-20 Balzers Pfeiffer Gmbh Turbomolekularpumpe
JPH01219393A (ja) * 1988-02-29 1989-09-01 Daikin Ind Ltd 分子式真空ポンプ
JP3013083B2 (ja) * 1998-06-23 2000-02-28 セイコー精機株式会社 ターボ分子ポンプ
JP2003269365A (ja) * 2002-03-13 2003-09-25 Boc Edwards Technologies Ltd 真空ポンプ
JP4935527B2 (ja) * 2007-06-21 2012-05-23 株式会社島津製作所 固定翼の製造方法、およびその固定翼を備えたターボ分子ポンプ

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5990796A (ja) * 1982-11-12 1984-05-25 Shimadzu Corp タ−ボ分子ポンプ
JPS62258187A (ja) * 1986-05-02 1987-11-10 Mitsubishi Heavy Ind Ltd タ−ボ分子ポンプ用静翼板の成形方法
JPH01190990A (ja) * 1988-01-26 1989-08-01 Osaka Shinku Kiki Seisakusho:Kk 真空ポンプ
EP0442556A1 (de) * 1990-02-16 1991-08-21 VARIAN S.p.A. Stator für eine Turbomolekularpumpe
US20040156715A1 (en) * 2003-02-03 2004-08-12 Alcatel Turbomolecular pump having multistage stator spacers

Also Published As

Publication number Publication date
DE102005027097A1 (de) 2006-12-14
JP2006348935A (ja) 2006-12-28
US20060280595A1 (en) 2006-12-14
ATE551533T1 (de) 2012-04-15
EP1731766A2 (de) 2006-12-13
EP1731766B1 (de) 2012-03-28

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