EP1714328A2 - Actionneur piezo-electrique et procede de production correspondant - Google Patents

Actionneur piezo-electrique et procede de production correspondant

Info

Publication number
EP1714328A2
EP1714328A2 EP04802790A EP04802790A EP1714328A2 EP 1714328 A2 EP1714328 A2 EP 1714328A2 EP 04802790 A EP04802790 A EP 04802790A EP 04802790 A EP04802790 A EP 04802790A EP 1714328 A2 EP1714328 A2 EP 1714328A2
Authority
EP
European Patent Office
Prior art keywords
individual wires
molded part
piezo actuator
electrodes
contacted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04802790A
Other languages
German (de)
English (en)
Inventor
Axel Endriss
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1714328A2 publication Critical patent/EP1714328A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/80—Constructional details
    • H10N30/87—Electrodes or interconnections, e.g. leads or terminals
    • H10N30/872—Interconnections, e.g. connection electrodes of multilayer piezoelectric or electrostrictive devices
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00—Piezoelectric or electrostrictive devices
    • H10N30/01—Manufacture or treatment
    • H10N30/06—Forming electrodes or interconnections, e.g. leads or terminals
    • H10N30/063—Forming interconnections, e.g. connection electrodes of multilayered piezoelectric or electrostrictive parts

Definitions

  • the invention relates to a piezo actuator and a method for its production, for example for actuating a mechanical component such as a valve or the like, according to the generic features of the main claim.
  • a piezo element can be constructed from a material with a suitable crystal structure.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • Piezo actuators of this type can be provided, for example, for driving switching valves in fuel injection systems in motor vehicles.
  • This known piezo actuator is constructed here in several layers (multilayer actuator). Roden, via which the electrical voltage is applied, are each arranged between the layers and alternately emerge at different locations, mostly opposite, where they are electrically connected to one another by an external contact. In addition to the conductive connection to the inner electrodes, this contacting layer serves as the outer electrode for the actual electrical contact to the outside, in the simplest case, for example, for soldering a connecting wire.
  • the inner electrodes contacted on one side are generally integrated into the layer structure in the manner of a comb, the inner electrodes which follow one another in the direction of the layer structure must, as mentioned, be contacted alternately on opposite sides.
  • the piezo actuator is actuated, i.e.
  • an electrical voltage is applied between the inner electrodes lying opposite one another in the layer structure, different mechanical forces occur in the area of the inner electrodes and in the area of the contacts on the outer electrodes, which lead to mechanical stresses and thus to cracks in the outer electrodes and thus can interrupt the electrical connection.
  • the outer electrodes must therefore in turn be provided with additional electrodes in order to achieve the required expansion tolerance, which usually also have to withstand mechanical stresses.
  • a so-called basic metallization consisting of a baking paste containing metal and glass frit, is often used as the contacting variant for the external electrodes.
  • Such pastes are notable for good adhesion to piezoceramics on the one hand, and for good electrical conductivity on the other.
  • the required elongation tolerance is achieved with them alone - However, this is generally not achieved, which is why safe continuous operation is not possible, especially in the case of dynamic operation.
  • an additional layer that is as tolerant to stretch as possible is applied. This should also bridge electrically conductive if the base metallization layer underneath is interrupted by cracks, ie it must act to bridge the cracks.
  • Variants with which this can be accomplished are e.g. several soldered individual wires, a soldered sieve, a metal mesh, a metal foam, a wire helix or another strain-tolerant electrically conductive construction.
  • the mechanically strong and electrically conductive connection can also be produced by gluing, for example with an electrically conductive polymer or conductive adhesive, or by welding, for example resistance welding on the base metallization.
  • a disadvantage of the variants mentioned is often a high manufacturing effort, e.g. individually soldered individual wires or an inadequate reliability, such as soldered wavy metal strips.
  • the electrical connection is the problem. Either an element that can be contacted subsequently, for example a metal mesh inserted therein, must also be inserted, or the contact must be connected to the polymer before it cures.
  • the piezo actuator described at the outset with a multilayer structure of piezo layers and internal electrodes arranged between them and a mutual lateral contacting of the internal electrodes via external electrodes, via which can be supplied with an electrical voltage, is advantageously designed such that the outer electrodes each consist of a molded part and individual wires.
  • the individual wires running parallel to the layers are contacted with the respective internal electrodes and the individual wires between the contact and the molded part and / or regions of the molded part form a zone that can be subjected to strain.
  • the molded part is a screen fabric, in which the extensions of the fabric parts running in the layer direction represent the individual wires.
  • the molded part can also be a metal surface to which the individual wires are attached.
  • the molded part and the individual wires are punched out in strip form from a metal strip and this strip is first wound up.
  • the individual wires are positioned over the inner electrodes to be contacted and contacted with them by soldering or welding.
  • an electrically conductive polymer can be applied to the areas of the internal electrodes to be contacted by means of a screen printing process and the individual wires can then be pressed in here.
  • the strip is cut off using a suitable punching tool.
  • the molded part can be folded down onto the contacted side of the piezo actuator in a simple manner, and the electrical contact can then be made with the outer electrode on the folded-down molded part. It is also possible for contact pins to be applied to the molded part before the tape with the pre-punched molded parts is introduced into the production device.
  • FIG. 1 shows a view of a piezo actuator with a multilayer structure of layers made of piezoceramic and internal electrodes as well as contacting with individual wires and an attached molded part made of a sieve fabric
  • FIG. 2 shows a view of the piezo actuator according to FIG. 1 with a molded part folded down
  • FIG. 3 shows an exemplary embodiment 4 shows another exemplary embodiment of an outer electrode prefabricated in tape form with a molded part made of a sieve fabric
  • FIG. 4 shows another exemplary embodiment of an outer electrode prefabricated in tape form with a molded part made of a metal sheet
  • a piezo actuator 1 is shown, which is constructed in a manner known per se as a layer structure from piezo foils of a ceramic material with a suitable crystal structure, so that using the so-called piezo effect when an external electrical voltage is applied to internal electrodes 2 and 3, each via a here visible outer electrode 4 for the inner electrodes 2 and an invisible outer electrode for contacting the inner electrodes 3, a mechanical reaction of the piezo actuator 1 takes place in the direction of the layer structure.
  • the outer electrode 4 shown by way of example here consists of a metallic fabric strip with a periodically strongly fluctuating mesh size, so that a molded part 5 is formed and only individual wires 6 come to lie on the piezo actuator 1. According to this view, the internal electrodes 2 are thus contacted only by individual individual wires 6 running parallel to the layers of the internal electrodes 2.
  • the electrically conductive connection of the individual wires 6 to the inner electrodes 2 of the piezo actuator 1 is preferably carried out by soldering, for example by ironing or thermode soldering, with the aid of a soldering foil or baking paste 7 or alternatively via a conductive polymer 7 into which the individual wires 6 can be pressed ,
  • soldering for example by ironing or thermode soldering
  • a soldering foil or baking paste 7 or alternatively via a conductive polymer 7 into which the individual wires 6 can be pressed
  • FIGS. 3 to 5 Possible production methods for the piezo actuator according to the invention are to be explained with reference to FIGS. 3 to 5.
  • the material for the production of the molded part 5 and the individual wires 6 can be wound out in a strip shape and punched out on a strip 10.
  • FIG. 3 shows a continuous screen fabric with different mesh sizes
  • FIG. 4 shows an embodiment with a flat molded part 5 made of metal, to which contact pins 13 are already attached.
  • the band 10 is unwound in a manufacturing device according to FIG. 5 and positioned tensioned on or above the piezo actuator 1.
  • a solder foil 7 can then be fed in automatically and the individual wires 6 can be held down as a wire harp, for example by means of a thermode tool 11, and soldered to the internal electrodes 2.
  • Softbeam soldering or resistance welding is also possible here.
  • the surface of the piezo actuator 1 can also be galvanically metallized.
  • the individual wires 6 can be made of Invar (FeNi36), for example.
  • the individual wires 6 are then cut, for example by means of a cutter 12 integrated into the thermode tool 11 according to FIG. 5, and a new piezo actuator can then be contacted.
  • the protruding molded part 5 is now folded over and folded over onto the piezo actuator 1, but this is not the case here illustrated folding tool is ideally integrated with the manufacturing device.
  • the final contacting of the outer electrode 4 thus formed then takes place on the folded-over molded part, for example by resistance welding.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention concerne un actionneur piézo-électrique présentant une structure multicouche, à base de couches piézo-électriques et d'électrodes intérieures (2, 3) disposées entre, ainsi qu'une métallisation latérale réciproque des électrodes intérieurs (2,3) par l'intermédiaire d'électrodes extérieures (4), par le biais desquelles une tension électrique peut être acheminée. Selon l'invention, les électrodes extérieures (4) sont mises en contact, au moins point par point, avec les électrodes intérieures (2, 3) respectives et une zone extensible peut reposer entre les points de métallisation. Les électrodes extérieures (4) comprennent chacune une partie moulée (5) et des fils individuels (6). Lesdits fils individuels (6) sont mis en contact, parallèlement aux couches, avec chacune des électrodes intérieures (2, 3) et lesdits fils individuels (6) et/ou les zones de la partie moulée (5) forment une zone sollicitée en extension.
EP04802790A 2004-01-30 2004-11-22 Actionneur piezo-electrique et procede de production correspondant Withdrawn EP1714328A2 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE102004004737A DE102004004737A1 (de) 2004-01-30 2004-01-30 Piezoaktor und ein Verfahren zu dessen Herstellung
PCT/DE2004/002579 WO2005074050A2 (fr) 2004-01-30 2004-11-22 Actionneur piezo-electrique et procede de production correspondant

Publications (1)

Publication Number Publication Date
EP1714328A2 true EP1714328A2 (fr) 2006-10-25

Family

ID=34801290

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04802790A Withdrawn EP1714328A2 (fr) 2004-01-30 2004-11-22 Actionneur piezo-electrique et procede de production correspondant

Country Status (4)

Country Link
EP (1) EP1714328A2 (fr)
JP (1) JP2007520065A (fr)
DE (1) DE102004004737A1 (fr)
WO (1) WO2005074050A2 (fr)

Families Citing this family (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006006077B4 (de) 2006-02-09 2009-04-09 Continental Automotive Gmbh Piezokeramischer Vielschicht-Aktor, Verfahren zum Herstellen eines piezokeramischen Vielschicht-Aktors und Einspritzsystem
DE102006018035A1 (de) * 2006-04-19 2007-10-31 Robert Bosch Gmbh Piezoaktor mit außen kontaktierten Innenelektroden eines Piezoelements
US7679273B2 (en) * 2006-07-31 2010-03-16 Delphi Technologies, Inc. Strain tolerant metal electrode design
DE102006040316B4 (de) * 2006-08-29 2012-07-05 Deutsches Zentrum für Luft- und Raumfahrt e.V. Piezokeramischer Flächenaktuator und Verfahren zur Herstellung eines solchen
DE102008062021A1 (de) 2008-08-18 2010-03-04 Epcos Ag Piezoaktor in Vielschichtbauweise
DE102011114194A1 (de) * 2011-09-22 2013-03-28 Epcos Ag Piezoelektrisches Aktorbauelement
DE102012020956A1 (de) 2012-10-25 2014-04-30 Feindrahtwerk Adolf Edelhoff Gmbh & Co. Kg Drahtgelege, Piezoelement mit Drahtgelege und Herstellungsverfahren
DE102014214018A1 (de) * 2014-07-18 2016-01-21 Continental Automotive Gmbh Piezobauelement, Kontaktierungsbauelement zum elektrischen Kontaktieren eines Piezostapels und Verfahren zum Herstellen eines solchen Piezobauelements

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19917728A1 (de) * 1999-04-20 2000-10-26 Bosch Gmbh Robert Piezoelektrischer Aktor
DE19928190A1 (de) * 1999-06-19 2001-01-11 Bosch Gmbh Robert Piezoaktor
EP1065735B1 (fr) * 1999-06-29 2007-03-07 Siemens Aktiengesellschaft Actionneur piezoélectrique avec une feuille multicouche conductrice
DE19945933C1 (de) * 1999-09-24 2001-05-17 Epcos Ag Piezoaktor mit isolationszonenfreier elektrischer Kontaktierung und Verfahren zu dessen Herstellung
DE10026635B4 (de) * 2000-05-29 2006-01-05 Epcos Ag Verfahren zum Herstellen einer Lotverbindung, elektrotechnisches Erzeugnis mit der Lotverbindung und Verwendung des elektrotechnischen Erzeugnisses
WO2005047689A1 (fr) * 2003-11-12 2005-05-26 Siemens Aktiengesellschaft Tapis de mise en contact pour actionneur, et procede de production correspondant
DE10352773A1 (de) * 2003-11-12 2005-06-30 Siemens Ag Kontaktierung für einen Aktor und zugehöriges Herstellungsverfahren

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005074050A3 *

Also Published As

Publication number Publication date
DE102004004737A1 (de) 2005-08-18
WO2005074050A3 (fr) 2005-12-08
JP2007520065A (ja) 2007-07-19
WO2005074050A2 (fr) 2005-08-11

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