EP1687854A1 - Piezoaktor - Google Patents

Piezoaktor

Info

Publication number
EP1687854A1
EP1687854A1 EP04786708A EP04786708A EP1687854A1 EP 1687854 A1 EP1687854 A1 EP 1687854A1 EP 04786708 A EP04786708 A EP 04786708A EP 04786708 A EP04786708 A EP 04786708A EP 1687854 A1 EP1687854 A1 EP 1687854A1
Authority
EP
European Patent Office
Prior art keywords
piezo actuator
piezo
inactive
dielectric constant
areas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04786708A
Other languages
German (de)
English (en)
French (fr)
Inventor
Bertram Sugg
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP1687854A1 publication Critical patent/EP1687854A1/de
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • HELECTRICITY
    • H10SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10NELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N30/00Piezoelectric or electrostrictive devices
    • H10N30/50Piezoelectric or electrostrictive devices having a stacked or multilayer structure

Definitions

  • the invention relates to a piezo actuator, for example for actuating a mechanical component, according to the generic features of the main claim.
  • a piezo element for controlling the needle stroke of a valve or the like can be constructed from a material with a suitable crystal structure.
  • an external electrical voltage is applied, there is a mechanical reaction of the piezo element which, depending on the crystal structure and the contact areas of the electrical voltage, represents a push or pull in a predeterminable direction.
  • piezo actuators can be provided for the construction of actuators, for example for driving switching valves in fuel injection systems in motor vehicles.
  • the voltage or charge control te deflection of the piezo actuator is used to position a control valve, which in turn controls the stroke of a nozzle needle.
  • this piezo actuator is constructed here in several layers from stacked metallized piezo ceramics to a so-called multilayer Actuator.
  • there are internal electrodes between the layers which e.g. applied with a printing process, and there are external electrodes through which the electrical voltage is applied.
  • a typical method for producing such layers is in the film casting technique. The individual layers are metallized and stacked one above the other to produce the inner electrodes, the piezo effect then acting between two layers with inner electrodes of different polarity.
  • the inner electrodes are usually missing at the head and foot area, because on the one hand a certain insulation distance to the end faces is necessary to avoid short circuits to the outside and on the other hand passive zones are used for the electrical connection of the outer electrodes. Passive areas can also be present in the middle of the piezo actuator. However, there is the problem here that these passive layers, as cover packs, represent parasitic or interference capacities with respect to the electrical ground, which can lead to electromagnetic radiation in motor vehicles or other applications.
  • the passive layers consist of the same ceramic material as the active area, but with outer electrodes that are not electrically contacted on one side or not at all, so that the inactive areas are also interspersed with the inner electrode metal layers.
  • the respective inactive area can also be a complete, electrically insulated metal or ceramic block, which, for example, can simply be glued onto the piezoelectrically active area.
  • the piezo actuator described at the outset is constructed with a multilayer structure of piezo layers and in a piezoelectrically active region with internal electrodes arranged between the layers, and is provided with contacting of the internal electrodes which changes from layer to layer and is subjected to an electrical voltage.
  • the dielectric constant of at least the head or foot part as inactive areas is lower than the dielectric constant of the active area.
  • the inactive regions and the active region are preferably produced from the same basic ceramic substance, additional dopants in the inactive regions are inserted in such a way that there is a minimum dielectric constant.
  • the basic substance is, for example, lead zirconate titanate (PZT) and the dopant is silver.
  • the layer thicknesses of the inactive areas on the head and / or foot part are the same.
  • the inactive regions are formed from an electrically polarized ceramic with an electrical field applied in such a way that there is a minimal dielectric constant.
  • the advantage of the invention is in particular that initially the active area of the piezo actuator remains untouched with a predetermined piezoceramic, that is to say that parameters such as idle stroke, blocking force etc. of the active actuating element remain unchanged.
  • the parasitic capacitance C para on the head and / or foot part can then be minimized by the choice of material according to the invention, the geometry or the polarity of the cover packs on the head and / or foot part.
  • FIG. 1 shows a section through a piezo actuator with a multilayer structure of layers made of piezoceramic and active and inactive areas
  • FIG. 2 shows an electrical equivalent circuit diagram of the capacities occurring at the piezo actuator when a connection formation of the inactive areas on inner electrodes of the active area with the same polarity
  • FIG. 2 shows an electrical equivalent circuit diagram of the capacitances occurring at the piezo actuator when the inactive regions are connected to the internal electrodes of the active region with an unequal polarity
  • FIG. 3 shows a course of the parasitic capacitances at certain ratios of the layer thicknesses of the inactive areas.
  • a piezo actuator 1 is shown, which is made in a manner known per se from piezo layers 2 of a ceramic material, e.g. So-called green foils, is constructed with a suitable crystal structure, so that a mechanical reaction of the piezo actuator 1 takes place using the so-called piezo effect when an external electrical direct voltage is applied to internal electrodes 3 and 4 via externally contacted electrodes 5 and 6.
  • a ceramic material e.g. So-called green foils
  • the piezo actuator 1 is divided into a piezoelectrically active area A and two inactive or passive areas B and C attached to the head and foot ends as cover packs.
  • an area is actively referred to, which is penetrated by the internal electrodes 3 and 4 of alternating polarity and thus ultimately contributes to the overall longitudinal expansion of the piezo actuator 1 that is desired for operation.
  • the multilayer piezo actuator 1 is constructed in such a way that the Material compositions of the ceramic layers in the active area A and in the passive areas B and C differ.
  • two types of ceramics are necessary for green film production. These can be, for example, differently prepared types of ceramic, for example based on lead zirconate titanate (PZT).
  • PZT lead zirconate titanate
  • These or other ceramics on a jointly based base substance can be changed and adapted accordingly by adding suitable dopants, for example silver.
  • the ceramic in the active area A has a dielectric constant of 8 33 .
  • the dielectric constant ⁇ '33 of the region B or C is chosen such that the relationship ⁇ ' 33 « ⁇ 33 applies.
  • the ceramic of the areas B and C according to FIG. 1 is then selected or modified in such a way that the dielectric constant ⁇ '33 is minimized in any case.
  • the parasitic capacitances C B and C c of the areas B or C are accordingly determined as a function of the layer thicknesses d B and d c
  • A represents the active area
  • the exemplary embodiment according to the invention includes the possibilities that the last connected inner electrode layer 3 or 4 can be selected with the same or different polarity towards the head part B and towards the foot part C at the foot side.
  • the invention presented here thus explicitly includes a piezo actuator 1 with symmetrical cover packs B and C on the head and foot part.
  • the minimization due to this geometric effect also works in particular when the cover packs B and C are made of the same ceramic material as the active area A.
  • a further, not shown in the figures aspect relates to the adjustment of the parasitic capacitance C para by an at least partially polarity of the covering assemblies B and C. If one wants to for a particular electrical vote a certain capacitance value C para to the deck packages B and C set, so this can be done by adjusting the
  • Dielectric constant ⁇ '33 and in particular take place via the polarity of the cover packs B and C. Since unpolarized ceramic has a dielectric constant that is only half as large as that of a polarized ceramic, the parasitic capacitance C para quasi can be tuned by installing a suitable electric field.

Landscapes

  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)
  • Fuel-Injection Apparatus (AREA)
EP04786708A 2003-11-14 2004-09-07 Piezoaktor Withdrawn EP1687854A1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10353171A DE10353171A1 (de) 2003-11-14 2003-11-14 Piezoaktor
PCT/DE2004/001980 WO2005053046A1 (de) 2003-11-14 2004-09-07 Piezoaktor

Publications (1)

Publication Number Publication Date
EP1687854A1 true EP1687854A1 (de) 2006-08-09

Family

ID=34585080

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04786708A Withdrawn EP1687854A1 (de) 2003-11-14 2004-09-07 Piezoaktor

Country Status (7)

Country Link
US (1) US7402937B2 (zh)
EP (1) EP1687854A1 (zh)
JP (1) JP2006527486A (zh)
KR (1) KR20060125750A (zh)
CN (1) CN1879231A (zh)
DE (1) DE10353171A1 (zh)
WO (1) WO2005053046A1 (zh)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004002133A1 (de) * 2004-01-15 2005-08-04 Robert Bosch Gmbh Piezoelektrischer Aktor
DE112005001022B4 (de) * 2005-01-06 2014-08-21 Murata Manufacturing Co., Ltd. Verfahren zur Herstellung eines piezoelektrischen Aktuators und piezoelektrischer Aktuator
DE102005018791A1 (de) * 2005-01-18 2006-07-27 Epcos Ag Piezoaktor mit niedriger Streukapazität
CN101317280B (zh) * 2005-11-29 2010-12-22 京瓷株式会社 层叠型电子部件及其制造方法
DE102006050174A1 (de) * 2006-10-25 2008-04-30 Robert Bosch Gmbh Piezoelektrischer Aktor
DE102010008775A1 (de) * 2010-02-22 2011-08-25 Epcos Ag, 81669 Piezoelektrisches Vielschichtbauelement und Verfahren zur Herstellung eines piezoelektrischen Vielschichtbauelements
US8780503B2 (en) 2012-10-16 2014-07-15 Seagate Technology Llc Multi-layer piezoelectric transducer with inactive layers
KR20150032132A (ko) * 2013-09-17 2015-03-25 삼성전기주식회사 적층형 압전소자
FR3011147B1 (fr) * 2013-09-20 2015-10-16 Onera (Off Nat Aerospatiale) Actionneur plan piezoelectrique a grand deplacement en cisaillement.
KR20160099390A (ko) 2015-02-12 2016-08-22 삼성전기주식회사 레벨 센서 및 액체 수용조

Family Cites Families (14)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5126618A (en) * 1990-03-06 1992-06-30 Brother Kogyo Kabushiki Kaisha Longitudinal-effect type laminar piezoelectric/electrostrictive driver, and printing actuator using the driver
JPH04159785A (ja) * 1990-10-23 1992-06-02 Nec Corp 電歪効果素子
DE4201937C2 (de) * 1991-01-25 1997-05-22 Murata Manufacturing Co Piezoelektrisches laminiertes Stellglied
US5300852A (en) * 1991-10-04 1994-04-05 Honda Giken Kogyo Kabushiki Kaisha Piezoelectric ceramic laminate device
US5744898A (en) * 1992-05-14 1998-04-28 Duke University Ultrasound transducer array with transmitter/receiver integrated circuitry
US5329496A (en) * 1992-10-16 1994-07-12 Duke University Two-dimensional array ultrasonic transducers
JPH08153914A (ja) * 1994-11-25 1996-06-11 Philips Japan Ltd 圧電磁器トランス
JP3262076B2 (ja) * 1997-10-03 2002-03-04 株式会社村田製作所 圧電共振子、圧電共振子の周波数調整方法および通信機器
US6411012B2 (en) * 1999-12-08 2002-06-25 Tdk Corporation Multilayer piezoelectric element and method of producing the same
DE10101188A1 (de) * 2001-01-12 2002-08-01 Bosch Gmbh Robert Piezoelektrisches keramisches Material, Verfahren zu dessen Herstellung und elektrokeramisches Mehrlagenbauteil
DE10202574A1 (de) * 2001-02-15 2002-09-12 Ceramtec Ag Piezokeramischer Vielschichtaktor mit einem Übergangsbereich zwischen dem aktiven Bereich und den inaktiven Kopf- und Fußbereichen
JP2003124766A (ja) * 2001-10-17 2003-04-25 Murata Mfg Co Ltd 積層型圧電共振子の製造方法
JPWO2005064700A1 (ja) * 2003-12-26 2007-07-26 株式会社村田製作所 積層セラミック電子部品
JP4876467B2 (ja) * 2004-12-06 2012-02-15 株式会社デンソー 積層型圧電素子

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2005053046A1 *

Also Published As

Publication number Publication date
JP2006527486A (ja) 2006-11-30
US7402937B2 (en) 2008-07-22
US20070046148A1 (en) 2007-03-01
CN1879231A (zh) 2006-12-13
WO2005053046A1 (de) 2005-06-09
DE10353171A1 (de) 2005-06-16
KR20060125750A (ko) 2006-12-06

Similar Documents

Publication Publication Date Title
WO2006042791A1 (de) Piezoaktor
DE10147666B4 (de) Piezoelement und Verfahren zur Herstellung eines Piezoelements
DE19802302A1 (de) Piezoelektrischer Aktor
EP1687854A1 (de) Piezoaktor
EP1530807B1 (de) Piezoaktor
EP1192672B1 (de) Piezoelement mit einem mittels faltung hergestellten mehrschichtaufbau
EP1690303B1 (de) Piezoaktor
DE102005008718A1 (de) Aktormodul mit einem Piezoaktor
WO2008145477A1 (de) Kondensatorstruktur mit veränderbarer kapazität und verwendung der kondensatorstruktur
EP1192376B1 (de) Piezoaktor
EP2297797B1 (de) Piezoelektrisches bauelement und verfahren zur herstellung eines elektrischen kontaktes
DE10025998A1 (de) Piezoaktor
EP2798679B1 (de) Piezostack mit passivierung und verfahren zur passivierung eines piezostacks
EP2149922B1 (de) Piezoaktor mit passiven Bereichen am Kopf und/oder Fuss
WO2001024286A1 (de) Piezostapelaktor
EP1503435B1 (de) Verfahren zur Herstellung eines Piezoaktors
EP2529422A1 (de) Piezoaktor mit einem mehrlagenaufbau von piezolagen
WO2001089002A1 (de) Piezoaktor
WO2006003039A1 (de) Piezoaktor
DE102006054701A1 (de) Piezoaktor mit übereinandergestapelten Piezoelementen
EP2149921B1 (de) Piezoaktor mit passiven Bereichen am Kopf und/oder am Fuss
WO2002029910A1 (de) Piezoelement
DE102005052714B4 (de) Piezoaktor und Verfahren zur Herstellung desselben
EP3335252A1 (de) Piezoelektrisches bauelement
DE10046657A1 (de) Piezoelement und ein Verfahren zu seiner Herstellung

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20060614

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR

DAX Request for extension of the european patent (deleted)
17Q First examination report despatched

Effective date: 20070322

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20071002