EP1685428A4 - NEUTRON DETECTION DEVICE AND MANUFACTURING METHOD - Google Patents
NEUTRON DETECTION DEVICE AND MANUFACTURING METHODInfo
- Publication number
- EP1685428A4 EP1685428A4 EP04821349A EP04821349A EP1685428A4 EP 1685428 A4 EP1685428 A4 EP 1685428A4 EP 04821349 A EP04821349 A EP 04821349A EP 04821349 A EP04821349 A EP 04821349A EP 1685428 A4 EP1685428 A4 EP 1685428A4
- Authority
- EP
- European Patent Office
- Prior art keywords
- manufacture
- detection device
- neutron detection
- neutron
- detection
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 238000001514 detection method Methods 0.000 title 1
- 238000004519 manufacturing process Methods 0.000 title 1
- 238000000034 method Methods 0.000 title 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01T—MEASUREMENT OF NUCLEAR OR X-RADIATION
- G01T3/00—Measuring neutron radiation
- G01T3/08—Measuring neutron radiation with semiconductor detectors
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L31/00—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof
- H01L31/08—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors
- H01L31/10—Semiconductor devices sensitive to infrared radiation, light, electromagnetic radiation of shorter wavelength or corpuscular radiation and specially adapted either for the conversion of the energy of such radiation into electrical energy or for the control of electrical energy by such radiation; Processes or apparatus specially adapted for the manufacture or treatment thereof or of parts thereof; Details thereof in which radiation controls flow of current through the device, e.g. photoresistors characterised by potential barriers, e.g. phototransistors
- H01L31/115—Devices sensitive to very short wavelength, e.g. X-rays, gamma-rays or corpuscular radiation
Landscapes
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Life Sciences & Earth Sciences (AREA)
- High Energy & Nuclear Physics (AREA)
- Molecular Biology (AREA)
- Health & Medical Sciences (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Measurement Of Radiation (AREA)
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US10/693,847 US7271389B2 (en) | 2003-10-20 | 2003-10-20 | Neutron detection device and method of manufacture |
PCT/US2004/033686 WO2005076779A2 (en) | 2003-10-20 | 2004-10-12 | Neutron detection device and method of manufacture |
Publications (2)
Publication Number | Publication Date |
---|---|
EP1685428A2 EP1685428A2 (en) | 2006-08-02 |
EP1685428A4 true EP1685428A4 (en) | 2006-11-22 |
Family
ID=34522487
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP04821349A Withdrawn EP1685428A4 (en) | 2003-10-20 | 2004-10-12 | NEUTRON DETECTION DEVICE AND MANUFACTURING METHOD |
Country Status (4)
Country | Link |
---|---|
US (1) | US7271389B2 (ja) |
EP (1) | EP1685428A4 (ja) |
JP (1) | JP2007509345A (ja) |
WO (1) | WO2005076779A2 (ja) |
Families Citing this family (28)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US7244947B2 (en) * | 2004-04-13 | 2007-07-17 | Science Applications International Corporation | Neutron detector with layered thermal-neutron scintillator and dual function light guide and thermalizing media |
US7491948B2 (en) * | 2006-01-30 | 2009-02-17 | International Business Machines Corporation | Method of detecting and transmitting radiation detection information to a network |
US7712535B2 (en) * | 2006-10-31 | 2010-05-11 | Clearwater International, Llc | Oxidative systems for breaking polymer viscosified fluids |
US7858425B2 (en) * | 2007-05-21 | 2010-12-28 | Sanders Thomas J | Monolithic nuclear event detector and method of manufacture |
US20090039270A1 (en) * | 2007-08-08 | 2009-02-12 | Cabral Jr Cyril | Large-area alpha-particle detector and method for use |
US7868362B2 (en) * | 2007-10-16 | 2011-01-11 | Honeywell International Inc. | SOI on package hypersensitive sensor |
US7645993B2 (en) * | 2007-12-28 | 2010-01-12 | Spansion, Llc | Arrayed neutron detector with multi shielding allowing for discrimination between radiation types |
US7550730B1 (en) | 2008-04-08 | 2009-06-23 | International Business Machines Corporation | Method for detecting alpha particles in SOI technology |
US7875854B2 (en) * | 2008-04-08 | 2011-01-25 | International Business Machines Corporation | Design structure for alpha particle sensor in SOI technology and structure thereof |
US7791031B2 (en) * | 2008-06-09 | 2010-09-07 | Honeywell International Inc. | Neutron detection structure |
US7902520B2 (en) * | 2008-06-09 | 2011-03-08 | Spansion Llc | Radiation detecting electronic device and methods of operating |
US8436289B1 (en) | 2008-06-09 | 2013-05-07 | Spansion Llc | System and method for detecting particles with a semiconductor device |
US8232515B2 (en) | 2008-06-09 | 2012-07-31 | Spansion Llc | Imaging device having a radiation detecting structure disposed at a semiconductor substrate with a thermalizing material and a first radiation-reactive material sensitive to neutron radiation |
US8237129B2 (en) * | 2008-06-20 | 2012-08-07 | Arradiance, Inc. | Microchannel plate devices with tunable resistive films |
WO2010002875A1 (en) * | 2008-06-30 | 2010-01-07 | Kerns David V Jr | Neutron detection semiconductor device and method for manufacture |
US7952075B2 (en) * | 2008-08-14 | 2011-05-31 | Ut-Battelle, Llc | Neutron absorption detector |
US20100155611A1 (en) * | 2008-12-19 | 2010-06-24 | Spansion Llc | Radiation-detecting structures |
US7838324B2 (en) * | 2008-12-19 | 2010-11-23 | Honeywell International Inc. | Neutron detection structure and method of fabricating |
US8569708B2 (en) * | 2009-01-30 | 2013-10-29 | Alliance For Sustainable Energy, Llc | High sensitivity, solid state neutron detector |
US8153985B2 (en) * | 2009-01-30 | 2012-04-10 | Honeywell International Inc. | Neutron detector cell efficiency |
US8203123B2 (en) | 2009-03-10 | 2012-06-19 | Alliant Techsystems Inc. | Neutron detection by neutron capture-initiated relaxation of a ferroelectrically, ferromagnetically, and/or chemically metastable material |
US8120131B2 (en) * | 2009-03-13 | 2012-02-21 | International Business Machines Corporation | Array of alpha particle sensors |
US20110186940A1 (en) * | 2010-02-03 | 2011-08-04 | Honeywell International Inc. | Neutron sensor with thin interconnect stack |
US8310021B2 (en) | 2010-07-13 | 2012-11-13 | Honeywell International Inc. | Neutron detector with wafer-to-wafer bonding |
US20130056641A1 (en) * | 2011-09-01 | 2013-03-07 | Massachusetts Institute Of Technology | Solid-state neutron detector with gadolinium converter |
WO2015156215A1 (ja) * | 2014-04-08 | 2015-10-15 | 株式会社日立製作所 | 乱数発生器、シミュレーション装置およびメーター |
US11175417B1 (en) * | 2019-09-30 | 2021-11-16 | National Technology & Engineering Solutions Of Sandia, Llc | Mutli-layered neutron detector |
CN112490319B (zh) * | 2020-11-27 | 2023-03-28 | 东华理工大学 | 一种利用湿法刻蚀具有微沟槽的AlGaAs/GaAs中子探测器 |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6259099B1 (en) * | 1996-12-18 | 2001-07-10 | Commissariat A L'energie Atomique | Ultra-thin ionizing radiation detector and methods for making same |
Family Cites Families (13)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
DE4190941C2 (de) * | 1990-04-27 | 2001-07-26 | Hitachi Ltd | Neutronendosimeter und Verfahren für dessen Herstellung |
JPH0458571A (ja) * | 1990-06-28 | 1992-02-25 | Mitsubishi Materials Corp | 放射線検出素子 |
JPH0458570A (ja) * | 1990-06-28 | 1992-02-25 | Mitsubishi Materials Corp | 中性子検出装置 |
JPH05281364A (ja) * | 1992-04-06 | 1993-10-29 | Aloka Co Ltd | 中性子線量当量測定装置 |
JPH06180370A (ja) * | 1992-12-15 | 1994-06-28 | Hitachi Ltd | 中性子モニタ |
JPH07176777A (ja) * | 1993-12-20 | 1995-07-14 | Hitachi Ltd | 中性子検出器及び中性子モニタ |
FR2742878B1 (fr) * | 1995-12-20 | 1998-01-16 | Commissariat Energie Atomique | Detecteur de rayonnements ionisants ultra-mince et procedes de realisation d'un tel detecteur |
US5913131A (en) * | 1996-11-14 | 1999-06-15 | Advanced Micro Devices, Inc. | Alternative process for BPTEOS/BPSG layer formation |
US6075261A (en) * | 1997-08-22 | 2000-06-13 | Advanced Micro Devices | Neutron detecting semiconductor device |
JP2002040147A (ja) * | 2000-07-28 | 2002-02-06 | Matsushita Electric Ind Co Ltd | 中性子検出装置 |
DE10132550B4 (de) * | 2001-07-09 | 2008-07-10 | Bundesrepublik Deutschland, vertr. d. d. Bundesministerium für Wirtschaft und Technologie, dieses vertr. d. d. Präsidenten der Physikalisch-Technischen Bundesanstalt | Verfahren zur Bestimmung der Personendosis in gemischten Neutronen-/Photonen-Feldern sowie anderer Messgrößen in anderen Strahlenfeldern |
DE10153319B4 (de) * | 2001-10-29 | 2011-02-17 | austriamicrosystems AG, Schloss Premstätten | Mikrosensor |
US20040178337A1 (en) * | 2003-03-11 | 2004-09-16 | Baker Hughes Incorporated | Neutron detector for downhole use |
-
2003
- 2003-10-20 US US10/693,847 patent/US7271389B2/en not_active Expired - Fee Related
-
2004
- 2004-10-12 EP EP04821349A patent/EP1685428A4/en not_active Withdrawn
- 2004-10-12 WO PCT/US2004/033686 patent/WO2005076779A2/en active Application Filing
- 2004-10-12 JP JP2006536670A patent/JP2007509345A/ja active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6259099B1 (en) * | 1996-12-18 | 2001-07-10 | Commissariat A L'energie Atomique | Ultra-thin ionizing radiation detector and methods for making same |
Non-Patent Citations (1)
Title |
---|
MCGREGOR D S ET AL: "Design considerations for thin film coated semiconductor thermal neutron detectors-I: basics regarding alpha particle emitting neutron reactive films", NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION - A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPMENT, ELSEVIER, AMSTERDAM, NL, vol. 500, no. 1-3, 11 March 2003 (2003-03-11), pages 272 - 308, XP004434690, ISSN: 0168-9002 * |
Also Published As
Publication number | Publication date |
---|---|
EP1685428A2 (en) | 2006-08-02 |
US7271389B2 (en) | 2007-09-18 |
US20050082489A1 (en) | 2005-04-21 |
WO2005076779A2 (en) | 2005-08-25 |
WO2005076779A3 (en) | 2006-07-27 |
JP2007509345A (ja) | 2007-04-12 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
AK | Designated contracting states |
Kind code of ref document: A2 Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PL PT RO SE SI SK TR |
|
AX | Request for extension of the european patent |
Extension state: AL HR LT LV MK |
|
PUAK | Availability of information related to the publication of the international search report |
Free format text: ORIGINAL CODE: 0009015 |
|
17P | Request for examination filed |
Effective date: 20060707 |
|
RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: WHITLOCK, ROBERT, R. Inventor name: MCMARR, PATRICK, J. Inventor name: HUGHES, HAROLD, L. Inventor name: AUGUST, ROBERT, A. |
|
A4 | Supplementary search report drawn up and despatched |
Effective date: 20061019 |
|
RIC1 | Information provided on ipc code assigned before grant |
Ipc: H01L 31/115 20060101ALI20061013BHEP Ipc: G01T 3/08 20060101AFI20060629BHEP |
|
DAX | Request for extension of the european patent (deleted) | ||
17Q | First examination report despatched |
Effective date: 20080716 |
|
STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
18D | Application deemed to be withdrawn |
Effective date: 20081028 |