Classifications

• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
  • C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
  • C23C16/40—Oxides
  • C23C16/401—Oxides containing silicon
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
  • C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
  • C23C16/509—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges using internal electrodes
• • C—CHEMISTRY; METALLURGY
  • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
  • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
  • C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
  • C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
  • C23C16/54—Apparatus specially adapted for continuous coating
  • C23C16/545—Apparatus specially adapted for continuous coating for coating elongated substrates
• • D—TEXTILES; PAPER
  • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
  • D06B—TREATING TEXTILE MATERIALS USING LIQUIDS, GASES OR VAPOURS
  • D06B3/00—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating
  • D06B3/04—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating of yarns, threads or filaments
  • D06B3/045—Passing of textile materials through liquids, gases or vapours to effect treatment, e.g. washing, dyeing, bleaching, sizing, impregnating of yarns, threads or filaments in a tube or a groove
• • D—TEXTILES; PAPER
  • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
  • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
  • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
  • D06M10/02—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements ultrasonic or sonic; Corona discharge
  • D06M10/025—Corona discharge or low temperature plasma
• • D—TEXTILES; PAPER
  • D06—TREATMENT OF TEXTILES OR THE LIKE; LAUNDERING; FLEXIBLE MATERIALS NOT OTHERWISE PROVIDED FOR
  • D06M—TREATMENT, NOT PROVIDED FOR ELSEWHERE IN CLASS D06, OF FIBRES, THREADS, YARNS, FABRICS, FEATHERS OR FIBROUS GOODS MADE FROM SUCH MATERIALS
  • D06M10/00—Physical treatment of fibres, threads, yarns, fabrics, or fibrous goods made from such materials, e.g. ultrasonic, corona discharge, irradiation, electric currents, or magnetic fields; Physical treatment combined with treatment with chemical compounds or elements
  • D06M10/04—Physical treatment combined with treatment with chemical compounds or elements
  • D06M10/08—Organic compounds
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
  • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
  • H01J37/32—Gas-filled discharge tubes
  • H01J37/32431—Constructional details of the reactor
  • H01J37/32733—Means for moving the material to be treated
• • H—ELECTRICITY
  • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
  • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
  • H05H1/00—Generating plasma; Handling plasma
  • H05H1/24—Generating plasma
  • H05H1/26—Plasma torches
  • H05H1/32—Plasma torches using an arc
  • H05H1/44—Plasma torches using an arc using more than one torch

Definitions

• the present invention relates to a method for continuously treating the surface of an elongated object, for example a fiber, a wire, a tubular element, a tape or a strip or the like. by means of a plasma flow created by an electrical discharge under ambient pressure, in which said elongated object is continuously scrolled through a channel formed inside a hollow tubular body, at least partially open to its two ends, along a running axis substantially parallel to the longitudinal axis of said channel.
• an elongated object for example a fiber, a wire, a tubular element, a tape or a strip or the like.
• It also relates to a device for continuous treatment of the surface of an elongated object, for example a fiber, a wire, a tubular element, a tape or a strip or the like by means of '' a plasma flow created by an electrical discharge under ambient pressure, in which said elongated object is continuously scrolled through a channel formed inside a hollow tubular body, at least partially open at both ends , along a scroll axis substantially parallel to the longitudinal axis of said channel, for the implementation of the method of the invention.
• an elongated object for example a fiber, a wire, a tubular element, a tape or a strip or the like by means of '' a plasma flow created by an electrical discharge under ambient pressure
• the invention relates to a use of the method for modifying the physical characteristics of the surface of a threadlike object.
• the surface treatments carried out successively or simultaneously may for example include cleaning, pickling, surface activation, depositing a film, or any treatment making it possible to modify the physical characteristics of a surface and in particular of a surface of an elongated object of insulating or conductive material, or of a textile material with natural or synthetic fibers.
• the elongated objects to be treated include all kinds of threads, made of natural or synthetic material, threads made of fibers or filaments mixed or intertwined, threads made of braided fibers for textile or technical use.
• US Patent 4,397,893 describes a method of treating the surface of a metal rod such as a piston rod, in which a plasma torch oriented towards the rod and arranged perpendicularly to it is moved along this rod, while it is rotated around its axis.
• This device requires the synchronized movement of a preheating device, the plasma torch and the rod support.
• a first object of the present invention is to provide a method and a device for treating the surface of an elongated object producing a homogeneous result, in a single operation from all sides of this elongated object, making it possible to use various types of plasma and additives with the aim of being able to carry out different chemical and physical treatments by using plasma and which can be applied to optical fibers, as well as strings, metallic cables or cords.
• a second object of the present invention is to propose a method and a device of the aforementioned type which is integrated into a production line while modifying the construction and the parameters of this line as little as possible while guaranteeing great safety during the use.
• a neutral plasma flow is generated by means of a electric discharge generated by a voltage applied between a central electrode and a ground, said neutral plasma flow being generated at a determined angle relative to said longitudinal axis in at least part of said body of the channel, and in that one confines substantially said plasma flow in said part of said channel body at least while said elongated object passes through this part of the channel body.
• said plasma flow forms an acute angle with respect to said axis of travel of said elongated object.
• At least said part of said body of the channel is placed in fluid communication with the external atmosphere.
• said electric discharge is generated by an electric voltage chosen from the group of voltages constituted by the direct, pulsed, alternating voltages of any range of frequencies.
• said plasma flow is generated by means of a supply conduit connected to said channel in said part of said body of this channel.
• said plasma is maintained with at least one carrier fluid injected into a device generating said plasma.
• Said plasma is preferably maintained by means of a carrier fluid which contains a treatment component in an injectable form.
• Said injectable form can be a gas, a vapor, a mixture of gases and vapor, or a compound comprising a fluid vehicle containing gaseous or solid particles or a mixture of these particles.
• several plasma streams are generated at determined angles relative to the longitudinal axis of said channel body, said plasma streams are substantially confined respectively in said parts of said channel body and said plasma streams are respectively maintained with specific carrier fluids.
• the elongated object can circulate in said channel at a speed ranging from a few centimeters / second to several tens of meters / second.
• the device as defined in the preamble and characterized in that it comprises means for generating a flow of neutral plasma by means of an electric discharge generated by a voltage applied between a central electrode and a ground, means for generating said flow of neutral plasma at a determined angle with respect to said longitudinal axis in at least part of said channel body and means for substantially confining said flow of plasma in said part of said channel body at least while said object elongated crosses this part of the body of the canal.
• said means for generating a plasma flow at a determined angle with respect to the longitudinal axis of said body of the channel comprises a plasma generating device provided with a supply conduit connected to said channel in said part of said body of this channel, this supply duct forming an angle with the axis of travel of the elongated object.
• the plasma generating device is preferably arranged to generate the plasma flow by means of an electric discharge made between an electrode and said part of the channel body, this plasma flow being substantially confined between the interior walls of this part. of the body of said channel.
• the supply duct advantageously forms an angle with the axis of travel of the elongated object of between 0 and 90 degrees and preferably between 30 and 60 degrees.
• the channel is formed in a tubular body made of a material resistant to the temperature of the plasma flow.
• the channel is formed in a tubular body made of a material having good thermal conductivity and the outer wall of the body of the channel is cooled.
• a material having good thermal conductivity e.g., quartz or ceramics, in particular alumina-based ceramics, having good thermal conductivity.
• the plasma flow can be generated in a laminar manner and so as to reach a speed of propagation of the plasma equal to or greater than that of the movement of the elongated object.
• the device advantageously includes means for circulating said elongated object at a speed ranging from a few centimeters / second to several tens of meters / second.
• the same running speed is adopted as the upstream and / or downstream workstations of the production or transformation plant for the elongated object.
• This device can advantageously include two plasma generating devices oriented so as to direct plasma flows in opposite directions.
• said channel body comprises separation means arranged to cut the interior of said channel from the outside atmosphere.
• said channel comprises several parts as well as several plasma generating devices arranged to generate several plasma flows at determined angles relative to the longitudinal axis of said channel body, said plasma flows being respectively confined in said parts of said channel body and each of said respective plasma streams being maintained with specific carrier fluids.
• a carrier fluid mention may be made of argon, air or nitrogen.
• the carrier fluid can carry a plasmochemical treatment component, such as oxygen, carbon tetrafluoride, carbon tetrachloride or the like.
• the channel can be, if necessary, subjected to partial vacuum, by means of a pump, or be placed in a vacuum enclosure or in a controlled atmosphere.
• FIG. 1 is a schematic view in longitudinal section of a first embodiment of the treatment device according to the invention
• FIG. 2 shows a schematic view in longitudinal section of a second embodiment of the treatment device according to the invention
• FIG. 3 shows a schematic view in longitudinal section of a third embodiment of the treatment device according to the invention
• Figure 4 shows a schematic view in longitudinal section of a fourth mode of execution of the processing device according to the invention.
• FIG. 5 shows a schematic view in longitudinal section of a fifth embodiment of the treatment device according to the invention.
• the device 100 comprises a channel 1 formed inside a hollow cylindrical body 2, open at its two ends, made for example from copper or from an insulating or even refractory material.
• This cylindrical body 2 is electrically connected to a mass T and is equipped with means for generating in channel 1 a flow of neutral plasma by means of an electric discharge generated by a voltage applied between a central electrode and the mass T, so that channel 1 is not crossed by any electrical voltage.
• the body 2 is connected to a plasma generating device 3 comprising an electrode 4 connected to an electrical energy source 5, itself connected to the ground T.
• the electrode 4 of the plasma generating device 3 is housed inside an insulator 6 itself mounted in a nozzle 7 connected to the channel 1.
• This nozzle 7 is preferably arranged in such a way that its longitudinal axis forms an acute angle, for example between 30 and 60 degrees with the axis of channel 1 which is in fact the axis of travel of an elongated object A to be treated, partially shown and arranged along the axis of channel 1.
• the source of electrical energy 5 can be a voltage generator or an alternating voltage generator.
• the plasma generating device 3 is connected to the channel 1 via a supply duct 8 whose axis is inclined relative to the axis of the channel 1. In this supply duct 8 opens a duct d injection 9 of a carrier fluid which may be a treatment gas or any vapor or carrier fluid loaded with solid particles etc.
• the portion of the elongated object A passing through the channel 1 is maintained in a substantially central position using guides 11 integrated in the channel, as well as using tensioning devices and driving devices external to said channel.
• channel (not shown), such as those used in the textile industry to pass a thread through a succession of processing stations, which are arranged outside of channel 1 and allow to maintain a portion of the elongated object A, for example of a wire, taut and animated with a movement of movement in the longitudinal direction of the channel.
• the displacement can be done in the right-left direction or the left-right direction depending on the type of treatment to be applied.
• the plasma generating device 3 generates a neutral plasma flow which is transmitted through the supply duct 8 and which is then located in a part 10 of the channel in which the plasma is confined.
• the portion of the elongated object A, the surface of which is to be treated is completely immersed in the plasma when it travels inside the channel 1.
• the substance that may be necessary for the treatment can be added to the plasma. either by direct injection or by means of a carrier fluid through the injection pipe 9. This substance is chosen according to the treatment carried out, namely cleaning, pickling, surface deposition.
• FIG. 2 is a longitudinal section of a second embodiment of the processing device according to the invention.
• Channel 1 comprises in particular two parts 10a and 10b in which the plasma is confined and which are each associated with their own plasma generator device 3 identical to that described with reference to FIG. 1.
• the sources of electrical energy 5 respectively associated with the two generating devices are identical to the source of electrical energy 5 of the device of FIG. 1 and provide the same voltage, and that the elongated object A passes through the channel 1 at the same speed
• this device allows, under identical processing conditions, to double the contact time between this object and the plasma or, conversely, for an equal contact time between the object and the plasma, this device makes it possible to double the speed of movement of the object .
• Figure 3 is a longitudinal sectional view of a third mode of execution of the processing device according to the invention.
• the channel 1 is provided with two plasma generating devices 3 oriented so as to fill with plasma part 10 of the channel in which the plasma is confined in order to increase the plasma density and therefore to increase the speed of treatment by increasing the speed of passage of the elongated object A.
• This embodiment also allows a treatment which requires the use of substances which cannot be mixed directly before being injected into the plasma, but which must be necessarily present at the same time on a surface of the elongated object for successful treatment. In this case these substances are injected into the plasma through the injection conduits 9.
• the plasma generating devices 3 are associated with two sources of electrical energy 5 which deliver electrical voltages which may be identical or different depending on the 'application.
• Figure 4 is a longitudinal sectional view of a fourth embodiment of the processing device 100 according to the invention.
• the channel 1 is equipped at the ends with separation devices 12 intended to isolate from the ambient atmosphere a part 10 in which the plasma is confined.
• These separation devices represent kinds of buffer volumes which can be pressurized or vacuumed by openings 13 and 14. They are arranged for example to isolate the elongated object A passing through said channel 1 from the rest of the external atmosphere by compared to that of the interior of channel 1 and of part 10 which is the treatment zone.
• This arrangement also makes it possible to graft molecules of a substance onto the surface of the elongated object or to carry out the two operations consecutively if two separation devices are installed in series.
• FIG. 5 represents a longitudinal section of a fifth embodiment of the treatment device 100 according to the invention.
• the treatment zone constituted by the part 10 in which the plasma is confined, is filled with the plasma created by two plasma generating devices 3 arranged so as to direct the plasma at a determined angle with respect to to channel 1 in the directions of propagation of the plasma opposite to each other, which makes it possible to widen the treatment area.
• the injection conduits 9 described above can be used.
• Other complementary injection conduits 15 make it possible to deliver directly to the treatment zone, substances necessary for treatment or to use substances which are too sensitive to the plasma medium and which could, in the case of a standard injection process in plasma, be destroyed before they produce the expected effects on a surface of the elongated object being treated.
• the voltages delivered by the energy sources 5 can all be different or identical depending on the application.
• the processing device can be the subject of numerous other modifications without departing from the scope of the invention.
• the body 2 can be made of two elements capable of being separated and which are, in the longitudinal direction, in the form of an open gutter and a cover of complementary shape and dimensions in order to define between them the channel for the passage of the object to be treated.
• the method and the device according to the invention make it possible to treat various elongated objects, in particular filiform objects with a very low plasma volume. This small volume results in very low consumption of electrical energy and process gas for the creation of the plasma.
• the device being connected to ground, it can be used for the treatment of metallic wires, and in particular conductive wires, in complete safety.
• Example 1 As examples, some uses of the device of the invention for the treatment of an elongated object will be described below.
• Example 1
• This example shows the use of the device used in its first mode to carry out a treatment by surface burn of cotton threads.
• This example uses the device according to the invention in its first embodiment for stripping part of the surface of a synthetic yarn.
• This example uses the device in its first embodiment to deposit a layer of SiOx on the surface of a synthetic yarn.
• Process parameters Alternating current energy (13.56 MHz) Argon carrier gas

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• Chemical & Material Sciences (AREA)
• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Plasma & Fusion (AREA)
• Metallurgy (AREA)
• Chemical Kinetics & Catalysis (AREA)
• Materials Engineering (AREA)
• Mechanical Engineering (AREA)
• General Chemical & Material Sciences (AREA)
• Organic Chemistry (AREA)
• Textile Engineering (AREA)
• Spectroscopy & Molecular Physics (AREA)
• Inorganic Chemistry (AREA)
• Analytical Chemistry (AREA)
• Treatment Of Fiber Materials (AREA)
• Chemical Or Physical Treatment Of Fibers (AREA)

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• 2003
  • 2003-11-18 JP JP2005510679A patent/JP2007524004A/ja active Pending
  • 2003-11-18 WO PCT/CH2003/000763 patent/WO2005049226A1/fr active Application Filing
  • 2003-11-18 AU AU2003275902A patent/AU2003275902A1/en not_active Abandoned
  • 2003-11-18 US US10/579,653 patent/US20070128375A1/en not_active Abandoned
  • 2003-11-18 CA CA002546411A patent/CA2546411A1/en not_active Abandoned
  • 2003-11-18 EP EP03819014A patent/EP1684915A1/de not_active Withdrawn

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