EP1681469A1 - Rotary dry vacuum pump - Google Patents

Rotary dry vacuum pump Download PDF

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Publication number
EP1681469A1
EP1681469A1 EP04792788A EP04792788A EP1681469A1 EP 1681469 A1 EP1681469 A1 EP 1681469A1 EP 04792788 A EP04792788 A EP 04792788A EP 04792788 A EP04792788 A EP 04792788A EP 1681469 A1 EP1681469 A1 EP 1681469A1
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
motor
rotary
partition wall
dry vacuum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04792788A
Other languages
German (de)
English (en)
French (fr)
Inventor
Daisuke c/o Tsu Plant INOUE
Satoshi c/o Tsu Plant FUJII
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nabtesco Corp
Original Assignee
Nabtesco Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nabtesco Corp filed Critical Nabtesco Corp
Publication of EP1681469A1 publication Critical patent/EP1681469A1/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C23/00—Combinations of two or more pumps, each being of rotary-piston or oscillating-piston type, specially adapted for elastic fluids; Pumping installations specially adapted for elastic fluids; Multi-stage pumps specially adapted for elastic fluids
    • F04C23/008—Hermetic pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0042—Driving elements, brakes, couplings, transmissions specially adapted for pumps
    • F04C29/0085—Prime movers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/0092—Removing solid or liquid contaminants from the gas under pumping, e.g. by filtering or deposition; Purging; Scrubbing; Cleaning
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F04C2220/12—Dry running
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2280/00—Arrangements for preventing or removing deposits or corrosion
    • F04C2280/02—Preventing solid deposits in pumps, e.g. in vacuum pumps with chemical vapour deposition [CVD] processes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F04C29/045—Heating; Cooling; Heat insulation of the electric motor in hermetic pumps

Definitions

  • the present invention relates to a rotary dry vacuum pump used in an apparatus such as a semiconductor manufacturing apparatus into which reaction produced gas is poured and, in particular, to such rotary dry vacuum pump structured in such a manner that the reaction produced gas is difficult to flow into a canned motor serving as the power part of the rotary dry vacuum pump.
  • the rotary dry vacuum pump includes a screw vacuum pump, a roots vacuum pump, a scroll vacuum pump and the like.
  • Such rotary dry vacuum pump has a shaft for rotating a rotor and uses a bearing for supporting the shaft.
  • the rotary dry vacuum pump including a rotation drive part, there is used a canned motor which is capable of keeping the pressure of the interior of the motor substantially equal to that of the exhaust chamber.
  • the motor includes a stator winding for generating a rotation magnetic field in a stator core, the interior of a metal-made thin cylindrical partition wall (can) mounted on the inner peripheral side of the motor is hermetically sealed by a frame, a side plate and the partition wall, and a rotary element is mounted on the shaft of the motor supported by a bearing fixed to a bracket, thereby providing a rotatable structure.
  • a stator winding for generating a rotation magnetic field in a stator core
  • the interior of a metal-made thin cylindrical partition wall (can) mounted on the inner peripheral side of the motor is hermetically sealed by a frame, a side plate and the partition wall, and a rotary element is mounted on the shaft of the motor supported by a bearing fixed to a bracket, thereby providing a rotatable structure.
  • the interior of the partition wall with the rotary element housed therein forms a vacuum while the canned motor is in operation.
  • the vacuum pump itself can be broken down.
  • a rotary dry vacuum pump comprising: one or plural rotors housed within a housing; bearings for respectively supporting the shafts of these rotors; a suction port and an exhaust port respectively formed in the housing for sucking and exhausting fluid; and a rotary rotor composed of a motor for driving and rotating at least one of the rotors, wherein the motor includes a stator core, a partition wall mounted on the rotor inner peripheral side of the motor is fixedly secured to the housing to thereby hermetically seal the interior of the partition wall, a rotary element is rotatably disposed within the partition wall, the shaft of at least one of the rotors and the shaft of the rotary element are fixedly secured together to thereby be able to drive and rotate the rotor, and there is opened up a gas charge hole in the motor for charging purge gas into the partition wall.
  • the partition wall can be made of magnetic metal. And, the purge gas is also allowed to flow to the bearings respectively supporting the shafts of the rotors rotatably.
  • the shaft of the motor and the shaft of the rotor are formed integral with each other.
  • the rotary element of the motor is fixed to the shaft mounted on the end portion of the rotor by given means, this end portion is fixed to the flange through a cylindrical member constituting the partition wall, and the partition wall is then covered with the flange constituting the housing to thereby hermetically seal the interior of the partition wall.
  • the motor is disposed on the suction port side.
  • the rotary dry vacuum pump is arranged vertically and the bearings and motor are set in the upper portion of the pump, the effects of the invention can be increased further.
  • a rotary dry vacuum pump having two or more shafts is arranged vertically, timing gears for synchronization and requiring lubricating are disposed on the lower discharge port side, and the motor is disposed on the suction side, the contamination of the exhaust chamber due to the lubricating oil can be prevented.
  • flow rate control means is disposed on a pipe for sending the purge gas to the purge gas charge hole.
  • the flow rate control means there are available means for throttling the flow rate of the purge gas through a purge gas flow hole of a given size opened up in a purge gas flow passage and, as the need arises, a hand-operated valve; and further, there is disposed an electromagnetic valve on the N2 supply side.
  • the electromagnetic valve is opened to thereby allow the gas to flow in an amount controlled by the valve as the purge gas, thereby being able to prevent the process gas from flowing into the bearing part and motor part of the vacuum pump.
  • the control valve can be omitted.
  • the amount can be controlled at the time when the electromagnetic valve is opened, or there can be used an electromagnetic valve having a flow rate control function.
  • a pressure measuring device for measuring the pressure of the interior of the partition wall and/or a pressure measuring device for measuring the pressure of the interior of an exhaust chamber.
  • the gas flow rate may be controlled using the electromagnetic valve such that the pressure of the interior of the partition wall is equal to or larger than the pressure of the interior of the exhaust chamber.
  • the flow-in amount of the purge gas as well as the flow rate thereof can also be controlled using only one of the two pressures.
  • the pressure measuring device there is available a thin film semiconductor detector or the like.
  • the flow-in amount and flow rate of the purge gas can also be adjusted.
  • the flow-in amount and flow rate of the purge gas may also be adjusted using only variations in the pressure of the interior of the chamber, or they may be controlled according to the pressure of the interior of the partition wall.
  • rotation number measuring means for measuring the number of rotations of the rotary element of the motor and the rotors.
  • an encoder may be mounted on the rotary element of the motor and the magnetism of a permanent magnet provided in the rotary element may be detected at a specific position by the encoder to thereby find the number of rotations of the rotary element.
  • the flow-in amount and flow rate of the purge gas are controlled in accordance with the thus found number of rotations. For example, when the number of rotations decreases, the control to allow the flow of the purge gas is made, or, according to the increase or decrease ratio of the number of rotations, the flow-in amount and flow rate of the gas can be adjusted.
  • the flow rate of the gas can be adjusted depending on the power consumption of the motor measure by this means. For example, when the power consumption is varied due to an increase in the suction gas amount during the running operation of the motor, the control to allow the flow of the purge gas can be made, or, at the time when the motor is not running, the flow-in amount and flow rate of the purge gas can be adjusted according to the variations in the power consumption.
  • a reaction produced gas flow meter in the vicinity of the suction port or exhaust port.
  • the flow rate of the purge gas can be controlled according to variations in the flow rate of the reaction produced gas. For example, when the flow rate of the reaction produced gas increases, the control to increase the flow rate of the purge gas may be made. Also, the flow rate of the purge gas may also be adjusted according to the flow rate of the gas that is charged into the above-mentioned chamber.
  • a rotary dry vacuum pump comprising: one or plural rotors housed within a housing; bearings for supporting respectively the shafts of these rotors; a suction port and a discharge port respectively formed in the housing for sucking and discharging fluid; and a rotary rotor composed of a motor for driving and rotating at least one of the rotors
  • the motor includes a stator core fixed to the interior of the housing of the motor, a partition wall mounted on the rotor inner peripheral side of the motor is fixedly secured to the housing to thereby hermetically seal the interior of the partition wall, a rotary element is fixed to the shaft within the partition wall to thereby provide a rotatable structure, and there is opened up a gas charge hole in the motor for charging purge gas into the partition wall.
  • the purge gas may be charged into the motor; that is, this can prevent the reaction produced gas from flowing from the vacuum exhaust chamber into the interior of the partition wall. Also, by applying the purge gas to the bearings similarly, the reaction products can be prevented from sticking to the bearings, thereby being able to prevent the bearings from being broken down due to the reaction products.
  • flow rate control means in a pipe used to send the purge gas to the purge gas charge port, there is provided flow rate control means. Thanks to this structure, a minimum quantity of purge gas necessary to prevent the process gas from flowing into the interior of the partition wall during the stop of the pump can be poured. Therefore, the wasteful use of N2 can be restricted and the spread of the lubricant sticking to the bearing part to the exhaust chamber can be minimized.
  • a pressure measuring device for measuring the pressure of the interior of the partition wall and/or a pressure measuring device for measuring the pressure of the interior of the exhaust chamber. Thanks to this structure, the flow rate of the purge gas can be controlled using an electromagnetic valve or the like in such a manner that the pressure of the interior of the partition wall is slightly higher than that of the interior of the exhaust chamber.
  • a gas flow meter in the vicinity of the suction port or exhaust port, there is provided a gas flow meter. This makes it possible to realize the control that allows the flow of only the necessary purge gas. Thanks to this, not only the wasteful use of gas can be avoided but also the leakage of the purge gas into the exhaust chamber and thus the lowered exhaust performance of the pump can be prevented.
  • a screw vacuum pump As an embodiment of a rotary dry vacuum pump according to the invention, there is shown a screw vacuum pump.
  • the vacuum pump 200 comprises two screw rotors 202 and 204.
  • the screw rotors 202 and 204 are housed in the interior of a housing 210.
  • the screw rotor 202 is rotatably supported in the housing 210 by bearings 231 and 233
  • the screw rotor 204 is rotatably supported in the housing 210 by bearings 234 and 236.
  • timing gears 251 and 253, a motor 241, and seals 237, 238, 239 and 240 are arranged as shown in Fig. 1.
  • the seals 237 and 238 separate the bearings 231 and 233 from a screw rotor storage chamber 210b, whereby not only the lubricating oil of the bearings 231 and 233 is prevented from leaking into the screw rotor chamber 210b but also a foreign substance is prevented from entering the bearings 231 and 233 from the screw rotor storage chamber 210b.
  • the seals 239 and 240 separate the bearings 234 and 236 from the screw rotor storage chamber 210b, thereby not only preventing the lubricating oil of the bearings 234 and 236 from leaking into the screw rotor storage chamber 210b but also preventing a foreign substance from entering the bearings 234 and 236 from the screw rotor storage chamber 210b.
  • the seals 237, 238, 239 and 240 there are available a contact type seal, a clearance seal such as a magnetic fluid seal and a Labyrinth seal, and other type seal.
  • timing gears 251 and 253 which can rotate the screw rotor 202 as the screw rotor 204 is rotated, while the timing gears are meshingly engaged with each other. Further, to the other end portion of the screw rotor 202, there is connected the motor 241 integrally therewith.
  • the screw rotor storage chamber 210b is allowed to communicate with the outside of the housing 210 through a suction port (not shown) which is formed in the wall portion of the housing 210 and is used to suck compressible fluid into the inside of the housing 210 from the outside of the housing 210; and, the screw rotor storage chamber 210b is also allowed to communicate with the outside of the housing 210 through a discharge port (not shown) formed in the wall portion of the housing 210 to discharge the compressible fluid from the inside of the housing 210 to the outside of the housing 210.
  • the suction port is in communication with a vessel to be evacuated (not shown), whereas the discharge port is in communication with an exhaust gas processing device (not shown).
  • the housing 210 is composed of a first housing member 211, a second housing member 212, a third housing member 213, a fourth housing member 214 and a fifth housing member 215.
  • the first housing member 211 constitutes a suction side flange and also serves as the housing of the canned motor 241.
  • the second, third and fourth housing members 212, 213 and 214 cooperate together in constituting a housing main body; and also, these housing members 212, 213 and 214 cooperate together in defining a vacuum exhaust chamber.
  • To the second housing member 212 there are fixed the bearings 237., 234 and the shaft seals 237, 239.
  • the fourth housing member 214 there are fixed the bearings 233, 236 and the shaft seals 238, 240.
  • the canned motor 241 includes a stator winding which is used to generate a rotation field in a stator core 261.
  • a rotary element 265 is fixed to the shaft portion 263 of the canned motor 241 which is formed integral with the rotor 202.
  • the stator core 261 and rotary element 265 are separated by a partition wall (can) 281, while the partition wall 281 is closely contacted with and fixed to the second housing member 212.
  • the flange 267 of the canned motor 241 is closely contacted with and fixed to the partition wall 281, so that the rotary element 265 can be sealed from the open air.
  • a charge hole 269 which is used to charge purge gas (for example, nitrogen gas or argon gas) into the inside of the canned motor 241 hermetically sealed by the partition wall 281, housing second member 212 and flange 267 with their connecting portions hermetically closed by O rings (not shown) or the like.
  • purge gas for example, nitrogen gas or argon gas
  • the charge hole 269 there is mounted a flow passage 271 which is used to guide the purge gas; and, on the flow passage 271, there are mounted flow rate control means (for example, a hand-operated valve and an orifice) 273 and an electromagnetic valve 275 which are used to control the flow rate of the purge gas.
  • the pressure of the interior of the exhaust chamber 210c rises and thus gas existing in the exhaust chamber 210c reverse flows into the interior of the canned motor 241 hermetically sealed by the first housing member 211, second housing member 212 and flange 267 the pressure of which are low.
  • the gas within the exhaust chamber is corrosive gas or reaction produced gas, the gas can corrode the rotary element 265 and shaft 263, and a reaction product can stick to them to thereby cause the canned motor 241 to break down.
  • the purge gas when the corrosive gas or reaction produced gas is allowed to flow, the purge gas must be poured in such a manner that the pressure of the interior of the canned motor 241 hermetically sealed by the first housing member 211, second housing member 212 and flange 267 becomes higher than the pressure of the interior of the exhaust chamber 210c.
  • the pressure of the interior of the canned motor is expressed as a pressure P1 and the pressure of the interior of the exhaust chamber 210c nearest to the canned motor 241 is expressed as a pressure P2
  • the flow rate of the purge gas may preferably be set such that the relationship P1 ⁇ P2 can be obtained after stop of the vacuum pump.
  • the electromagnetic valve may be opened and gas of a flow rate L controlled by a valve (a hand-operated valve, an electromagnetic valve or an orifice) may be poured as purge gas, thereby being able to prevent the process gas from flowing into the bearing part and motor portion of the vacuum pump. If the time T necessary for the P1 to reach the atmospheric pressure is previously measured, only during the time T, the electromagnetic valve may be opened, thereby being able to pour the purge gas of the flow rate L.
  • a valve a hand-operated valve, an electromagnetic valve or an orifice
  • a necessary and minimum flow rate of purge gas can be poured, so that not only the wasteful use of the purge gas can be prevented but also the spread of the lubricant sticking to the bearing part to the exhaust chamber can be minimized.
  • the pressure P1 of the interior of the canned motor 241 hermetically sealed by the first housing member 211, second housing member 212 and flange 267 is measured by a pressure gauge
  • the pressure P2 of the interior of the exhaust chamber 210c is measured by a pressure gauge
  • the flow rate of the purge gas is controlled by an electromagnetic valve in such a manner that a difference between the pressures is P1 ⁇ P2.
  • Control of the flow rate of the purge gas is not limited to the time of stop of the vacuum pump, but, during the running time of the vacuum pump as well, the purge gas may be allowed to continue to flow in a small quantity in such a manner that the relationship P1 ⁇ P2 can be obtained. Further, during the running time of the vacuum pump as well, when the flow rate of the reaction produced gas varies, there is a possibility that the pressure of the interior of the exhaust chamber can vary. Therefore, in this case, the flow rate of the purge gas should be controlled so as to be able to obtain the relationship P1 ⁇ P2.
  • the pressure of the interior of the exhaust chamber can also be replaced with the pressure of the interior of the chamber of a semiconductor manufacturing apparatus which uses the vacuum pump according to the present embodiment.
  • the flow rate of the purge gas is controlled by comparing the two pressures with each other; however, the flow rate can also be controlled by using one of the pressure of the interior of the motor partition wall, the pressure of the interior of the exhaust chamber and the pressure of the interior of the reaction chamber.
  • the flow rate of the purge gas is controlled by measuring the pressures.
  • the purge gas flow rate can also be controlled by measuring the number of rotations of the motor or rotor, the power consumption of the motor and the flow rate of the reaction produced gas.
  • a semiconductor manufacturing apparatus dislikes contamination by oil.
  • a vertical vacuum pump in particular, the suction port is disposed at an upper position, the discharge port is disposed at a lower position, the portions of the timing gears always requiring lubricating oil are disposed at lower positions, and the canned motor 241 not using the lubricating oil and disliking contamination by the lubricating oil is disposed on the suction side of the vacuum pump.
  • This structure can restrict the contamination of the suction side with oil as much as possible.
  • use of grease for a vacuum as the lubricant of the bearings on the suction side can increase the above effect still further.
  • a screw vacuum pump of a capacity transfer type description has been given heretofore of a screw vacuum pump of a capacity transfer type.
  • the invention can also apply to a claw vacuum pump, a roots vacuum pump, a scroll vacuum pump and other type vacuum pump in which a shaft can be driven by a motor.
  • the rotary dry vacuum pump according to the invention can have the same structure as those of the respective pumps of a plural stage type vacuum pump, for example, a two-stage screw vacuum pump.
  • the pressure, gas flow rate, power consumption and the number of rotations are converted to data electric signals and are transmitted to signal process means, the flow rate of the purge gas is decided by the signal process means from the data electric signals, the thus-decided flow rate is converted to an output electric signal and is transmitted to flow rate control means, and the flow rate of the purge gas is controlled by an electromagnet valve or the like.
  • the invention can apply to a vacuum pump which includes a shaft and a motor for driving the shaft and is used to pour and exhaust an extremely small amount of reaction produced gas in a semiconductor manufacturing apparatus or the like.
  • FIG. 1 It is an axial section view of a screw vacuum pump according to the invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP04792788A 2003-10-21 2004-10-21 Rotary dry vacuum pump Withdrawn EP1681469A1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003361153 2003-10-21
PCT/JP2004/015639 WO2005042979A1 (ja) 2003-10-21 2004-10-21 回転式ドライ真空ポンプ

Publications (1)

Publication Number Publication Date
EP1681469A1 true EP1681469A1 (en) 2006-07-19

Family

ID=34543742

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04792788A Withdrawn EP1681469A1 (en) 2003-10-21 2004-10-21 Rotary dry vacuum pump

Country Status (7)

Country Link
US (1) US20080038132A1 (ja)
EP (1) EP1681469A1 (ja)
JP (1) JPWO2005042979A1 (ja)
KR (1) KR20060087599A (ja)
CN (1) CN1871436A (ja)
TW (1) TW200525086A (ja)
WO (1) WO2005042979A1 (ja)

Cited By (4)

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WO2008022916A1 (de) 2006-08-23 2008-02-28 Oerlikon Leybold Vacuum Gmbh Verfahren zur abreaktion selbstentzündlicher stäube in einer vakuumpumpvorrichtung
WO2012076204A3 (fr) * 2010-12-10 2013-01-10 Ateliers Busch Sa Pompe à vide pour applications dans des machines d'emballage sous vide
WO2017140471A1 (de) * 2016-02-19 2017-08-24 Multivac Sepp Haggenmüller Se & Co. Kg Vakuumpumpe
WO2020188515A3 (en) * 2019-03-19 2020-11-26 Edwards, S.R.O. Control apparatus and method for supplying purge gas

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WO2010124250A1 (en) * 2009-04-24 2010-10-28 Ebara International Corporation Method to liquefy ammonia gas
JP5330896B2 (ja) * 2009-05-20 2013-10-30 三菱重工業株式会社 ドライ真空ポンプ
WO2010134427A1 (ja) * 2009-05-20 2010-11-25 三菱重工業株式会社 ドライ真空ポンプ
DE102009034837A1 (de) * 2009-07-27 2011-02-17 Gsi Helmholtzzentrum Für Schwerionenforschung Gmbh Gehäuse
GB0922564D0 (en) 2009-12-24 2010-02-10 Edwards Ltd Pump
NO332974B1 (no) * 2010-06-22 2013-02-11 Vetco Gray Scandinavia As Trykkutligningsbasert reguleringssystem for barriere- og smorefluider for en undersjoisk motor- og pumpemodul
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JPWO2005042979A1 (ja) 2007-05-10
TW200525086A (en) 2005-08-01
KR20060087599A (ko) 2006-08-02
US20080038132A1 (en) 2008-02-14
WO2005042979A1 (ja) 2005-05-12
CN1871436A (zh) 2006-11-29

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