EP1664738A1 - Dispositif de mesure de particule - Google Patents

Dispositif de mesure de particule

Info

Publication number
EP1664738A1
EP1664738A1 EP04764723A EP04764723A EP1664738A1 EP 1664738 A1 EP1664738 A1 EP 1664738A1 EP 04764723 A EP04764723 A EP 04764723A EP 04764723 A EP04764723 A EP 04764723A EP 1664738 A1 EP1664738 A1 EP 1664738A1
Authority
EP
European Patent Office
Prior art keywords
sensor
fluid
particle counter
throttle
medium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04764723A
Other languages
German (de)
English (en)
Inventor
Jörg KLEBER
Andreas Busch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hydac Filtertechnik GmbH
Original Assignee
Hydac Filtertechnik GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=34352955&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1664738(A1) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Hydac Filtertechnik GmbH filed Critical Hydac Filtertechnik GmbH
Priority to EP12001991.4A priority Critical patent/EP2479553A3/fr
Publication of EP1664738A1 publication Critical patent/EP1664738A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N35/00Automatic analysis not limited to methods or materials provided for in any single one of groups G01N1/00 - G01N33/00; Handling materials therefor
    • G01N35/10Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices
    • G01N35/1095Devices for transferring samples or any liquids to, in, or from, the analysis apparatus, e.g. suction devices, injection devices for supplying the samples to flow-through analysers
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/06Investigating concentration of particle suspensions
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/1031Investigating individual particles by measuring electrical or magnetic effects
    • G01N15/12Investigating individual particles by measuring electrical or magnetic effects by observing changes in resistance or impedance across apertures when traversed by individual particles, e.g. by using the Coulter principle
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1404Handling flow, e.g. hydrodynamic focusing
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N3/00Investigating strength properties of solid materials by application of mechanical stress
    • G01N3/56Investigating resistance to wear or abrasion
    • G01N3/567Investigating resistance to wear or abrasion by submitting the specimen to the action of a fluid or of a fluidised material, e.g. cavitation, jet abrasion
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N33/00Investigating or analysing materials by specific methods not covered by groups G01N1/00 - G01N31/00
    • G01N33/26Oils; Viscous liquids; Paints; Inks
    • G01N33/28Oils, i.e. hydrocarbon liquids
    • G01N33/2888Lubricating oil characteristics, e.g. deterioration
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N15/14Optical investigation techniques, e.g. flow cytometry
    • G01N15/1404Handling flow, e.g. hydrodynamic focusing
    • G01N15/1409Handling samples, e.g. injecting samples
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/10Investigating individual particles
    • G01N2015/1024Counting particles by non-optical means

Definitions

  • the invention relates to a device for particle measurement with a particle counter, in which an evaluable sensor signal is generated by means of a sensor which responds to the presence of particles in a measuring zone through which a fluid stream of a viscous medium flows, wherein before the fluid stream enters the sensor Measuring zone of the particle counter by means of an adjustment device, the inlet pressure for the viscose medium can be adjusted.
  • a particle counter in this regard is described by way of example in EP-B-0427 908.
  • the known solution is a particle counter working according to the darkening method, in particular for counting opaque particles in a fluid flow of a hydraulic or lubrication system, with a light barrier, the light beam of which penetrates a measuring channel for the fluid transversely to the channel in the longitudinal direction and one of the emp - Receiver of the evaluation electronics connected downstream of the light barrier.
  • the known solution is characterized in that the light exit surface of the light barrier is formed by the end surface of an illumination phase and the light entry surface by the end surface of a receiver phase.
  • the end surface of the illumination phase is arranged in a first boundary surface of the measurement channel and the end surface of the receiver phase, which is arranged concentrically to this end surface, as a measurement zone in a second boundary surface of the measurement channel parallel to the first limit area. net.
  • the lighting phase and the receiver phase are embedded relative to one another and immovably in relation to the measuring channel and protected from moisture in a sensor body which also contains the receiver of the light barrier.
  • the relevant particle counter is well suited for rough industrial use and is not very susceptible to faults.
  • the inlet pressure for the viscous medium can be adjusted by means of an adjusting device before the fluid flow enters the sensor measuring zone of the particle counter.
  • the known adjusting device is preferably designed as a pressure reduction unit and contains a throttle valve and a pressure valve.
  • the sensor is connected on the input side with a fluid-carrying line to the pressure reduction unit as an adjusting device.
  • DE-C-197 35 066 also discloses an evaluation method for a particle counter and a device for carrying out the method, a sensor of the particle counter responding to the presence of particles in a measuring zone through which a fluid stream flows, thereby causing a Sensor signal is generated, which is processed by means of a signal processing device and converted into a display value taking into account at least one calibration factor, the conditioning of the sensor signal being carried out in such a way that the individual residence times of the particles in the measuring zone are determined within a predetermined period of time and by Summation of the dwell times a sum signal is formed and this is used taking into account the at least one calibration factor to represent the display value.
  • the device for performing the measuring method has a signal processing device with a comparator circuit, a clock and with a summing device, for example in the form of a pulse counter to form the sum signal.
  • DE-A-41 10 231 discloses another generic measuring device for determining the dirt particle content of liquids, in particular hydraulic oils, in which liquid is continuously drawn off into a flow line of the measuring device (sensor) and, via this, a dirt particle counter for generating Particle readings can be supplied.
  • the known solution is characterized by a flow measuring device (sensor) arranged in the flow line, through which the withdrawn liquid flows, for generating flow measurement values, and by a computer combining the particle and flow measurement values for calculating a degree of contamination related to a predeterminable volume unit.
  • a check valve is also arranged on the inlet or inlet side of the sensor, as well as an additional pressure accumulator connected downstream and a flow regulator.
  • the relevant pressure-setting device for the viscous medium on the inlet side avoids an interruption in operation when the temperature falls below a certain minimum system pressure and enables the flow to be adjusted to the nominal value of the dirt particle counter.
  • the volume flow of the fluid medium to be analyzed must be within a defined range, for example between 20 to 200 ml / min, using a particle counter as a sensor device.
  • the lower limit is determined by the fact that when the temperature falls below this, the particles sediment in the fluid flow, on the inflow side (feed line) to the Sensor, which on the one hand leads to obstacles to the measurement with increasing sedimentation, and on the other hand, since the sedimented particles can no longer be detected as contamination by the sensor, false statements are made and thus an incorrect assessment of the quality of the fluid.
  • the specified upper volume flow limit of up to 200 ml / min. results in the fact that the signals generated by the dirt particles in the measuring zone of the sensor become shorter and shorter with increasing flow velocity and the signals are correspondingly damped by the limited bandwidth of the downstream measuring circuits and thus the particle size is incorrectly determined.
  • the object of the invention is to further improve the known devices for particle measurement in such a way that the disadvantages described no longer occur, in particular that they are functionally reliable at low manufacturing costs
  • Device is obtained which provides improved measurements for a fluid stream loaded with particles (contaminants).
  • a relevant object is achieved by a device with the features of claim 1 in its entirety.
  • the adjusting device is arranged on the outflow side of the sensor and / or in the branch to it, there is the possibility, depending on the viscosity of the Fluids (medium) to generate an inlet pressure suitable for particle measurement on the particle counter with a sensor.
  • the temperature-dependent viscosity of the fluid can be compensated in a wide range in a cost-effective and reliable manner in such a way that the volume flow remains constant over a wide range, with the result that it maintains defined ranges for which the respective particle counter with its sensor is measuring is designed.
  • the input pressure for the fluid medium can be specified in such a way that the gaseous particles in question are dissolved in the fluid before the measurement, so that they are no longer recognized by the particle counter as harmful contamination components, which would otherwise also falsify the measurement result.
  • a spring-loaded check valve or a throttle in the secondary branch serves as an adjusting device on the outflow side of the sensor.
  • the related inputs Actuators can be operated in a functionally reliable manner and are inexpensively available on the market in a large number of embodiments.
  • a filter unit is arranged in the fluid direction upstream of the throttle in the secondary branch to the sensor. With the relevant filter unit in the secondary flow, contaminants can be filtered out of the fluid circuit, so that the particle counter is relieved. Due to the elimination of a large number of particles that tend to sediment by filtration, the device according to the invention can then be used longer.
  • the check valve is arranged in the fluid circuit in the direction of flow of the medium behind a branch point at which the secondary branch with the throttle in the main branch with the sensor of the particle counter on the latter Outflow side opens.
  • the inlet pressure for the particle counter can be adapted to the temperature-dependent viscosity via the spring-loaded check valve, with the result that the pressure in the measuring cell is increased in order to be able to better dissolve the air bubbles in the system that are disturbing the measurement in the fluid.
  • the adjusting device has a line section of predeterminable length on the inflow side of the sensor.
  • the conductor piece can preferably be between a further branch point of the secondary branch be arranged with the throttle and the sensor on its inflow side.
  • the optical particle counter would detect the gas or air entry as harmful contamination for the fluid due to the different refractive indices between air and medium (oil), which would lead to an incorrect assessment of the quality of the fluid medium would lead.
  • the senor of the particle counter is preferably provided with a temperature control, in particular heating device, there is the possibility, even at low outside temperatures, of heating the medium in such a way that a significant and desired volume flow is achieved.
  • the temperature control or heating device is preferably arranged outside the actual sensor of the particle counter in order to help prevent the sensor and its measuring zone from being adversely affected.
  • FIG. 1 to 4 show four different embodiments of the sensor device according to the invention on the basis of corresponding circuit diagrams.
  • the device shown there has a fluid tank 10, the tank contents of which are exposed to the ambient pressure in the form of a fluid 12, for example in the form of a hydraulic medium. Gas bubbles, in particular in the form of air bubbles 14, can be embedded within the fluid 12, for example by foaming processes when operating a hydraulic system or the like.
  • a hydraulic pump 16 designed as a constant pump
  • fluid 12 is removed from the tank 10 via a fluid line 18 and brought to the inflow side 20 of the particle counter 22.
  • an adjusting device 28 is connected to an associated fluid line 26, which leads back to the tank.
  • the inlet pressure for the viscous medium 12 can be adapted to the temperature-dependent viscosity before the fluid flow enters the sensor measuring zone of the particle counter 22. Accordingly, it is possible to use the setting device 28 to keep the volume flow of the fluid to be analyzed for the particle counter 22 within its predefinable range limits, for example between 20 and 200 ml / min.
  • the predeterminable volume flow can thus rule out the risk that, due to an insufficient volume flow, the can sediment dirt particles and that if the volume flow is too high, the particle size is incorrectly determined due to signal damping.
  • the setting device 28 allows the air bubbles 14 shown in FIG.
  • a setting device 28 for the solution according to FIG. 1 is a spring-loaded check valve 30 which can be operated or maintained in a functionally reliable and cost-effective manner. Depending on which volume flow you want to supply to the particle counter 22, the corresponding nominal diameters of the check valve 30 and its spring strengths must then be selected and specified.
  • FIG. 1 the basic structure according to FIG. 1 is essentially preserved, so that the same reference numerals are used for the following exemplary embodiments as in FIG. 1. Furthermore, the following embodiments are only explained insofar as they essentially differ from the first embodiment according to FIG. 1.
  • the particle counter 22 is in turn connected in a main branch 32, and in the bypass to the particle counter 22 and to the main branch 32, a secondary branch 34 with a throttle 36 is connected therein.
  • the fluid-carrying line of the secondary branch 34 opens into the main branch 32 in the form of two branch points 38, 40.
  • the throttle 36 used is characterized in that it has a cross-sectional constriction in which the length of its opening is significantly lent is larger than the diameter. Due to the friction occurring during the flow, the flow through the throttle 36 is viscosity-dependent.
  • the arrangement in question realizes a type of flow divider and, because of the same characteristic curve characteristic of the viscosity-dependent throttle 36, an input pressure for the particle counter 22 can be generated such that nine parts of the fluid flow cross the throttle 36 via the flow divider and part of the particle counter ( Contamination sensor) 22.
  • the particle counter 22 can be designed to be structurally small for low volume flows, which helps to save installation space and costs for making the particle counter 22 available. Also with the relevant solution In turn, gases that are harmful to measurement technology can be released in the fluid flow, in particular if, according to the illustration in FIG. 4, the spring-loaded check valve 30 in the flow direction behind the further second branch point 40 is set in accordance with the illustration in FIG. Furthermore, the process of gas dissolving in the fluid can be further improved if, as shown in FIGS. 3 and 4, a line piece 42 in the manner of a calming section is used on the inflow side 20 between the hydraulic pump 16 and the particle counter 22.
  • the arrangement in question avoids the collecting containers known in the prior art, which serve on the one hand to collect the gas bubbles and to release them to the environment, and on the other hand in the sense of a hydraulic circulation the inflow and outflow of the fluid to be transported to enable. If one provides in the known solutions that the flow speed of the fluid 12 in the hydraulic circuit is lower than the speed at which the collected gas bubbles rise in the container, a development is thus Gassing is reached and the particle counter connected in the hydraulic circuit does not come into contact with the gas or air bubbles, which are harmful to the measurement technology.
  • the solution known in this respect is complex to implement in terms of apparatus technology, and the efficiency of the known systems is markedly reduced in view of the small flow velocities mentioned for the fluid to be used.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Pathology (AREA)
  • Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Dispersion Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Food Science & Technology (AREA)
  • Medicinal Chemistry (AREA)
  • Measuring Volume Flow (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Measuring Fluid Pressure (AREA)
  • Fluid-Pressure Circuits (AREA)

Abstract

La présente invention concerne un dispositif comprenant un compteur de particules (22) dans lequel un capteur, qui est sensible à la présence de particules (14) dans une zone de mesure traversée par un courant fluidique d'un milieu visqueux (12), permet de produire un signal de capteur qui peut être analysé. Avant l'entrée du courant fluidique dans la zone de mesure du capteur du compteur de particules (22), la pression d'entrée pour le milieu visqueux (12) peut être réglée au moyen d'un dispositif de réglage (28). Etant donné que le dispositif de réglage (28) est placé sur le côté sortie (24) du capteur et/ou dans un embranchement latéral (34) à celui-ci, afin d'adapter la pression d'entrée à la viscosité du milieu (12) dépendant de la température, il est possible de produire une pression d'entrée adaptée à la mesure de particule au niveau du compteur de particules, à l'aide d'un capteur, en fonction de la viscosité du fluide (milieu).
EP04764723A 2003-09-19 2004-09-02 Dispositif de mesure de particule Withdrawn EP1664738A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP12001991.4A EP2479553A3 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particules adapté au réglage de la pression d'entrée

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10343457A DE10343457C5 (de) 2003-09-19 2003-09-19 Vorrichtung zur Partikelmessung
PCT/EP2004/009764 WO2005038434A1 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particule

Related Child Applications (1)

Application Number Title Priority Date Filing Date
EP12001991.4A Division EP2479553A3 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particules adapté au réglage de la pression d'entrée

Publications (1)

Publication Number Publication Date
EP1664738A1 true EP1664738A1 (fr) 2006-06-07

Family

ID=34352955

Family Applications (2)

Application Number Title Priority Date Filing Date
EP12001991.4A Withdrawn EP2479553A3 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particules adapté au réglage de la pression d'entrée
EP04764723A Withdrawn EP1664738A1 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particule

Family Applications Before (1)

Application Number Title Priority Date Filing Date
EP12001991.4A Withdrawn EP2479553A3 (fr) 2003-09-19 2004-09-02 Dispositif de mesure de particules adapté au réglage de la pression d'entrée

Country Status (3)

Country Link
EP (2) EP2479553A3 (fr)
DE (1) DE10343457C5 (fr)
WO (1) WO2005038434A1 (fr)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102005016761A1 (de) * 2005-04-11 2006-10-12 Mahle International Gmbh Partikelzähler für Fremdpartikel in einem Flüssigkeitsstrom
DE102008048956A1 (de) * 2008-09-25 2010-04-01 Repower Systems Ag Verfahren zum Überwachen eines Getriebes einer Windenergieanlage
DE102009048271A1 (de) * 2009-10-05 2011-04-07 Robert Bosch Gmbh Vorrichtung zur Partikelmessung in stark mit Gas, insbesondere Luft beladenem Medium
DE102011056093B3 (de) * 2011-12-06 2013-04-11 Kenersys Gmbh Verfahren und System zur Überwachung eines Getriebes einer Windenergieanlage und entsprechende Windenergieanlage
DE102016223221A1 (de) * 2016-11-23 2018-05-24 Filtration Group Gmbh Verfahren und Vorrichtung zum Ermitteln von Feststoffpartikeln in einem Flüssigkeitsstrom
DE102017008580A1 (de) * 2017-09-13 2019-03-14 Hydac Filter Sytems Gmbh Filteraggregat
DE102020007053A1 (de) 2020-11-19 2022-05-19 Hydac Fluidtechnik Gmbh Prüfvorrichtung

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952580A (en) 1975-06-19 1976-04-27 J. I. Case Company Apparatus for counting particle contamination in a liquid
US4164137A (en) 1978-06-02 1979-08-14 Clark Equipment Company Method of measuring volume of air entrained in hydraulic fluids
US4181009A (en) 1978-04-24 1980-01-01 Clark Equipment Company Apparatus for counting particle contamination in a liquid
JPS63144235A (ja) 1986-12-05 1988-06-16 Horiba Ltd 微粒子カウンタ−
DE4110231A1 (de) * 1991-03-28 1992-10-01 Knecht Filterwerke Gmbh Messeinrichtung zum bestimmen des schmutzpartikelanteils von fluessigkeiten
EP0602416A1 (fr) * 1992-12-14 1994-06-22 Becton, Dickinson and Company Méthode de régulation d'un cytomètre à écoulement avec fluide entraîne par aspiration
US6299723B1 (en) * 1998-05-29 2001-10-09 Lsi Logic Corporation Anti-airlock apparatus for filters

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03108635A (ja) * 1989-09-22 1991-05-08 Kondo Kogyo Kk 気中微粒子監視報知機
DE8912584U1 (de) * 1989-10-24 1989-12-07 Hydac Technology GmbH, 6603 Sulzbach Partikelzähler
DE19735066C1 (de) * 1997-08-13 1999-01-28 Hydac Filtertechnik Gmbh Auswerteverfahren für einen Partikelzähler und Vorrichtung zum Durchführen des Verfahrens
DE19957592A1 (de) * 1999-11-30 2001-06-07 Mahle Filtersysteme Gmbh Ölsystem, insbesondere Hydrauliksystem oder Schmierölsystem
DE10129100A1 (de) * 2001-06-16 2003-01-09 Hydac Filtertechnik Gmbh Vorrichtung zum Trennen von Fluidgemischen

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3952580A (en) 1975-06-19 1976-04-27 J. I. Case Company Apparatus for counting particle contamination in a liquid
US4181009A (en) 1978-04-24 1980-01-01 Clark Equipment Company Apparatus for counting particle contamination in a liquid
US4164137A (en) 1978-06-02 1979-08-14 Clark Equipment Company Method of measuring volume of air entrained in hydraulic fluids
JPS63144235A (ja) 1986-12-05 1988-06-16 Horiba Ltd 微粒子カウンタ−
DE4110231A1 (de) * 1991-03-28 1992-10-01 Knecht Filterwerke Gmbh Messeinrichtung zum bestimmen des schmutzpartikelanteils von fluessigkeiten
EP0602416A1 (fr) * 1992-12-14 1994-06-22 Becton, Dickinson and Company Méthode de régulation d'un cytomètre à écoulement avec fluide entraîne par aspiration
US6299723B1 (en) * 1998-05-29 2001-10-09 Lsi Logic Corporation Anti-airlock apparatus for filters

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See also references of WO2005038434A1

Also Published As

Publication number Publication date
WO2005038434A1 (fr) 2005-04-28
EP2479553A2 (fr) 2012-07-25
DE10343457B3 (de) 2005-04-21
DE10343457C5 (de) 2012-01-12
EP2479553A3 (fr) 2014-06-25

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