EP1655494A2 - Vacuum pump system and signal generating method - Google Patents

Vacuum pump system and signal generating method Download PDF

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Publication number
EP1655494A2
EP1655494A2 EP05022633A EP05022633A EP1655494A2 EP 1655494 A2 EP1655494 A2 EP 1655494A2 EP 05022633 A EP05022633 A EP 05022633A EP 05022633 A EP05022633 A EP 05022633A EP 1655494 A2 EP1655494 A2 EP 1655494A2
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EP
European Patent Office
Prior art keywords
vacuum pump
comparison
pump system
processing unit
values
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Granted
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EP05022633A
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German (de)
French (fr)
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EP1655494A3 (en
EP1655494B1 (en
Inventor
Jochen BÖTTCHER
Wolfgang Losch
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Definitions

  • the invention relates to an apparatus and a method for operating a vacuum pumping system.
  • Vacuum pumps are important components of many systems for the production of products or for the analysis of substances.
  • the manufacturing processes have become increasingly complex and highly efficient, which is why the demands on the vacuum pumps have increased.
  • high flexibility and good operability with high reliability are required today.
  • vacuum pumps have a variety of sensors that monitor the operating condition. These include Temperaturfiihler, tachometer and many more. Even those variables that are determined without a sensor characterize the state of the pump, for example error codes that are stored in a fault memory, or the switching states of heating elements, etc.
  • the integration of the vacuum pump and safe operation require that the measured values of the Sensors and the other sizes constantly monitored and control signals can be generated.
  • control signals it is possible for the user of the pump to integrate the pump into his system. In particular, they allow a response to a changing operating condition of the pump.
  • the control signals are generated by first detecting those quantities which characterize the operating state of the vacuum pump system. Subsequently, these quantities are compared with default values. The result of this comparison can then logically be linked to other such results and form an end result. From this, a control signal is then generated and made available on the control line. In the prior art, this is done in a fixed predetermined form, ie when making the pump is determined which links are possible.
  • the object of the invention is to provide a vacuum pumping system in which the adaptation of the generation of control signals is more flexible and overall cost-saving.
  • the generation of the control signals within the vacuum pumping system is adaptable. This allows the vacuum pumping system to be adapted to current needs without having to consult the manufacturer. The adjustment is on-site and can be done by the user of the vacuum pumping system or a service person, which saves overall working time for vacuum pump system owners and vacuum pump system manufacturers. A cost-intensive variety of variants is avoided because each variant by adaptation on site from the same basic type of vacuum pump system emerges.
  • the user or service employee can also use an adjustment that has been created by a third party.
  • the setting can be made virtually also far away from the vacuum pump system.
  • the setting can also be spent by a third party via a suitable medium (eg Internet) directly on the vacuum pump system, without having to be on site
  • the inventive method is shown in its simplest form in Fig. 1.
  • Fig. 1a There are at least two output values (left side of FIG. 1a), wherein in the example shown here, the speed is a variable characterizing the state of the vacuum pump and a default value. These two values are compared with one another in the "compare” step, thereby generating a comparison result.
  • the values are checked for equality, but any comparison operator can be used, including "greater than”, “less than”, “less than or equal to”, “greater than or equal to”.
  • the comparison produces a result in the form of a logical state.
  • This state is then used to generate a signal, for example, a light-emitting diode is driven, a signal line is set to a logic level (eg 5V or 0V) or a logic value is transmitted via a bus system.
  • a logic level eg 5V or 0V
  • a logic value is transmitted via a bus system.
  • the choice of the user creates an individual graph that corresponds to a configuration of the vacuum pumping system.
  • several variables characterizing the state of the vacuum pump can also be used. This is shown in Figure 1b, where two measured temperatures 1 and 2 are compared. Shown is the comparison "Temperature 1 greater than temperature 2". This results again a comparison result "result 2", from which a signal 2 is generated.
  • the user of the vacuum pumping system is enabled to choose the type and number of comparisons himself.
  • the invention gives the user the opportunity to choose the type and number of comparisons, which is not the case with a prefabricated configuration as in the prior art.
  • FIG. 2 The higher flexibility and efficiency of the method according to the invention is illustrated in FIG. 2 using the example of a more complex system.
  • the error code is a binary number representing whether a component is working properly or not.
  • the error code may also include timeouts or similar errors. According to the invention, the user can now subject these detected variables to his chosen comparisons.
  • FIG. 2 Another example of a user-selected scheme of comparisons and logical operations is shown in FIG. Compared to the example in Figure 2, the comparison of the temperature 1 has been omitted.
  • a masking of the error code was made, i. only part of the error code is used for comparison with the default "0101", for example the last four digits or "bits" (underlined).
  • the masking can be done by bitwise AND, bitwise OR, bitwise EXCLUSIVE-OR or similar bitwise operations.
  • the result of the masking is still a value and only becomes a logical state through the following comparison. It is also new with respect to FIG. 2 that the result 1 of the logical combination of the results of the two comparisons in lines 1 and 2 is used as the basis for the comparison in line 3.
  • FIG. 4 shows a vacuum pumping system designed to carry out the method according to the invention. Shown are a turbomolecular pump 41, a roughing pump 42, a state processing unit 43 and a tool 44.
  • the rotor 50 of the turbomolecular pump is rotated by a drive 45 and rotatably supported by bearings 51.
  • Temperature sensors 46 and 47 monitor the temperature of various areas of the turbomolecular pump.
  • a valve 48 serves, for example, for flooding the turbomolecular pump.
  • the state processing unit 43 monitors the state of the turbomolecular pump. For this purpose it is in connection with its sensors, for example the temperature sensors, the drive, the flood valve and the bearing sensors 52.
  • the state processing unit includes electrical and electronic circuits 53 for performing the method steps "compare” and "generate a signal".
  • the generated signals are on the Lines 56 are provided, 56 may also be a digital bus system or a display unit.
  • the choice of the type of comparisons can be made in different ways. It is conceivable, for example, in discrete electronic circuits that are provided on the board selector switch with which individual parts of the circuit (each corresponding to individual comparisons) can be switched off or bypasses can be unlocked. In another form, it might be possible to exchange electronic boards containing circuits with comparisons. Depending on the need, another board would be used. In vacuum pump systems with microprocessors, the comparisons can be made by a program on the microprocessor.
  • the user or another operator of the pump according to the invention is able to determine the active parts of the software and thus the comparisons.
  • the tool 44 which may be formed as part of the state processing unit 43 or as a stand-alone device, enables the user to select the type of comparisons and logical operations. It is conceivable that the configuration of the comparisons is carried out in the aid 44, while the aid 44 and the state processing unit 43 are separated from one another. Through a connection or a transmission medium, the new configuration is then transferred to the state processing unit.
  • this tool is designed as a computer, which is in contact via a bus system with the state processing unit and exchanges data.
  • the state processing unit may include one or more physical transducers 54, for example in the form of one or more analog-to-digital converters.
  • the state processing unit 43 or the aid 44 may include a test unit 55. This unit checks the user-selected comparisons and logic operations for logical correctness.
  • the state processing unit may include a microprocessor that performs at least a portion of the functions of the electrical and electronic circuits 53, the physical converter 54, and the test unit 55.
  • the state processing unit 43 is part of the turbomolecular pump 41. It may also be part of the control electronics, the drive and possibly existing magnetic bearing controls.

Abstract

The method involves comparing two values for generating comparison results, where the mode and the number of comparison are changeable using an auxiliary unit (44). The two values are magnitudes or default values that represent the operating condition of a vacuum pump system. Control signals representing system condition are generated based on the comparison results by a condition processing unit (43). An independent claim is also included for a vacuum pump system.

Description

Die Erfindung betrifft eine Vorrichtung und ein Verfahren zum Betrieb eines Vakuumpumpsystems.The invention relates to an apparatus and a method for operating a vacuum pumping system.

Vakuumpumpen sind wichtige Bestandteile vieler Systeme zur Erzeugung von Produkten oder zur Analyse von Stoffen. Die Fertigungsprozesse sind zunehmend komplex und hocheffizient geworden, weshalb auch die Anforderungen an die Vakuumpumpen gestiegen sind. Insbesondere sind heute eine hohe Flexibilität und gute Bedienbarkeit bei hoher Betriebssicherheit gefragt.
Um diesen Anforderungen zu genügen, besitzen Vakuumpumpen eine Vielzahl von Sensoren, die den Betriebszustand überwachen. Hierzu zählen Temperaturfiihler, Drehzahlmesser und viele andere mehr. Auch solche Größen, die ohne Sensor bestimmt werden, charakterisieren den Zustand der Pumpe, beispielsweise Fehlercodes, die in einem Fehlerspeicher abgespeichert werden, oder die Schaltzustände von Heizelementen u.ä.. Die Integration der Vakuumpumpe und ein sicherer Betrieb erfordern, dass die Messwerte der Sensoren und die weiteren Größen ständig überwacht und Steuersignale generiert werden können. Mit Hilfe dieser Steuersignale ist es dem Anwender der Pumpe möglich, die Pumpe in sein System zu integrieren. Insbesondere erlauben sie eine Reaktion auf einen sich ändernden Betriebszustand der Pumpe.
Die Steuersignale werden erzeugt, indem zunächst diejenigen Größen erfasst werden, die den Betriebszustand des Vakuumpumpsystems kennzeichnen. Anschließend werden diese Größen mit Vorgabewerten verglichen. Das Ergebnis dieses Vergleichs kann dann logisch mit anderen solchen Ergebnissen verknüpft werden und bilden ein Endergebnis. Aus diesem wird dann ein Steuersignal generiert und auf der Steuerleitung zur Verfügung gestellt.
Im Stand der Technik geschieht dies in fest vorgegebenen Form, d.h. bei Herstellung der Pumpe wird festgelegt, welche Verknüpfungen möglich sind.Vacuum pumps are important components of many systems for the production of products or for the analysis of substances. The manufacturing processes have become increasingly complex and highly efficient, which is why the demands on the vacuum pumps have increased. In particular, high flexibility and good operability with high reliability are required today.
To meet these requirements, vacuum pumps have a variety of sensors that monitor the operating condition. These include Temperaturfiihler, tachometer and many more. Even those variables that are determined without a sensor characterize the state of the pump, for example error codes that are stored in a fault memory, or the switching states of heating elements, etc. The integration of the vacuum pump and safe operation require that the measured values of the Sensors and the other sizes constantly monitored and control signals can be generated. With the aid of these control signals, it is possible for the user of the pump to integrate the pump into his system. In particular, they allow a response to a changing operating condition of the pump.
The control signals are generated by first detecting those quantities which characterize the operating state of the vacuum pump system. Subsequently, these quantities are compared with default values. The result of this comparison can then logically be linked to other such results and form an end result. From this, a control signal is then generated and made available on the control line.
In the prior art, this is done in a fixed predetermined form, ie when making the pump is determined which links are possible.

Dies macht die Pumpen erheblich unflexibel, denn die Steuersignale sind nur auf die Fälle angepasst, die bei der Herstellung ersichtlich waren. Treten Sonderfälle auf, muss die Software durch den Hersteller der Pumpe geändert werden, wodurch natürlich Kosten und Zeitverlust entstehen. Für den Benutzer der Pumpe ist überdies meist nicht klar, wie die Sensorsignale zu Steuersignalen verknüpft werden, er kann nicht davon ausgehen, dass das ausgegebene Steuersignal seinen Anforderungen entspricht.This makes the pumps considerably inflexible, because the control signals are adapted only to the cases that were evident in the production. If special cases occur, the software must be changed by the manufacturer of the pump, which of course costs and time is lost. For the user of the pump, moreover, it is usually not clear how the sensor signals are linked to control signals, he can not assume that the output control signal corresponds to his requirements.

Die Aufgabe der Erfindung ist es, ein Vakuumpumpsystem zu schaffen, in welchem die Anpassung der Erzeugung von Steuersignalen flexibler und insgesamt kostensparend ist.The object of the invention is to provide a vacuum pumping system in which the adaptation of the generation of control signals is more flexible and overall cost-saving.

Gelöst wird diese Aufgabe durch das Signalerzeugungsverfahren nach Anspruch 1 und die Vorrichtung nach Anspruch 9.
Entgegen dem Stand der Technik ist die Erzeugung der Steuersignale innerhalb des Vakuumpumpsystems anpassbar. Damit kann das Vakuumpumpsystem an aktuelle Bedürfnisse ausgerichtet werden, ohne dass der Hersteller konsultiert werden muss. Die Einstellung geschieht vor Ort und kann durch den Benutzer des Vakuumpumpsystems oder einem Servicemitarbeiter erfolgen, was insgesamt Arbeitszeit bei Vakuumpumpsystembesitzer und Vakuumpumpsystemhersteller spart. Eine kostenintensive Variantenvielfalt wird vermieden, da jede Variante durch Anpassung vor Ort aus demselben Grundtyp des Vakuumpumpsystems hervorgeht.This object is achieved by the signal generation method according to claim 1 and the device according to claim 9.
Contrary to the prior art, the generation of the control signals within the vacuum pumping system is adaptable. This allows the vacuum pumping system to be adapted to current needs without having to consult the manufacturer. The adjustment is on-site and can be done by the user of the vacuum pumping system or a service person, which saves overall working time for vacuum pump system owners and vacuum pump system manufacturers. A cost-intensive variety of variants is avoided because each variant by adaptation on site from the same basic type of vacuum pump system emerges.

Der Benutzer bzw. Servicemitarbeiter kann auch eine Anpassung verwenden, die ein Dritter erstellt hat. In dem Fall kann die Einstellung quasi auch fern der Vakuumpumpsystems erfolgen. Oder als Kombination kann die Einstellung auch durch einen Dritten per geeignetem Medium (z.B. Internet) direkt auf das Vakuumpumpsystem verbracht werden, ohne dass jemand vor Ort sein mussThe user or service employee can also use an adjustment that has been created by a third party. In this case, the setting can be made virtually also far away from the vacuum pump system. Or as a combination, the setting can also be spent by a third party via a suitable medium (eg Internet) directly on the vacuum pump system, without having to be on site

Die Erfindung soll im Folgenden anhand der Figuren näher erläutert werden.

Fig. 1:
Schematische Darstellung des Verfahrens in der einfachsten Form.
Fig. 2:
Komplexere Verarbeitung mehrerer Größen zur Erzeugung mehrerer Steuersignale.
Fig. 3:
Maskierung und eine Rückkopplungsschleife in der ein Endergebnis zurück auf den Eingang gekoppelt wird.
Fig. 4:
Vakuumpumpsystem mit einer Zustandsverarbeitungseinheit und einem Hilfsmittel zur Durchführung der Änderung an der Erzeugung der Steuersignale.
The invention will be explained in more detail below with reference to FIGS.
Fig. 1:
Schematic representation of the process in the simplest form.
Fig. 2:
More complex processing of multiple sizes to generate multiple control signals.
3:
Masking and a feedback loop in which an end result is coupled back to the input.
4:
A vacuum pumping system comprising a state processing unit and an aid for making the change to the generation of the control signals.

Das erfindungsgemäße Verfahren ist in seiner einfachsten Form in Fig. 1 dargestellt. Es liegen mindestens zwei Ausgangswerte vor (linke Seite der Fig. 1a), wobei es sich im hier gezeigten Beispiel um die Drehzahl als eine den Zustand der Vakuumpumpe kennzeichnende Größe und einen Vorgabewert handelt. Diese beiden Werte werden im Schritt "Vergleichen" miteinander verglichen und damit ein Vergleichsergebnis erzeugt. Im gezeigten Beispiel werden die Werte auf Gleichheit überprüft, es kann hier aber jeder Vergleichsoperator angewendet werden, also auch "größer als", "kleiner als", "kleiner gleich", "größer gleich" und "ungleich". Durch den Vergleich entsteht ein Ergebnis in Form eines logischen Zustands. Dieser Zustand wird dann zur Erzeugung eines Signals genutzt, beispielsweise wird eine Leuchtdiode angesteuert, eine Signalleitung auf einen logischen Pegel (z.B. 5V oder 0V) gesetzt oder ein Logikwert über ein Bussystem übertragen. Durch die Wahl des Benutzers entsteht ein individuelles Schaubild, dass einer Konfiguration des Vakuumpumpsystems entspricht.
Als Ausgangswerte für den Vergleichsschritt können auch mehrere den Zustand der Vakuumpumpe kennzeichnende Größen dienen. Dies ist in Figur 1b gezeigt, wo zwei gemessene Temperaturen 1 und 2 miteinander verglichen werden. Dargestellt ist der Vergleich "Temperatur 1 größer als Temperatur 2". Daraus resultiert wiederum ein Vergleichsergebnis "Ergebnis 2", woraus ein Signal 2 erzeugt wird. Erfindungsgemäß wird der Benutzer des Vakuumpumpsystems in die Lage versetzt, die Art und die Anzahl der Vergleiche selbst zu wählen. Dadurch kann er kann beispielsweise selbst den Vergleich "größer als" in Fig. 1b durch einen anderen Vergleich, z.B. "kleiner als", ersetzen. In diesem Beispiel gibt die Erfindung dem Benutzer die Möglichkeit, Art und Anzahl der Vergleiche zu wählen, was bei einer vorgefertigten Konfiguration wie im Stand der Technik nicht zutrifft.The inventive method is shown in its simplest form in Fig. 1. There are at least two output values (left side of FIG. 1a), wherein in the example shown here, the speed is a variable characterizing the state of the vacuum pump and a default value. These two values are compared with one another in the "compare" step, thereby generating a comparison result. In the example shown, the values are checked for equality, but any comparison operator can be used, including "greater than", "less than", "less than or equal to", "greater than or equal to". The comparison produces a result in the form of a logical state. This state is then used to generate a signal, for example, a light-emitting diode is driven, a signal line is set to a logic level (eg 5V or 0V) or a logic value is transmitted via a bus system. The choice of the user creates an individual graph that corresponds to a configuration of the vacuum pumping system.
As output values for the comparison step, several variables characterizing the state of the vacuum pump can also be used. This is shown in Figure 1b, where two measured temperatures 1 and 2 are compared. Shown is the comparison "Temperature 1 greater than temperature 2". This results again a comparison result "result 2", from which a signal 2 is generated. According to the invention, the user of the vacuum pumping system is enabled to choose the type and number of comparisons himself. As a result, for example, he himself can replace the comparison "greater than" in FIG. 1b with another comparison, eg "less than". In this example, the invention gives the user the opportunity to choose the type and number of comparisons, which is not the case with a prefabricated configuration as in the prior art.

Die höhere Flexibilität und Effizienz des erfindungsgemäßen Verfahrens wird in Fig. 2 am Beispiel eines komplexeres Systems veranschaulicht. Im ersten Schritt ganz links in der Abbildung werden mehrere Größen erfasst, hier die Drehzahl, ein Fehlercode und eine Temperatur 1. Der Fehlercode ist eine binäre Zahl, die repräsentiert, ob eine Komponente fehlerfrei funktioniert oder nicht. Im Fehlercode können auch Zeitüberschreitungen oder ähnliche Fehler enthalten sein. Erfindungsgemäß kann der Benutzer nun diese erfassten Größen von ihm gewählten Vergleichen unterziehen. In der Figur von oben nach unten sind dies: der Vergleich der Drehzahl mit der Vorgabe "50 Hz" durch den Vergleichsoperator "größer als"; der Vergleich der Drehzahl mit dem der Vorgabe "250 Hz" mit dem Vergleichsoperator "kleiner als"; der Vergleich des Fehlercodes mit der Vorgabe "0100101" mit dem Vergleichsoperator "ist gleich" und in der unteren Zeile der Vergleich der Temperatur 1 mit der Vorgabe "100°C" mit dem Vergleichsoperator "größer als". Im nächsten Schritt werden die Ergebnisse der Vergleiche zumindest teilweise logisch miteinander verknüpft, wobei die Art und Anzahl der logischen Verknüpfungen ebenfalls und damit in einem weiteren Aspekt der Erfindung, vom Benutzer gewählt werden. Gezeigt ist im Beispiel der Figur 2, das die Vergleiche der ersten beiden Zeilen durch "und" miteinander verknüpft werden. Dieses Ergebnis wird anschließend mit dem Ergebnis der Zeile 3 durch "oder" verknüpft, wodurch ein Ergebnis 1 entsteht, aus dem dann in der Folge das Signal 1 erzeugt wird. Im Beispiel wird das Ergebnis des Vergleichs der Temperatur 1 mit der Vorgabe direkt als Ergebnis 2 zur Erzeugung des Signals 2 benutzt.The higher flexibility and efficiency of the method according to the invention is illustrated in FIG. 2 using the example of a more complex system. In the first step on the far left of the figure, several quantities are detected, here the speed, an error code and a temperature 1. The error code is a binary number representing whether a component is working properly or not. The error code may also include timeouts or similar errors. According to the invention, the user can now subject these detected variables to his chosen comparisons. In the figure from top to bottom, these are: the comparison of the speed with the specification "50 Hz" by the comparison operator "greater than"; the comparison of the speed with the specification "250 Hz" with the comparison operator "less than"; the comparison of the error code with the specification "0100101" with the comparison operator "is the same" and in the bottom line the comparison of the temperature 1 with the specification "100 ° C" with the comparison operator "greater than". In the next step, the results of the comparisons are at least partially logically linked with each other, and the type and number of logic operations are also selected by the user in a further aspect of the invention. Shown in the example of FIG. 2, the comparisons of the first two lines are linked to one another by "and". This result is then linked to the result of line 3 by "or", resulting in a result of 1, which then generates the signal 1 in the sequence becomes. In the example, the result of the comparison of the temperature 1 with the specification is used directly as result 2 for the generation of the signal 2.

Eine weiteres Beispiel eines vom Benutzer gewählten Schemas von Vergleichen und logischen Verknüpfungen ist in Fig. 3 gezeigt. Gegenüber dem Beispiel in Figur 2 wurde der Vergleich der Temperatur 1 weggelassen. Zusätzlich wurde eine Maskierung des Fehlercodes vorgenommen, d.h. nur ein Teil des Fehlercodes wird für den Vergleich mit der Vorgabe "0101" benutzt, beispielsweise die letzten vier Stellen bzw. "bits" (unterstrichen). Die Maskierung kann durch bitweises UND, bitweises ODER, bitweises EXKLUSIV-ODER oder ähnliche bitweise Operationen erfolgen. Das Ergebnis der Maskierung ist immer noch ein Wert und wird erst durch den nachfolgenden Vergleich zu einem logischen Zustand. Ebenfalls neu gegenüber Figur 2 ist, dass das Ergebnis 1 der logischen Verknüpfung der Ergebnisse der beiden Vergleiche in den Zeilen 1 und 2 als Grundlage des Vergleiches in Zeile 3 benutzt wird.Another example of a user-selected scheme of comparisons and logical operations is shown in FIG. Compared to the example in Figure 2, the comparison of the temperature 1 has been omitted. In addition, a masking of the error code was made, i. only part of the error code is used for comparison with the default "0101", for example the last four digits or "bits" (underlined). The masking can be done by bitwise AND, bitwise OR, bitwise EXCLUSIVE-OR or similar bitwise operations. The result of the masking is still a value and only becomes a logical state through the following comparison. It is also new with respect to FIG. 2 that the result 1 of the logical combination of the results of the two comparisons in lines 1 and 2 is used as the basis for the comparison in line 3.

Figur 4 zeigt ein Vakuumpumpsystem, das zur Durchführung des erfindungsgemäße Verfahrens gestaltet ist. Gezeigt sind eine Turbomolekularpumpe 41, eine Vorvakuumpumpe 42, eine Zustandsverarbeitungseinheit 43 und ein Hilfsmittel 44. Der Rotor 50 der Turbomolekularpumpe wird durch einen Antrieb 45 in Drehung versetzt und durch Lager 51 drehbar unterstützt. Temperatursensoren 46 und 47 überwachen die Temperatur von verschiedenen Bereichen der Turbomolekularpumpe. Ein Ventil 48 dient beispielsweise zum Fluten der Turbomolekularpumpe. Die Zustandsverarbeitungseinheit 43 überwacht den Zustand der Turbomolekularpumpe. Dazu steht sie in Verbindung mit deren Sensoren, beispielsweise den Temperatursensoren, dem Antrieb, dem Flutventil und den Lagersensoren 52. Die Zustandsverarbeitungseinheit beinhaltet elektrische und elektronische Schaltungen 53 zur Durchführung der Verfahrensschritte "Vergleichen" und "Erzeugen eines Signals". Die erzeugten Signale werden auf den Leitungen 56 zur Verfügung gestellt, es kann sich bei 56 auch um ein digitales Bussystem oder eine Anzeigeeinheit handeln. Die Wahl der Art der Vergleiche kann auf verschiedene Art geschehen. Denkbar ist beispielsweise bei diskreten elektronischen Schaltungen, dass auf der Platine Wählschalter vorgesehen sind, mit denen einzelne Teile der Schaltung (jeweils entsprechend einzelnen Vergleichen) abgeschaltet oder Umgehungen freigeschaltet werden können. In einer anderen Form könnte es möglich sein, elektronische Platinen auszutauschen, die Schaltungen mit Vergleichen enthalten. Je nach Bedürfnis würde eine andere Platine eingesetzt. Bei Vakuumpumpsystemen mit Mikroprozessoren können die Vergleiche durch ein Programm auf dem Mikroprozessor durchgeführt werden. Der Benutzer oder ein anderer Bediener der Pumpe ist erfindungsgemäß in der Lage, die aktiven Teile der Software und damit die Vergleiche zu bestimmen.
Das Hilfsmittel 44, welches als Bestandteil der Zustandsverarbeitungseinheit 43 oder als eigenständiges Gerät ausgebildet sein kann, versetzt den Benutzer in die Lage, die Art der Vergleiche und logischen Verknüpfungen zu wählen. Denkbar ist, dass die Konfiguration der Vergleiche im Hilfsmittel 44 durchgeführt wird, während Hilfsmittel 44 und Zustandsverarbeitungseinheit 43 voneinander getrennt sind. Durch eine Verbindung oder ein Übertragungsmedium wird dann die neue Konfiguration in die Zustandsverarbeitungseinheit übertragen.FIG. 4 shows a vacuum pumping system designed to carry out the method according to the invention. Shown are a turbomolecular pump 41, a roughing pump 42, a state processing unit 43 and a tool 44. The rotor 50 of the turbomolecular pump is rotated by a drive 45 and rotatably supported by bearings 51. Temperature sensors 46 and 47 monitor the temperature of various areas of the turbomolecular pump. A valve 48 serves, for example, for flooding the turbomolecular pump. The state processing unit 43 monitors the state of the turbomolecular pump. For this purpose it is in connection with its sensors, for example the temperature sensors, the drive, the flood valve and the bearing sensors 52. The state processing unit includes electrical and electronic circuits 53 for performing the method steps "compare" and "generate a signal". The generated signals are on the Lines 56 are provided, 56 may also be a digital bus system or a display unit. The choice of the type of comparisons can be made in different ways. It is conceivable, for example, in discrete electronic circuits that are provided on the board selector switch with which individual parts of the circuit (each corresponding to individual comparisons) can be switched off or bypasses can be unlocked. In another form, it might be possible to exchange electronic boards containing circuits with comparisons. Depending on the need, another board would be used. In vacuum pump systems with microprocessors, the comparisons can be made by a program on the microprocessor. The user or another operator of the pump according to the invention is able to determine the active parts of the software and thus the comparisons.
The tool 44, which may be formed as part of the state processing unit 43 or as a stand-alone device, enables the user to select the type of comparisons and logical operations. It is conceivable that the configuration of the comparisons is carried out in the aid 44, while the aid 44 and the state processing unit 43 are separated from one another. Through a connection or a transmission medium, the new configuration is then transferred to the state processing unit.

Denkbar ist auch, dass dieses Hilfsmittel als Rechner ausgestaltet ist, der über ein Bussystem mit der Zustandsverarbeitungseinheit in Kontakt steht und Daten austauscht.It is also conceivable that this tool is designed as a computer, which is in contact via a bus system with the state processing unit and exchanges data.

Die Zustandsverarbeitungseinheit kann einen oder mehrere Physikalische Wandler 54 enthalten, beispielsweise in Form eines oder mehrerer Analog-to-Digital-Converter.The state processing unit may include one or more physical transducers 54, for example in the form of one or more analog-to-digital converters.

Weiterhin kann die Zustandsverarbeitungseinheit 43 oder das Hilfsmittel 44 eine Prüfeinheit 55 beinhalten. Diese Einheit überprüft die vom Benutzer gewählten Vergleiche und logischen Verknüpfungen auf logische Richtigkeit.Furthermore, the state processing unit 43 or the aid 44 may include a test unit 55. This unit checks the user-selected comparisons and logic operations for logical correctness.

In einer Ausführungsform kann die Zustandsverarbeitungseinheit einen Mikroprozessor enthalten, der mindestens einen Teil der Funktionen der elektrischen und elektronischen Schaltungen 53, des physikalischen Wandlers 54 und der Prüfeinheit 55 übernimmt.In one embodiment, the state processing unit may include a microprocessor that performs at least a portion of the functions of the electrical and electronic circuits 53, the physical converter 54, and the test unit 55.

In einer weiteren Ausführungsform ist die Zustandsverarbeitungseinheit 43 Bestandteil der Turbomolekularpumpe 41. Sie kann auch Teil der Steuerelektronik sein, die Antrieb und eventuell vorhandene Magnetlager ansteuert.In a further embodiment, the state processing unit 43 is part of the turbomolecular pump 41. It may also be part of the control electronics, the drive and possibly existing magnetic bearing controls.

Claims (11)

Verfahren zum Erzeugen mindestens eines den Zustand eines Vakuumpumpsystems kennzeichnenden Signals, welches als Verfahrensschritte beinhaltet: - den Vergleich mindestens zweier Werte zur Erzeugung eines Vergleichsergebnisses, wobei die Werte den Betriebszustand des Vakuumpumpsystems kennzeichnende Größen oder Vorgabewerte sind, und - Erzeugen eines Signals aus dem Vergleichsergebnis, dadurch gekennzeichnet, dass die Art des Vergleiches veränderbar ist.Method for generating at least one signal characterizing the state of a vacuum pump system, which comprises as method steps: comparing at least two values to produce a comparison result, the values representing the operating state of the vacuum pump system being quantities or default values, and Generating a signal from the comparison result, characterized in that the type of comparison is variable. Verfahren nach Anspruch 1, dadurch gekennzeichnet, dass es als weiteren Schritt das logische Verknüpfen von logischen Zuständen umfasst, wobei die logischen Zustände Vergleichsergebnisse oder Vorgabewerte sind.A method according to claim 1, characterized in that it comprises, as a further step, the logical linking of logic states, wherein the logic states are comparison results or default values. Verfahren nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass es als weiteren Schritt das Maskieren der den Betriebszustand des Vakuumpumpsystems kennzeichnende Größen umfasst.A method according to claim 1 or 2, characterized in that it comprises, as a further step, the masking of the operating state of the vacuum pump system characteristic variables. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass es als weiteren Schritt das Physikalische Wandeln von logischen Zuständen umfasst.Method according to one of the preceding claims, characterized in that it comprises, as a further step, the physical conversion of logic states. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass mindestens eines der Vergleichsergebnisse als Ausgangswert für wenigstens einen Vergleich dient.Method according to one of the preceding claims, characterized in that at least one of the comparison results serves as output value for at least one comparison. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Einstellungen auf logische Richtigkeit getestet werden.Method according to one of the preceding claims, characterized in that the settings are tested for logical correctness. Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Vakuumpumpsystem Sensoren (46, 47) und eine Zustandsverarbeitungseinheit (43) aufweist.Method according to one of the preceding claims, characterized in that the vacuum pumping system comprises sensors (46, 47) and a state processing unit (43). Verfahren nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass das Vakuumpumpsystem Mittel (44) zum Wählen der Art und Anzahl der Vergleiche umfasst.Method according to one of the preceding claims, characterized in that the vacuum pumping system comprises means (44) for selecting the type and number of comparisons. Vakuumpumpsystem umfassend eine Vakuumpumpe (41), Sensoren (46, 47) und eine Zustandsverarbeitungseinheit (43), wobei die Zustandsverarbeitungseinheit mindestens eines den Zustand eines Vakuumpumpsystems kennzeichnenden Signals erzeugt, wobei - mindestens zwei Werte zur Erzeugung eines Vergleichsergebnisses verglichen werden, wobei die Werte den Betriebszustand des Vakuumpumpsystems kennzeichnende Größen oder Vorgabewerte sind, und - das Signal aus dem Vergleichsergebnis erzeugt wird dadurch gekennzeichnet, dass die Art des Vergleiches veränderbar ist.A vacuum pumping system comprising a vacuum pump (41), sensors (46, 47) and a state processing unit (43), said state processing unit generating at least one signal indicative of the condition of a vacuum pumping system, wherein at least two values are compared in order to produce a comparison result, the values representing the operating state of the vacuum pump system being quantities or default values, and - The signal is generated from the comparison result characterized in that the type of comparison is variable. Vakuumpumpsystem nach Anspruch 9, dadurch gekennzeichnet, dass die Zustandsverarbeitungseinheit mindestens einen Mikroprozessor enthält, der mindestens einen Teil der Funktionen der elektrischen und elektronischen Schaltungen (53), des physikalischen Wandlers (54) und der Prüfeinheit (55) übernimmt.Vacuum pump system according to claim 9, characterized in that the state processing unit includes at least one microprocessor which takes over at least part of the functions of the electrical and electronic circuits (53), the physical converter (54) and the test unit (55). Vakuumpumpsystem nach Anspruch 9 oder 10, dadurch gekennzeichnet, dass Zustandsverarbeitungseinheit (43) und Hilfsmittel (44) voneinander trennbar sind.Vacuum pump system according to claim 9 or 10, characterized in that state processing unit (43) and auxiliary means (44) are separable from each other.
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EP2758670B1 (en) * 2011-09-20 2018-10-31 Grundfos Holding A/S Pump unit
EP3462032A1 (en) * 2011-09-20 2019-04-03 Grundfos Holding A/S Pump unit
EP3456979A1 (en) 2017-09-18 2019-03-20 Pfeiffer Vacuum Gmbh Vacuum device and method for generating an item of information concerning the operation of a vacuum device

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