EP1655494A3 - Vacuum pump system and signal generating method - Google Patents

Vacuum pump system and signal generating method Download PDF

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Publication number
EP1655494A3
EP1655494A3 EP05022633.1A EP05022633A EP1655494A3 EP 1655494 A3 EP1655494 A3 EP 1655494A3 EP 05022633 A EP05022633 A EP 05022633A EP 1655494 A3 EP1655494 A3 EP 1655494A3
Authority
EP
European Patent Office
Prior art keywords
vacuum pump
signal generating
pump system
generating method
pumping system
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05022633.1A
Other languages
German (de)
French (fr)
Other versions
EP1655494A2 (en
EP1655494B1 (en
Inventor
Jochen BÖTTCHER
Wolfgang Losch
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1655494A2 publication Critical patent/EP1655494A2/en
Publication of EP1655494A3 publication Critical patent/EP1655494A3/en
Application granted granted Critical
Publication of EP1655494B1 publication Critical patent/EP1655494B1/en
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D15/00—Control, e.g. regulation, of pumps, pumping installations or systems
    • F04D15/0066—Control, e.g. regulation, of pumps, pumping installations or systems by changing the speed, e.g. of the driving engine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D27/00—Control, e.g. regulation, of pumps, pumping installations or pumping systems specially adapted for elastic fluids
    • F04D27/001—Testing thereof; Determination or simulation of flow characteristics; Stall or surge detection, e.g. condition monitoring

Abstract

Ein Vakuumpumpsystem und ein Signalerzeugungsverfahren werden vorgestellt, bei dem aus den Zustand des Vakuumpumpsystems kennzeichnende Größen mittels Vergleiche und logischen Verknüpfungen Signale erzeugt werden. Der Benutzer des Vakuumpumpsystems wird in die Lage versetzt, selbst die Art und Anzahl dieser Vergleiche und logischen Verknüpfungen zu wählen.

Figure imgaf001
A vacuum pumping system and a signal generation method are presented in which signals indicative of the state of the vacuum pumping system are generated by means of comparisons and logic operations. The user of the vacuum pumping system will be able to choose for himself the type and number of these comparisons and logic operations.
Figure imgaf001
EP05022633.1A 2004-11-09 2005-10-18 Vacuum pump system and signal generating method Active EP1655494B1 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE102004054004A DE102004054004A1 (en) 2004-11-09 2004-11-09 Vacuum pump system and signal generation method

Publications (3)

Publication Number Publication Date
EP1655494A2 EP1655494A2 (en) 2006-05-10
EP1655494A3 true EP1655494A3 (en) 2013-05-22
EP1655494B1 EP1655494B1 (en) 2019-03-20

Family

ID=35759230

Family Applications (1)

Application Number Title Priority Date Filing Date
EP05022633.1A Active EP1655494B1 (en) 2004-11-09 2005-10-18 Vacuum pump system and signal generating method

Country Status (2)

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EP (1) EP1655494B1 (en)
DE (1) DE102004054004A1 (en)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006034478A1 (en) * 2006-07-26 2008-01-31 Oerlikon Leybold Vacuum Gmbh Method for determining a statement about a state of a turbomolecular pump and a turbomolecular pump
DE102010005458A1 (en) * 2010-01-23 2011-07-28 Oerlikon Leybold Vacuum GmbH, 50968 Rolling bearing assembly and method for the early detection of bearing damage in a rolling bearing assembly
EP2573403B1 (en) * 2011-09-20 2017-12-06 Grundfos Holding A/S Pump
EP3456979B1 (en) 2017-09-18 2022-03-30 Pfeiffer Vacuum Gmbh Vacuum device and method for generating an item of information concerning the operation of a vacuum device

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020094277A1 (en) * 1993-07-16 2002-07-18 Helix Technology Corporation Electronically controlled vacuum pump
WO2003040568A1 (en) * 2001-11-09 2003-05-15 Leybold Vakuum Gmbh Vacuum pump

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4237971B4 (en) * 1992-11-11 2004-05-06 Unaxis Deutschland Holding Gmbh Vacuum pump with converter
JP2002295398A (en) * 2001-03-28 2002-10-09 Boc Edwards Technologies Ltd Device and method for protecting turbo molecular pump

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US20020094277A1 (en) * 1993-07-16 2002-07-18 Helix Technology Corporation Electronically controlled vacuum pump
WO2003040568A1 (en) * 2001-11-09 2003-05-15 Leybold Vakuum Gmbh Vacuum pump

Also Published As

Publication number Publication date
DE102004054004A1 (en) 2006-05-11
EP1655494A2 (en) 2006-05-10
EP1655494B1 (en) 2019-03-20

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