EP1626179A2 - Vacuum pump - Google Patents

Vacuum pump Download PDF

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Publication number
EP1626179A2
EP1626179A2 EP05016491A EP05016491A EP1626179A2 EP 1626179 A2 EP1626179 A2 EP 1626179A2 EP 05016491 A EP05016491 A EP 05016491A EP 05016491 A EP05016491 A EP 05016491A EP 1626179 A2 EP1626179 A2 EP 1626179A2
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EP
European Patent Office
Prior art keywords
vacuum pump
flange
pump according
rotor shafts
active components
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP05016491A
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German (de)
French (fr)
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EP1626179A3 (en
EP1626179B1 (en
Inventor
Jürgen JUNG
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Publication of EP1626179A2 publication Critical patent/EP1626179A2/en
Publication of EP1626179A3 publication Critical patent/EP1626179A3/en
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Publication of EP1626179B1 publication Critical patent/EP1626179B1/en
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/16—Combinations of two or more pumps ; Producing two or more separate gas flows

Definitions

  • turbomolecular pumps have been used in the generation of high vacuum.
  • the pumping action in these pumps is created by discs with vanes mounted alternately on the rotor and stator.
  • the pumping speed is a decisive characteristic of these pumps and depends inter alia on the diameter of the rotor disks and the speed of the rotor.
  • Some applications require a very high pumping speed.
  • large volumes of particle accelerators are evacuated.
  • the pumping speed can be 5000 liters per minute.
  • These turbomolecular pumps are technically not easy.
  • One problem is, for example, that a very high kinetic energy is stored in the rotor with the large diameter, which can be released in unfavorable cases in case of a malfunction.
  • Another problem is the difficult rotor dynamics, because the mass distribution in a short rotor with a large pulley diameter makes the moment of inertia for the rotation about different axes similar. This makes the rotating system more unstable.
  • the object is to develop a vacuum pump with very high pumping speed, which overcomes the aforementioned disadvantages.
  • the solution should also be inexpensive.
  • the vacuum pump has a flange, a plurality of gas inlet openings within this flange and a plurality of rotor shafts carrying rotating pump-active components, which achieve the pumping action together with stationary pump-active components.
  • the vacuum pump is very inexpensive to implement.
  • the standard components can be pre-assembled and then pushed into the common pump top.
  • a round flange geometry makes it possible to use the vacuum pump as a replacement for existing high suction capacity vacuum pumps. It is conceivable, of course, to adapt the flange to any predetermined by the vacuum chamber geometries.
  • FIG. 1 shows a vacuum pump according to the invention in section.
  • the vacuum pump 1 has a flange 2. Within this flange are several gas inlet openings 4. One or more gas outlet openings 5 allow the emission of the gas to be pumped.
  • Several rotor shafts 6 each carry rotating pump-active components 7. Together with the stationary pump-active components 8, these achieve the pumping effect as soon as the rotor shafts are set in rotation.
  • the flange 2 is arranged on a common housing upper part 10.
  • the housing is completed by at least one lower housing part 9.
  • Drive means 11 serve to set the rotor shafts in rotation. This may be an electric motor, the stator is mounted in the housing and the rotor elements sitting on the respective rotor shaft. The necessary electrical supply is carried out by the controller 12.
  • bearing means serve 13. These may be, for example, oil or grease-lubricated ball bearings. Likewise gas storage are conceivable. Except for the special shaped upper housing part 10, the other components mentioned can come from the series production of pumps with smaller pumping speed and only one rotor.
  • the second figure shows some conceivable flange geometries.
  • a plurality of gas inlet openings 4 are arranged with the same diameter in a common circular flange.
  • the diameter of the pump-active rotating components sitting on the different rotor shafts is the same.
  • FIG. 2b A further embodiment is shown in FIG. 2b, in which a plurality of round gas inlet openings 4 with different diameters are arranged in the common circular flange.
  • FIG. 2c Another embodiment is shown in Figure 2c, in which the common flange is no longer round but square.
  • the vacuum pump can be optimally adapted to the chamber to be evacuated.
  • Other, not shown here flange geometries are conceivable.
  • FIG. 3 shows two different flange shapes in cross section.
  • the web 14 is formed retracted between the gas inlet openings 4, whereby a gas inlet 3 is formed, with which the gas inlet openings 4 are directly connected.
  • the web 14 is pulled up to the flange height and is flush with it.
  • the rotor shafts 6 are at least part of their axial length in the common housing upper part 10 which carries the flange 2.
  • a plurality of controls 12 are provided, which are in contact with each other.
  • This contact can be made for example via electrical lines.
  • the contact is used, for example, operating parameters such as rotational frequency of the rotor shaft, etc. exchange.
  • the single controller or the plurality of controllers is designed in a further embodiment so that it serves to control the backing pump system.
  • the backing pump system consists of one or more vacuum pumps, at least one of which compresses the gas to atmospheric pressure.
  • the regulation includes, for example, the adjustment of the pumping speed of the individual or a plurality of backing pumps.
  • the rotor shafts are offset in frequency offset in rotation. That is, at the beginning, when the rotor shafts have not yet reached the final rotational frequency, the rotor shafts each rotate at different frequencies. Between the start of the vacuum pump with stationary rotor shafts and the achievement of the operating speed, the rotor shafts run at any time with mutually different rotational frequencies. In this way it can be avoided that all the rotor shafts rotate simultaneously with a frequency which lies in a resonance range. Loads caused by a mutual rocking of the vibrations resulting from the resonances can thus be avoided.
  • the rotor shafts are arranged at least partially parallel. This allows a very cost-effective and easy installation, since the lower housing parts and the packages of rotating and stationary pump-active components can be pre-assembled as assemblies. Only the upper housing part 10 with its flange 2 is then placed on these assemblies already assembled.
  • This embodiment can be further developed in that not only the axes of the individual rotor shafts are parallel to each other.
  • the flange defines a surface and thus a perpendicular surface normal to it.
  • Auskhrungsform arises when these surface normal and at least a portion of the rotor shafts are parallel to each other.
  • At least one of the bearing means is a magnetic bearing. It may be a passive or an active magnetic bearing, which supports the rotation in the radial or axial direction.
  • the rotating 7 and standing 8 pump-active components are designed as wings so that it is a turbomolecular vacuum pump.

Abstract

Vacuum pump (1) has flange (2), at least two gas inlets (4), at least one gas outlet, at least two rotary shafts (6) each carrying rotating pump parts (7), which are situated opposite respective stationary pump parts (8). It has a lower housing part (9), an upper housing part (10) which has the flange, and drive means which make the rotary shafts rotate. All the gas inlets are inside the flange and the flange is located within the shared upper housing.

Description

Seit vielen Jahrzehnten werden Turbomolekularpumpen bei der Erzeugung von Hochvakuum eingesetzt. Die Pumpwirkung wird in dieser Pumpen durch Scheiben mit Flügeln erzeugt, die abwechselnd auf Rotor und Stator angebracht sind. Das Saugvermögen ist eine maßgebliche Kenngröße dieser Pumpen und hängt unter anderem von dem Durchmesser der Rotorscheiben und der Drehzahl des Rotors ab. Einige Anwendungen erfordern ein sehr hohes Saugvermögen. Beispielsweise werden große Volumina an Teilchenbeschleunigern evakuiert. Hier finden sehr große Turbomolekularpumpen Anwendung, das Saugvermögen kann bei 5000 Litern pro Minute liegen.
Diese Turbomolekularpumpen sind technisch nicht einfach. Ein Problem ist beispielsweise, dass in dem Rotor mit dem großen Durchmesser eine sehr hohe kinetische Energie gespeichert wird, die in ungünstigen Fällen bei einer Fehlfunktion freigesetzt werden kann. Ein anderes Problem ist die schwierige Rotordynamik, denn die Massenverteilung bei einem kurzen Rotor mit großem Scheibendurchmesser sorgt dafür, dass die Trägheitsmomente für die Rotation um verschiedene Achsen ähnlich werden. Damit wird das rotierende System instabiler.For many decades turbomolecular pumps have been used in the generation of high vacuum. The pumping action in these pumps is created by discs with vanes mounted alternately on the rotor and stator. The pumping speed is a decisive characteristic of these pumps and depends inter alia on the diameter of the rotor disks and the speed of the rotor. Some applications require a very high pumping speed. For example, large volumes of particle accelerators are evacuated. Here are very large turbomolecular pumps application, the pumping speed can be 5000 liters per minute.
These turbomolecular pumps are technically not easy. One problem is, for example, that a very high kinetic energy is stored in the rotor with the large diameter, which can be released in unfavorable cases in case of a malfunction. Another problem is the difficult rotor dynamics, because the mass distribution in a short rotor with a large pulley diameter makes the moment of inertia for the rotation about different axes similar. This makes the rotating system more unstable.

Ausgehend von diesem Stand der Technik ist die Aufgabe, eine Vakuumpumpe mit sehr hohem Saugvermögen zu entwickeln, die die vorgenannten Nachteile überwindet. Die Lösung soll zudem kostengünstig sein.Based on this prior art, the object is to develop a vacuum pump with very high pumping speed, which overcomes the aforementioned disadvantages. The solution should also be inexpensive.

Diese Aufgabe wird gelöst durch die Merkmale des ersten Anspruches. Die weiteren Ansprüche stellen Ausgestaltungen der Erfindung dar.
Gemäß der Erfindung besitzt die Vakuumpumpe einen Flansch, mehrere Gaseintrittsöffnungen innerhalb dieses Flansches und mehrere Rotorwellen, die rotierende pumpaktive Bauteile tragen, welche zusammen mit stehenden pumpaktiven Bauteilen die Pumpwirkung erzielen.This object is achieved by the features of the first claim. The further claims constitute embodiments of the invention.
According to the invention, the vacuum pump has a flange, a plurality of gas inlet openings within this flange and a plurality of rotor shafts carrying rotating pump-active components, which achieve the pumping action together with stationary pump-active components.

Durch diese Maßnahme wird es möglich, ein hohes Saugvermögen zu realisieren und gleichzeitig den Durchmesser der Rotorscheiben im Vergleich zur Rotorlänge so zu gestalten, dass die Trägheitsmomente eine stabile Rotation um die Rotorwellenachse begünstigen. Da für die einzelnen Rotorwellen, deren Lager- und Antriebsmittel und den pumpaktiven Bauteilen auf Standardkomponenten zurückgegriffen werden kann und nur ein gemeinsames Pumpenoberteil als neues Bauteil hinzukommt, ist die Vakuumpumpe sehr kostengünstig zu realisieren. So können zur Montage zunächst die Standardkomponenten vormontiert und anschließend in das gemeinsame Pumpenoberteil geschoben werden. Eine runde Flanschgeometrie erlaubt es, die Vakuumpumpe als Ersatz für bestehende Vakuumpumpen mit großem Saugvermögen zu verwenden. Denkbar ist natürlich, den Flansch an beliebige durch die Vakuumkammer vorgegebene Geometrien anzupassen.By this measure, it is possible to realize a high pumping speed and at the same time to make the diameter of the rotor discs in comparison to the rotor length so that the moments of inertia favor a stable rotation about the rotor shaft axis. Since it is possible to fall back on standard components for the individual rotor shafts, their bearing and drive means and the pump-active components and only a common pump shell is added as a new component, the vacuum pump is very inexpensive to implement. For assembly, the standard components can be pre-assembled and then pushed into the common pump top. A round flange geometry makes it possible to use the vacuum pump as a replacement for existing high suction capacity vacuum pumps. It is conceivable, of course, to adapt the flange to any predetermined by the vacuum chamber geometries.

Die erfindungsgemäße Gestaltung einer Vakuumpumpe soll anhand der Figuren näher erläutert werden.

  • Fig.1: Schnitt durch die erfindungs gemäße Vakuumpumpe
  • Fig.2: Verschiedene Flanschgeometrien in der Draufsicht von oben.
  • Fig.3: Zwei Flanschformen im Querschnitt.
The inventive design of a vacuum pump will be explained in more detail with reference to FIGS.
  • Fig.1: section through the fiction, contemporary vacuum pump
  • Fig.2: Different flange geometries in plan view from above.
  • Fig.3: Two flange shapes in cross section.

Figur 1 zeigt eine erfindungsgemäße Vakuumpumpe im Schnitt. Die Vakuumpumpe 1 besitzt einen Flansch 2. Innerhalb dieses Flansches befinden sind mehrere Gaseintrittsöffnungen 4. Eine oder mehrere Gasaustrittsöffnungen 5 erlauben den Ausstoß des abzupumpenden Gases. Mehrere Rotorwellen 6 tragen jeweils rotierende pumpaktive Bauteile 7. Zusammen mit den stehenden pumpaktiven Bauteilen 8 erzielen diese die Pumpwirkung, sobald die Rotorwellen in Drehung versetzt werden. Der Flansch 2 ist an einem gemeinsamen Gehäuseoberteil 10 angeordnet. Komplettiert wird das Gehäuse durch wenigstens ein Gehäuseunterteil 9. Antriebsmittel 11 dienen dazu, die Rotorwellen in Drehung zu versetzen. Hierbei kann es sich um einen elektrischen Motor handeln, dessen Stator im Gehäuse angebracht ist und dessen Rotorelemente auf der jeweiligen Rotorwelle sitzt. Die dazu notwendige elektrische Versorgung erfolgt durch die Steuerung 12. Um die Drehung der Wellen zu unterstützen, dienen Lagermittel 13. Dies können beispielsweise öl- oder fettgeschmierte Kugellager sein. Ebenso sind Gaslager denkbar. Bis auf das spezielle geformte Gehäuseoberteil 10 können die anderen genannten Komponenten aus der Serienfertigung von Pumpen mit kleinerem Saugvermögen und nur einem Rotor stammen.Figure 1 shows a vacuum pump according to the invention in section. The vacuum pump 1 has a flange 2. Within this flange are several gas inlet openings 4. One or more gas outlet openings 5 allow the emission of the gas to be pumped. Several rotor shafts 6 each carry rotating pump-active components 7. Together with the stationary pump-active components 8, these achieve the pumping effect as soon as the rotor shafts are set in rotation. The flange 2 is arranged on a common housing upper part 10. The housing is completed by at least one lower housing part 9. Drive means 11 serve to set the rotor shafts in rotation. This may be an electric motor, the stator is mounted in the housing and the rotor elements sitting on the respective rotor shaft. The necessary electrical supply is carried out by the controller 12. To assist the rotation of the shafts, bearing means serve 13. These may be, for example, oil or grease-lubricated ball bearings. Likewise gas storage are conceivable. Except for the special shaped upper housing part 10, the other components mentioned can come from the series production of pumps with smaller pumping speed and only one rotor.

Die zweite Figur zeigt einige denkbare Flanschgeometrien. In Teil a) sind mehrere Gaseintrittsöffnungen 4 mit gleichem Durchmesser in einem gemeinsamen runden Flansch angeordnet. In diesem Fall ist der Durchmesser der pumpaktiven rotierenden Bauteile, die auf den verschiedenen Rotorwellen sitzen, gleich.The second figure shows some conceivable flange geometries. In part a) a plurality of gas inlet openings 4 are arranged with the same diameter in a common circular flange. In this case, the diameter of the pump-active rotating components sitting on the different rotor shafts is the same.

Eine weitere Ausführungsform zeigt Figur 2b, in der im gemeinsamen runden Flansch mehrere runde Gaseintrittsöffnungen 4 mit unterschiedlichem Durchmesser angeordnet sind.A further embodiment is shown in FIG. 2b, in which a plurality of round gas inlet openings 4 with different diameters are arranged in the common circular flange.

Eine weitere Ausführungsform ist in Figur 2c dargestellt, bei der der gemeinsame Flansch nicht mehr rund sondern viereckig ist. Durch diese Maßnahme kann die Vakuumpumpe optimal an die auszupumpende Kammer angepasst werden.
Weitere, hier nicht gezeigte Flanschgeometrien sind denkbar.Another embodiment is shown in Figure 2c, in which the common flange is no longer round but square. By this measure, the vacuum pump can be optimally adapted to the chamber to be evacuated.
Other, not shown here flange geometries are conceivable.

Figur 3 zeigt zwei verschiedene Flanschformen im Querschnitt. In der Variante a) ist der Steg 14 zwischen den Gaseintrittsöffnungen 4 zurückgezogen ausgebildet, wodurch ein Gaseinlass 3 entsteht, mit dem die Gaseintrittsöffnungen 4 direkt verbunden sind. In der Variante b) ist der Steg 14 bis auf Flanschhöhe hochgezogen und schließt bündig mit diesem ab.FIG. 3 shows two different flange shapes in cross section. In variant a), the web 14 is formed retracted between the gas inlet openings 4, whereby a gas inlet 3 is formed, with which the gas inlet openings 4 are directly connected. In variant b), the web 14 is pulled up to the flange height and is flush with it.

In einer weiteren Ausführungsform befinden sich die Rotorwellen 6 zumindest mit einem Teil ihrer axialen Länge in dem gemeinsamen Gehäuseoberteil 10, das den Flansch 2 trägt.In a further embodiment, the rotor shafts 6 are at least part of their axial length in the common housing upper part 10 which carries the flange 2.

In einer weiteren Ausführungsform sind mehrere Steuerungen 12 vorgesehen, die miteinander in Kontakt stehen. Dieser Kontakt kann beispielsweise über elektrische Leitungen erfolgen. Der Kontakt dient beispielsweise dazu, Betriebsparameter wie Drehfrequenz der Rotorwellen u.ä. auszutauschen.In a further embodiment, a plurality of controls 12 are provided, which are in contact with each other. This contact can be made for example via electrical lines. The contact is used, for example, operating parameters such as rotational frequency of the rotor shaft, etc. exchange.

Die einzige Steuerung oder die Mehrzahl von Steuerungen ist in einer weiteren Ausführungsform so ausgestaltet, dass sie zur Regelung des Vorvakuumpumpsystems dient. Das Vorvakuumpumpsystem besteht aus einer oder mehreren Vakuumpumpen, von denen mindestens eine das Gas bis auf Atmosphärendruck verdichtet. Die Regelung umfasst beispielsweise die Einstellung des Saugvermögens der einzelnen oder Mehrzahl der Vorpumpen.The single controller or the plurality of controllers is designed in a further embodiment so that it serves to control the backing pump system. The backing pump system consists of one or more vacuum pumps, at least one of which compresses the gas to atmospheric pressure. The regulation includes, for example, the adjustment of the pumping speed of the individual or a plurality of backing pumps.

In einer weiteren Ausführungsform werden die Rotorwellen frequenzversetzt in Drehung versetzt. Das heißt zu Beginn, wenn die Rotorwellen noch nicht die endgültige Drehfrequenz erreicht haben, drehen sich die Rotorwellen jeweils mit unterschiedlichen Frequenzen. Zwischen dem Start der Vakuumpumpe mit stillstehenden Rotorwellen und dem Erreichen der Betriebsdrehzahl laufen die Rotorwellen zu jedem Zeitpunkt mit von einander verschiedenen Drehfrequenzen. Hierdurch kann vermieden werden, dass sich alle Rotorwellen gleichzeitig mit einer Frequenz drehen, die in einem Resonanzbereich liegt. Belastungen durch ein gegenseitiges Aufschaukeln der durch die Resonanzen entstehenden Schwingungen können somit vermieden werden.In a further embodiment, the rotor shafts are offset in frequency offset in rotation. That is, at the beginning, when the rotor shafts have not yet reached the final rotational frequency, the rotor shafts each rotate at different frequencies. Between the start of the vacuum pump with stationary rotor shafts and the achievement of the operating speed, the rotor shafts run at any time with mutually different rotational frequencies. In this way it can be avoided that all the rotor shafts rotate simultaneously with a frequency which lies in a resonance range. Loads caused by a mutual rocking of the vibrations resulting from the resonances can thus be avoided.

In einer weiteren Ausführungsform sind die Rotorwellen zumindest teilweise parallel angeordnet. Dies erlaubt eine sehr kostengünstige und einfach Montage, da die unteren Gehäuseteile und die Pakete aus rotierenden und stehenden pumpaktiven Bauteilen als Baugruppen vormontiert werden können. Auf diese bereits montierten Baugruppen wird dann nur noch das obere Gehäuseteil 10 mit seinem Flansch 2 gesetzt.In a further embodiment, the rotor shafts are arranged at least partially parallel. This allows a very cost-effective and easy installation, since the lower housing parts and the packages of rotating and stationary pump-active components can be pre-assembled as assemblies. Only the upper housing part 10 with its flange 2 is then placed on these assemblies already assembled.

Diese Ausführungsform kann dadurch weitergedacht werden, dass nicht nur die Achsen der einzelnen Rotorwellen parallel zu einander sind. Der Flansch definiert eine Fläche und damit eine auf ihr senkrecht stehende Flächennormale. Die weitergedachte Auskhrungsform entsteht, wenn diese Flächennormale und mindestens ein Teil der Rotorwellen parallel zu einander sind.This embodiment can be further developed in that not only the axes of the individual rotor shafts are parallel to each other. The flange defines a surface and thus a perpendicular surface normal to it. The further developed Auskhrungsform arises when these surface normal and at least a portion of the rotor shafts are parallel to each other.

In einer weiteren Ausführungsform ist wenigstens eines der Lagermittel ein Magnetlager. Dabei kann es sich um ein passives oder ein aktives Magnetlager handeln, welches die Drehung in radialer oder axialer Richtung unterstützt.In a further embodiment, at least one of the bearing means is a magnetic bearing. It may be a passive or an active magnetic bearing, which supports the rotation in the radial or axial direction.

In einer weiteren Ausführungsform sind die rotierenden 7 und stehenden 8 pumpaktiven Bauteile als Flügel derart ausgebildet, dass es sich um eine Turbomolekularvakuumpumpe handelt.In a further embodiment, the rotating 7 and standing 8 pump-active components are designed as wings so that it is a turbomolecular vacuum pump.

Claims (12)

Vakuumpumpe (1) mit einem Flansch (2), mindestens zwei Gaseintrittsöffnungen (4), mindestens einer Gasaustrittsöffnung (5), mindestens zwei Rotorwellen (6), die jeweils rotierende pumpaktive Bauteile (7) tragen, welche jeweils stehenden pumpaktiven Bauteilen (8) gegenüberstehen, mit mindestens einem unteren Gehäuseteil (9), einem den Flansch tragenden Gehäuseoberteil (10), mit Antriebsmitteln (11), welche die Rotorwellen (6) in Rotation versetzen, dadurch gekennzeichnet, dass sich alle Gaseintrittsöffnungen (4) innerhalb des Flansches (2) befinden und dass der Flansch (2) an einem gemeinsamen Gehäuseoberteil (10) angeordnet sind.Vacuum pump (1) with a flange (2), at least two gas inlet openings (4), at least one gas outlet opening (5), at least two rotor shafts (6), each carrying rotating pump-active components (7), each standing pump active components (8) with at least one lower housing part (9), an upper housing part (10) carrying the flange, with drive means (11) which set the rotor shafts (6) in rotation, characterized in that all the gas inlet openings (4) inside the flange (4) 2) are located and that the flange (2) on a common housing upper part (10) are arranged. Vakuumpumpe nach Anspruch 1, dadurch gekennzeichnet, dass alle Rotorwellen (6) wenigstens über einem Teil ihrer axialen Länge in einem gemeinsamen Gehäuseoberteil (10) angeordnet sind.Vacuum pump according to claim 1, characterized in that all the rotor shafts (6) are arranged at least over part of their axial length in a common housing upper part (10). Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass eine Steuerung (12) zur elektrischen Ansteuerung der Antriebsmittel (11) vorhanden ist.Vacuum pump according to claim 1 or 2, characterized in that a control (12) for the electrical control of the drive means (11) is present. Vakuumpumpe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass mehrere Steuerungen (12) zur elektrischen Ansteuerung der Antriebsmittel (11) vorhanden sind und miteinander in Kontakt stehen.Vacuum pump according to claim 1 or 2, characterized in that a plurality of controls (12) for the electrical control of the drive means (11) are present and are in contact with each other. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Steuerung (12) zur elektrischen Ansteuerung des Vorvakuumsystems dienen.Vacuum pump according to one of the preceding claims, characterized in that the controller (12) serve for the electrical control of the backing system. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Durchmesser der rotierenden pumpaktiven Bauteile (7) und die Durchmesser der stehenden pumpaktiven Bauteile (8) der verschiedenen Rotorwellen (6) gleich sind.Vacuum pump according to one of the preceding claims, characterized in that the diameter of the rotating pump-active components (7) and the diameters of the stationary pump-active components (8) of the different rotor shafts (6) are equal. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Rotorwellen (6) frequenzversetzt in Rotation versetzt werden.Vacuum pump according to one of the preceding claims, characterized in that the rotor shafts (6) are offset in frequency offset in rotation. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass mindestens ein Teil der Achsen der Vakuumpumpe, die durch Flächennormale und durch die Rotorwellen gegeben sind, parallel angeordnet sind.Vacuum pump according to one of the preceding claims, characterized in that at least a part of the axes of the vacuum pump, which are given by surface normal and by the rotor shafts, are arranged in parallel. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass mindestens eines der Lagermittel (13) ein Magnetlager ist.Vacuum pump according to one of the preceding claims, characterized in that at least one of the bearing means (13) is a magnetic bearing. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Flansch (2) kreisförmig ist.Vacuum pump according to one of the preceding claims, characterized in that the flange (2) is circular. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie eine Molekularvakuumpumpe ist.Vacuum pump according to one of the preceding claims, characterized in that it is a molecular vacuum pump. Vakuumpumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sie eine Turbomolekularvakuumpumpe ist.Vacuum pump according to one of the preceding claims, characterized in that it is a turbomolecular vacuum pump.
EP05016491.2A 2004-08-10 2005-07-29 Vacuum pump Active EP1626179B1 (en)

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DE102004038677.3A DE102004038677B4 (en) 2004-08-10 2004-08-10 vacuum pump

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EP1626179A2 true EP1626179A2 (en) 2006-02-15
EP1626179A3 EP1626179A3 (en) 2012-04-18
EP1626179B1 EP1626179B1 (en) 2013-10-23

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
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GB2469015A (en) * 2009-01-30 2010-10-06 Compair Uk Ltd Multi-stage centrifugal compression system
FR2984972A1 (en) * 2011-12-26 2013-06-28 Adixen Vacuum Products ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
EP3327293A1 (en) * 2016-11-23 2018-05-30 Pfeiffer Vacuum Gmbh Vacuum pump having multiple inlets

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DE102007027354A1 (en) * 2007-06-11 2008-12-18 Oerlikon Leybold Vacuum Gmbh Turbo molecular pump

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Cited By (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1992822A1 (en) 2007-05-15 2008-11-19 Agilent Technologies Inc Vacuum divider for differential pumping of a vacuum system
GB2469015A (en) * 2009-01-30 2010-10-06 Compair Uk Ltd Multi-stage centrifugal compression system
GB2469015B (en) * 2009-01-30 2011-09-28 Compair Uk Ltd Improvements in multi-stage centrifugal compressors
US9109603B2 (en) 2009-01-30 2015-08-18 Gardner Denver Deutschland Gmbh Multi-stage centrifugal compressors
FR2984972A1 (en) * 2011-12-26 2013-06-28 Adixen Vacuum Products ADAPTER FOR VACUUM PUMPS AND ASSOCIATED PUMPING DEVICE
WO2013098178A1 (en) * 2011-12-26 2013-07-04 Adixen Vacuum Products Adapter for vacuum pumps and associated pumping device
CN104024645A (en) * 2011-12-26 2014-09-03 普发真空有限公司 Adapter for vacuum pumps and associated pumping device
CN104024645B (en) * 2011-12-26 2016-09-07 普发真空有限公司 Adapter and relevant pumping installations for vavuum pump
US9970444B2 (en) 2011-12-26 2018-05-15 Pfeiffer Vacuum Gmbh Adapter for vacuum pumps and associated pumping device
EP3327293A1 (en) * 2016-11-23 2018-05-30 Pfeiffer Vacuum Gmbh Vacuum pump having multiple inlets
JP2018084231A (en) * 2016-11-23 2018-05-31 プファイファー・ヴァキューム・ゲーエムベーハー Vacuum pump

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JP2006052728A (en) 2006-02-23
EP1626179A3 (en) 2012-04-18
DE102004038677A1 (en) 2006-02-23
JP5189729B2 (en) 2013-04-24
EP1626179B1 (en) 2013-10-23

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