EP1570507A2

EP1570507A2 - Gas discharge lamp for euv radiation

Info

Publication number: EP1570507A2
Application number: EP03812235A
Authority: EP
Inventors: Guenther Hans Derra; Joseph Robert Rene Pankert; Willi Neff; Klaus Bergmann; Jeroen Jonkers
Original assignee: Koninklijke Philips Electronics NV
Current assignee: Koninklijke Philips NV
Priority date: 2002-12-04
Filing date: 2003-11-28
Publication date: 2005-09-07
Also published as: AU2003302551A8; WO2004051698A8; CN100375219C; US7397190B2; WO2004051698A2; JP4594101B2; CN1720600A; TW200503045A; US20060138960A1; WO2004051698A3; JP2006509330A; AU2003302551A1; DE10256663B3

Abstract

The invention relates to a gas discharge lamp for EUV radiation, comprising an anode (1) and a hollow cathode (2). Said hollow cathode (2) is provided with at least two openings (3, 3') while the anode (1) is provided with a passage (4). The inventive gas discharge lamp is characterized by the fact that the longitudinal axes (5, 5') of the hollow cathode openings (3) have a common point of intersection S which is located on the axis of symmetry (6) of the anode passage (4).

Description

Gas discharge lamp for EUN radiation

The invention relates to a gas discharge lamp for extreme ultraviolet radiation according to the preamble of claim 1. Preferred areas of application are those which require extreme ultraviolet (EUN) radiation, preferably in the wavelength range from approximately 10 to 20 nm, for example semiconductor lithography. It is generally known as a dense hot plasma

Use radiation-emitting medium to provide EUN radiation.

For this purpose, WO 01/91532 A2 teaches the use of an EUV radiation source with a plurality of partial electrodes arranged in the form of a segment of a circle, between which ion beams are accelerated. The ion beams open into a plasma discharge space and form a dense, hot plasma there, which emits radiation in the EUN wavelength range. In order to reduce the divergence of the ion beams and to create a particularly small plasma volume, means are also provided for the electrical neutralization of the ions. A device for generating EUN and softer

X-ray radiation is disclosed in WO 01/01736 AI, in which two main electrodes are provided, between which there is a gas-filled intermediate space. The main electrodes have one or more openings. The configuration of the main electrodes means that the plasma ignites only within the cylinder determined by the diameter of the two central openings and is subsequently compressed to an even smaller cylinder due to the pinch effect. In this respect, only a single plasma channel is formed.

The invention is based on the technical problem of providing a gas discharge lamp with a pinch plasma emitting in the EUN wavelength range, in which a spatially highly localized one

BESTATIGUΝGSKOPIE Plasma is generated and at the same time the erosion of the cathode material is as low as possible.

This technical problem is solved by the features of independent claim 1. Advantageous further developments are specified by the dependent claims.

According to the invention, it was recognized that the above-mentioned technical problem is solved by a gas discharge lamp for extreme ultraviolet radiation with an anode and a hollow cathode, in which the hollow cathode has at least two openings and the anode has a through opening, and in which the longitudinal axes of the hollow cathode openings have a common intersection S, which lies on the axis of symmetry of the anode opening.

The invention is based on the finding that cathode erosion can be reduced by distributing the entire electron current emanating from the cathode over several cathode openings. The cathode of a gas discharge source has to deliver a very high electron current of several kiloamps during a current pulse. This leads to the formation of so-called cathode spots in the inner surface of the cathode opening and in the immediately adjacent surface area of the cathode facing the anode. The electrons preferentially emerge from these cathode spots. At these locations, however, erosion of the cathode material can go far beyond the purely thermal evaporation. By selecting several hollow cathode openings, the current density occurring at a cathode spot is reduced. Overall, this leads to less erosion of the cathode, in particular in the opening area, and to an improved service life of the gas discharge lamp. 1 shows a gas discharge lamp according to the invention with an anode

1 and a hollow cathode 2, the latter having three cathode openings 3, 3 ', 3 "to a cavity 8.

Anode 1, cathode 2 and cavity 8 are in a gas atmosphere at pressures of typically 1 to 100 Pa. A voltage is applied to the electrode system. Gas pressure and electrode spacing are selected such that the plasma is ignited on the left branch of the Paschen curve, ie the ionization processes start along the long electrical field lines, which is preferred occur in the area of the openings of the anode and cathode. In the course of the discharge, the hollow cathode space 8 is not potential-free, rather the potential protrudes or the electrical field lines also protrude into the hollow cathode space 8. A hollow cathode plasma is created there with high efficiency of plasma formation due to oscillating electrons.

As a result of this hollow cathode plasma and in particular also by the electron beam generated in the hollow cathode plasma, which spreads through the openings 3, 3 ', 3 "in the direction of the anode or in the direction of the arrow, cf. also FIG. 2a, a highly conductive plasma is produced in the area between anode and cathode The electrical conductivity is particularly high in the area of the intersection point S.

This plasma is compressed and heated to temperatures by a pulsed current in the one-digit to two-digit kiloampere range, so that it generates radiation in the extreme ultraviolet range. The current pulses are chosen in terms of amplitude and period in such a way that the plasma is a source of EUN radiation. This plasma preferably arises in the area of the intersection point S. FIG. 1 shows an arrangement with planar electrodes 1, 2 which is technically particularly simple to implement. An arrangement in the form of a segment of a circle is also possible, for example in FIG. 3 with a hollow cathode 2 in the form of a segment of a circle. This arrangement has the advantage that the electrode walls are further away from the plasma, the cooling of the electrodes is easier, and there are also larger angles to the axis of symmetry 6 can be realized. With this type of construction, the wall 7 opposite the respective cathode opening 3, 3 ', 3 "can be perpendicular to the longitudinal axis 5, 5', 5" of this opening, and can thus contribute by ionization in the electrode interspace, preferably in the area of the common Intersection S has a high electrical conductivity.

The current pulses used advantageously have amplitudes with a two-digit kiloampere number and period durations in the two- to three-digit Νanosecond range. In particular with these parameters for the current pulses, the plasma is adequately compressed and heated in that it reaches the temperature required for the radiation emission. Xenon is mainly used as the working gas of the discharge source, in pure form or in a mixture with other gases. However, gases with other emitters such as lithium or tin, in elemental form or as a chemical compound, can also be used to ensure the highest possible radiation efficiency. The working pressure is in the range of 1-100 Pascal. The working point is chosen so that the product of the electrode distance and discharge pressure lies on the left branch of the Paschen curve. In this case, the ignition voltage rises with falling gas pressure with a fixed electrode geometry.

At the beginning of the discharge, i.e. when current begins to flow, a plasma 13 is generated in the hollow cathode 2 according to FIG. 2a. In the course of the discharge, this plasma 13 passes through the cathode openings and forms conductive channels 11 between the cathode and anode, cf. see Fig. 2b. It follows from the foregoing that the beam 11 of ions and electrons emerging from the hollow cathode openings has a certain spatial extent. The common intersection point S should also be understood to be that spatial area 12 within which these spatially extended beams intersect or overlap.

A rapid increase in the current occurs along the channels 11, as a result of which the plasma is magnetically compressed to a small volume 14 on the axis of symmetry 6 of the arrangement according to FIG. 2c. A cigar-shaped plasma can be realized on and in the direction of the main axis of symmetry 6. The length of this plasma region in the axial direction is approximately 2 to 5 mm, and perpendicular to this approximately 0.5 to 2 mm. The focus of this plasma area is approximately at the intersection S. Due to the sharp rise in temperature, the gas atoms in it are ionized several times and emit the desired EUV radiation. The alignment of the hollow cathode openings to a common one

Intersection S has the effect that the electron or plasma rays generated in the initial phase of the discharge meet at one point, namely the intersection S, and thus predetermine current channels directed to a spatial point. In the later phase of high current flow, a very localized plasma is formed in this way due to the pinch effect.

According to the invention, at least two cathode openings are provided; the use of an even larger number of cathode openings is advantageous. The use of a larger number of cathode openings increases the electrode area even more and reduces the stress that each individual cathode opening experiences. If desired, this reduces the erosion of the cathode. It is advantageous if the longitudinal axis 5 of the respective hollow cathode opening 3 is substantially perpendicular to the part of the hollow cathode wall 7 opposite the hollow cathode opening 3, ie the rear wall of the hollow cathode space, see FIG. 3. The orientation of the hollow cathode wall 7 is in relation to the longitudinal axis of the hollow cathode opening namely, strong influence on the direction of the electron or plasma beam and on its current intensity when it emerges from the cathode opening.

In the starting phase of the discharge, electrons are namely emitted from the rear walls 7 of the hollow cathode or the hollow cathodes, in each case perpendicular to the wall. This leads to the formation of an electron beam, followed by a beam of neutral plasma, which propagates through the respective openings 3, 3 ', 3 "in the direction of the anode. Since the primary electron emission occurs perpendicular to the wall of the hollow cathode, the charge carriers then emerge as completely as possible Openings if the longitudinal axis of the openings is perpendicular to the back of the hollow cathode.

The embodiments mentioned at the beginning have in common that the at least two hollow cathode openings lead to a single and in this respect common hollow cathode space.

According to FIGS. 4a and 4b, however, it is also possible for each hollow cathode opening 3, 3 ', 3 "to be assigned a separate hollow cathode space 8, 8', 8". More generally, a hollow cathode can also be understood to mean a cathode with at least two openings 3, 3 ′ with at least one assigned hollow cathode space 8.

Separate hollow cathode spaces are smaller than a common hollow cathode space. Due to the smaller size, the advantage is that the plasma recombines faster and thus higher repetition rates are possible. An embodiment of the invention in which the

Hollow cathode 2 has no opening on the axis of symmetry 6, see FIGS. 5a and 5b. If there is an opening at this point, determine experimentally that the current flow from this opening often significantly exceeds the current flows from the other openings 3, 3 '. By not providing an opening at this point, one avoids the risk that this opening is subject to particularly severe erosion. In other words, the distribution of the total current over the individual flows is particularly uniform.

5a and 5b illustrate variants without a hollow cathode opening on the axis of symmetry 6, in which these openings 3, 3 'have a single common cavity, the above statements also apply mutatis mutandis if, as in FIG. 4a or FIG. 4b, separate cavities 8,8 ', 8 "are provided.

A variant, not shown in the drawing, consists in choosing a continuous hollow cathode opening on the axis of symmetry, the diameter of which is smaller than the diameter of the other hollow cathode openings. In this case, the central hollow cathode opening, that is to say the hollow cathode opening on the (main) axis of symmetry of the electrode arrangement, plays no role in the ignition of the plasma. An advantage of this variant is that erosion by particles which are emitted in the axial direction when the pinch plasma is compressed can be avoided.

In another variant it can be provided that one or more hollow cathode openings 3, 3 ',... Are designed as a blind hole, see FIGS. 6a and 6b. This design is particularly easy to manufacture.

Investigations have further shown that, with non-optimized operating parameters, the center of gravity of the plasma is not shifted at point S, but often in the direction of the cathode. Especially with a blind hole 3 'on the axis of symmetry 6, as shown in FIGS. 6c and 6d, the distance of the plasma from the cathode wall can be increased, in particular if the diameter of the blind hole is larger than the diameter of the further hollow cathode openings 3 or 3 '. The increased distance of the plasma from the cathode wall leads to a further reduction in cathode erosion. Furthermore, in the case of a blind hole on the main axis of symmetry

6 the arrangement more tolerant of erosion in the opening area. Play any rounding or existing removal of the cathode on the edge of the opening in the case of a blind hole for the transport of electricity and thus for the pinch plasma, it is not as important as in a geometry with a continuous opening. In the latter case, the geometry of the pinch plasma is essentially determined by the current approach and its development over time in the opening, experience having shown that the eroded edge has a negative effect on the pinch geometry. The pinch plasma becomes longer and means that less radiation can be coupled out. In this respect, the blind hole means that despite erosion, the plasma remains unchanged in terms of position and geometry.

The anode 1 contains a continuous central main opening 4 on the axis of symmetry 6. In addition to the continuous central main opening 4, the anode 1 can have at least two further openings 4 ', 4 ". The longitudinal axes 9' and 9" of these additional anode openings 4 'and 4 "are each identical to the longitudinal axis of a hollow cathode opening 3 'or 3", see Fig. 7. In this respect, for each additional anode opening 4', 4 "there is an opposite hollow cathode opening 3 ', 3" which is not located on the axis of symmetry. In this case there are overlapping plasma channels at location S, and the further anode openings 4 ', 4 "largely define the plasma volume to be compressed via the pinch effect. Since the additional anode openings 4', 4" have a smaller diameter than the central anode opening 4 on the Axis of symmetry 6, the plasma volume to be compressed will turn out to be smaller overall. This compresses the plasma to an even smaller volume. This has the advantage that an even higher proportion of the EUV radiation generated can be coupled out along the axis of symmetry 6 and made usable for the application. Since lower pulse energies are required to achieve a specified EUV output power, the erosion of the cathode material can be restricted further.

The additional anode openings can be designed differently. Viewed from S, behind the anode opening 4 ', 4 "in FIG. 7 there is an open space area, in FIG. 8a this space area is closed. The closed design has the consequence that the plasma cannot be disturbed by processes in said space area , and the plasma emission takes place in a particularly trouble-free manner. The variant according to FIG. 8b is structurally particularly simple in that the closed spatial area consists of an anode opening 4 ', 4 "designed as a blind hole. Regardless of the presence and design of the additional anode openings 4 ', 4 ", the main opening 4 can also be designed as a grid, the open areas of which are strip-like or checkerboard-like. In this case, the grid acts as electrical shielding during the ignition phase of the plasma. This configuration the central main opening of the anode is mainly at

The presence of additional anode openings is advantageous. Then the ignition process is determined even more dominantly by the additional anode openings 4 ', 4 ", and the plasma volume to be compressed is thus even smaller overall. In a further advantageous embodiment of the invention, trigger devices are provided for the hollow cathode space or spaces. In this way, the Trigger the ignition of the discharge precisely as required, in particular the simultaneity of the ignition of the partial discharges can also be improved.

According to FIGS. 9a and 9b, an additional electrode 10 can be provided in the cavity 8 as a trigger device. This additional electrode 10 can be prevented by igniting the discharge by igniting it at a positive potential with respect to the cathode 2. If the trigger electrode is switched to cathode potential by a control pulse on the trigger electronics, the discharge is ignited in a precisely controllable manner. The same applies in the event that a dielectric trigger is used. According to FIG. 10a, a pulsed high-frequency source 10, 10 ', 10 "can be used as

Trigger device can be provided, and for example a microwave source can be used to trigger the discharge. The radio frequency is injected through the opening in the direction of the dash-dotted axes into the hollow cathode space or spaces 8, 8 ', 8 ", and there triggers the build-up of the hollow cathode plasma and finally the main discharge.

Glow discharge units can also be provided for triggering according to FIG. 10b. A glow discharge is maintained within these units before the main discharge. Electrons are then extracted from the glow plasma by applying a positive voltage pulse to the grid electrode facing the hollow cathode 2, which electrons initiate the main discharge in the hollow cathode space 8, 8 ', 8 "and in the space between the anode and cathode, that is to say in the space between the electrodes. 10c and 10d, laser beams 15, 15 ', 15 "of a pulsed laser beam source focused on the respective hollow cathode openings can be used to trigger primary electrons from the cathode surface and to ignite the discharge. One or more focused laser beams can be used both from the anode side, see FIG. 10d, and through openings from the cathode side, see FIG. 10c.

11 shows a double plasma arrangement with an auxiliary anode 17. The auxiliary anode and anode 1 are electrically connected to one another via lines 19. During the ignition phase of the discharge, a plasma builds up in the hollow cathode spaces 8, 8 ', 8 ", from which an electron beam propagates in the direction of the anode 1 and also in the direction of the auxiliary anode 17. In the later course, space 18, 18' 18 "between the openings 16, 16 ', 16" and auxiliary anode 17, a plasma which in turn emits an ion beam in the direction of the hollow cathode 2. The ion beam crosses the hollow cathode space 8,8', 8 "and passes through the openings 3,3 ', 3 "into the gap between the electrodes. Here, ionization of the main plasma between anode 1 and cathode 2 is again locally amplified along the ion beam. This further reduces the spatial extent of the plasma volume emitting EUV radiation. This allows the EUN- Radiation: It follows from the above that the various

Embodiments of cathode, anode (s), respective openings and associated trigger devices can also be combined as desired.

LIST OF REFERENCE NUMBERS

1 anode

2 hollow cathode

3,3 ', 3 "hollow cathode opening

4 anode opening, continuous

5.5 ', 5 "longitudinal axis of a hollow cathode opening

6 axis of symmetry, defined by the continuous anode opening

7 hollow cathode rear wall

8, 8 ', 8 "hollow cathode space

9 longitudinal axis of an additional anode opening

10 trigger device

11 Spatially extended beam of electrons and ions

12 Overlap area of the electron beams

13 plasma

14 pinch plasma

15.15 ', 15 "laser beams

16, 16 ', 16 "openings of the hollow cathode, which face the auxiliary anode auxiliary anode

Gap between hollow cathode 2 and auxiliary anode 17

electrical lines which connect anode 1 and auxiliary anode 17 to one another

Claims

CLAIMS:

1. Gas discharge lamp for EUV radiation, with an anode (1) and a hollow cathode (2), in which the hollow cathode (2) has at least two openings (3, 3 ') and the anode (1) has a through opening (4) , characterized in that the longitudinal axes (5,5 ') of the hollow cathode openings (3) have a common intersection point S which lies on the axis of symmetry (6) of the anode opening (4).

2. Gas discharge lamp according to claim 1, characterized in that the longitudinal axis (5) of the respective hollow cathode opening (3) is substantially perpendicular to the part of the hollow cathode wall (7) opposite the hollow cathode opening (3).

3. Gas discharge lamp according to claim 1 or 2, characterized in that each hollow cathode opening (3) is assigned a separate hollow cathode space (8).

4. Gas discharge lamp according to one of claims 1 to 3, characterized in that a hollow cathode opening is designed as a blind hole.

5. Gas discharge lamp according to claim 4, characterized in that the hollow cathode opening (3) located on the axis of symmetry (6) is designed as a blind hole.

6. Gas discharge lamp according to one of claims 1 to 3, characterized in that the hollow cathode (2) has no opening (3) on the axis of symmetry (6) of the anode opening (4)

7. Gas discharge lamp according to one of claims 1 to 4, characterized in that the hollow cathode (2) has a continuous opening on the Has axis of symmetry (6) of the anode opening (4), the diameter of which is smaller than the diameter of the other hollow cathode openings.

8. Gas discharge lamp according to one of claims 1 to 7, characterized in that the anode (1) has additional openings (4 ', 4 "), the longitudinal axes (9', 9") are each identical to the longitudinal axis of a hollow cathode opening.

9. Gas discharge lamp according to claim 8, characterized in that viewed from the intersection S, the space behind the additional anode opening (4 ', 4' ') is closed.

10. Gas discharge lamp according to one of claims 8 or 9, characterized in that an additional anode opening (4 ', 4 ") is designed as a blind hole.

11. Gas discharge lamp according to one of claims 8, 9 or 10, characterized in that the central continuous anode opening 4 is designed as a grid, the open areas of which are strip-shaped or checkerboard-like.

12. Gas discharge lamp according to one of claims 1 to 11, characterized in that trigger devices (10) are provided for the hollow cathode space (s) (8), preferably an additional electrode, a dielectric trigger, a pulsed high-frequency source, one or more glow discharge units, or a pulsed one laser beam source.

13. Gas discharge lamp according to one of claims 1 to 12, characterized in that a double plasma arrangement with an auxiliary anode (17) is provided as the trigger device.