EP1168895B9 - Pulse device with a system for radiation generation and method for radiation generation - Google Patents

Pulse device with a system for radiation generation and method for radiation generation Download PDF

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Publication number
EP1168895B9
EP1168895B9 EP20000113560 EP00113560A EP1168895B9 EP 1168895 B9 EP1168895 B9 EP 1168895B9 EP 20000113560 EP20000113560 EP 20000113560 EP 00113560 A EP00113560 A EP 00113560A EP 1168895 B9 EP1168895 B9 EP 1168895B9
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Prior art keywords
discharge
switch
assembly
electrode
radiation
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EP20000113560
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German (de)
French (fr)
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EP1168895B1 (en
EP1168895A1 (en
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Norbert Dr. Böwering
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TuiLaser AG
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TuiLaser AG
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Priority to DE50006337T priority Critical patent/DE50006337D1/en
Priority to EP20000113560 priority patent/EP1168895B9/en
Priority to PCT/EP2001/007344 priority patent/WO2002001926A1/en
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    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05G—X-RAY TECHNIQUE
    • H05G2/00—Apparatus or processes specially adapted for producing X-rays, not involving X-ray tubes, e.g. involving generation of a plasma
    • H05G2/001—Production of X-ray radiation generated from plasma
    • H05G2/003—Production of X-ray radiation generated from plasma the plasma being generated from a material in a liquid or gas state

Definitions

  • the present invention relates to a pulsable device with an arrangement for generating radiation from a magnetic compressed electrical gas discharge and one Switch for triggering the radiation generation of the arrangement. It also relates to a method for generating radiation.
  • Such devices are used for example Generation of EUV (extreme ultraviolet) and X-rays, the medium emitting the radiation being a plasma.
  • EUV extreme ultraviolet
  • X-rays the medium emitting the radiation being a plasma.
  • preferred Application areas are projection lithography and Inspection and analysis procedures in this spectral range.
  • a plasma as a source of X-ray light
  • a pinch discharge for example, between Two electrodes generate a plasma that is used to emit the desired Radiation must be ignited.
  • Z-pinch discharge is usually a cylindrical, pulsed high current gas discharge, which is characterized by magnetic Compression tied up into a stream of electricity.
  • the atoms are ionized several times and in general high ionization levels reached.
  • the different excited Ionic states give off radiation in the form of lines off, in the case of heavy materials sometimes also in the form of bands, which consist of many lines. 1 shows for clarification a circuit arrangement known from the prior art for Ignition of a gas discharge, the so-called Blumlein circuit.
  • two capacitor banks C1, C2 are connected across charging resistors R charged to high voltage (HV).
  • HV high voltage
  • the switch S for example a spark gap or a thyratron the capacitors of capacitor bank C1 are short-circuited.
  • This causes the capacitors of capacitor bank C1 to swing around, i.e. due to the dampened by the system electrical resonant circuit, the vibration behavior of its characteristics capacitance, inductance and ohmic resistance are determined, after a half-wave is almost in terms of the voltage at C2 is the same as at C2 is present, but with reverse polarity. So that's right the inputs of the two connections of the laser almost double High voltage on. This leads to the ignition of the gas discharge between the electrodes of the assembly.
  • the problem of the circuit shown in Fig. 1 lies in that due to the high tensions involved in Switch the capacitor bank C1 the electrodes of the switch experience a burn that not only limits their lifespan, but also the reliability of the ignition of the gas discharge impaired.
  • the inner electrode is therefore subjected to magnetic compression in the way which is why it is not possible to switch this as perform magnetically compressed gas discharge.
  • the one from the Main discharge side let in gas pulse reaches the Switch timed only after entering the main discharge area has reached.
  • the main discharge therefore does the pre-ionization for the switch. This switches after insertion the main discharge and then maintains it longer.
  • the pulse generator has its own switch, which is designed as a spark gap.
  • the Pre-discharge is therefore only a kind of secondary discharge and it does not serve to switch the energy of the main discharge.
  • a CO 2 gas laser arrangement is known from US Pat. No. 4,509,176, which is designed as a double arrangement with metal rings, but is conventionally switched by a thyratron switch.
  • SU-A-1,804,661 relates to a generator of hard X-rays with an electron beam, the brake radiation generated a target. Hydrogen is used as the gas. It is a so-called electron cyclotron resonance, where the orbits of the electrons are influenced by permanent magnets and be narrowed down.
  • the present invention is therefore based on the object a device and a method of the type mentioned to provide the switching and operation at make optimal pressure and voltage values possible, at which the impairments due to erosion at the switch electrodes are reduced and repetition rates of more than 20 pulses per second are possible.
  • the invention is based on the knowledge that when the Switch for triggering the radiation generation of the application also as a magnetically compressed electrical discharge is executed, no switch used in the traditional sense must become.
  • the pre-ionization for the switching discharge can, for example by trigger discharge, whereupon the Preionization for the main discharge of the actual arrangement to generate radiation through the switching discharge.
  • the arrangement and the are particularly advantageous Switch designed as a Z-pinch. This results in a very low ablation and erosion not only on the discharge involved electrodes, but also on the between the electrodes arranged isolators. Notwithstanding this particular However, the principle of the invention is also advantageously applicable to Gas-Puff-Z-Pinch, capillary discharge, plasma focus discharge, Pseudo spark discharge and transient cavity discharge as well further pinched discharges. Is included in the invention the combination of different magnetically compressed electrical gas discharges for switches and arrangement.
  • the arrangement and switch are one have common axis of symmetry and of the arrangement and the switch is emitted in the same area. Generated with it the switch on the one hand additional usable radiation, which contributes to the light emission of the entire device.
  • the charge carriers generated by the switch after its ignition on the other hand used for pre-ionization of the arrangement.
  • the embodiment comprises at least one Trigger electrode for generating the trigger discharge, at least a switching discharge electrode for generating the switching discharge of the switch, at least one main discharge electrode to generate the main discharge of the arrangement, as well as a near-mass Electrode.
  • the trigger electrode (s), the switching discharge electrode (s) and the main discharge electrode (s) are preferably in the form of disks or as a hollow cylinder or as a hollow cylinder with aligned Apertures executed. So that the switching discharge to discharge the Arrangement contributes, the electrodes mentioned are preferred arranged along a common axis of symmetry, the Openings of the discs and / or hollow cylinders aligned are.
  • the disks and / or hollow cylinders are electrically separate from one another arranged in isolation, in particular by between the panes and / or disks and / or hollow cylinders arranged in the hollow cylinders made of electrically insulating material.
  • the device is a cooling device, in particular as a microchannel diffusion cooling trained on to the system from trigger electrode, Switching discharge electrode, main discharge electrode to cool on the side facing away from the discharge side.
  • the device is a semi-transparent, in particular has a spherically curved capillary arrangement, in particular a multi-channel capillary arrangement with which the Switches and the arrangement of a user's vacuum system the radiation generated are separable to absorb the Reduce radiation in the medium.
  • the present invention is now based on the example of an axial Double arrangement of two Z-pinches described, without the inventive concept to this embodiment chosen as an example limit.
  • Fig. 2 shows a schematic representation of a cross section through the discharge region of an axial double arrangement of two Z-pinches.
  • the device according to the invention has a first pinch electrode 10, a second pinch electrode 12 and a third pinch electrode 14.
  • the pinch electrodes 10 and 12 are involved in the switching discharge, while the main discharge is provided by the pinch electrodes 12 and 14.
  • a trigger electrode 16 is used to ignite a trigger discharge to the pinch electrode 10.
  • the illustration in FIG. 2 shows a plurality of insulator tubes 5a, 5b, 5c, 5d, which are preferably formed from ceramic materials, for example Al 2 O 3 .
  • the two pinches ie the first switch pinch formed by pinch electrodes 10 and 12 and the second main pinch formed by pinch electrodes 12 and 14, are arranged along a common axis of symmetry 18.
  • a cooling device 20 is provided, which is preferably designed as a microchannel diffusion cooling.
  • the electrodes for cooling the electrodes, provision can be made for the electrodes to be hollow and for cooling to be brought into direct contact with a medium such as insulating oil.
  • the right side of the arrangement of Fig. 2 is the user facing side, i.e. on this side the radiation is off the system and transported to the place of use. How will be described in more detail below, it is required to bring gas into the discharge space 22 so that a gas discharge can take place.
  • the extreme short wavelength of radiation generated less than 100 nm, preferably less than 50 nm, in particular 13.5 nm, 13.0 nm or 11.4 nm
  • a multi-channel capillary arrangement 24 the user-facing side arranged for training a pressure difference is suitable and causes only small Gas quantities get into the transport route and the absorption can be significantly reduced in the medium.
  • Fig. 3 is the electrical wiring of the invention Device shown.
  • the trigger electrode 16 each are preferably designed as disc or hollow cylinders, and two capacitor banks C1, C2, which are connected via series resistors R are applied to high voltage HV.
  • the capacitor bank is C2 connected directly to ground at its other terminal, while the capacitor bank C1 with its other connection via a Resistor R 'is connected to ground.
  • the trigger electrode 16 is connected to a low high voltage NHV, the lower one Has amplitude and reverse polarity than the high voltage HV.
  • the pinch electrode After charging the capacitor banks C1, C2, the pinch electrode is located 10 quasi to ground potential. Will now go to the Trigger electrode 16 applied a negative low high voltage NHV, this creates a discharge from the electrode 16 to the first Pinch electrode 10. This causes charge carriers on the left side End of the discharge space 22 provided. These carriers act as pre-ionization for the switch pinch, which includes the pinch electrodes 10 and 12. This forms there is a sliding discharge between the pinch electrode 10 and the pinch electrode 12, which due to the low inductance large current flows quickly. Between the pinch electrode 12 and pinch electrode 14 there is no sliding discharge, because these two electrodes are at the same potential. The sliding discharge between pinch electrode 10 and pinch electrode 12 leads to short-circuiting the capacitor bank C1 and results in a recharge of the pinch electrode 12.
  • the time period until the transhipment is determined by the on this resonant circuit involved resistors, capacitors and inductors. After the first half wave of this vibration is the pinch electrode 12 at a potential that is almost the same size like the high voltage HV, but has reverse polarity. Between the pinch electrode 12 and the pinch electrode 14 is therefore almost twice the high voltage HV, what is in it results in the main discharge breaking down.
  • Devices for pulsed gas supply are not shown in the discharge space, preferably on the left in the representation of the Fig. 2 arranged, and devices for pumping the gas.
  • the high voltage can be HV to 40 kV, the low high voltage NHV -5kV.
  • the capacitor banks can be realized as 60 arranged in oil Capacitors with a capacitance of 1.7 nF (50 kVDc) each.
  • the ceramic tubes 5b and 5c have a length of 30 mm as well an inner diameter of 15 mm with an outer diameter of 20 mm.
  • the electrodes are ring-shaped and made of one refractory material, such as Molybdenum.
  • the total diameter the arrangement including the capacitor banks is 600 mm, while the total length of the arrangement towards the axis of symmetry, as shown in Fig. 2, is 90 mm.
  • the energy stored in the capacitors can vary between 68 and 81 J after high voltage is applied.
  • the main discharge lasts approx. 50 ns, the proportion of which from Switch pinch to total radiation is made up to about 30 % can be.
  • a pulse operation of the arrangement of up to 100 Hz is possible without any problems. Is particularly suitable as a gas Xenon.
  • the Arrangement and the switch are preferred with noble gases, oxygen, Gases or vapors or mixtures containing oxygen from the gases mentioned at a pressure in the range of 1 Pa operated up to 1000 Pa.

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Optics & Photonics (AREA)
  • Plasma & Fusion (AREA)
  • X-Ray Techniques (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)

Description

Die vorliegende Erfindung betrifft eine pulsbare Vorrichtung mit einer Anordnung zur Erzeugung von Strahlung aus einer magnetisch komprimierten elektrischen Gasentladung und einem Schalter zum Auslösen der Strahlungserzeugung der Anordnung. Sie betrifft weiterhin ein Verfahren zur Erzeugung von Strahlung.The present invention relates to a pulsable device with an arrangement for generating radiation from a magnetic compressed electrical gas discharge and one Switch for triggering the radiation generation of the arrangement. It also relates to a method for generating radiation.

Derartige Vorrichtungen werden eingesetzt beispielsweise zur Erzeugung von EUV (Extrem-Ultraviolett)- und Röntgenstrahlung, wobei das die Strahlung emittierende Medium ein Plasma ist. Bevorzugtes Anwendungsgebiet sind die Projektionslithographie und Inspektions- und Analyseverfahren in diesem Spektralbereich.Such devices are used for example Generation of EUV (extreme ultraviolet) and X-rays, the medium emitting the radiation being a plasma. preferred Application areas are projection lithography and Inspection and analysis procedures in this spectral range.

Der Einsatz eines Plasmas als Quelle für Röntgenlicht ist bekannt. Bei einer Pinch-Entladung wird beispielsweise zwischen zwei Elektroden ein Plasma erzeugt, das zur Emission der gewünschten Strahlung gezündet werden muß. Bei einer sogenannten Z-Pinch-Entladung handelt es sich meist um eine zylindrische, gepulste Hochstrom-Gasentladung, die sich durch magnetische Kompression zu einem Stromfaden zusammenschnürt. Im erzeugten heißen Plasma werden die Atome mehrfach ionisiert und im allgemeinen hohe Ionisationsstufen erreicht. Die verschiedenen angeregten ionischen Zustände geben Strahlung in Form von Linien ab, bei schweren Materialien zum Teil auch in Form von Bändern, die aus vielen Linien bestehen. Zur Verdeutlichung zeigt Fig. 1 eine aus dem Stand der Technik bekannte Schaltungsanordnung zur Zündung einer Gasentladung, die sogenannte Blumlein-Schaltung. Zunächst werden zwei Kondensatorbänke C1, C2 über Ladewiderstände R auf Hochspannung (HV) aufgeladen. Durch den Schalter S, beispielsweise eine Funkenstrecke oder ein Thyratron, werden die Kondensatoren der Kondensatorbank C1 kurzgeschlossen. Dies führt dazu, daß die Kondensatoren der Kondensatorbank C1 umschwingen, d.h. aufgrund des vom System gebildeten, gedämpften elektrischen Schwingkreises, dessen Schwingungsverhalten durch seine Kenngrößen Kapazität, Induktivität und Ohmscher Widerstand bestimmt sind, liegt nach einer Halbwelle nahezu die hinsichtlich der Amplitude gleich große Spannung an C2 an, wie an C2 anliegt, jedoch mit umgekehrter Polarität. Damit liegt an den Eingängen der beiden Anschlüsse des Lasers nahezu die doppelte Hochspannung an. Dies führt zum Zünden der Gasentladung zwischen den Elektroden der Anordnung.The use of a plasma as a source of X-ray light is known. With a pinch discharge, for example, between Two electrodes generate a plasma that is used to emit the desired Radiation must be ignited. In a so-called Z-pinch discharge is usually a cylindrical, pulsed high current gas discharge, which is characterized by magnetic Compression tied up into a stream of electricity. In generated In hot plasma, the atoms are ionized several times and in general high ionization levels reached. The different excited Ionic states give off radiation in the form of lines off, in the case of heavy materials sometimes also in the form of bands, which consist of many lines. 1 shows for clarification a circuit arrangement known from the prior art for Ignition of a gas discharge, the so-called Blumlein circuit. First, two capacitor banks C1, C2 are connected across charging resistors R charged to high voltage (HV). Through the switch S, for example a spark gap or a thyratron the capacitors of capacitor bank C1 are short-circuited. This causes the capacitors of capacitor bank C1 to swing around, i.e. due to the dampened by the system electrical resonant circuit, the vibration behavior of its characteristics capacitance, inductance and ohmic resistance are determined, after a half-wave is almost in terms of the voltage at C2 is the same as at C2 is present, but with reverse polarity. So that's right the inputs of the two connections of the laser almost double High voltage on. This leads to the ignition of the gas discharge between the electrodes of the assembly.

Die Problematik der in Fig. 1 dargestellten Schaltung liegt darin, daß aufgrund der hohen beteiligten Spannungen beim Schalten der Kondensatorbank C1 die Elektroden des Schalters einen Abbrand erfahren, der nicht nur deren Lebensdauer begrenzt, sondern auch die Zuverlässigkeit der Zündung der Gasentladung beeinträchtigt.The problem of the circuit shown in Fig. 1 lies in that due to the high tensions involved in Switch the capacitor bank C1 the electrodes of the switch experience a burn that not only limits their lifespan, but also the reliability of the ignition of the gas discharge impaired.

Zur Vermeidung dieser Problematik ist beispielsweise aus der DE 197 53 696 eine Vorrichtung zur Erzeugung von Extrem-Ultraviolett-Strahlung bekannt, die im Selbstdurchbruch betrieben'wird. Der Selbstdurchbruchbetrieb erlaubt jedoch nicht das zeitlich präzise Schalten der Entladung. Zudem sind dabei für eine gegebene Elektrodenanordnung der Gasdruck und die für den Durchbruch anzulegende Spannung nicht voneinander unabhängig variierbar, sondern sie sind korreliert, d.h. der Arbeitspunkt ist nicht frei wählbar.To avoid this problem, for example, from DE 197 53 696 a device for generating extreme ultraviolet radiation known, which is operated in self-breakthrough. However, the self-breakthrough operation does not allow this in time precise switching of the discharge. In addition, there are for a given Electrode arrangement of the gas pressure and the one for the breakthrough voltage to be applied cannot be varied independently of one another, but they are correlated, i.e. the working point is not freely selectable.

Aus AKIYAMA H. et al.: A SELF-CROWBAR SWITCH FOR A GAS-PUFF Z-PINCH DRIVEN BY A PULSED POWER GENERATOR' REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. Bd. 61, Nr. 4, 1. April 1990 (1990-04-01), Seiten 134-14346, ist bekannt, eine gepulste Pinch-Entladung für weiche Röntgenstrahlung zusammen mit einem crowbar-Schalter zu betreiben. Der Schalter besteht aus einer diffusen Entladung zwischen einer Innenelektrode von 12 cm Durchmesser und einer Außenelektrode von 18 cm Durchmesser. Die Innenelektrode steht also einer magnetischen Kompression im Weg, weshalb es nicht möglich ist, diesen Schalter als magnetisch komprimierte Gasentladung auszuführen. Der von der Hauptentladungsseite her eingelassene Gaspuls erreicht den Schalter zeitlich erst nachdem er den Bereich der Hauptentladung erreicht hat. Die Hauptentladung macht daher die Vorionisation für den Schalter . Dieser schaltet nach dem Einsetzen der Hauptentladung und unterhält sie dann aber dadurch länger.From AKIYAMA H. et al .: A SELF-CROWBAR SWITCH FOR A GAS-PUFF Z-PINCH DRIVEN BY A PULSED POWER GENERATOR 'REVIEW OF SCIENTIFIC INSTRUMENTS, AMERICAN INSTITUTE OF PHYSICS. Vol. 61, No. 4, 1. April 1990 (1990-04-01), pages 134-14346, is known to be a pulsed pinch discharge for soft x-rays together to operate with a crowbar switch. The switch is there from a diffuse discharge between an inner electrode of 12 cm in diameter and an outer electrode of 18 cm in diameter. The inner electrode is therefore subjected to magnetic compression in the way which is why it is not possible to switch this as perform magnetically compressed gas discharge. The one from the Main discharge side let in gas pulse reaches the Switch timed only after entering the main discharge area has reached. The main discharge therefore does the pre-ionization for the switch. This switches after insertion the main discharge and then maintains it longer.

Aus VELLA M.C. et al.: Plasma pinch for final focus and transport', NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPEMENT, NORTH-HOLLAND PUBLISHING COMPANY. Bd. 415, Nr. 1-2, 21. September 1998 (1998-09-21), Seiten 193-199, ist eine Pinch-Entladung mit einem zeitlichen Pinch-Vorpuls bekannt. Die dort beschriebene Anordnung hat nur zwei Elektroden, wobei ein Laserstrahl eine vorentladung zwischen diesen Elektroden aus einem Vorpulskondensator triggert. Erst danach wird die Hauptentladung zwischen den gleichen Elektroden durch Triggern des Pulsgenerators gezündet. Der Pulsgenerator hat seinen eigenen Schalter, der als Funkenstrecke ausgebildet ist. Die Vorentladung ist demnach nur eine Art Nebenentladung, und sie dient nicht dazu, die Energie der Hauptentladung zu schalten.From VELLA M.C. et al .: Plasma pinch for final focus and transport ', NUCLEAR INSTRUMENTS & METHODS IN PHYSICS RESEARCH, SECTION A: ACCELERATORS, SPECTROMETERS, DETECTORS AND ASSOCIATED EQUIPEMENT, NORTH-HOLLAND PUBLISHING COMPANY. Vol. 415, No. 1-2, September 21, 1998 (1998-09-21), pages 193-199, a pinch discharge with a temporal pinch prepulse is known. The arrangement described there has only two electrodes, a laser beam pre-discharging between these electrodes triggers from a pre-pulse capacitor. Only after that will the main discharge between the same electrodes by triggering the pulse generator ignited. The pulse generator has its own switch, which is designed as a spark gap. The Pre-discharge is therefore only a kind of secondary discharge and it does not serve to switch the energy of the main discharge.

Aus der US-A-4,509,176 ist eine CO2 Gaslaseranordnung bekannt, die als Doppelanordnung mit Metallringen ausgeführt ist, jedoch konventionell durch einen Thyratronschalter geschaltet wird.A CO 2 gas laser arrangement is known from US Pat. No. 4,509,176, which is designed as a double arrangement with metal rings, but is conventionally switched by a thyratron switch.

Die SU-A-1,804,661 betrifft einen Generator von harter Röntgenstrahlung mit einem Elektronenstrahl, der Bremsstrahlung auf einem Target erzeugt. Als Gas wird Wasserstoff verwendet. Es handelt sich um eine sogenannte Elektronen-Zyklotron-Resonanz, bei der die Bahnen der Elektronen durch Permanentmagnete beeinflusst und eingeengt werden.SU-A-1,804,661 relates to a generator of hard X-rays with an electron beam, the brake radiation generated a target. Hydrogen is used as the gas. It is a so-called electron cyclotron resonance, where the orbits of the electrons are influenced by permanent magnets and be narrowed down.

Der vorliegenden Erfindung liegt daher die Aufgabe zugrunde, eine Vorrichtung und ein Verfahren der eingangs genannten Art zur Verfügung zu stellen, die das Schalten und den Betrieb bei optimalen Druck- und Spannungswerten möglich machen, bei welchen die Beeinträchtigungen durch Abbrand an den Schalterelektroden reduziert sind und Repetitionsraten von mehr als 20 Pulsen pro Sekunde ermöglicht sind. The present invention is therefore based on the object a device and a method of the type mentioned to provide the switching and operation at make optimal pressure and voltage values possible, at which the impairments due to erosion at the switch electrodes are reduced and repetition rates of more than 20 pulses per second are possible.

Diese Aufgabe wird gelöst durch eine Vorrichtung mit den Merkmalen von Patentanspruch 1 sowie durch ein Verfahren mit den Merkmalen von Patentanspruch 15.This object is achieved by a device with the features of claim 1 and by a method with the Features of claim 15.

Der Erfindung liegt die Erkenntnis zugrunde, daß, wenn der Schalter zum Auslösen der Strahlungserzeugung der Anmeldung ebenfalls als magnetisch komprimierte elektrische Entladung ausgeführt ist, kein Schalter im herkömmlichen Sinne verwendet werden muß. Die Vorionisation für die Schaltentladung kann beispielsweise durch eine Triggerentladung erfolgen, woraufhin die Vorionisation für die Hauptentladung der eigentlichen Anordnung zur Erzeugung von Strahlung durch die Schaltentladung erfolgt.The invention is based on the knowledge that when the Switch for triggering the radiation generation of the application also as a magnetically compressed electrical discharge is executed, no switch used in the traditional sense must become. The pre-ionization for the switching discharge can, for example by trigger discharge, whereupon the Preionization for the main discharge of the actual arrangement to generate radiation through the switching discharge.

In besonders vorteilhafter Weise ist die Anordnung und der Schalter als Z-Pinch ausgeführt. Hierbei ergeben sich eine sehr geringe Ablation und Erosion nicht nur an den an der Entladung beteiligten Elektroden, sondern auch an den zwischen den Elektroden angeordneten Isolatoren. Ungeachtet dieses besonderen Vorteils ist das Erfindungsprinzip jedoch auch anwendbar auf Gas-Puff-Z-Pinch, Kapillarentladung, Plasmafokusentladung, Pseudofunkenentladung und transiente Hohlraumentladung sowie weitere gepinchte Entladungen. Von der Erfindung mitumfaßt ist die Kombination unterschiedlicher magnetisch komprimierter elektrischer Gasentladungen für Schalter und Anordnung.The arrangement and the are particularly advantageous Switch designed as a Z-pinch. This results in a very low ablation and erosion not only on the discharge involved electrodes, but also on the between the electrodes arranged isolators. Notwithstanding this particular However, the principle of the invention is also advantageously applicable to Gas-Puff-Z-Pinch, capillary discharge, plasma focus discharge, Pseudo spark discharge and transient cavity discharge as well further pinched discharges. Is included in the invention the combination of different magnetically compressed electrical gas discharges for switches and arrangement.

Besonders vorteilhaft ist es, wenn Anordnung und Schalter eine gemeinsame Symmetrieachse aufweisen und von der Anordnung und dem Schalter in denselben Raumbereich emittiert wird. Damit erzeugt der Schalter einerseits zusätzlich nutzbare Strahlung, die zur Lichtemission der gesamten Vorrichtung beiträgt. Die vom Schalter nach dessen Zündung erzeugten Ladungsträger werden andererseits zur Vorionisation der Anordnung verwendet.It is particularly advantageous if the arrangement and switch are one have common axis of symmetry and of the arrangement and the switch is emitted in the same area. Generated with it the switch on the one hand additional usable radiation, which contributes to the light emission of the entire device. The charge carriers generated by the switch after its ignition on the other hand used for pre-ionization of the arrangement.

Zur Versorgung von Schalter und Anordnung mit Energie werden vorzugsweise Kondensatorbänke eingesetzt. Bei einem bevorzugten Ausführungsbeispiel umfaßt die Vorrichtung mindestens eine Triggerelektrode zur Erzeugung der Triggerentladung, mindestens eine Schaltentladungselektrode zur Erzeugung der Schaltentladung des Schalters, mindestens eine Hauptentladungselektrode zur Erzeugung der Hauptentladung der Anordnung, sowie eine massenahe Elektrode.To supply the switch and arrangement with energy preferably capacitor banks used. With a preferred one The embodiment comprises at least one Trigger electrode for generating the trigger discharge, at least a switching discharge electrode for generating the switching discharge of the switch, at least one main discharge electrode to generate the main discharge of the arrangement, as well as a near-mass Electrode.

Die Triggerelektrode(n), die Schaltentladungselektrode(n) und die Hauptentladungselektrode(n) sind bevorzugt als Scheiben oder als Hohlzylinder oder als Hohlzylinder mit fluchtenden Blenden ausgeführt. Damit die Schaltentladung zur Entladung der Anordnung beiträgt, sind die erwähnten Elektroden vorzugsweise entlang einer gemeinsamen Symmetrieachse angeordnet, wobei die Öffnungen der Scheiben und/oder Hohlzylinder fluchtend ausgerichtet sind.The trigger electrode (s), the switching discharge electrode (s) and the main discharge electrode (s) are preferably in the form of disks or as a hollow cylinder or as a hollow cylinder with aligned Apertures executed. So that the switching discharge to discharge the Arrangement contributes, the electrodes mentioned are preferred arranged along a common axis of symmetry, the Openings of the discs and / or hollow cylinders aligned are.

Die Scheiben und/oder Hohlzylinder sind elektrisch voneinander isoliert angeordnet, insbesondere durch zwischen den Scheiben und/oder den Hohlzylindern angeordnete Scheiben und/oder Hohlzylinder aus elektrisch isolierendem Material. Bevorzugt weist die Vorrichtung eine Kühlvorrichtung, insbesondere als Mikrokanal-Diffusionskühlung ausgebildet, auf, um das System aus Triggerelektrode, Schaltentladungselektrode, Hauptentladungselektrode an der von der Entladungsseite abgewandten Seite zu kühlen.The disks and / or hollow cylinders are electrically separate from one another arranged in isolation, in particular by between the panes and / or disks and / or hollow cylinders arranged in the hollow cylinders made of electrically insulating material. Preferably points the device is a cooling device, in particular as a microchannel diffusion cooling trained on to the system from trigger electrode, Switching discharge electrode, main discharge electrode to cool on the side facing away from the discharge side.

Im Hinblick auf die sehr kurze Wellenlänge der erzeugten Strahlung, die insbesondere je nach Gasart auf 13,5 nm, 13,0 nm oder 11,4 nm einstellbar ist, besteht eine besonders bevorzugte Weiterbildung darin, daß die Vorrichtung eine semi-transparente, insbesondere sphärisch gekrümmte Kapillarenanordnung aufweist, insbesondere eine Vielkanal-Kapillarenanordnung, mit der der Schalter und die Anordnung von einer Vakuumanlage eines Benutzers der erzeugten Strahlung trennbar sind, um Absorption der Strahlung im Medium zu reduzieren.In view of the very short wavelength of the radiation generated, which in particular depending on the type of gas to 13.5 nm, 13.0 nm or 11.4 nm is adjustable, there is a particularly preferred development in that the device is a semi-transparent, in particular has a spherically curved capillary arrangement, in particular a multi-channel capillary arrangement with which the Switches and the arrangement of a user's vacuum system the radiation generated are separable to absorb the Reduce radiation in the medium.

Weitere vorteilhafte Ausführungsformen ergeben sich aus den Unteransprüchen. Further advantageous embodiments result from the subclaims.

Ein Ausführungsbeispiel der Erfindung wird im Folgenden unter Hinweis auf die beigefügten Zeichnungen näher beschrieben.An embodiment of the invention is described below Reference to the accompanying drawings described in more detail.

Es stellen dar:

Fig. 1
Die aus dem Stand der Technik bekannte Blumlein-Schaltung zum Zünden einer elektrischen Gasentladung;
Fig. 2
in schematischer geschnittener Darstellung die Entladungsregion einer erfindungsgemäßen Vorrichtung; und
Fig. 3
die elektrische Beschaltung der erfindungsgemäßen Vorrichtung von Fig. 2.
They represent:
Fig. 1
The Blumlein circuit known from the prior art for igniting an electrical gas discharge;
Fig. 2
the discharge region of a device according to the invention in a schematic sectional illustration; and
Fig. 3
the electrical wiring of the device according to the invention from FIG. 2.

Die vorliegende Erfindung wird nunmehr am Beispiel einer axialen Doppelanordnung zweier Z-Pinche beschrieben, ohne den Erfindungsgedanken auf diese als Beispiel gewählte Ausführungsform einzuschränken.The present invention is now based on the example of an axial Double arrangement of two Z-pinches described, without the inventive concept to this embodiment chosen as an example limit.

Fig. 2 zeigt in schematischer Darstellung einen Querschnitt durch die Entladungsregion einer axialen Doppelanordnung zweier Z-Pinche. Die erfindungsgemäße Vorrichtung weist eine erste Pinch-Elektrode 10, eine zweite Pinch-Elektrode 12 und eine dritte Pinch-Elektrode 14 auf. Die Pinch-Elektroden 10 und 12 sind bei der Schaltentladung beteiligt, während die Hauptentladung von den Pinch-Elektroden 12 und 14 besorgt wird. Eine Trigger-Elektrode 16 dient zur Zündung einer Trigger-Entladung zur Pinch-Elektrode 10. Die Darstellung von Fig. 2 läßt mehrere Isolatorröhrchen 5a, 5b, 5c, 5d erkennen, die vorzugsweise aus Keramikwerkstoffen, beispielsweise Al2O3, gebildet sind. Die zwei Pinche, d.h. der erste von den Pinch-Elektroden 10 und 12 gebildete Schalter-Pinch und der zweite von den Pinch-Elektroden 12 und 14 gebildete Hauptpinch, sind entlang einer gemeinsamen Symmetrieachse 18 angeordnet. An der von der Gasentladung abgewandten Seite ist eine Kühlvorrichtung 20 vorgesehen, die vorzugsweise als Mikrokanal-Diffusionskühlung ausgebildet ist. Alternativ kann zur Kühlung der Elektroden vorgesehen werden, die Elektroden hohl auszubilden und zur Kühlung direkt mit einem Medium wie Isolieröl in Kontakt zu bringen.Fig. 2 shows a schematic representation of a cross section through the discharge region of an axial double arrangement of two Z-pinches. The device according to the invention has a first pinch electrode 10, a second pinch electrode 12 and a third pinch electrode 14. The pinch electrodes 10 and 12 are involved in the switching discharge, while the main discharge is provided by the pinch electrodes 12 and 14. A trigger electrode 16 is used to ignite a trigger discharge to the pinch electrode 10. The illustration in FIG. 2 shows a plurality of insulator tubes 5a, 5b, 5c, 5d, which are preferably formed from ceramic materials, for example Al 2 O 3 . The two pinches, ie the first switch pinch formed by pinch electrodes 10 and 12 and the second main pinch formed by pinch electrodes 12 and 14, are arranged along a common axis of symmetry 18. On the side facing away from the gas discharge, a cooling device 20 is provided, which is preferably designed as a microchannel diffusion cooling. Alternatively, for cooling the electrodes, provision can be made for the electrodes to be hollow and for cooling to be brought into direct contact with a medium such as insulating oil.

Die rechte Seite der Anordnung von Fig. 2 ist die zum Benutzer gerichtete Seite, d.h. auf dieser Seite wird die Strahlung aus dem System ausgeleitet und zum Einsatzort transportiert. Wie weiter unten noch detaillierter beschrieben werden wird, ist es erforderlich, in den Entladungsraum 22 Gas einzubringen, damit eine Gasentladung stattfinden kann. Im Hinblick auf die äußerst kurze Wellenlänge der erzeugten Strahlung, die weniger als 100 nm, bevorzugt weniger als 50 nm, insbesondere 13,5 nm, 13,0 nm oder 11,4 nm beträgt, ist es besonders vorteilhaft, den Transportweg von der Anordnung zur Strahlungserzeugung bis zum Einsatzort als Vakuum auszubilden, da ansonsten die erzeugte Strahlung von den Gasatomen auf diesem Weg bereits wieder absorbiert werden kann. Zu diesem Zweck ist in der erfindungsgemäßen Vorrichtung eine Vielkanal-Kapillaren-Anordnung 24 auf der zum Benutzer gerichteten Seite angeordnet, die zum Ausbilden einer Druckdifferenz geeignet ist und bewirkt, daß nur geringe Gasmengen in den Transportweg gelangen und die Absorption im Medium deutlich verringert werden kann.The right side of the arrangement of Fig. 2 is the user facing side, i.e. on this side the radiation is off the system and transported to the place of use. How will be described in more detail below, it is required to bring gas into the discharge space 22 so that a gas discharge can take place. With regard to the extreme short wavelength of radiation generated, less than 100 nm, preferably less than 50 nm, in particular 13.5 nm, 13.0 nm or 11.4 nm, it is particularly advantageous to use the transport route from the arrangement for generating radiation to the place of use to train as a vacuum, otherwise the generated one Radiation from the gas atoms is already absorbed again in this way can be. For this purpose, in the invention Device a multi-channel capillary arrangement 24 the user-facing side arranged for training a pressure difference is suitable and causes only small Gas quantities get into the transport route and the absorption can be significantly reduced in the medium.

Eine ähnliche, wenngleich weniger effiziente Maßnahme besteht darin, das Keramikröhrchen 5d als sich in Richtung zur Gasentladung verjüngenden Stopfen auszubilden.A similar, albeit less efficient, measure exists therein, the ceramic tube 5d as directed towards the gas discharge to form tapered plugs.

In Fig. 3 ist die elektrische Beschaltung der erfindungsgemäßen Vorrichtung dargestellt. Sie umfaßt neben den erwähnten Pinch-Elektroden 10, 12, 14 die Trigger-Elektrode 16, die jeweils vorzugsweise als Scheiben- oder Hohlzylinder ausgebildet sind, sowie zwei Kondensatorbänke C1, C2, die über Vorwiderstände R an Hochspannung HV angelegt sind. Die Kondensatorbank C2 ist mit ihrem anderen Anschluß direkt mit Masse verbunden, während die Kondensatorbank C1 mit ihrem anderen Anschluß über einen Widerstand R' mit Masse verbunden ist. Die Triggerelektrode 16 ist mit einer niedrigen Hochspannung NHV verbunden, die niedrigere Amplitude und umgekehrte Polarität aufweist als die Hochspannung HV .In Fig. 3 is the electrical wiring of the invention Device shown. In addition to the aforementioned pinch electrodes, it also includes 10, 12, 14 the trigger electrode 16, each are preferably designed as disc or hollow cylinders, and two capacitor banks C1, C2, which are connected via series resistors R are applied to high voltage HV. The capacitor bank is C2 connected directly to ground at its other terminal, while the capacitor bank C1 with its other connection via a Resistor R 'is connected to ground. The trigger electrode 16 is connected to a low high voltage NHV, the lower one Has amplitude and reverse polarity than the high voltage HV.

Zur Funktionsweise:How it works:

Nach Aufladung der Kondensatorbänke C1, C2 liegt die Pinch-Elektrode 10 quasi auf Massepotential. Wird nunmehr an die Triggerelektrode 16 eine negative niedrige Hochspannung NHV angelegt, so entsteht eine Entladung von der Elektrode 16 zur ersten Pinch-Elektrode 10. Dadurch werden Ladungsträger am linksseitigen Ende des Entladungsraums 22 bereitgestellt. Diese Ladungsträger wirken als Vorionisation für den Schalter-Pinch, der die Pinch-Elektroden 10 und 12 umfaßt. Hierdurch bildet sich eine Gleitentladung zwischen der Pinch-Elektrode 10 und der Pinch-Elektrode 12 aus, wodurch aufgrund der niedrigen Induktivität schnell großer Strom fließt. Zwischen Pinch-Elektrode 12 und Pinch-Elektrode 14 entsteht keine Gleitentladung, da diese beiden Elektroden auf demselben Potential liegen. Die Gleitentladung zwischen Pinch-Elektrode 10 und Pinch-Elektrode 12 führt zum Kurzschließen der Kondensatorbank C1 und resultiert in einer Umladung der Pinch-Elektrode 12. Die Zeitdauer bis zur Umladung wird bestimmt von den an diesem Schwingkreis beteiligten Widerständen, Kondensatoren und Induktivitäten. Nach der ersten Halbwelle dieser Schwingung ist die Pinch-Elektrode 12 auf einem Potential, das nahezu gleich groß ist wie die Hochspannung HV, jedoch umgekehrte Polarität aufweist. Zwischen der Pinch-Elektrode 12 und der Pinch-Elektrode 14 liegt daher nahezu die doppelte Hochspannung HV an, was darin resultiert, daß die Hauptentladung durchbricht.After charging the capacitor banks C1, C2, the pinch electrode is located 10 quasi to ground potential. Will now go to the Trigger electrode 16 applied a negative low high voltage NHV, this creates a discharge from the electrode 16 to the first Pinch electrode 10. This causes charge carriers on the left side End of the discharge space 22 provided. These carriers act as pre-ionization for the switch pinch, which includes the pinch electrodes 10 and 12. This forms there is a sliding discharge between the pinch electrode 10 and the pinch electrode 12, which due to the low inductance large current flows quickly. Between the pinch electrode 12 and pinch electrode 14 there is no sliding discharge, because these two electrodes are at the same potential. The sliding discharge between pinch electrode 10 and pinch electrode 12 leads to short-circuiting the capacitor bank C1 and results in a recharge of the pinch electrode 12. The time period until the transhipment is determined by the on this resonant circuit involved resistors, capacitors and inductors. After the first half wave of this vibration is the pinch electrode 12 at a potential that is almost the same size like the high voltage HV, but has reverse polarity. Between the pinch electrode 12 and the pinch electrode 14 is therefore almost twice the high voltage HV, what is in it results in the main discharge breaking down.

Nicht dargestellt sind Vorrichtungen zur gepulsten Gaszufuhr in den Entladungsraum, vorzugsweise links in der Darstellung der Fig. 2 angeordnet, sowie Vorrichtungen zum Abpumpen des Gases.Devices for pulsed gas supply are not shown in the discharge space, preferably on the left in the representation of the Fig. 2 arranged, and devices for pumping the gas.

Bei einem bevorzugten Labormuster kann die Hochspannung HV bis 40 kV, die niedrige Hochspannung NHV -5kV betragen. Die Kondensatorbänke können realisiert werden als 60 in Öl angeordnete Kondensatoren mit einer Kapazität von jeweils 1,7 nF (50 kVDc). Die Keramikröhrchen 5b und 5c haben eine Länge von 30 mm sowie einen Innendurchmesser von 15 mm bei einem Außendurchmesser von 20 mm. Die Elektroden sind ringförmig ausgebildet und aus einem hochschmelzenden Werkstoff, wie z.B. Molybdän. Der Gesamtdurchmesser der Anordnung einschließlich der Kondensatorbänke beträgt 600 mm, während die Gesamtlänge der Anordnung in Richtung der Symmetrieachse, wie in Fig. 2 dargestellt, 90 mm beträgt. Die in den Kondensatoren gespeicherte Energie kann je nach angelegter Hochspannung zwischen 68 und 81 J betragen. Die Hauptentladung dauert ca. 50 ns, wobei der Anteil der vom Schalter-Pinch zur Gesamtstrahlung geleistet wird bis zu ca. 30 % betragen kann. Ein Pulsbetrieb der Anordnung von bis zu 100 Hz ist problemlos möglich. Als Gas eignet sich insbesondere Xenon.In a preferred laboratory pattern, the high voltage can be HV to 40 kV, the low high voltage NHV -5kV. The capacitor banks can be realized as 60 arranged in oil Capacitors with a capacitance of 1.7 nF (50 kVDc) each. The ceramic tubes 5b and 5c have a length of 30 mm as well an inner diameter of 15 mm with an outer diameter of 20 mm. The electrodes are ring-shaped and made of one refractory material, such as Molybdenum. The total diameter the arrangement including the capacitor banks is 600 mm, while the total length of the arrangement towards the axis of symmetry, as shown in Fig. 2, is 90 mm. The energy stored in the capacitors can vary between 68 and 81 J after high voltage is applied. The main discharge lasts approx. 50 ns, the proportion of which from Switch pinch to total radiation is made up to about 30 % can be. A pulse operation of the arrangement of up to 100 Hz is possible without any problems. Is particularly suitable as a gas Xenon.

Im allgemeinen liegt der Abstand und der Innendurchmesser der Elektroden sowie die Länge und der Innendurchmesser der sie trennenden Isolatoren im Millimeter- bis Zentimeterbereich. Die Anordnung und der Schalter werden bevorzugt mit Edelgasen, Sauerstoff, Sauerstoff enthaltenden Gasen oder Dämpfen oder Gemischen aus den genannten Gasen bei einem Druck im Bereich von 1 Pa bis 1000 Pa betrieben.In general, the distance and the inner diameter of the Electrodes as well as the length and inner diameter of them isolating isolators in the millimeter to centimeter range. The Arrangement and the switch are preferred with noble gases, oxygen, Gases or vapors or mixtures containing oxygen from the gases mentioned at a pressure in the range of 1 Pa operated up to 1000 Pa.

Claims (16)

  1. Pulsable device including an assembly with two electrodes (12, 14) for generating radiation from a magnetically compressed electrical gas discharge, and a switch for initiating the radiation generation of the assembly,
    characterized in that
    the switch (10, 12) includes first and second switch discharge electrodes (10; 12) disposed in a preset distance along an axis (18) such that an electrical gas discharge magnetically self-compressing on the axis (18) to a current streamer can be generated as a switch discharge.
  2. Device according to claim 1,
    characterized in that
    the assembly is each designed as a Z pinch or as a gas puff Z pinch or as a capillary discharge or as a plasma focus discharge or as a pseudo spark discharge or as a transient hollow cavity discharge.
  3. Device according to claim 1 or 2,
    characterized in that
    the switch is each designed as a Z pinch or as a gas puff Z pinch or as a capillary discharge or as a plasma focus discharge or as a pseudo spark discharge or as a transient hollow cavity discharge.
  4. Device according to any one of the preceding claims,
    characterized in that
    the assembly and the switch have a common axis of symmetry (18), wherein the radiation emitted by the assembly and the switch is able to be emitted into the same spatial region.
  5. Device according to any one of the preceding claims,
    characterized in that
    the switch is ignitable and/or pre-ionizable by a trigger discharge.
  6. Device according to any one of the preceding claims,
    characterized in that
    the charge carriers generated by the switch after ignition thereof are usable for pre-ionization of the assembly.
  7. Device according to any one of the preceding claims,
    characterized in that
    the device has at least one capacitor bank (C1, C2), wherein by the at least one capacitor bank the energy for the radiation emitted by the switch and/or the assembly is able to be provided.
  8. Device according to any one of claims 5 to 7,
    characterized in that
    the device further includes
    at least one trigger electrode (16) for generating the trigger discharge;
    at least one main discharge electrode (12, 14) for generating the main discharge of the assembly; and
    an electrode near ground.
  9. Device according to claim 8,
    characterized in that
    the trigger electrode(s) (16), the switch discharge electrode(s) (10, 12) and the main discharge electrode(s) (12, 14) are designed as disks or as hollow cylinders or as hollow cylinders with aligned apertures.
  10. Device according to claim 9,
    characterized in that
    the trigger electrode(s) (16), the switch discharge electrode(s) (10, 12) and the main discharge electrode(s) (12, 14) are disposed along a common axis of symmetry (18) such that the openings of the disks and/or hollow cylinders are oriented in alignment.
  11. Device according to claim 9 or 10,
    characterized in that
    the disks and/or hollow cylinders are disposed electrically isolated from each other, especially by disks and/or hollow cylinders (5a, 5b, 5c, 5d) of electrically isolating material, especially ceramic raw materials, disposed between the disks and/or the hollow cylinders.
  12. Device according to any one of claims 8 to 11,
    characterized in that
    the assembly has a cooling device (20), especially formed as a microchannel diffusion cooling, for cooling the system of trigger electrode (16), switch discharge electrode (10, 12) and main discharge electrode (12, 14) on the side facing away from the discharge side.
  13. Device according to any one of claims 4 to 12,
    characterized in that
    the device has a semi-transparent, especially spherically curved capillary assembly (24), especially a multi-channel capillary assembly, by which the switch and the assembly are separable from a vacuum equipment of a user of the generated radiation.
  14. Device according to any one of the preceding claims,
    characterized in that
    the generated radiation has a wavelength of less than 50 nm, especially is EUV radiation and/or soft X-ray radiation.
  15. Method for generating radiation, comprising the steps of:
    a) effecting a switch discharge by an electrical gas discharge magnetically self-compressing to an axis (18) to a current streamer in a switch (10, 12) having first and second switch discharge electrodes (10; 12) disposed in a preset distance along the axis (18);
    b) using the magnetically self-compressed electrical gas discharge of the switch for initiating a magnetically compressed electrical gas discharge in an assembly (12, 14) for generating radiation.
  16. Method according to claim 15,
    characterized in that
    in step a) the gas discharge of the switch is ignited and/or pre-ionized by a trigger discharge.
EP20000113560 2000-06-27 2000-06-27 Pulse device with a system for radiation generation and method for radiation generation Expired - Lifetime EP1168895B9 (en)

Priority Applications (3)

Application Number Priority Date Filing Date Title
DE50006337T DE50006337D1 (en) 2000-06-27 2000-06-27 Pulsable device with an arrangement for generating radiation and method for generating radiation
EP20000113560 EP1168895B9 (en) 2000-06-27 2000-06-27 Pulse device with a system for radiation generation and method for radiation generation
PCT/EP2001/007344 WO2002001926A1 (en) 2000-06-27 2001-06-27 Pulsable device with an arrangement for producing radiation and method for producing radiation

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
EP20000113560 EP1168895B9 (en) 2000-06-27 2000-06-27 Pulse device with a system for radiation generation and method for radiation generation

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EP1168895B1 EP1168895B1 (en) 2004-05-06
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CN102523675B (en) * 2011-12-13 2014-08-06 西安交通大学 Plasma ejection device for igniting long air spark gap and circuit thereof

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IT1171313B (en) * 1981-06-17 1987-06-10 Selenia Ind Elettroniche LONGITUDINAL PULSE DISCHARGE LASER WITH PREIONIZATION OBTAINED BY CROWN EFFECT
CA1239486A (en) * 1985-10-03 1988-07-19 Rajendra P. Gupta Gas discharge derived annular plasma pinch x-ray source

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