EP1565922B1 - Electrostatic microswitch for low-voltage-actuation components - Google Patents
Electrostatic microswitch for low-voltage-actuation components Download PDFInfo
- Publication number
- EP1565922B1 EP1565922B1 EP03786074A EP03786074A EP1565922B1 EP 1565922 B1 EP1565922 B1 EP 1565922B1 EP 03786074 A EP03786074 A EP 03786074A EP 03786074 A EP03786074 A EP 03786074A EP 1565922 B1 EP1565922 B1 EP 1565922B1
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- European Patent Office
- Prior art keywords
- electrodes
- deformable means
- electrostatic
- support
- control electrodes
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
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- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 238000004377 microelectronic Methods 0.000 description 2
- 230000035939 shock Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 239000000758 substrate Substances 0.000 description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
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- 229920001721 polyimide Polymers 0.000 description 1
- 229910052814 silicon oxide Inorganic materials 0.000 description 1
Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
- H01H59/00—Electrostatic relays; Electro-adhesion relays
- H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
- H01H2059/0063—Electrostatic relays; Electro-adhesion relays making use of micromechanics with stepped actuation, e.g. actuation voltages applied to different sets of electrodes at different times or different spring constants during actuation
Definitions
- the invention relates to an electrostatic micro-switch with high reliability of operation and adapted to components with low operating voltage.
- microswitch are included micro-relays, MEMS type actuators (for "Micro-Electro-Mechanical-System") and high frequency actuators.
- the micro-switches are very widely used in the field of communications: in the signal routing, the tuning networks of imdisputedpances, the gain adjustment of amplifiers, etc ...
- these frequencies are between a few MHz and several tens of GHz.
- switches from microelectronics are used, which allow integration with the circuit electronics and which have a low manufacturing cost. In terms of performance, these components are rather limited.
- silicon FET type switches can switch high power signals at low frequency but not high frequency.
- MESFET switches in GaAs or PIN diodes work well at high frequencies but only for low level signals.
- all these micro-electronic switches have a significant loss of insertion (typically around 1 to 2 dB) in the on state and a relatively weak insulation in the state open (-20 to -25 dB). The replacement of conventional components by MEMS microswitches is therefore promising for this type of application.
- the other type of contact is the capacitive switch described in the article "RF MEMS From a Device Perspective” by J. Jason Yao cited above and in the article “Finite Ground Coplanar Waveguide Shunt MEMS Switches for Switched Line Phase Shifters”From George E. Ponchak et al., published in 30th European Microwave Conference, Paris 2000, pages 252 to 254.
- an air layer is electromechanically adjusted to obtain a variation of capacitance between the closed state and open state.
- This type of contact is particularly well suited to high frequencies (above 10 GHz) but inadequate at low frequencies.
- thermal actuated switches In the state of the art, there are two major operating principles for MEMS switches: thermal actuated switches and electrostatically actuated switches.
- the thermally actuated switches have the advantage of a low actuating voltage. On the other hand, they have the following drawbacks: excessive consumption (especially in the case of applications in mobile telephony), low switching speed (because of thermal inertia) and often heavy technology.
- microswitch which differs from the state of the art by its mode of operation and design. It has in fact two distinct sets of operating electrodes and uses a two-step actuation mode which allows it to reconcile both a low operating voltage and a low switching time while maintaining a mechanical stiffness of micro-switch in high operation.
- the invention therefore relates to an electrostatic microswitch for electrically connecting at least two electrically conductive tracks arranged on a support, the electrical connection between the two conductive tracks being done by means of a contact pad provided on deformable means made of insulating material and able to deform with respect to the support under the action of a electrostatic force generated by control electrodes, the contact pad providing the electrical connection of the ends of the two conductive tracks when the deformable means are sufficiently deformed, characterized in that the control electrodes are distributed over the deformable means and the support in two electrode sets, a first set of electrodes for generating a first electrostatic force to initiate the deformation of the deformable means, a second set of electrodes for generating a second electrostatic force to continue the deformation of the deformable means so that the contact pad electrically connects the ends of the two conductive tracks.
- control electrodes distributed on the deformable means may be disposed thereon so that the deformable means are interposed between them and the control electrodes distributed on the support.
- control electrodes distributed on the support comprise two electrodes which are each a common electrode for the first set of electrodes and for the second set of electrodes.
- the deformable means may comprise a beam embedded at its two ends or a cantilever beam.
- the control electrodes distributed on the deformable means may comprise electrodes of one of the two sets of electrodes arranged on ancillary parts. attached to the beam and arranged on each side of the beam.
- the control electrodes distributed on the deformable means may comprise electrodes of the other of the two sets of electrodes arranged on the beam and arranged on each side of the contact pad.
- Figure 1 is a top view of an electrostatic microswitch according to the present invention.
- the micro-switch is made on the surface of an insulating substrate.
- the surface is provided with a recess 1 delimited by edges 2, 12, 22 and 32 overhanging it.
- a beam 3 is formed above the recess 1 having a first end integral with the edge 22 and a second end integral with the edge 32. It is therefore a beam embedded at both ends.
- the beam 3 is provided with two additional parts or fins 13 and 23 located at the same level as the beam 3.
- the fins 13 and 23 are located on either side of the beam 3. They are attached to the beam by a part narrowed central. They are attached to the edges 2 and 12 by lateral narrowed parts.
- the electrically conductive tracks to be connected are referenced 4 and 5. They have ends, respectively 14 and 15, arranged under the beam 3 and aligned along the longitudinal axis of the beam 3, facing each other.
- the bottom of the recess 1 supports two lower electrodes 101 and 102 respectively connectable electrically by the contact pads 111 and 112.
- the electrodes 101 and 102 are arranged symmetrically with respect to the longitudinal axis of the beam 3.
- the electrode 101 is located facing a first lateral portion of the beam 3 and facing the fin 13.
- the electrode 102 is opposite a second lateral portion of the beam 3 and facing the fin 23.
- the beam 3 supports several electrical conductors: a contact pad 6 and two electrodes 7 and 8.
- the contact pad 6 is located along the longitudinal axis of the beam 3 and extends to the top of the ends 14 and conductive tracks 4 and 5.
- the contact pad 6 protrudes from the bottom face of the beam 3 or flows at this lower face so as to electrically connect the ends 14 and 15 if the beam 3 is sufficiently deformed.
- the electrodes 7 and 8 are located on the face of the beam 3 opposite to the recess. Each is located on a lateral part of the beam so that the electrode 7 is located facing the corresponding part of the lower electrode 101 and the electrode 8 is located opposite the corresponding part of the lower electrode. 102.
- the electrodes 7 and 8 may be respectively electrically connected by the contact pads 17 and 18.
- the fin 13 supports on its upper face, that is to say the face opposite the recess, an electrode 33 that can be electrically connected by a contact pad 43.
- the electrode 33 is opposite a part of the lower electrode 101.
- the fin 23 supports on its upper face an electrode 53 which can be electrically connected by a contact pad 63.
- the electrode 53 is opposite a part of the lower electrode 102.
- FIG. 2 is a sectional view along the axis II-II of FIG. 1 and FIG. 3 is a sectional view along the axis III-III of FIG. 1. These figures show the non-deflected state of the beam 3 in the absence of potentials applied to the electrodes.
- FIGS 4 and 5 are explanatory views of the operation of the microswitch. These views correspond to the section shown in Figure 2.
- a voltage V1 is first applied to the first set of electrodes constituted by the electrodes 33 and 53 on the one hand and by the electrodes 101 and 102 on the other hand.
- the voltage V1, strain initiation voltage is chosen to come to press the center of the beam on the lower electrodes 101 and 102 as shown in Figure 4. In the case of a beam cantilever or cantilever, this first set of electrodes would function to press the end of the beam on the lower electrodes.
- the application of the voltage V1 to the first set of electrodes places the microswitch in operation but in the non-switched state, the ends 14 and 15 of the conductive tracks being sufficiently distant from each other for a mechanical contact of the beam is obtained without electrical contact.
- This displacement of the beam being activated only to prime the switch (for example at the start of a mobile phone), the damping brought by the large surface of these electrodes has no effect on the switching time of the switch in operation.
- This first set of electrodes has a sufficient surface to allow the abutment of the beam for a voltage less than 10 V, or even less than 5V.
- a voltage V2 is then applied to the second set of electrodes constituted by the electrodes 7 and 8 on the one hand and by the electrodes 101 and 102 on the other hand.
- the voltage V2, switching voltage is chosen to deform the beam 3 until the ends 14 and 15 come into contact with the contact pad 6 of the beam as shown in FIG.
- the second set of electrodes due to the bending of the beam during the initiation of the deformation, it makes it possible to actuate the microswitch with a low voltage while maintaining a high beam stiffness.
- the arrangement and the number of the electrodes can be variable.
- One or more electrodes may be constituent of the beam.
- the deformation of the beam under the effect of a starting voltage makes it possible to very greatly reduce the holding voltage of the deformed beam during switching.
- the invention provides a high stability and high reliability of the micro-switch in operation. This is due to the significant mechanical stiffness of the micro-switch in operation, that is to say after the initiation of the deformation. This results in a very low sensitivity to shocks and accelerations during operation, as well as the possible effects of trapping charges in the dielectric layer.
- the switching time is reduced, given the small displacement of the beam between the unswitched position and the switched position (limited air movement thus limited damping).
- the high frequency insulation is optimized because of the large distance of the two tracks to be connected.
- Another advantage of the invention consists in the manufacture of this micro-switch according to a technique compatible with the technique of manufacturing integrated circuits.
- the device of the invention differs from the microswitches of the prior art by the following characteristics.
- the operating voltage is low while maintaining a low sensitivity to accelerations, high reliability of operation, a low switching time and mechanical relaxation.
- the two-step operating mode also distinguishes the device according to the invention from the microswitches of the prior art.
- the phase of initiation of the deformation is carried out with a low actuation voltage and without strong constraint on the response time, the risk of electrostatic bonding and sensitivity to accelerations.
- the switching phase is performed at low voltage actuator meeting the criteria of low sensitivity to accelerations, low sensitivity to the risks of electrostatic bonding and low switching time.
- FIGS. 6A to 6G are sectional views illustrating a method of producing a microswitch according to the invention.
- FIG. 6A shows a silicon substrate 70 covered with a silicon oxide deposit 71 which has undergone a lithogravure operation in order to define a recess.
- the oxide deposit may be 2 ⁇ m thick and the depth of the etching may be 1.7 ⁇ m.
- the etching has defined a recess 72 and housings for electrode contact pads and conductive tracks, one of which, the housing 73 is visible.
- a metal deposit is then performed on the etched structure. It may be a bilayer comprising a crimp layer of 0.05 ⁇ m thick and a 0.9 ⁇ m thick gold layer. Lithography of the metal layer present in the recess and in the stud housings is carried out to define the tracks to be connected and the lower ignition and switching electrodes. The unprotected metal is etched to obtain the structure shown in Figure 6B.
- the reference 74 represents a contact pad of a lower control electrode
- the references 75 and 76 represent the ends of the conductive tracks to be connected
- the reference 77 represents a lower control electrode.
- FIG. 6C shows that a sacrificial layer 78, for example polyimide, has been deposited on the structure and planarized to the top of the oxide layer 71.
- a sacrificial layer 78 for example polyimide
- Figure 6D shows that a layer of dielectric material 79 has been deposited on the structure to form the beam. It may be a layer of Si 3 N 4 0.5 ⁇ m thick. An opening 80 is made, by lithography, in the layer 79 to define the location of the microswitch contact pad at the ends of the tracks 75 and 76.
- a metal deposit is then made on the structure. It may be a gold layer 0.5 ⁇ m thick. A lithography of this layer is performed to define the contact pad of the conductive tracks and the upper ignition and switching electrodes. The etching of this layer makes it possible to obtain these conductive elements.
- Figure 6E shows the contact pad 81, a contact pad 82 of the ignition electrodes (not shown), a switching electrode 83 and a contact pad 84 of a switching electrode.
- the layer 79 is then lithographically treated to define the beam 85 with stopping of the etching on the sacrificial layer 78 (see FIG. 6F).
- the sacrificial layer is then removed by dry etching, for example of the plasma type oxygen.
- the structure shown in FIG. 6G is obtained.
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- Electronic Switches (AREA)
- Push-Button Switches (AREA)
Abstract
Description
L'invention concerne un micro-commutateur électrostatique à grande fiabilité de fonctionnement et adapté aux composants à faible tension d'actionnement. Sous le terme de micro-commutateur, on inclut les micro-relais, les actionneurs de type MEMS (pour "Micro-Electro-Mechanical-System) et les actionneurs haute fréquence.The invention relates to an electrostatic micro-switch with high reliability of operation and adapted to components with low operating voltage. Under the term microswitch are included micro-relays, MEMS type actuators (for "Micro-Electro-Mechanical-System") and high frequency actuators.
L'article "RF MEMS from a device perspective" de J. Jason Yao, paru dans J. Micromech. Microeng. 10(2000), pages R9 à R38, récapitule les progrès récents accomplis dans le domaine des MEMS pour des applications haute fréquence.The article "RF MEMS from a device perspective" by J. Jason Yao, published in J. Micromech. Microeng. 10 (2000), pages R9 to R38, summarizes recent advances in the field of MEMS for high frequency applications.
Les composants haute fréquence ou RF pour la téléphonie mobile se voient imposer le cahier des charges suivants :
- tension d'alimentation inférieure à 5 V,
- isolation supérieure à 30 dB,
- perte d'insertion inférieure à 0,3 dB,
- fiabilité pour un nombre de cycles supérieur à 109,
- dimensions inférieures à 0,05 mm2.
- supply voltage less than 5 V,
- insulation greater than 30 dB,
- insertion loss less than 0.3 dB,
- reliability for a number of cycles greater than 10 9 ,
- dimensions less than 0.05 mm 2 .
Les micro-commutateurs sont très largement utilisés dans le domaine des communications : dans le routage des signaux, les réseaux d'accord d'imdépances, l'ajustage de gain d'amplificateurs, etc... En ce qui concerne les bandes de fréquences des signaux à commuter, ces fréquences sont comprises entre quelques MHz et plusieurs dizaines de GHz.The micro-switches are very widely used in the field of communications: in the signal routing, the tuning networks of imdépances, the gain adjustment of amplifiers, etc ... As for the frequency bands of the signals to be switched, these frequencies are between a few MHz and several tens of GHz.
Classiquement, pour ces circuits RF, on utilise des commutateurs issus de la microélectronique, qui permettent une intégration avec l'électronique des circuits et qui ont un faible coût de fabrication. En termes de performances, ces composants sont par contre assez limités. Ainsi, des commutateurs de type FET en silicium peuvent commuter des signaux de forte puissance à basse fréquence mais pas à haute fréquence. Les commutateurs de type MESFET en GaAs ou les diodes PIN fonctionnent bien à haute fréquence mais uniquement pour des signaux de faibles niveaux. Enfin, d'une manière générale, au delà de 1 GHz, tous ces commutateurs micro-électroniques présentent une perte d'insertion importante (classiquement autour de 1 à 2 dB) à l'état passant et une isolation assez faible à l'état ouvert (-20 à -25 dB). Le remplacement de composants conventionnels par des micro-commutateurs MEMS est par conséquent prometteur pour ce type d'application.Conventionally, for these RF circuits, switches from microelectronics are used, which allow integration with the circuit electronics and which have a low manufacturing cost. In terms of performance, these components are rather limited. Thus, silicon FET type switches can switch high power signals at low frequency but not high frequency. MESFET switches in GaAs or PIN diodes work well at high frequencies but only for low level signals. Finally, in general, beyond 1 GHz, all these micro-electronic switches have a significant loss of insertion (typically around 1 to 2 dB) in the on state and a relatively weak insulation in the state open (-20 to -25 dB). The replacement of conventional components by MEMS microswitches is therefore promising for this type of application.
De par leur conception et leur principe de fonctionnement, les commutateurs MEMS présentent les caractéristiques suivantes :
- faibles pertes d'insertion (typiquement inférieures à 0,3 dB),
- isolation importante du MHz au millimétrique (typiquement supérieure à -30 dB),
- faible consommation,
- pas de non-linéarité de réponse.
- low insertion losses (typically less than 0.3 dB),
- significant MHz isolation to millimeter (typically greater than -30 dB),
- low consumption,
- no non-linearity of response.
On distingue deux types de contact pour ces micro-commutateurs MEMS.There are two types of contact for these micro-switches MEMS.
L'un de ces types de contact est le commutateur à contact ohmique décrit dans l'article "RF MEMS from a device perpective" de J. Jason Yao cité ci-dessus et dans l'article "A Surface Micromachined Miniature Switch For Telecommunications Applications with Signal Frequencies From DC up to 4 GHz" de J. Jason Yao et M. Franck Chang, paru dans la revue Transducers'95, Eurosensors IX, pages 384 à 387. Dans ce type de contact, les deux pistes RF sont mises en contact par un court-circuit (contact métal-métal). Ce type de contact est adapté aussi bien pour les signaux continus que pour les signaux haute fréquence (supérieure à 10 GHz).One of these types of contact is the ohmic contact switch described in the article "RF MEMS from a device perpective" by J. Jason Yao cited above and in the article "Surface Micromachined Miniature Switch For Telecommunications Applications". with the signal frequencies from DC up to 4 GHz "by J. Jason Yao and M. Franck Chang, published in the magazine Transducers'95, Eurosensors IX, pages 384 to 387. In this type of contact, the two RF tracks are implemented. contact by a short circuit (metal-metal contact). This type of contact is suitable for both continuous signals and high frequency signals (above 10 GHz).
L'autre type de contact est le commmutateur capacitif décrit dans l'article "RF MEMS From a device perspective" de J. Jason Yao cité ci-dessus et dans l'article "Finite Ground Coplanar Waveguide Shunt MEMS Switches for Switched Line Phase Shifters" de George E. Ponchak et al., paru dans 30th European Microwave Conference, Paris 2000, pages 252 à 254. Dans ce type de contact, une couche d'air est ajustée de manière électromécanique pour obtenir une variation de capacité entre l'état fermé et l'état ouvert. Ce type de contact est particulièrement bien adapté aux hautes fréquences (supérieures à 10 GHz) mais inadéquat aux basses fréquences.The other type of contact is the capacitive switch described in the article "RF MEMS From a Device Perspective" by J. Jason Yao cited above and in the article "Finite Ground Coplanar Waveguide Shunt MEMS Switches for Switched Line Phase Shifters "From George E. Ponchak et al., published in 30th European Microwave Conference, Paris 2000, pages 252 to 254. In this type of contact, an air layer is electromechanically adjusted to obtain a variation of capacitance between the closed state and open state. This type of contact is particularly well suited to high frequencies (above 10 GHz) but inadequate at low frequencies.
Dans l'état de l'art, on distingue deux grand principes d'actionnement pour les commutateurs MEMS : les commutateurs à actionnement thermique et les commutateurs à actionnement électrostatique.In the state of the art, there are two major operating principles for MEMS switches: thermal actuated switches and electrostatically actuated switches.
Les commutateurs à actionnement thermique présentent l'avantage d'une faible tension d'actionnement. Par contre, ils présentent les inconvénients suivants : consommation excessive (surtout dans le cas d'applications en téléphonie mobile), vitesse de commutation faible (à cause de l'inertie thermique) et technologie souvent lourde.The thermally actuated switches have the advantage of a low actuating voltage. On the other hand, they have the following drawbacks: excessive consumption (especially in the case of applications in mobile telephony), low switching speed (because of thermal inertia) and often heavy technology.
Les commutateurs à actionnement électrostatique présentent les avantages d'une vitesse de commutation rapide et d'une technologie généralement simple. Par contre, ils présentent l'inconvénient dû à des problèmes de fiabilité. Ce point est particulièrement sensible dans le cas de micro-commutateurs électrostatiques à faible tension d'actionnement (possibilité d'un collage des structures). En effet, à cause de la configuration des micro-commutateurs à actionnement électrostatiques de l'état de l'art, le dimensionnement de ce type de composant pour avoir une tension d'actionnement faible (inférieure à 10 V, voire inférieure à 5 V) implique nécessairement :
- soit une diminution de la raideur mécanique du composant et on observe alors une forte sensibilité du commutateur aux accélérations et aux chocs, ce qui est un problème pour les téléphones mobiles,
- soit une augmentation de la surface des électrodes d'actionnement, ce qui induit alors nécessairement une augmentation de l'amortissement et donc un accroissement du temps de commutation,
- soit un compromis entre ces deux paramètres.
- or a decrease in the mechanical stiffness of the component and then there is a high sensitivity of the switch to accelerations and shocks, which is a problem for mobile phones,
- an increase in the area of the actuating electrodes, which then necessarily induces an increase in the damping and therefore an increase in the switching time,
- a compromise between these two parameters.
Enfin, quelle que soit l'option choisie, il en résulte une diminution sensible de la fiabilité du micro-commutateur du fait d'un risque accru de collage de la structure.Finally, whatever the chosen option, this results in a significant decrease in the reliability of the micro-switch because of an increased risk of bonding the structure.
Un example de micro-commutateur électrostatique avec faible tension d'actionnement est décrit dans le document US-A-2002/027487.An example of an electrostatic microswitch with low operating voltage is described in US-A-2002/027487.
Pour pallier aux inconvénients de l'art antérieur, il est proposé selon la présente invention un micro-commutateur qui se distingue de l'état de l'art par son mode de fonctionnement et sa conception. Il possède en effet deux jeux distincts d'électrodes d'actionnement et utilise un mode d'actionnement en deux temps qui lui permet de concilier à la fois une faible tension d'actionnement et un temps de commutation faible tout en conservant une raideur mécanique du micro-commutateur en fonctionnement élevée.To overcome the drawbacks of the prior art, it is proposed according to the present invention a microswitch which differs from the state of the art by its mode of operation and design. It has in fact two distinct sets of operating electrodes and uses a two-step actuation mode which allows it to reconcile both a low operating voltage and a low switching time while maintaining a mechanical stiffness of micro-switch in high operation.
L'invention a donc pour objet un micro-commutateur électrostatique destiné à raccorder électriquement au moins deux pistes électriquement conductrices disposées sur un support, le raccord électrique entre les deux pistes conductrices se faisant au moyen d'un plot de contact prévu sur des moyens déformables en matériau isolant et aptes à se déformer par rapport au support sous l'action d'une force électrostatique générée par des électrodes de commande, le plot de contact réalisant le raccord électrique des extrémités des deux pistes conductrices lorsque les moyens déformables sont suffisamment déformés, caractérisé en ce que les électrodes de commande sont réparties sur les moyens déformables et le support en deux jeux d'électrodes, un premier jeu d'électrodes destiné à la génération d'une première force électrostatique pour amorcer la déformation des moyens déformables, un deuxième jeu d'électrodes destiné à la génération d'une deuxième force électrostatique pour poursuivre la déformation des moyens déformables de façon que le plot de contact raccorde électriquement les extrémités des deux pistes conductrices.The invention therefore relates to an electrostatic microswitch for electrically connecting at least two electrically conductive tracks arranged on a support, the electrical connection between the two conductive tracks being done by means of a contact pad provided on deformable means made of insulating material and able to deform with respect to the support under the action of a electrostatic force generated by control electrodes, the contact pad providing the electrical connection of the ends of the two conductive tracks when the deformable means are sufficiently deformed, characterized in that the control electrodes are distributed over the deformable means and the support in two electrode sets, a first set of electrodes for generating a first electrostatic force to initiate the deformation of the deformable means, a second set of electrodes for generating a second electrostatic force to continue the deformation of the deformable means so that the contact pad electrically connects the ends of the two conductive tracks.
Les électrodes de commande réparties sur les moyens déformables peuvent être disposées sur ceux-ci de façon que les moyens déformables sont interposés entre elles et les électrodes de commande réparties sur le support.The control electrodes distributed on the deformable means may be disposed thereon so that the deformable means are interposed between them and the control electrodes distributed on the support.
Selon une variante de réalisation, les électrodes de commande réparties sur le support comprennent deux électrodes qui sont chacune une électrode commune pour le premier jeu d'électrodes et pour le deuxième jeu d'électrodes.According to an alternative embodiment, the control electrodes distributed on the support comprise two electrodes which are each a common electrode for the first set of electrodes and for the second set of electrodes.
Les moyens déformables peuvent comprendre une poutre encastrée à ses deux extrémités ou une poutre en porte-à-faux. Dans ce cas, les électrodes de commande réparties sur les moyens déformables peuvent comprendre des électrodes de l'un des deux jeux d'électrodes disposées sur des parties annexes rattachées à la poutre et agencées de chaque coté de la poutre. Dans ce cas aussi, les électrodes de commande réparties sur les moyens déformables peuvent comprendre des électrodes de l'autre des deux jeux d'électrodes disposées sur la poutre et agencées de chaque coté du plot de contact.The deformable means may comprise a beam embedded at its two ends or a cantilever beam. In this case, the control electrodes distributed on the deformable means may comprise electrodes of one of the two sets of electrodes arranged on ancillary parts. attached to the beam and arranged on each side of the beam. In this case also, the control electrodes distributed on the deformable means may comprise electrodes of the other of the two sets of electrodes arranged on the beam and arranged on each side of the contact pad.
L'invention sera mieux comprise et d'autres avantages et particularités apparaîtront à la lecture de la description qui va suivre, donnée à titre d'exemple non limitatif, accompagnée des dessins annexés parmi lesquels :
- la figure 1 est une vue de dessus d'un micro-commutateur électrostatique selon la présente invention,
- la figure 2 est une vue en coupe selon l'axe II-II de la figure 1,
- la figure 3 est une vue en coupe selon l'axe III-III de la figure 1,
- les figures 4
et 5 sont des vues explicatives du fonctionnement du micro-commutateur de l'invention, correspondant à la figure 2, - les figures 6A à 6G sont des vues en coupe illustrant un procédé de réalisation d'un micro-commutateur selon la présente invention.
- FIG. 1 is a top view of an electrostatic microswitch according to the present invention,
- FIG. 2 is a sectional view along the line II - II of FIG. 1,
- FIG. 3 is a sectional view along the axis III-III of FIG. 1,
- FIGS. 4 and 5 are explanatory views of the operation of the microswitch of the invention, corresponding to FIG. 2,
- Figs. 6A-6G are sectional views illustrating a method of making a micro-switch according to the present invention.
La figure 1 est une vue de dessus d'un micro-commutateur électrostatique selon la présente invention.Figure 1 is a top view of an electrostatic microswitch according to the present invention.
Le micro-commutateur est réalisé à la surface d'un substrat isolant. La surface est pourvue d'un évidement 1 délimité par des bords 2, 12, 22 et 32 le surplombant. Une poutre 3 est formée au-dessus de l'évidement 1 en ayant une première extrémité solidaire du bord 22 et une deuxième extrémité solidaire du bord 32. Il s'agit donc d'une poutre encastrée à ses deux extrémités.The micro-switch is made on the surface of an insulating substrate. The surface is provided with a
La poutre 3 est pourvue de deux parties annexes ou ailettes 13 et 23 situées au même niveau que la poutre 3. Les ailettes 13 et 23 sont situées de part et d'autre de la poutre 3. Elles sont rattachées à la poutre par une partie rétrécie centrale. Elles sont rattachées aux bords 2 et 12 par des parties rétrécies latérales.The
Les pistes électriquement conductrices à raccorder sont référencées 4 et 5. Elles possèdent des extrémités, respectivement 14 et 15, disposées sous la poutre 3 et alignées selon l'axe longitudinal de la poutre 3, en se faisant face.The electrically conductive tracks to be connected are referenced 4 and 5. They have ends, respectively 14 and 15, arranged under the
Le fond de l'évidement 1 supporte deux électrodes inférieures 101 et 102 pouvant être respectivement connectées électriquement par les plots de contact 111 et 112. Les électrodes 101 et 102 sont disposées symétriquement par rapport à l'axe longitudinal de la poutre 3. L'électrode 101 se trouve en regard d'une première partie latérale de la poutre 3 et en regard de l'ailette 13. L'électrode 102 se trouve en regard d'une deuxième partie latérale de la poutre 3 et en regard de l'ailette 23.The bottom of the
La poutre 3 supporte plusieurs conducteurs électriques : un plot de contact 6 et deux électrodes 7 et 8. Le plot de contact 6 est situé le long de l'axe longitudinal de la poutre 3 et s'étend jusqu'au-dessus des extrémités 14 et 15 des pistes conductrices 4 et 5. Le plot de contact 6 dépasse de la face inférieure de la poutre 3 ou affleuve au niveau de cette face inférieure de façon à pouvoir relier électriquement les extrémités 14 et 15 si la poutre 3 est suffisamment déformée.The
Les électrodes 7 et 8 sont situées sur la face de la poutre 3 opposée à l'évidement. Chacune est située sur une partie latérale de la poutre de façon que l'électrode 7 soit située en regard de la partie correspondante de l'électrode inférieure 101 et que l'électrode 8 soit située en regard de la partie correspondante de l'électrode inférieure 102. Les électrodes 7 et 8 peuvent être respectivement connectées électriquement par les plots de contact 17 et 18.The
L'ailette 13 supporte sur sa face supérieure, c'est-à-dire la face opposée à l'évidement, une électrode 33 pouvant être connectée électriquement par un plot de contact 43. L'électrode 33 se trouve en regard d'une partie de l'électrode inférieure 101. De même, l'ailette 23 supporte sur sa face supérieure une électrode 53 pouvant être connectée électriquement par un plot de contact 63. L'électrode 53 se trouve en regard d'une partie de l'électrode inférieure 102.The
La figure 2 est une vue en coupe selon l'axe II-II de la figure 1 et la figure 3 est une vue en coupe selon l'axe III-III de la figure 1. Ces figures montrent l'état non défléchi de la poutre 3 en l'absence de potentiels appliqués sur les électrodes.FIG. 2 is a sectional view along the axis II-II of FIG. 1 and FIG. 3 is a sectional view along the axis III-III of FIG. 1. These figures show the non-deflected state of the
Les figures 4 et 5 sont des vues explicatives du fonctionnement du micro-commutateur. Ces vues correspondent à la section représentée à la figure 2.Figures 4 and 5 are explanatory views of the operation of the microswitch. These views correspond to the section shown in Figure 2.
Une tension V1 est d'abord appliquée sur le premier jeu d'électrodes constitué par les électrodes 33 et 53 d'une part et par les électrodes 101 et 102 d'autre part. La tension V1, tension d'amorçage de la déformation, est choisie pour venir plaquer le centre de la poutre sur les électrodes inférieures 101 et 102 comme le montre la figure 4. Dans le cas d'une poutre en porte-à-faux ou cantilever, ce premier jeu d'électrodes aurait pour fonction de plaquer l'extrémité de la poutre sur les électrodes inférieures.A voltage V1 is first applied to the first set of electrodes constituted by the
L'application de la tension V1 au premier jeu d'électrodes place le micro-commutateur en fonctionnement mais à l'état non commuté, les extrémités 14 et 15 des pistes conductrices étant suffisamment éloignées l'une de l'autre pour qu'un contact mécanique de la poutre soit obtenu sans contact électrique. Ce déplacement de la poutre n'étant activé que pour amorcer le commutateur (par exemple à la mise en route d'un téléphone portable), l'amortissement amené par la grande surface de ces électrodes n'a aucune conséquence sur le temps de commutation de l'interrupteur en fonctionnement.The application of the voltage V1 to the first set of electrodes places the microswitch in operation but in the non-switched state, the ends 14 and 15 of the conductive tracks being sufficiently distant from each other for a mechanical contact of the beam is obtained without electrical contact. This displacement of the beam being activated only to prime the switch (for example at the start of a mobile phone), the damping brought by the large surface of these electrodes has no effect on the switching time of the switch in operation.
Ce premier jeu d'électrodes présente une surface suffisante pour permettre la mise en butée de la poutre pour une tension inférieure à 10 V, voire inférieure à 5V.This first set of electrodes has a sufficient surface to allow the abutment of the beam for a voltage less than 10 V, or even less than 5V.
Une tension V2 est ensuite appliquée sur le deuxième jeu d'électrodes constitué par les électrodes 7 et 8 d'une part et par les électrodes 101 et 102 d'autre part. La tension V2, tension de commutation, est choisie pour déformer la poutre 3 jusqu'à la mise en contact des extrémités 14 et 15 à connecter avec le plot de contact 6 de la poutre comme le montre la figure 5. La proximité des électrodes en regard du deuxième jeu d'électrodes, due à la flexion de la poutre lors de l'amorçage de la déformation, permet d'actionner le micro-commutateur avec une faible tension tout en conservant une raideur de poutre élevée.A voltage V2 is then applied to the second set of electrodes constituted by the
La disposition et le nombre des électrodes peuvent être variables. Une ou plusieurs électrodes peuvent être constitutives de la poutre.The arrangement and the number of the electrodes can be variable. One or more electrodes may be constituent of the beam.
La déformation de la poutre sous l'effet d'une tension d'amorçage permet de diminuer très fortement la tension de maintien de la poutre déformée lors de la commutation.The deformation of the beam under the effect of a starting voltage makes it possible to very greatly reduce the holding voltage of the deformed beam during switching.
L'invention procure une grande stabilité et une grande fiabilité du micro-commutateur en fonctionnement. Ceci est dû à la raideur mécanique importante du micro-commutateur en fonctionnement, c'est-à-dire après l'amorçage de la déformation. Il en résulte une très faible sensibilité aux chocs et aux accélérations lors du fonctionnement, ainsi qu'aux effets possibles de piégeage de charges dans la couche diélectrique.The invention provides a high stability and high reliability of the micro-switch in operation. This is due to the significant mechanical stiffness of the micro-switch in operation, that is to say after the initiation of the deformation. This results in a very low sensitivity to shocks and accelerations during operation, as well as the possible effects of trapping charges in the dielectric layer.
Le temps de commutation est réduit, étant donné le faible déplacement de la poutre entre la position non commutée et la position commutée (déplacement d'air limité donc amortissement limité).The switching time is reduced, given the small displacement of the beam between the unswitched position and the switched position (limited air movement thus limited damping).
L'isolation haute fréquence est optimisée à cause de l'éloignement important des deux pistes à connecter.The high frequency insulation is optimized because of the large distance of the two tracks to be connected.
Un autre avantage de l'invention consiste dans la fabrication de ce micro-commutateur selon une technique compatible avec la technique de fabrication des circuits intégrés.Another advantage of the invention consists in the manufacture of this micro-switch according to a technique compatible with the technique of manufacturing integrated circuits.
En termes de performance, le dispositif de l'invention se distingue des micro-commutateurs de l'art antérieur par les caractéristiques suivantes. La tension d'actionnement est faible tout en conservant une faible sensibilité aux accélérations, une grande fiabilité de fonctionnement, un temps de commutation et de relaxation mécanique faible.In terms of performance, the device of the invention differs from the microswitches of the prior art by the following characteristics. The operating voltage is low while maintaining a low sensitivity to accelerations, high reliability of operation, a low switching time and mechanical relaxation.
Le mode de fonctionnement en deux étapes distingue aussi le dispositif selon l'invention des micro-commutateurs de l'art antérieur. La phase d'amorçage de la déformation est effectuée avec une tension d'actionnement faible et sans contrainte forte sur le temps de réponse, le risque de collage électrostatique et la sensibilité aux accélérations. La phase de commutation est effectuée à faible tension d'actionnement répondant aux critères de faible sensibilité aux accélérations, de faible sensibilité aux risques de collage électrostatique et de faible temps de commutation.The two-step operating mode also distinguishes the device according to the invention from the microswitches of the prior art. The phase of initiation of the deformation is carried out with a low actuation voltage and without strong constraint on the response time, the risk of electrostatic bonding and sensitivity to accelerations. The switching phase is performed at low voltage actuator meeting the criteria of low sensitivity to accelerations, low sensitivity to the risks of electrostatic bonding and low switching time.
Les figures 6A à 6G sont des vues en coupe illustrant un procédé de réalisation d'un micro-commutateur selon l'invention.FIGS. 6A to 6G are sectional views illustrating a method of producing a microswitch according to the invention.
La figure 6A montre un substrat de silicium 70 recouvert d'un dépôt d'oxyde de silicium 71 qui a subi une opération de lithogravure afin de définir un encastrement. Le dépôt d'oxyde peut avoir 2 µm d'épaisseur et la profondeur de la gravure peut être de 1,7 µm. La gravure a défini un évidement 72 et des logements pour plots de contact d'électrodes et pistes conductrices dont un, le logement 73 est visible.FIG. 6A shows a
Un dépôt métallique est ensuite effectué sur la structure gravée. Il peut s'agir d'un bicouche comprenant une couche d'accrochage en Cr de 0,05 pm d'épaisseur et une couche d'or de 0,9 µm d'épaisseur. On réalise une lithographie de la couche métallique présente dans l'évidement et dans les logements de plots pour définir les pistes à connecter et les électrodes d'amorçage et de commutation inférieures. Le métal non protégé est gravé pour obtenir la structure représentée à la figure 6B. Sur cette figure, la référence 74 représente un plot de contact d'une électrode de commande inférieure, les références 75 et 76 représentent les extrémités des pistes conductrices à connecter, la référence 77 représente une électrode de commande inférieure.A metal deposit is then performed on the etched structure. It may be a bilayer comprising a crimp layer of 0.05 μm thick and a 0.9 μm thick gold layer. Lithography of the metal layer present in the recess and in the stud housings is carried out to define the tracks to be connected and the lower ignition and switching electrodes. The unprotected metal is etched to obtain the structure shown in Figure 6B. In this figure, the
La figure 6C montre qu'une couche sacrificielle 78, par exemple en polyimide, a été déposé sur la structure et planarisée jusqu'au sommet de la couche d'oxyde 71.FIG. 6C shows that a
La figure 6D montre qu'une couche de matériau diélectrique 79 a été déposée sur la structure afin de constituer la poutre. Il peut s'agir d'une couche de Si3N4 de 0,5 µm d'épaisseur. Une ouverture 80 est pratiquée, par lithogravure, dans la couche 79 pour définir l'emplacement du plot de contact du micro-commutateur au niveau des extrémités de pistes 75 et 76.Figure 6D shows that a layer of
Un dépôt métallique est ensuite réalisé sur la structure. Il peut s'agir d'une couche d'or de 0,5µm d'épaisseur. Une lithographie de cette couche est effectuée pour définir le plot de contact des pistes conductrices et les électrodes d'amorçage et de commutation supérieures. La gravure de cette couche permet d'obtenir ces éléments conducteurs. La figure 6E montre le plot de contact 81, un plot de contact 82 des électrodes d'amorçage (non représentées), une électrode de commutation 83 et un plot de contact 84 d'une électrode de commutation.A metal deposit is then made on the structure. It may be a gold layer 0.5 μm thick. A lithography of this layer is performed to define the contact pad of the conductive tracks and the upper ignition and switching electrodes. The etching of this layer makes it possible to obtain these conductive elements. Figure 6E shows the
La couche 79 est ensuite traitée par lithogravure pour définir la poutre 85 avec arrêt de la gravure sur la couche sacrificielle 78 (voir la figure 6F).The
La couche sacrificielle est ensuite éliminée par gravure sèche, par exemple du type plasma d'oxygène. On obtient la structure représentée à la figure 6G.The sacrificial layer is then removed by dry etching, for example of the plasma type oxygen. The structure shown in FIG. 6G is obtained.
Claims (6)
- Electrostatic microswitch for electrically connecting at least two electrically conductive paths (4, 5) placed on a support, the electrical connection between the conductive paths (4, 5) taking place by means of a contact stud (6) provided on deformable means (3) made from an insulating material and which can be deformed relative to the support, under the action of an electrostatic force generated by control electrodes, the contact stud (6) implementing the electrical connection of the ends (14, 15) of the two conductive paths (4, 5) when the deformable means are sufficiently deformed, characterized in that the control electrodes are subdivided on the deformable means and support so as to form two sets of electrodes, a first set of electrodes (101, 102, 33, 53) for generating a first electrostatic force for initiating the deformation of the deformable means (3) until a mechanical contact of the deformable means is obtained, the ends (14, 15) of the conductive paths (4, 5) being sufficiently remote from one another to ensure that the contact stud (6) does not electrically connect the ends of the two conductive paths, a second set of electrodes (101, 102, 7, 8) for generating a second electrostatic force in order to continue the deformation of the deformable means (3) in such a way that the contact stud (6) electrically connects the ends (14, 15) of the two conductive paths.
- Electrostatic microswitch according to claim 1, characterized in that the control electrodes (7, 8, 33, 53) laid out on the deformable means (3) are placed on the latter so that the deformable means are interposed between them and the control electrodes (101, 102) laid out on the support.
- Electrostatic microswitch according to claim 1, characterized in that the control electrodes laid out on the support comprise two electrodes (101, 102) each of which is a common electrode to the first set of electrodes and to the second set of electrodes.
- Electrostatic microswitch according to claim 1, characterized in that the deformable means (3) comprise a beam embedded at its two ends or a cantilever beam.
- Electrostatic microswitch according to claim 4, characterized in that the control electrodes laid out on the deformable means comprise the electrodes (33, 53) of one of the two sets of electrodes placed on the annex parts (13, 23) attached to the beam (3) and fitted on each side of the beam.
- Electrostatic microswitch according to claim 5, characterized in that the control electrodes laid out on the deformable means comprise the electrodes (7, 8) of the other of the two sets of electrodes placed on the beam (3) and fitted on each side of the contact stud (6).
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
FR0214944A FR2848020B1 (en) | 2002-11-28 | 2002-11-28 | ELECTROSTATIC MICRO-SWITCH FOR LOW ACTUATING VOLTAGE COMPONENTS |
FR0214944 | 2002-11-28 | ||
PCT/FR2003/050138 WO2004051688A1 (en) | 2002-11-28 | 2003-11-27 | Electrostatic microswitch for low-voltage-actuation components |
Publications (2)
Publication Number | Publication Date |
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EP1565922A1 EP1565922A1 (en) | 2005-08-24 |
EP1565922B1 true EP1565922B1 (en) | 2006-08-16 |
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Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03786074A Expired - Lifetime EP1565922B1 (en) | 2002-11-28 | 2003-11-27 | Electrostatic microswitch for low-voltage-actuation components |
Country Status (6)
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US (1) | US7283023B2 (en) |
EP (1) | EP1565922B1 (en) |
AT (1) | ATE336799T1 (en) |
DE (1) | DE60307672T2 (en) |
FR (1) | FR2848020B1 (en) |
WO (1) | WO2004051688A1 (en) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2868591B1 (en) * | 2004-04-06 | 2006-06-09 | Commissariat Energie Atomique | MICROCOMMUTER WITH LOW ACTUATION VOLTAGE AND LOW CONSUMPTION |
US7466215B2 (en) * | 2005-08-04 | 2008-12-16 | Wireless Mems, Inc. | Balanced MEMS switch for next generation communication systems |
GB0516516D0 (en) * | 2005-08-11 | 2005-09-21 | Cosmetic Warriors Ltd | Incense candles |
US8493081B2 (en) | 2009-12-08 | 2013-07-23 | Magna Closures Inc. | Wide activation angle pinch sensor section and sensor hook-on attachment principle |
US9234979B2 (en) | 2009-12-08 | 2016-01-12 | Magna Closures Inc. | Wide activation angle pinch sensor section |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB9309327D0 (en) * | 1993-05-06 | 1993-06-23 | Smith Charles G | Bi-stable memory element |
US6115231A (en) * | 1997-11-25 | 2000-09-05 | Tdk Corporation | Electrostatic relay |
EP1156504A3 (en) * | 2000-05-16 | 2003-12-10 | Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. | Micromechanical relay with improved switching behaviour |
JP2002075156A (en) * | 2000-09-01 | 2002-03-15 | Nec Corp | Microswitch and manufacturing method therefor |
SE0101182D0 (en) * | 2001-04-02 | 2001-04-02 | Ericsson Telefon Ab L M | Micro electromechanical switches |
US6608268B1 (en) * | 2002-02-05 | 2003-08-19 | Memtronics, A Division Of Cogent Solutions, Inc. | Proximity micro-electro-mechanical system |
US7053736B2 (en) * | 2002-09-30 | 2006-05-30 | Teravicta Technologies, Inc. | Microelectromechanical device having an active opening switch |
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2002
- 2002-11-28 FR FR0214944A patent/FR2848020B1/en not_active Expired - Fee Related
-
2003
- 2003-11-27 AT AT03786074T patent/ATE336799T1/en not_active IP Right Cessation
- 2003-11-27 DE DE60307672T patent/DE60307672T2/en not_active Expired - Lifetime
- 2003-11-27 WO PCT/FR2003/050138 patent/WO2004051688A1/en active IP Right Grant
- 2003-11-27 US US10/536,632 patent/US7283023B2/en not_active Expired - Fee Related
- 2003-11-27 EP EP03786074A patent/EP1565922B1/en not_active Expired - Lifetime
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DE60307672D1 (en) | 2006-09-28 |
ATE336799T1 (en) | 2006-09-15 |
EP1565922A1 (en) | 2005-08-24 |
FR2848020A1 (en) | 2004-06-04 |
DE60307672T2 (en) | 2007-09-06 |
FR2848020B1 (en) | 2005-01-07 |
US7283023B2 (en) | 2007-10-16 |
US20060164193A1 (en) | 2006-07-27 |
WO2004051688A1 (en) | 2004-06-17 |
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