EP1554035A1 - Corps catalyseur microstructure et procede de fabrication - Google Patents

Corps catalyseur microstructure et procede de fabrication

Info

Publication number
EP1554035A1
EP1554035A1 EP03747914A EP03747914A EP1554035A1 EP 1554035 A1 EP1554035 A1 EP 1554035A1 EP 03747914 A EP03747914 A EP 03747914A EP 03747914 A EP03747914 A EP 03747914A EP 1554035 A1 EP1554035 A1 EP 1554035A1
Authority
EP
European Patent Office
Prior art keywords
cavities
catalyst body
layer elements
layer
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03747914A
Other languages
German (de)
English (en)
Inventor
Johannes Konle
Hartmut Presting
Marc Sommer
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Individual
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DE10243002A external-priority patent/DE10243002A1/de
Application filed by Individual filed Critical Individual
Publication of EP1554035A1 publication Critical patent/EP1554035A1/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B3/00—Hydrogen; Gaseous mixtures containing hydrogen; Separation of hydrogen from mixtures containing it; Purification of hydrogen
    • C01B3/02—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen
    • C01B3/32—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air
    • C01B3/34—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents
    • C01B3/38—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents using catalysts
    • C01B3/40—Production of hydrogen or of gaseous mixtures containing a substantial proportion of hydrogen by reaction of gaseous or liquid organic compounds with gasifying agents, e.g. water, carbon dioxide, air by reaction of hydrocarbons with gasifying agents using catalysts characterised by the catalyst
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J19/00—Chemical, physical or physico-chemical processes in general; Their relevant apparatus
    • B01J19/0093—Microreactors, e.g. miniaturised or microfabricated reactors
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
    • B01J23/38—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals
    • B01J23/40—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of noble metals of the platinum group metals
    • B01J23/42—Platinum
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
    • B01J35/00—Catalysts, in general, characterised by their form or physical properties
    • B01J35/50—Catalysts, in general, characterised by their form or physical properties characterised by their shape or configuration
    • B01J35/56—Foraminous structures having flow-through passages or channels, e.g. grids or three-dimensional monoliths
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/02—Processes for making hydrogen or synthesis gas
    • C01B2203/0205—Processes for making hydrogen or synthesis gas containing a reforming step
    • C01B2203/0227—Processes for making hydrogen or synthesis gas containing a reforming step containing a catalytic reforming step
    • C—CHEMISTRY; METALLURGY
    • C01—INORGANIC CHEMISTRY
    • C01B—NON-METALLIC ELEMENTS; COMPOUNDS THEREOF; METALLOIDS OR COMPOUNDS THEREOF NOT COVERED BY SUBCLASS C01C
    • C01B2203/00—Integrated processes for the production of hydrogen or synthesis gas
    • C01B2203/10—Catalysts for performing the hydrogen forming reactions
    • C01B2203/1005—Arrangement or shape of catalyst
    • C01B2203/1035—Catalyst coated on equipment surfaces, e.g. reactor walls
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02P—CLIMATE CHANGE MITIGATION TECHNOLOGIES IN THE PRODUCTION OR PROCESSING OF GOODS
    • Y02P20/00—Technologies relating to chemical industry
    • Y02P20/50—Improvements relating to the production of bulk chemicals
    • Y02P20/52—Improvements relating to the production of bulk chemicals using catalysts, e.g. selective catalysts

Definitions

  • the invention relates to microstructured catalyst bodies for chemical reformers for use, for example, in fuel cell systems and to a method for their production.
  • fuel cells have a very high market potential as an efficient and environmentally friendly alternative.
  • Fuel cell technology has also been successfully tested in the automotive sector for a long time.
  • One variant is to obtain the hydrogen required for the fuel cells from liquid fuels such as methanol or conventional petrol only in the automobile. For this, however, a so-called reforming process is necessary in the automobile, which converts long-chain hydrocarbons into hydrogen and carbon dioxide.
  • liquid fuels such as methanol or conventional petrol only in the automobile.
  • a method is used in which the starting components (water and / or air and liquid hydrocarbons) release the end products such as, for example, hydrogen at high temperatures by the action of a catalyst.
  • This process can be divided into two stages: In the reforming reaction, which can be highly endothermic, strongly exothermic or autothermal depending on the reforming process, the hydrocarbon is converted together with water and / or air into carbon monoxide and molecular hydrogen, among other things. puts. Since the liquid starting products can be put under high pressure and the residual hydrogen in the exhaust gas (which could not be implemented in the fuel cell) can be used, for example, to heat the first reactor stage, this process has a very high potential for miniaturizing all components involved , However, this requires a high level of efficiency in the first stage, in which the required hydrogen is generated catalytically. So-called catalytic reformers are usually used for the reforming process described.
  • Such a catalytic reformer is presented in US Pat. No. 5,811,062.
  • the catalyst body used in the reformer described there essentially consists of a stack of interconnected layer elements made of metal, ceramic or a semiconductor material, into which by microstructuring methods such.
  • the geometry of the microstructures is chosen such that the reactants pass from layer element to layer element through macroscopic openings and the reactants flow along the layer elements through cavities introduced into the surfaces of the elements.
  • the miniaturization potential of the arrangement described in the cited document is limited, since only one level of cavities running along the surface can be realized per layer element and, for reasons of stability, the thickness of the individual layer elements must not fall below a certain value.
  • the manufacturing process of the reformer described is complex and therefore expensive, since a large number of cavities running along the surface can be realized and the individual layer elements have different geometries.
  • the catalyst body according to the invention consists of a stacked layer structure of individual layer elements as shown in FIG. 1 (cross section through a layer element).
  • the cavities for example pores or channels, run essentially perpendicular to the layer surface through the individual layer elements 1.
  • This arrangement has a number of advantages: The reactants flow through the reactor essentially in a straight line. This makes the flow resistance of the arrangement reduced and thus the maximum possible throughput significantly increased.
  • the catalyst body according to the invention can be miniaturized excellently since the minimum spacing of the individual cavities from one another can be drastically reduced by the vertical arrangement of the cavities. Distances in the range of 50nm can be easily reached; a value that appears completely unrealistic for the above-mentioned conventional structure, since individual layer elements of this small thickness cannot be produced or structured using known production processes.
  • a further advantage of the invention is that, in contrast to the device described in US Pat. No. 5,811,062, identical layer elements can be used, which significantly simplifies the manufacture of the catalyst bodies according to the invention and thus makes them cheaper; the same process can be used to structure all elements.
  • the layer elements from silicon or a silicon mixed crystal.
  • silicon as a support structure for the catalyst makes it possible to optimize the geometry, porosity and pore diameter of the reformer in a very large range.
  • the pore diameter in silicon can be varied between approx. 0.8 ⁇ m and several lOO ⁇ m and can thus be adapted to the requirements for optimal flow, reaction kinetics and gas conversion.
  • Silicon is also extremely temperature-stable and not susceptible to frequent temperature cycles.
  • the etching of silicon is also very cost-effective thanks to the sophisticated Si process technology.
  • Another advantageous embodiment of the invention consists in that the dimensions of the cavities are designed to be variable both along the direction of flow and perpendicularly thereto.
  • the channels running through the catalyst body run along the stream. taper direction. In this way it becomes possible to set a pressure and speed profile in the reactor which is particularly advantageous from the point of view of reaction kinetics.
  • the individual layer elements can be provided on their outer edges with obliquely falling mesa flanks which can be arranged in a corresponding recess on the rear side of the adjacent layer element Adjustment elements can be produced in a further extra step by etching the cavities into the substrate without great effort, so that the individual layer elements can be stacked exactly in line with each other in any number, and the precision achieved is shown It is clear when you realize that a catalyst carrier produced in this way ger with a thickness in the centimeter range in the direction of the cavities appears transparent.
  • the desired conductivity or the desired conductivity profile can be set by suitable doping of the silicon. If a voltage is now applied to the semiconductor catalyst body, it is heated by the flowing current; the desired reaction temperature can be set by means of a current control.
  • conductors with good thermal conductivity such as, for. B. use silicon as a catalyst carrier.
  • a suitable starting material is e.g. ⁇ 300 ⁇ m thick, p-doped silicon substrates with 10cm diameter.
  • z. B. by means of the anodic etching process or a dry etching process the pores essentially perpendicular to the layer surface are etched.
  • the now porous substrate can then be sawn into pieces with the desired dimensions, which, depending on the thickness of the porous layer elements, are stacked on top of one another and fixed, for example, in a housing made of stainless steel.
  • FIG. 2 An exemplary arrangement for this is shown in FIG. 2.
  • Electrolyte 2 an aqueous solution of HF: dimethylformamide (DMF) or HF: isopropanol is used in a container 5.
  • the etching is generally carried out galvanostatically, that is with a constant current between the anode 4 and the cathode 1.
  • resulting depletion region (or space charge zone) plays a decisive role in the formation of the cavities:
  • the Diffu - Depending on the shape of the etched cavities, the ion current of charge carriers outweighs currents through tunnels or thermal excitation.
  • Anisotropic etching of the cavities takes place when the distance between individual cavities is less than twice the thickness of the depletion zone, since then the charge carrier transfer to the cavity walls is blocked. Since the space charge zone is determined by the applied voltage and the doping of the substrate, the shape and density of the cavities can be influenced by deliberately changing these parameters. Both the diameter and the density of the etched cavities can be adapted in this so-called "self-organized etching" by the choice of substrate doping. A major advantage of this process is the high surface / volume ratio that can be achieved. Since it has not hitherto been possible for technological reasons to completely etch a wafer through to the back by anodic etching, the porous layer must be removed by a lifting process.
  • the current density for etching is significantly increased within a few seconds, which leads to a drastic increase in the charge carrier transfer at the tips of the cavities and the silicon is etched there isotropically. As a result, the layer with the etched cavities is lifted off the substrate.
  • etching process is the etching of cavities by means of plasma etching.
  • the process in which the process gases C 4 H 8 and SF 6 are used, permits anisotropic etching with aspect ratios (ratio of cavity diameter / cavity length) of around 1:20.
  • aspect ratios ratio of cavity diameter / cavity length
  • the diameter of the plasma-etched cavities can therefore be approximately 15 ⁇ m or more.
  • a substrate can also be completely etched through.
  • the etching rate in this plasma process is approx. 80 ⁇ m / h.
  • the method for anodic etching of silicon described above can be modified in that a photolithographic process the position of the voids on the surface can be controlled.
  • a photolithographic process the position of the voids on the surface can be controlled.
  • so-called “dead ends” cavities closed on one side
  • an approximately 2 ⁇ m thick silicon dioxide layer is first structured with a photomask on the surface of the substrate, so that the later locations of the cavities can be etched freely using BHF oxide etching. Through this oxide mask on the Si surface, inverted pyramids are etched into the silicon by the subsequent etching with a KOH solution.
  • the side length of the inverted pyramids can be set between approx. 2 ⁇ m and ⁇ 20 ⁇ m using the oxide mask used. Since the tips of these pyramids represent a preferred inhomogeneity for the current in the anodic etching, the etching process will begin precisely here and continue into the substrate in accordance with its anisotropic character.
  • This method for the defined etching makes it possible to continue a single cavity over the entire reactor length (a few cm) by stacking several layers of these layers, for example by using alignment marks.
  • the pressure loss via the reformer is significantly minimized, since there are no "dead ends" in the structure.
  • Aluminum is best suited for this, which is also very often used in the established Si technology. Two types of surface covering are possible: Aluminum can be applied to the wafer and the walls of the etched cavities by evaporation from the aluminum melt under vacuum conditions.
  • a metallic surface can also be created by sputtering aluminum. This is a plasma process in which the ionized particles from the plasma hit a metallic target (here aluminum), from where atoms knock out, which in turn are deposited on the sample underneath.
  • a metallic target here aluminum
  • both methods are suitable for coating the catalyst carrier.
  • the thickness of the deposited aluminum layer is not decisive for the function of the reformer. A deposition of a few nm aluminum is therefore sufficient.
  • materials such as copper or nickel or their alloys are also suitable for realizing the metallic adhesive layer.
  • a platinum coating is particularly advantageous for a good catalytic effect of the reformer.
  • an adaptation of the thermomechanical properties of the materials used is necessary for good adhesion of the catalytically active coating to the metallic adhesive layer; in particular, materials with similar coefficients of linear expansion should be used in order to minimize the occurrence of stresses between the layers and thus the risk of the layers becoming detached due to temperature fluctuations.
  • the catalytically active layer is advantageously applied by thermal spraying or plasma spraying.
  • the principle of thermal spraying processes is that the coating material, which may be in powder or rod form, is melted in a thermal energy source and accelerated onto the substrate in the molten state.
  • the energy required to melt the spray material is generated by a plasma.
  • a gas-stabilized arc with a high energy density burns on a centrally arranged, water-cooled copper anode during plasma spraying.
  • the added plasma gas ionizes to the plasma and leaves the burning nozzle at high speeds (approx. 300-700 m / s) at temperatures from 15,000 to 20,000 K.
  • the powdered coating material is introduced into the plasma jet by means of a carrier gas, fed through it and melted there with hurled onto the substrate at high speed.
  • the production methods described allow the reactor with the catalyst body according to the invention to be constructed in segments advantageously by a suitable choice of the housing construction. This means that different demands on the catalytic reactor are taken into account by a combination of segments of different numbers and types depending on the field of application.
  • the excellent miniaturization of the catalyst body according to the invention allows its advantageous use in applications with special requirements for the maximum space required.
  • the use in fuel cell systems for mobile applications, in particular in motor vehicles, is of particular interest here.

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Inorganic Chemistry (AREA)
  • Physical Or Chemical Processes And Apparatus (AREA)
  • Catalysts (AREA)

Abstract

L'invention concerne un corps catalyseur comprenant un ou plusieurs éléments de stratification pourvus de cavités gravées, telles que des pores ou des canaux, pouvant être traversées par des milieux fluides. Selon ladite invention, ces cavités sont sensiblement perpendiculaires aux éléments de stratification et produites selon un procédé de gravure issu de la technologie des semiconducteurs.
EP03747914A 2002-08-23 2003-08-20 Corps catalyseur microstructure et procede de fabrication Withdrawn EP1554035A1 (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
DE10239550 2002-08-23
DE10239550 2002-08-23
DE10243002 2002-09-17
DE10243002A DE10243002A1 (de) 2002-08-23 2002-09-17 Mikrostrukturierter Katalysatorkörper und Verfahren zu dessen Herstellung
PCT/EP2003/009203 WO2004018091A1 (fr) 2002-08-23 2003-08-20 Corps catalyseur microstructure et procede de fabrication

Publications (1)

Publication Number Publication Date
EP1554035A1 true EP1554035A1 (fr) 2005-07-20

Family

ID=31947629

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03747914A Withdrawn EP1554035A1 (fr) 2002-08-23 2003-08-20 Corps catalyseur microstructure et procede de fabrication

Country Status (4)

Country Link
US (1) US20060105912A1 (fr)
EP (1) EP1554035A1 (fr)
AU (1) AU2003266998A1 (fr)
WO (1) WO2004018091A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007061687A1 (de) 2007-12-19 2009-06-25 Cpi Chemiepark Institut Gmbh Verfahren zum Mattierungsätzen von Siliziumsubstraten und Mittel zur Durchführung des Verfahrens

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102004025958A1 (de) * 2004-05-27 2005-12-22 Infineon Technologies Ag Platzsparende Anordnung von porösen Siliziumplatten als Katalysatorträger
US9076642B2 (en) 2009-01-15 2015-07-07 Solexel, Inc. High-Throughput batch porous silicon manufacturing equipment design and processing methods
US8906218B2 (en) 2010-05-05 2014-12-09 Solexel, Inc. Apparatus and methods for uniformly forming porous semiconductor on a substrate
WO2010129719A1 (fr) * 2009-05-05 2010-11-11 Solexel, Inc. Equipement de haut niveau de productivité pour la fabrication de semi-conducteurs poreux
US8241940B2 (en) 2010-02-12 2012-08-14 Solexel, Inc. Double-sided reusable template for fabrication of semiconductor substrates for photovoltaic cell and microelectronics device manufacturing
CN113789538B (zh) * 2021-11-15 2022-02-08 广东工业大学 一种带悬浮催化层的气体扩散阴极及电化学反应器

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5440872A (en) * 1988-11-18 1995-08-15 Pfefferle; William C. Catalytic method
DE4202454C1 (fr) * 1992-01-29 1993-07-29 Siemens Ag, 8000 Muenchen, De
US5534328A (en) * 1993-12-02 1996-07-09 E. I. Du Pont De Nemours And Company Integrated chemical processing apparatus and processes for the preparation thereof
AU7477398A (en) * 1997-05-09 1998-11-27 Regents Of The University Of California, The Peltier-assisted microfabricated reaction chambers for thermal cycling
US6887437B1 (en) * 1998-05-22 2005-05-03 Infineon Technologies Ag Reactor configuration and method for producing it
KR100415972B1 (ko) * 1998-05-22 2004-01-24 인피니언 테크놀로지스 아게 반응 장치 및 그 제작 방법
US6583022B1 (en) * 1998-08-27 2003-06-24 Micron Technology, Inc. Methods of forming roughened layers of platinum and methods of forming capacitors
DE19841993B4 (de) * 1998-09-04 2005-02-17 P21 - Power For The 21St Century Gmbh Mikrostruktur-Reaktor
US6207132B1 (en) * 1998-12-04 2001-03-27 Chinese Petroleum Corporation Process for producing high purity hydrogen
US6960235B2 (en) * 2001-12-05 2005-11-01 The Regents Of The University Of California Chemical microreactor and method thereof

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO2004018091A1 *

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102007061687A1 (de) 2007-12-19 2009-06-25 Cpi Chemiepark Institut Gmbh Verfahren zum Mattierungsätzen von Siliziumsubstraten und Mittel zur Durchführung des Verfahrens

Also Published As

Publication number Publication date
AU2003266998A1 (en) 2004-03-11
WO2004018091A1 (fr) 2004-03-04
US20060105912A1 (en) 2006-05-18

Similar Documents

Publication Publication Date Title
US6596187B2 (en) Method of forming a nano-supported sponge catalyst on a substrate for nanotube growth
US7070472B2 (en) Field emission display and methods of forming a field emission display
DE69824875T2 (de) Katalysator für membranelektrodenanordnung und herstellungsverfahren
US6891319B2 (en) Field emission display and methods of forming a field emission display
Jaworek Electrospray droplet sources for thin film deposition
JP4454931B2 (ja) ドットパターンを有する基板の製造方法及び柱状構造体の製造方法
DE602004009604T2 (de) Verfahren zum erhalt von nanoteilchen
EP2729411B1 (fr) Système de couches comprenant une couche de nanotubes de carbone parallèles et une couche de recouvrement électriquement conductrice, procédé de fabrication de ce système de couches et son utilisation dans les microsystèmes
DE60204476T2 (de) Verfahren für lokalisiertes wachstum von nanoröhren und verfahren zur herstellung einer selbstausgerichteten kathode mit dem nanoröhrenwachstumsverfahren
US20030013046A1 (en) Use of sacrificial layers in the manufacturing of chemical reactor structures and the application of such structures
Asoh et al. Effect of noble metal catalyst species on the morphology of macroporous silicon formed by metal-assisted chemical etching
EP1884578A1 (fr) Méthode de fabrication d'une structure poreuse d'oxide d'aluminium auto-organisée, article nanoporeux, et nano-objet.
CN102760897A (zh) 疏水性提高的多孔介质及其制造方法
DE102009010279A1 (de) Kostengünstige bipolare Brennstoffzellenplatte und Verfahren zur Herstellung derselben
Schneider et al. Site-specific deposition of single gold nanoparticles by individual growth in electrohydrodynamically-printed attoliter droplet reactors
WO2004018091A1 (fr) Corps catalyseur microstructure et procede de fabrication
KR100564106B1 (ko) 고체 산화물 연료전지의 제조방법
EP1179361A1 (fr) Procédé de fabrication d'une membrane composite métallique, membrane composite métallique ainsi produit et son utilisation
CN111039253A (zh) 一种凹槽复合多凸起结构及其制备工艺
DE10243002A1 (de) Mikrostrukturierter Katalysatorkörper und Verfahren zu dessen Herstellung
CN105483631B (zh) 一种纳米多孔晶态无机薄膜材料的制备方法
DE102006017153B3 (de) Verfahren zur Herstellung von Oberflächenstrukturen und Element mit Oberflächenstruktur zur Verwendung für Biosensoren oder die Herstellung von Zellleitstrukturen
WO2019215006A1 (fr) Procédé destiné à fabriquer une unité de séquençage destinée à séquencer un matériau biochimique et unité de séquençage
DE10038800A1 (de) Vorrichtung zur Herstellung katalytisch wirksamer Schichten
CN112687891B (zh) 一种多孔催化剂、电极、固体氧化物燃料电池及其制备方法

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20050509

AK Designated contracting states

Kind code of ref document: A1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

DAX Request for extension of the european patent (deleted)
RIN1 Information on inventor provided before grant (corrected)

Inventor name: SOMMER, MARC

Inventor name: PRESTING, HARTMUT

Inventor name: KONLE, JOHANNES

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20100302