EP1541871A2 - Side channel pumping stage - Google Patents

Side channel pumping stage Download PDF

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Publication number
EP1541871A2
EP1541871A2 EP20040027043 EP04027043A EP1541871A2 EP 1541871 A2 EP1541871 A2 EP 1541871A2 EP 20040027043 EP20040027043 EP 20040027043 EP 04027043 A EP04027043 A EP 04027043A EP 1541871 A2 EP1541871 A2 EP 1541871A2
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EP
European Patent Office
Prior art keywords
side channel
rotor
blades
pumping stage
elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP20040027043
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German (de)
French (fr)
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EP1541871A3 (en
EP1541871B1 (en
Inventor
Peter Fahrenbach
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Pfeiffer Vacuum GmbH
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Pfeiffer Vacuum GmbH
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Filing date
Publication date
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1541871A2 publication Critical patent/EP1541871A2/en
Publication of EP1541871A3 publication Critical patent/EP1541871A3/en
Application granted granted Critical
Publication of EP1541871B1 publication Critical patent/EP1541871B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D23/00—Other rotary non-positive-displacement pumps
    • F04D23/008—Regenerative pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/168—Pumps specially adapted to produce a vacuum

Definitions

  • the invention relates to a side channel pumping stage according to the preamble of 1. Protection claim.
  • Side channel pumps are a common type of turbomachinery. You will u. a. successfully used as vacuum pumps, as they are for a oil-free operation (that is, no lubricant in the working space) are suitable.
  • the pump-active parts of a side channel pump in their basic version from an impeller and a plurality of open radial or spatially curved Shovels on its outer circumference and one on this circumference arranged side channel.
  • the side channel is through a lock in one Suction and pressure area divided.
  • the invention is based on the object to present a side channel pump, which in a compact design a sufficiently high pressure difference generated.
  • the length of the pump should be kept within limits. A significant increase in the pumping speed comes as a further requirement added. Production must be rational and with less effort than existing ones Systems can be performed.
  • the arrangement according to the invention allows a short design of the pump, in particular of the rotor.
  • the rotor thermal length change kept within limits.
  • smaller gaps in turn affect the volume of construction out.
  • a combination of parallel and serial pumping stages offers in a simple way the possibility of optimizing pumping speed and compression. The production can be carried out easily and rationally become.
  • FIG. 1 A section of side channel pumping stages is shown in perspective in FIG. 1.
  • the pumping elements consist in this example of two rotor elements 12, which are mounted on a shaft 10, and a stator 14a (or 14b for another embodiment).
  • the stator element which is located between the rotor elements is not shown here fixed parts of the pump connected. Through the interaction of Rotor and stator elements, which are arranged alternately one behind the other are, the pumping effect arises.
  • On the rotor element 12 are, as here, for example shown arranged on two concentric rings blades 16, 18, which protrude in the axial direction from the rotor element.
  • the production of The rotor elements are made in such a way that in concentric elevations, which extend in the axial direction of a rotor disk, holes 15 are drilled with the desired radius of the blades 16, 18. ever According to embodiment, these holes are either according to the Drilled axial extent of the blades or completely drilled.
  • the Arrangement of the blades can thus mirror images on both sides of the disc arise. Through the method of piercing the holes can be a particularly rational manufacturing method arise by adding several slices be stacked in one operation.
  • the stator element 14a is in perspective in FIG. 2a and in FIG. 3a and FIG. 4a in FIG two sections A-A and B-B shown.
  • a rotor element 12 is arranged between two stator elements 14a.
  • concentric channels 22a and 24a In these channels engage the blades 16 and 18 of the rotor disk 12 and cause at rotation of promotion of gas, which at 32a and 34a into channels entry.
  • the channels In the channels are at 26a and 28a locks, which cause that the gas is not constantly conveyed in a circle, but at 36a and 38a leaves the channels and in the adjacent channels in the axial direction is encouraged. In this way, a gas extraction takes place in parallel in the concentric Wrestling, whereby the pumping speed of a pumping stage substantially is increased.
  • FIGS. 2b to 4b A further embodiment of the invention is shown in FIGS. 2b to 4b.
  • a stator element 14b is in perspective in FIG. 2b and in FIG. 3b and FIG. 4b in FIG two sections A-A and B-B shown.
  • Figs. 3b and 4b is a rotor element 12 arranged between two stator elements 14b.
  • In the stator element are concentric channels 22b and 24b incorporated. Access these channels the blades 16 and 18 of the rotor disk 12 and cause in the rotation the delivery of the gas, which enters the channel 22b at 32b.
  • At 36b causes the barrier 26b that the gas leaves the channel 22b and over a Connecting channel 30 at 34b to the channel 24b passes.
  • the lock 28b causes the gas leaves the channel 24b via the gas outlet opening 38b, to be promoted beyond a subsequent stage.
  • the two embodiments for parallel and serial promotion can each be combined as required and application.

Abstract

The side channel pump stage has pump-active structures fitted to shaft-mounted rotor elements (12) on both sides and consist of blades (16,18) projecting in the axial direction on at least one side and installed on one or more concentric rings. The blades of the rotor elements engage in one or more concentric channels (22a,24a,22b,24b) formed in stator elements (14a,14b). Gas inlet openings are separated from gas outlet openings by barriers. An independent claim is included for a method for the manufacture of rotor elements of a side channel pump stage entailing the drilling of holes (15), with the desired radius of the blades, in concentric protrusions which extend from the rotor disc in the axial direction.

Description

Die Erfindung betrifft eine Seitenkanalpumpstufe nach dem Oberbegriff des 1. Schutzanspruches.The invention relates to a side channel pumping stage according to the preamble of 1. Protection claim.

Seitenkanalpumpen sind eine weit verbreitete Art von Strömungsmaschinen. Sie werden u. a. erfolgreich als Vakuumpumpen eingesetzt, da sie für einen ölfreien Betrieb (d. h. keine Schmiermittel im Arbeitsraum) geeignet sind. Die pumpaktiven Teile einer Seitenkanalpumpe in ihrer Grundausführung bestehen aus einem Laufrad und einer Vielzahl von offenen radialen oder räumlich gekrümmten Schaufeln an dessen äußerem Umfang und einem an diesem Umfang angeordneten Seitenkanal. Der Seitenkanal ist durch eine Sperre in einen Saug- und Druckbereich aufgeteilt.Side channel pumps are a common type of turbomachinery. You will u. a. successfully used as vacuum pumps, as they are for a oil-free operation (that is, no lubricant in the working space) are suitable. The pump-active parts of a side channel pump in their basic version from an impeller and a plurality of open radial or spatially curved Shovels on its outer circumference and one on this circumference arranged side channel. The side channel is through a lock in one Suction and pressure area divided.

Zur Erzielung hoher Druckdifferenzen müssen mehrere Stufen hintereinander geschaltet werden. Dies hat zur Folge, dass die Pumpe in axialer Richtung länger wird. Neben einem höheren Platzbedarf wird sich auch die thermische Ausdehnung bei einer längeren Bauweise nachteilig auswirken. Zur Sicherheit müssen die Spalte zwischen Rotor- und Statorbauteilen größer werden, wodurch die Rückströmungsverluste zunehmen. Dadurch, dass die Schöpfräume, welche durch die am Umfang der Laufräder angebrachten Schaufeln und den ebenfalls am Umfang angeordneten Seitenkanal gebildet werden, begrenzt sind, werden solche Pumpen nur für kleine Förderströme eingesetzt. Folglich ist ihr Wirkungsgrad in Bezug auf die Gasförderung sehr gering. To achieve high pressure differences must be several stages in a row be switched. This has the consequence that the pump in the axial direction gets longer. In addition to a higher space requirement is also the thermal Expansion in a longer construction disadvantageous effect. For safety The gaps between the rotor and stator components must become larger, which means the return flow losses increase. Because the creative spaces, which by the blades attached to the circumference of the wheels and the are also formed on the circumference arranged side channel, limited are, such pumps are used only for small flow rates. Consequently, it is their efficiency in terms of gas production very low.

Der Erfindung liegt die Aufgabe zu Grunde, eine Seitenkanalpumpe vorzustellen, welche bei kompakter Bauweise eine ausreichend hohe Druckdifferenz erzeugt. Insbesondere soll die Länge der Pumpe in Grenzen gehalten werden. Eine deutliche Erhöhung des Saugvermögens kommt als weitere Anforderung hinzu. Die Fertigung muss rationell und mit weniger Aufwand als bei bestehenden Systemen durchgeführt werden können.The invention is based on the object to present a side channel pump, which in a compact design a sufficiently high pressure difference generated. In particular, the length of the pump should be kept within limits. A significant increase in the pumping speed comes as a further requirement added. Production must be rational and with less effort than existing ones Systems can be performed.

Die Aufgabe wird durch die kennzeichnenden Merkmale der Schutzansprüche gelöst.The object is achieved by the characterizing features of the claims solved.

Die erfindungsgemäße Anordnung erlaubt eine kurze Bauform der Pumpe, insbesondere des Rotors. Dadurch wird bei Erwärmung des Rotors die thermische Längenänderung in Grenzen gehalten. Als Folge ist eine Verkleinerung der axialen Spalte möglich, wodurch Rückströmverluste verringert werden. Zusätzlich wirken sich kleinere Spalte wiederum auf das Bauvolumen aus. Durch die Möglichkeit des parallelen Pumpens kann das Saugvermögen deutlich erhöht werden. Eine Kombination von parallelen und seriellen Pumpstufen bietet auf einfache Art die Möglichkeit einer Optimierung von Saugvermögen und Kompression. Die Fertigung kann einfach und rationell durchgeführt werden.The arrangement according to the invention allows a short design of the pump, in particular of the rotor. As a result, when heated, the rotor thermal length change kept within limits. As a result, a reduction the axial gap possible, whereby Rückströmverluste reduced become. In addition, smaller gaps in turn affect the volume of construction out. Due to the possibility of parallel pumping, the pumping speed be increased significantly. A combination of parallel and serial pumping stages offers in a simple way the possibility of optimizing pumping speed and compression. The production can be carried out easily and rationally become.

Anhand der Figuren 1 - 4b soll die Erfindung an einem Beispiel näher erläutert werden.

  • Fig. 1 zeigt eine Seitenkanalpumpstufe in perspektivischer Ansicht.
  • Fig. 2a zeigt eine Statorscheibe für den Parallelbetrieb zweier koaxialer Pumpstufen.
  • Fig. 3a zeigt den Schnitt A-A aus Fig. 2a.
  • Fig. 4a zeigt den Schnitt B-B aus Fig. 2a.
  • Fig. 2b zeigt eine Statorscheibe für den seriellen Betrieb zweier koaxialer Pumpstufen.
  • Fig. 3b zeigt den Schnitt A-A aus Fig. 2b.
  • Fig. 4b zeigt den Schnitt B-B aus Fig. 2b.
    • With reference to Figures 1 - 4b, the invention will be explained in more detail by way of example.
  • Fig. 1 shows a side channel pumping stage in a perspective view.
  • Fig. 2a shows a stator for the parallel operation of two coaxial pumping stages.
  • Fig. 3a shows the section AA of Fig. 2a.
  • Fig. 4a shows the section BB of Fig. 2a.
  • Fig. 2b shows a stator for the serial operation of two coaxial pumping stages.
  • Fig. 3b shows the section AA of Fig. 2b.
  • FIG. 4b shows the section BB from FIG. 2b.

    • Ein Ausschnitt aus Seitenkanalpumpstufen ist in Fig. 1 perspektivisch dargestellt. Die Pumpelemente bestehen in diesem Beispiel aus zwei Rotorelementen 12, welche auf einer Welle 10 befestigt sind, und aus einem Statorelement 14a (bzw. 14b für eine andere Ausführungsform). Das Statorelement, welches sich zwischen den Rotorelementen befindet, ist mit hier nicht dargestellten feststehenden Teilen der Pumpe verbunden. Durch das Zusammenwirken von Rotor- und Statorelementen, welche abwechselnd hintereinander angeordnet sind, entsteht der Pumpeffekt. An dem Rotorelement 12 sind, wie hier beispielsweise dargestellt, auf zwei konzentrischen Ringen Schaufeln 16, 18 angeordnet, welche in axialer Richtung vom Rotorelement abstehen. Die Herstellung der Rotorelemente erfolgt in der Weise, dass in konzentrische Erhebungen, welche sich in axialer Richtung von einer Rotorscheibe aus erstrecken, Löcher 15 mit dem gewünschten Radius der Schaufeln 16, 18 gebohrt werden. Je nach Ausführungsform werden diese Löcher entweder entsprechend der axialen Ausdehnung der Schaufeln angebohrt oder ganz durchgebohrt. Die Anordnung der Schaufeln kann so spiegelbildlich auf beiden Seiten der Scheibe entstehen. Durch die Methode des Durchbohrens der Löcher kann eine besonders rationelle Fertigungsmethode entstehen, indem mehrere Scheiben übereinandergestapelt in einem Arbeitsgang gefertigt werden. A section of side channel pumping stages is shown in perspective in FIG. 1. The pumping elements consist in this example of two rotor elements 12, which are mounted on a shaft 10, and a stator 14a (or 14b for another embodiment). The stator element, which is located between the rotor elements is not shown here fixed parts of the pump connected. Through the interaction of Rotor and stator elements, which are arranged alternately one behind the other are, the pumping effect arises. On the rotor element 12 are, as here, for example shown arranged on two concentric rings blades 16, 18, which protrude in the axial direction from the rotor element. The production The rotor elements are made in such a way that in concentric elevations, which extend in the axial direction of a rotor disk, holes 15 are drilled with the desired radius of the blades 16, 18. ever According to embodiment, these holes are either according to the Drilled axial extent of the blades or completely drilled. The Arrangement of the blades can thus mirror images on both sides of the disc arise. Through the method of piercing the holes can be a particularly rational manufacturing method arise by adding several slices be stacked in one operation.

    So können auf der Ober- und der Unterseite einer Rotorscheibe mehrere Pumpstufen konzentrisch angeordnet sein. Da in einer Ausführungsform die jeweils korrespondierenden Pumpstufen der Ober- und der Unterseite durch Löcher verbunden sind, wird es möglich, die Pumpstufen parallel oder seriell zu betreiben.So can on the top and the bottom of a rotor disk more Pump stages to be arranged concentrically. As in one embodiment, the respectively corresponding pumping stages of the top and the bottom by Holes are connected, it becomes possible to parallel or serial the pumping stages operate.

    Das Statorelement 14a ist in Fig. 2a perspektivisch und in Fig. 3a und Fig. 4a in zwei Schnitten A-A und B-B dargestellt. In den Schnitten Fig. 3a und Fig. 4a ist ein Rotorelement 12 zwischen zwei Statorelementen 14a angeordnet. Im Statorelement sind konzentrische Kanäle 22a und 24a eingearbeitet. In diese Kanäle greifen die Schaufeln 16 und 18 der Rotorscheibe 12 ein und bewirken bei der Rotation die Förderung des Gases, welches bei 32a und 34a in die Kanäle eintritt. In den Kanälen befinden sich bei 26a und 28a Sperren, welche bewirken, dass das Gas nicht ständig im Kreis gefördert wird, sondern bei 36a und 38a die Kanäle verlässt und in die in axialer Richtung benachbarten Kanäle gefördert wird. Auf diese Weise findet eine Gasförderung parallel in den konzentrischen Ringen statt, wodurch das Saugvermögen einer Pumpstufe wesentlich erhöht wird.The stator element 14a is in perspective in FIG. 2a and in FIG. 3a and FIG. 4a in FIG two sections A-A and B-B shown. In the sections Fig. 3a and Fig. 4a is a rotor element 12 is arranged between two stator elements 14a. In the stator element are concentric channels 22a and 24a incorporated. In these channels engage the blades 16 and 18 of the rotor disk 12 and cause at rotation of promotion of gas, which at 32a and 34a into channels entry. In the channels are at 26a and 28a locks, which cause that the gas is not constantly conveyed in a circle, but at 36a and 38a leaves the channels and in the adjacent channels in the axial direction is encouraged. In this way, a gas extraction takes place in parallel in the concentric Wrestling, whereby the pumping speed of a pumping stage substantially is increased.

    Eine weitere Ausführungsform der Erfindung zeigen Fig. 2b bis Fig. 4b.A further embodiment of the invention is shown in FIGS. 2b to 4b.

    Ein Statorelement 14b ist in Fig. 2b perspektivisch und in Fig. 3b und Fig. 4b in zwei Schnitten A-A und B-B dargestellt. In den Fig. 3b und 4b ist ein Rotorelement 12 zwischen zwei Statorelementen 14b angeordnet. Im Statorelement sind konzentrische Kanäle 22b und 24b eingearbeitet. In diese Kanäle greifen die Schaufeln 16 und 18 der Rotorscheibe 12 ein und bewirken bei der Rotation die Förderung des Gases, welches bei 32b in den Kanal 22b eintritt. Bei 36b bewirkt die Sperre 26b, dass das Gas den Kanal 22b verlässt und über einen Verbindungskanal 30 bei 34b an den Kanal 24b gelangt. Die Sperre 28b bewirkt, dass das Gas über die Gasaustrittsöffnung 38b den Kanal 24b verlässt, um über eine nachfolgende Stufe weiter befördert zu werden.A stator element 14b is in perspective in FIG. 2b and in FIG. 3b and FIG. 4b in FIG two sections A-A and B-B shown. In Figs. 3b and 4b is a rotor element 12 arranged between two stator elements 14b. In the stator element are concentric channels 22b and 24b incorporated. Access these channels the blades 16 and 18 of the rotor disk 12 and cause in the rotation the delivery of the gas, which enters the channel 22b at 32b. At 36b causes the barrier 26b that the gas leaves the channel 22b and over a Connecting channel 30 at 34b to the channel 24b passes. The lock 28b causes the gas leaves the channel 24b via the gas outlet opening 38b, to be promoted beyond a subsequent stage.

    Die beiden Ausführungsformen für parallele und serielle Förderung können je nach Bedarf und Anwendungsfall beliebig kombiniert werden. The two embodiments for parallel and serial promotion can each be combined as required and application.

    Bezugszahlenreference numerals

    1010
    Wellewave
    1212
    Rotorelementrotor member
    14a14a
    Statorelementstator
    14b14b
    Statorelementstator
    1515
    Löcherholes
    1616
    Schaufelnshovel
    1818
    Schaufelnshovel
    22a22a
    Konzentrische KanäleConcentric channels
    22b22b
    Konzentrische KanäleConcentric channels
    24a24a
    Konzentrische KanäleConcentric channels
    24b24b
    Konzentrische KanäleConcentric channels
    26a26a
    SperrenLock
    26b26b
    SperrenLock
    28a28a
    SperrenLock
    28b28b
    SperrenLock
    3030
    Verbindungskanalconnecting channel
    32a32a
    Gaseintrittgas inlet
    32b32b
    Gaseintrittgas inlet
    34a34a
    Gaseintrittgas inlet
    34b34b
    Gaseintrittgas inlet
    36a36a
    Gasaustrittgas outlet
    36b36b
    Gasaustrittgas outlet
    38a38a
    Gasaustrittgas outlet
    38b38b
    Gasaustrittgas outlet

    Claims (7)

    Seitenkanalpumpstufe mit auf einer Welle (10) befestigten Rotorelementen (12) und Statorelementen (14a, 14b), welche mit den feststehenden Teilen der Pumpe verbunden sind, dadurch gekennzeichnet, dass an den Rotorelementen (12) beidseitig pumpaktive Strukturen angebracht sind, wobei diese auf mindestens einer Seite aus in axialer Richtung abstehenden Schaufeln (16, 18) bestehen, welche auf einem oder mehreren konzentrischen Ringen angeordnet sind, dass in den Statorelementen (14a, 14b) ein oder mehrere konzentrische Kanäle (22a, 24a, 22b, 24b) eingearbeitet sind, in welche die Schaufeln (16, 18) der Rotorelemente eingreifen, und dass Gaseintrittsöffnungen (32a, 34a, 32b, 34b) vorhanden sind, welche durch Sperren (26a, 28a, 26b, 28b) von den Gasaustrittsöffnungen (36a, 38a, 36b, 38b) getrennt sind.Side channel pumping stage with on a shaft (10) fixed rotor elements (12) and stator elements (14a, 14b), which are connected to the fixed parts of the pump, characterized in that on the rotor elements (12) pump-active structures are mounted on both sides, said on at least one side of axially projecting blades (16, 18), which are arranged on one or more concentric rings, that incorporated in the stator elements (14a, 14b) one or more concentric channels (22a, 24a, 22b, 24b) are in which the blades (16, 18) of the rotor elements engage, and that gas inlet openings (32a, 34a, 32b, 34b) are present, which by locks (26a, 28a, 26b, 28b) from the gas outlet openings (36a, 38a, 36b, 38b) are separated. Seitenkanalpumpstufe nach Anspruch 1, dadurch gekennzeichnet, dass die Schaufeln (16, 18) beidseitig der Rotorelemente (12) angeordnet sind.Side channel pumping stage according to claim 1, characterized in that the blades (16, 18) are arranged on both sides of the rotor elements (12). Seitenkanalpumpstufe nach Anspruch 1 oder 2, dadurch gekennzeichnet, dass die Gasführungen der beiden Seiten eines Rotorelementes miteinander verbunden sind.Side channel pumping stage according to claim 1 or 2, characterized in that the gas ducts of the two sides of a rotor element are interconnected. Seitenkanalpumpstufe nach mindestens einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass sich in dem Rotorelement (12) zwischen den Schaufeln (16, 18) in axialer Richtung durchgehende Löcher (15) befinden.Side channel pumping stage according to at least one of the preceding claims, characterized in that in the rotor element (12) between the blades (16, 18) in the axial direction through holes (15) are located. Seitenkanalpumpstufe nach mindestens einem der vorangehenden Ansprüche, dadurch gekennzeichnet, dass die Gasaustrittsöffnung (36b) eines Kanals (22b) über einen Verbindungskanal (30) mit der Gaseintrittsöffnung (34b) eines benachbarten Kanals (24b) verbunden ist.Side channel pumping stage according to at least one of the preceding claims, characterized in that the gas outlet opening (36b) of a channel (22b) via a connecting channel (30) with the gas inlet opening (34b) of an adjacent channel (24b) is connected. Verfahren zum Herstellen von Rotorelementen (12) einer Seitenkanalpumpstufe, dadurch gekennzeichnet, dass in konzentrische Erhebungen, welche sich in axialer Richtung von einer Rotorscheibe aus erstrecken, Löcher (15) mit dem gewünschten Radius der Schaufeln (16, 18) gebohrt werden.Method for producing rotor elements (12) of a side channel pumping stage, characterized in that holes (15) with the desired radius of the blades (16, 18) are bored in concentric elevations which extend in the axial direction from a rotor disk. Verfahren zum Herstellen von Rotorelementen (12) einer Seitenkanalpumpstufe nach Anspruch 6, dadurch gekennzeichnet, dass die Löcher (15) zwischen den Schaufeln (16, 18) durch die Rotorscheibe gebohrt werden.A method of manufacturing rotor elements (12) of a side channel pumping stage according to claim 6, characterized in that the holes (15) between the blades (16, 18) are drilled through the rotor disk.
    EP04027043.1A 2003-12-10 2004-11-13 Side channel pumping stage Not-in-force EP1541871B1 (en)

    Applications Claiming Priority (2)

    Application Number Priority Date Filing Date Title
    DE2003157546 DE10357546A1 (en) 2003-12-10 2003-12-10 Side channel pump stage
    DE10357546 2003-12-10

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    Publication Number Publication Date
    EP1541871A2 true EP1541871A2 (en) 2005-06-15
    EP1541871A3 EP1541871A3 (en) 2011-09-14
    EP1541871B1 EP1541871B1 (en) 2015-08-05

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    Cited By (2)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    WO2014067704A1 (en) * 2012-10-29 2014-05-08 Continental Automotive Gmbh Turbomachine in a motor vehicle
    EP3088743A1 (en) * 2013-08-06 2016-11-02 Pfeiffer Vacuum GmbH Side-channel vacuum pump stage with a stripper that is slanted on the suction side

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    JPH01267390A (en) 1988-04-18 1989-10-25 Daikin Ind Ltd Vortex vacuum pump
    GB2253246A (en) 1990-12-15 1992-09-02 Dowty Defence & Air Syst Regenerative pump
    EP0805275A2 (en) 1996-05-03 1997-11-05 The BOC Group plc Vacuum pumps

    Cited By (2)

    * Cited by examiner, † Cited by third party
    Publication number Priority date Publication date Assignee Title
    WO2014067704A1 (en) * 2012-10-29 2014-05-08 Continental Automotive Gmbh Turbomachine in a motor vehicle
    EP3088743A1 (en) * 2013-08-06 2016-11-02 Pfeiffer Vacuum GmbH Side-channel vacuum pump stage with a stripper that is slanted on the suction side

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    Publication number Publication date
    DE10357546A1 (en) 2005-07-07
    EP1541871A3 (en) 2011-09-14
    EP1541871B1 (en) 2015-08-05

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