EP1531267A3 - Pumping device using thermal-transpiration micropumps - Google Patents

Pumping device using thermal-transpiration micropumps Download PDF

Info

Publication number
EP1531267A3
EP1531267A3 EP04292591A EP04292591A EP1531267A3 EP 1531267 A3 EP1531267 A3 EP 1531267A3 EP 04292591 A EP04292591 A EP 04292591A EP 04292591 A EP04292591 A EP 04292591A EP 1531267 A3 EP1531267 A3 EP 1531267A3
Authority
EP
European Patent Office
Prior art keywords
thermal
pumping device
micropumps
transpiration micropumps
control conductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04292591A
Other languages
German (de)
French (fr)
Other versions
EP1531267A2 (en
EP1531267B1 (en
Inventor
Roland Bernard
Hisanori Kambara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Alcatel Lucent SAS
Original Assignee
Alcatel CIT SA
Alcatel SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Alcatel CIT SA, Alcatel SA filed Critical Alcatel CIT SA
Publication of EP1531267A2 publication Critical patent/EP1531267A2/en
Publication of EP1531267A3 publication Critical patent/EP1531267A3/en
Application granted granted Critical
Publication of EP1531267B1 publication Critical patent/EP1531267B1/en
Not-in-force legal-status Critical Current
Anticipated expiration legal-status Critical

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/20—Other positive-displacement pumps
    • F04B19/24—Pumping by heat expansion of pumped fluid
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B19/00—Machines or pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B1/00 - F04B17/00
    • F04B19/006—Micropumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Micromachines (AREA)
  • Reciprocating Pumps (AREA)
  • Disinfection, Sterilisation Or Deodorisation Of Air (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Thermotherapy And Cooling Therapy Devices (AREA)

Abstract

The device has heat transpiration micropumps (1, 6-9) placed on a semiconductor substrate (5) in several rows (A-D) and columns (a-d). Each micropump has a channel (3) and a heating unit (4) connected in series with a transistor whose base is connected to an output of an AND gate whose respective inputs are connected to a row control conductor and a column control conductor.
EP04292591A 2003-11-04 2004-11-02 Pumping device using thermal-transpiration micropumps Not-in-force EP1531267B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0312894 2003-11-04
FR0312894A FR2861814B1 (en) 2003-11-04 2003-11-04 THERMAL TRANSPIRATION MICROPOMP PUMPING DEVICE

Publications (3)

Publication Number Publication Date
EP1531267A2 EP1531267A2 (en) 2005-05-18
EP1531267A3 true EP1531267A3 (en) 2006-05-17
EP1531267B1 EP1531267B1 (en) 2008-12-03

Family

ID=34429857

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04292591A Not-in-force EP1531267B1 (en) 2003-11-04 2004-11-02 Pumping device using thermal-transpiration micropumps

Country Status (6)

Country Link
US (1) US7572110B2 (en)
EP (1) EP1531267B1 (en)
JP (1) JP2005163784A (en)
AT (1) ATE416311T1 (en)
DE (1) DE602004018089D1 (en)
FR (1) FR2861814B1 (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI278426B (en) * 2004-12-30 2007-04-11 Prec Instr Dev Ct Nat Composite plate device for thermal transpiration micropump
WO2006121534A1 (en) * 2005-05-09 2006-11-16 University Of Oregon Thermally-powered nonmechanical fluid pumps using ratcheted channels
US20090095927A1 (en) * 2005-11-04 2009-04-16 Mccarthy Matthew Thermally actuated valves, photovoltaic cells and arrays comprising same, and methods for producing same
US7913928B2 (en) 2005-11-04 2011-03-29 Alliant Techsystems Inc. Adaptive structures, systems incorporating same and related methods
WO2008038611A1 (en) * 2006-09-28 2008-04-03 National Institute Of Advanced Industrial Science And Technology Gas conveying pump, method of forming heater, and sensor
US7980828B1 (en) 2007-04-25 2011-07-19 Sandia Corporation Microelectromechanical pump utilizing porous silicon
US9728699B2 (en) * 2009-09-03 2017-08-08 Game Changers, Llc Thermal transpiration device and method of making same
US9243624B2 (en) 2009-10-23 2016-01-26 University Of Louisville Research Foundation, Inc. Thermally driven Knudsen pump
US8480622B2 (en) * 2009-12-18 2013-07-09 Sims Infusion pump
RU2462615C1 (en) * 2011-04-19 2012-09-27 Федеральное Государственное Автономное Образовательное Учреждение Высшего Профессионального Образования "Московский Физико-Технический Институт (Государственный Университет)" Gas micropump
JP4934750B1 (en) * 2011-05-31 2012-05-16 株式会社メトラン Pump unit, breathing assistance device
JP5211336B2 (en) * 2012-02-16 2013-06-12 株式会社メトラン Pump unit, breathing assistance device
US9702351B2 (en) * 2014-11-12 2017-07-11 Leif Alexi Steinhour Convection pump and method of operation
US10208739B2 (en) * 2016-01-05 2019-02-19 Funai Electric Co., Ltd. Microfluidic pump with thermal control
JP7310911B2 (en) 2019-10-21 2023-07-19 株式会社村田製作所 Fluid control device
IL311347A (en) * 2021-09-09 2024-05-01 Torramics Inc Apparatus and method of operating a gas pump

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
US20020076140A1 (en) * 2000-12-14 2002-06-20 Onix Microsystems, Inc. MEMS optical switch with pneumatic actuation
US6422823B2 (en) * 1999-12-09 2002-07-23 Alcatel Mini-environment control system and method
US6533554B1 (en) * 1999-11-01 2003-03-18 University Of Southern California Thermal transpiration pump

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59130519A (en) * 1983-09-05 1984-07-27 Mitsutoshi Kashiwajima Device for transporting and compressing gas by using porous material
US5041800A (en) * 1989-05-19 1991-08-20 Ppa Industries, Inc. Lower power oscillator with heated resonator (S), with dual mode or other temperature sensing, possibly with an insulative support structure disposed between the resonator (S) and a resonator enclosure
JP3005972B2 (en) * 1992-05-19 2000-02-07 株式会社 セル・コーポレーション Threshold operation type semiconductor electrostatic device
DE69333758T2 (en) * 1992-10-08 2006-04-13 Hewlett-Packard Development Co., L.P., Houston Printhead with reduced connections to a printer
DE29724735U1 (en) * 1996-12-11 2003-11-13 Gesim Ges Fuer Silizium Mikros Micro-ejection pump - has feed channel found in silicon chip in direction of pump chamber designed at least partly as diffusor element
US6179586B1 (en) * 1999-09-15 2001-01-30 Honeywell International Inc. Dual diaphragm, single chamber mesopump
AU2003304553A1 (en) * 2003-10-21 2005-06-08 Robert Lerner Improved capillary pumps for vaporization of liquids

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5871336A (en) * 1996-07-25 1999-02-16 Northrop Grumman Corporation Thermal transpiration driven vacuum pump
US6533554B1 (en) * 1999-11-01 2003-03-18 University Of Southern California Thermal transpiration pump
US6422823B2 (en) * 1999-12-09 2002-07-23 Alcatel Mini-environment control system and method
US20020076140A1 (en) * 2000-12-14 2002-06-20 Onix Microsystems, Inc. MEMS optical switch with pneumatic actuation

Also Published As

Publication number Publication date
DE602004018089D1 (en) 2009-01-15
JP2005163784A (en) 2005-06-23
EP1531267A2 (en) 2005-05-18
EP1531267B1 (en) 2008-12-03
US7572110B2 (en) 2009-08-11
FR2861814A1 (en) 2005-05-06
US20050095143A1 (en) 2005-05-05
FR2861814B1 (en) 2006-02-03
ATE416311T1 (en) 2008-12-15

Similar Documents

Publication Publication Date Title
EP1531267A3 (en) Pumping device using thermal-transpiration micropumps
WO2004030036A3 (en) A modular bipolar-cmos-dmos analog integrated circuit and power transistor technology
TW200501039A (en) Active matrix display panel, method and device for driving such a display panel and a display device comprising such a display panel
MXPA05008119A (en) Microfluidic device with thin-film electronic devices.
ATE349622T1 (en) FLUID CONTROL DEVICE
EP2290642A3 (en) Semiconductor device for a TFTdisplay matrix
BRPI0603019A (en) pump based on electroactive polymer
ATE370546T1 (en) DOUBLE DRIVE DOWN REGULATOR
EP2365533A3 (en) High-voltage vertical FET and method of manufacturing the same
EP1653513A3 (en) Integrated circuit with multi-length output transistor segments
TW200507240A (en) Semiconductor device and semiconductor memory device
EP1193741A3 (en) Semiconductor device having thin film transistor for supplying current to driven element
WO2007034437A3 (en) A micro-fluidic device based upon active matrix principles
ATE472845T1 (en) FREE PISTON DEVICE WITH ELECTRICAL LINEAR DRIVE
DE602007014315D1 (en) Vertical high voltage FET
ATE405732T1 (en) EXHAUST TREATMENT DEVICE AND PRODUCTION METHOD THEREOF
SE0303106D0 (en) Ldmos transistor device, integrated circuit, and fabrication method thereof
TW200633190A (en) Method for conversion of flash-memory to rom-memory and device with such a converted rom-memory
WO2005052997A3 (en) Solid-state high power device and method
DE50200957D1 (en) Fluid operated drive device
WO2005027216A3 (en) Electronic devices
EP1473779A3 (en) Thin film transistor and display device using the same
WO2008120351A1 (en) Organic el display and method for fabricating the same
TW200608583A (en) Semiconductor device
TW200638328A (en) Active matrix display devices

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL HR LT LV MK YU

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL HR LT LV MK YU

17P Request for examination filed

Effective date: 20061117

AKX Designation fees paid

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

RAP1 Party data changed (applicant data changed or rights of an application transferred)

Owner name: ALCATEL LUCENT

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

RIC1 Information provided on ipc code assigned before grant

Ipc: F04B 19/00 20060101ALI20071029BHEP

Ipc: F04B 19/24 20060101AFI20071029BHEP

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IS IT LI LU MC NL PL PT RO SE SI SK TR

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

Free format text: NOT ENGLISH

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

Free format text: LANGUAGE OF EP DOCUMENT: FRENCH

REF Corresponds to:

Ref document number: 602004018089

Country of ref document: DE

Date of ref document: 20090115

Kind code of ref document: P

REG Reference to a national code

Ref country code: CH

Ref legal event code: NV

Representative=s name: CABINET ROLAND NITHARDT CONSEILS EN PROPRIETE INDU

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090314

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: SI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: PL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

REG Reference to a national code

Ref country code: IE

Ref legal event code: FD4D

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BG

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090303

Ref country code: RO

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: EE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: IE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090504

Ref country code: IS

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090403

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090303

Ref country code: CZ

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: SK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

26N No opposition filed

Effective date: 20090904

BERE Be: lapsed

Owner name: ALCATEL LUCENT

Effective date: 20091130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: BE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091130

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090304

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: FR

Payment date: 20110104

Year of fee payment: 7

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: CH

Payment date: 20101224

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20101221

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20091102

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20101222

Year of fee payment: 7

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: HU

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20090604

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: TR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20081203

REG Reference to a national code

Ref country code: CH

Ref legal event code: PCOW

Free format text: ALCATEL LUCENT;3, AVENUE OCTAVE GREARD;75007 PARIS (FR)

REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20111102

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CH

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20111130

Ref country code: LI

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20111130

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20120731

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 602004018089

Country of ref document: DE

Effective date: 20120601

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20111102

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20111130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120601

REG Reference to a national code

Ref country code: FR

Ref legal event code: CA

Effective date: 20150521

REG Reference to a national code

Ref country code: FR

Ref legal event code: CA

Effective date: 20150521