EP1511629B1 - Device and method for positioning a substrate to be printed - Google Patents

Device and method for positioning a substrate to be printed Download PDF

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Publication number
EP1511629B1
EP1511629B1 EP03752760A EP03752760A EP1511629B1 EP 1511629 B1 EP1511629 B1 EP 1511629B1 EP 03752760 A EP03752760 A EP 03752760A EP 03752760 A EP03752760 A EP 03752760A EP 1511629 B1 EP1511629 B1 EP 1511629B1
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EP
European Patent Office
Prior art keywords
substrate
screen
printing
print table
arrangement
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EP03752760A
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German (de)
French (fr)
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EP1511629A2 (en
Inventor
Karl Schanz
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Asys Automatisierungssysteme GmbH
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Asys Automatisierungssysteme GmbH
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Publication of EP1511629A2 publication Critical patent/EP1511629A2/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41FPRINTING MACHINES OR PRESSES
    • B41F15/00Screen printers
    • B41F15/14Details
    • B41F15/16Printing tables
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B41PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41PINDEXING SCHEME RELATING TO PRINTING, LINING MACHINES, TYPEWRITERS, AND TO STAMPS
    • B41P2215/00Screen printing machines
    • B41P2215/10Screen printing machines characterised by their constructional features
    • B41P2215/11Registering devices

Definitions

  • the invention relates to an apparatus and a method for positioning a lying on a printing table according to the screen printing process substrate to be printed against the printing pattern of the screen of the screen printing device.
  • the screen printing process is one of the classic printing methods by which very accurate and fine print pattern can be achieved. Such patterns are necessary, for example, for the conductor arrangement in solar cells. Therefore, they are applied in practice by the screen printing method.
  • a very accurate positioning is required, which should not exceed a positional deviation of ⁇ 15 ⁇ m.
  • high productivity should be achievable, ie low cycle times with largely automatic operation.
  • the conveyed substrate to be printed on the printing table of the screen printing device is placed and fixed by means of a vacuum device by suction.
  • the screen carrying the stencil sheet or printing pattern is then placed over the printing table and lowered onto the substrate for screen printing. Due to various circumstances, in particular by the inaccuracy of the conveying and depositing device when fixing the substrate, however, there is the necessary accuracy exceeding deviations of the relative position between the screen and substrate to be printed. It is therefore necessary to detect the corresponding deviation and to change the relative position of substrate and sieve, depending on the detected deviation. Suitably, this is generally achieved by twisting and / or moving the screen relative to the already fixed on the printing table substrate. It can also be moved to the printing table and rotated. Finally, a mixed form can also be used.
  • Essential is thus a very accurate determination of the actual position of the substrate on the printing table. After the shape of the substrate as it leaves its manufacturing process, is known very well, it is sufficient to detect certain predetermined edge portions of the substrate in their position relative to the printing table exactly, with a 5 such edge portion by an edge, so an abrupt transition from the substrate is marked to the printing table.
  • a screen printing machine of the known type is in DE 40 37 678 A1 disclosed.
  • a web to be printed is guided to the screen printing device which includes at least one slidably mounted screen and a device for reading registration marks or the like for a multicolor print.
  • the slidably mounted sieve is connected to servomotors, which are controlled by at least one surveillance camera reading the register marks or color shifts, the pulse generator of which controls the servomotors via a computer or the like.
  • a disadvantage of this device is that the adjustment of the screen is carried out according to the relative position of two or more superimposed color print layers, whereby a correction of the screen position is possible only after successful printing. This is due to the fact that the material to be printed consists of a continuous web, whereby no positioning of the screen with respect to a fixed point on the material to be printed can be done itself.
  • the disadvantage here is that for reading the reference marks of the substrate, the screen must be removed in each case from the viewable by the viewing unit area. This means a reduction in the speed of the production process.
  • the substrate and the surrounding area of the printing table are well illuminated and the actual position of the substrate or the actual position of the predetermined edge portions of the substrate by means of a photoelectric detector, in particular a CCD camera detected.
  • the electrical signal characterizing the actual position of the edge section is processed, and by means of the signals generated during the processing, the relative adjustment of the screen relative to the substrate fixed on the printing table can be achieved.
  • the position of the substrate deposited and fixed on the printing table outside the actual printing area is achieved by successively approaching the predetermined edge sections by means of a movable CCD camera. After detecting the different edge sections, the position is calculated by coordinate calculation. Together with the calculation and the subsequent adjustment of the screen, the printing table is moved to the printing position. This procedure is very time consuming and requires numerous moving parts. In addition, significant masses have to be moved. Furthermore, a very complex calibration, in particular by making trial prints is required. If two movable printing tables are used on which intermittent printing is used, different printing results may occur.
  • the CCD camera is also used for detecting the position of the screen in the known positioning system in a development, so that the positioning of the screen relative to the substrate is somewhat simplified, in particular the initialization or calibration is simplified.
  • the cycle times are even higher and the device is more complex overall and contains even more movable parts.
  • the object of the present invention is thus to provide a device and a method for positioning a substrate applied to a printing table, in which a minimum displacement of the screen is necessary for position control of the relative position of the substrate on the printing table to the screen, whereby the process simplified and accelerated.
  • the basic idea of the present invention is to arrange both the illumination arrangement and the photoelectric detector in or under the printing table and to use the very closely approximated screen as a diffuse reflector, whereby the printing table can remain stationary and the screen depends on the values determined during the detection the actual situation can only be adjusted to a limited extent.
  • Fig. 1 shows a screen printing device 1, consisting essentially of a printing table 2 and a screen. 3
  • a substrate to be printed 4 is stored in a pressure position as possible corresponding position on the table surface 5 of the printing table 2 and fixed by means not shown ansich known Vakuumansaug Rheinen in position.
  • the actual or actual position of the deposited substrate 4 is accurately detected at certain predetermined edge portions 6. In general, three such edge portions are sufficient, but in individual cases, more or fewer edge portions may be required or even sufficient, depending on the type of substrate and the accuracy of the applied printing.
  • a lighting arrangement 7 which illuminates the opposite side of the screen 3 from the side of the printing table 2, specifically in the area of the predetermined edge section 6 considered, wherein the light is diffused on the screen 3.
  • a very good illumination of the substrate 4 is achieved in the predetermined edge portion 6, with high contrast.
  • each of the predetermined edge portions 6 associated photoelectric arrangement in particular a CCD camera 8
  • this strong contrast is detected, so the actual position of the predetermined edge portion 6 relative to the printing table 2 detected extremely accurate.
  • the photoelectric device may also be formed by a suitable laser device or a line scan camera. This accurate detection allows the derivation of adjustment signals for adjusting the screen 3 relative to the substrate 4 on the printing table 2 in accordance with adjusting movements of the screen represented by arrows 9, 10 and 11 3, by moving in the horizontal plane and turning in this horizontal plane.
  • the adjustment arrangements required for this purpose are not shown in detail, since they are commercially available.
  • the evaluation circuit of the detection signals of the CCD cameras 8 is not shown, since this is also commercially available.
  • the CCD camera 8 looks at the predetermined edge portion 6 through the printing table 2 through a viewing window 12, which is completed in the table surface 5 by a transparent insert, such as an acrylic or glass insert 13, the screen 3 facing side with the Table surface 5 is flush.
  • a transparent insert such as an acrylic or glass insert 13
  • the illumination arrangement 7 is also associated with the respective predetermined edge section 6 and integrated in the embodiment in the printing table 2 in this area.
  • at least one light-emitting element such as an LED 14 is installed in the printing table 2 and illuminates the facing side of the screen 3 by also a transparent insert, for example, an acrylic or glass insert 15 therethrough, wherein the screen 3 side facing also flush with the Table surface 5 of the printing table 2 is.
  • a transparent insert for example, an acrylic or glass insert 15 therethrough
  • two such LED 14 are provided with corresponding glass inserts 15.
  • the electrical supply lines are not shown. There may be more than two such LED 14 are provided, which are arranged substantially concentric with the viewing window 12.
  • a reflector or mirror 17 is used in such a position that the light emitted by the LED 14 is directed or focused substantially on a region of the screen 3, which is approximately in the middle of the detection part the CCD camera 8, as corresponds approximately to the axis of symmetry of the viewing window 12.
  • the accuracy of the detection of the respective edge portion 6 is increased.
  • a disturbance or impairment of the detection at another predetermined Randabschitt is also avoided if this is spatially very close.
  • the mirror 17 the light can also be replaced by another suitable device, such. B. a light guide, and the screen 3 are formed.
  • Fig. 1 shows in addition to the described arrangement of illumination assembly 7 and CCD camera 8, a further corresponding arrangement of a second illumination assembly 18 and a second CCD camera 19, these two arrangements have substantially the same structure and the same assignment to each other.
  • This second arrangement of illumination arrangement 18 and CCD camera 19 is used to detect a further, not shown here predetermined edge portion.
  • This further edge section may relate to the same substrate 4.
  • the second illumination arrangement 18 and the second CCD camera 19 can be in a position which corresponds to a predetermined edge section of a substrate of a different format.
  • the LED of this second lighting arrangement 18 may be already integrated in the printing table 2 incorporated, wherein it is only put into operation when a correspondingly assigned or predetermined edge portion is to be detected.
  • the CCD camera 19 may also be removed in the given case. After all, a CCD camera can also do several Assigned to viewing windows and, depending on the format of the substrate to be printed between which, if necessary, be moved automatically.
  • An advantage of the device according to the invention is further that after detecting the predetermined edge portion 6 neither the printing table 2 nor the substrate 4 are moved, whereby the highest possible accuracy in the detection and printing are ensured. Since, after the adjustment of the screen 3 as a result of the detection of the position of the at least one predetermined edge portion 6 of the substrate to be printed 4 only on a very short path (as indicated by arrow 20) must be lowered to the substrate 4 to carry out the screen printing, is also achieves the highest possible accuracy, since any impairment that might arise in the case of long paths of movement is avoided.
  • the distance of the wire 3 from the table surface 5 is determined only by the thickness of the substrate 4 and the conditions that are required to supply the substrate 4 from outside the printing table 2 and place it on the table surface 5. This makes it possible to bring the position of the substrate 4 and the screen 3 as early as possible in preliminary or coarse coverage in an automatic operating method, and the eventual adjustment only for the alignment of the screen 3 relative to the substrate 4 as a result of the signals of the CCD Camera 8 bring about. Also, the calibration of the system can be performed without further resources.
  • the invention is very tolerant of thickness variations, before in particular, when the distance between the sieve 3 and the table surface 5 when carrying out the photoelectric detection is about 5 mm.
  • the printing of solar cells by means of the present invention can be carried out with cycle times of only 3 seconds or less per printing process.
  • the invention is not limited to the printing of solar cells.
  • the invention is also suitable for printing on thick film hybrids, of LCD arrangements, in particular flat screens, of LTCCs and the like.

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Screen Printers (AREA)
  • Manufacturing Of Printed Wiring (AREA)
  • Shaping Of Tube Ends By Bending Or Straightening (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

The disclosure relates to a device and a method for positioning a substrate to be printed in accordance with a screen printing method, lying on a print table, with respect to a template of a screen of the screen printing device. After placement and fixing of the substrate on the print table, and with the screen arranged close to the print position, the side of the screen towards the print table is illuminated from the print table and at least one predetermined edge section of the substrate is photoelectrically detected from the print table. After evaluation of the detection signals, the screen is adjusted into its desired disposition with respect to the actual disposition of the substrate, and then the printing is effected.

Description

Die Erfindung betrifft eine Vorrichtung und ein Verfahren zum Positionieren eines auf einem Drucktisch aufliegende gemäß dem Siebdruckverfahren zu bedruckenden Substrats gegenüber dem Druckmuster des Siebs der Siebdruckeinrichtung.The invention relates to an apparatus and a method for positioning a lying on a printing table according to the screen printing process substrate to be printed against the printing pattern of the screen of the screen printing device.

Das Siebdruckverfahren gehört zu den klassischen Durchdruckverfahren mittels dem sehr genaue und auch feine Druckmuster erzielt werden können. Derartige Muster sind beispielsweise für die Leiteranordnung bei Solarzellen notwendig. Deshalb werden diese in der Praxis mit dem Siebdruckverfahren aufgebracht. Um den erwünschten lagegenauen Druck der Leiter auf dem Substrat zu erreichen, ist eine sehr genaue Positionierung erforderlich, die eine Lageabweichung von ± 15µm nicht überschreiten soll. Darüber hinaus soll auch hohe Produktivität erreichbar sein, also geringe Taktzeiten bei weitestgehend automatischem Betrieb.The screen printing process is one of the classic printing methods by which very accurate and fine print pattern can be achieved. Such patterns are necessary, for example, for the conductor arrangement in solar cells. Therefore, they are applied in practice by the screen printing method. In order to achieve the desired accurate pressure of the conductors on the substrate, a very accurate positioning is required, which should not exceed a positional deviation of ± 15μm. In addition, high productivity should be achievable, ie low cycle times with largely automatic operation.

Herkömmlich wird das angeförderte zu bedruckende Substrat auf dem Drucktisch der Siebdruckeinrichtung platziert und mittels einer Vakuumeinrichtung durch Ansaugen fixiert. Das die Druckschablone oder das Druckmuster tragende Sieb wird dann über dem Drucktisch platziert und auf das Substrat zur Durchführung des Siebdruckes abgesenkt. Bedingt durch verschiedene Umstände, insbesondere durch die Ungenauigkeit der Förder- und Ablegeeinrichtung beim Fixieren des Substrates kommt es allerdings zu die notwendige Genauigkeit übersteigenden Abweichungen der relativen Lage zwischen Sieb und zu bedruckendem Substrat. Es ist demnach erforderlich, die entsprechende Abweichung zu erfassen und abhängig von der erfassten Abweichung die relative Lage von Substrat und Sieb entsprechend zu ändern. Zweckmäßig wird dies im allgemeinen durch Verdrehen und/oder Verschieben des Siebes gegenüber dem auf dem Drucktisch bereits fixierten Substrat erreicht. Es kann auch der Drucktisch verschoben werden und gedreht werden. Schließlich kann auch eine Mischform verwendet werden.Conventionally, the conveyed substrate to be printed on the printing table of the screen printing device is placed and fixed by means of a vacuum device by suction. The screen carrying the stencil sheet or printing pattern is then placed over the printing table and lowered onto the substrate for screen printing. Due to various circumstances, in particular by the inaccuracy of the conveying and depositing device when fixing the substrate, however, there is the necessary accuracy exceeding deviations of the relative position between the screen and substrate to be printed. It is therefore necessary to detect the corresponding deviation and to change the relative position of substrate and sieve, depending on the detected deviation. Suitably, this is generally achieved by twisting and / or moving the screen relative to the already fixed on the printing table substrate. It can also be moved to the printing table and rotated. Finally, a mixed form can also be used.

Wesentlich ist somit eine sehr genaue Feststellung der Ist-Lage des Substrats auf dem Drucktisch. Nachdem die Form des Substrats, wie es dessen Fertigungsprozess verlässt, sehr genau bekannt ist, genügt es, bestimmte vorgegebene Randabschnitte des Substrats in ihrer Lage gegenüber dem Drucktisch genau zu erfassen, wobei ein 5 solcher Randabschnitt durch eine Kante, also einen abrupten Übergang vom Substrat zum Drucktisch gekennzeichnet ist.Essential is thus a very accurate determination of the actual position of the substrate on the printing table. After the shape of the substrate as it leaves its manufacturing process, is known very well, it is sufficient to detect certain predetermined edge portions of the substrate in their position relative to the printing table exactly, with a 5 such edge portion by an edge, so an abrupt transition from the substrate is marked to the printing table.

Eine Siebdruckmaschine der bekannten Art ist in DE 40 37 678 A1 offenbart. Bei dieser Vorrichtung wird mittels einer bekannten Bahnführungs- und Transportvorrichtung eine zu bedruckende Warenbahn zur Siebdruckvorrichtung geführt, welche mindestens ein verschiebbar gelagertes Sieb beinhaltet und eine Vorrichtung zum Ablesen von Passermarken oder dgl. für einen Mehrfarbendruck. Das verschiebbar gelagerte Sieb ist mir Stellmotoren verbunden, welche von mindestens einer die Passermarken oder Farbverschiebungen ablesenden Überwachungskamera gesteuert sind, wobei deren Impulsgeber über einen Rechner oder dgl. die Stellmotoren steuert.A screen printing machine of the known type is in DE 40 37 678 A1 disclosed. In this device, by means of a known web guiding and transporting device, a web to be printed is guided to the screen printing device which includes at least one slidably mounted screen and a device for reading registration marks or the like for a multicolor print. The slidably mounted sieve is connected to servomotors, which are controlled by at least one surveillance camera reading the register marks or color shifts, the pulse generator of which controls the servomotors via a computer or the like.

Nachteilig an dieser Vorrichtung ist, daß die Verstellung des Siebes entsprechend der relativen Lage zweier oder mehrerer aufeinanderliegender Farbdruckschichten erfolgt, wodurch eine Korrektur der Siebposition erst nach erfolgten Druck möglich ist. Bedingt wird dies durch die Tatsache, daß das zu bedruckende Material aus einer fortlaufenden Warenbahn besteht, wodurch keine Positionierung des Siebes bezüglich eines festgelegten Punktes auf dem zu bedruckenden Material selbst erfolgen kann.A disadvantage of this device is that the adjustment of the screen is carried out according to the relative position of two or more superimposed color print layers, whereby a correction of the screen position is possible only after successful printing. This is due to the fact that the material to be printed consists of a continuous web, whereby no positioning of the screen with respect to a fixed point on the material to be printed can be done itself.

Gemäß der DE 692 30 099 T2 ein zu bedruckendes Substrat auf einem Drucktisch fixiert. Sowohl das Substrat als auch das zu verwendende Sieb besitzen Bezagsmarken. Oberhalb des Drucktisches ist eine Betrachtungseinrichtung so angebracht, daß sie den Drucktisch, insbesondere die Bezugsmarken des auf dem Drucktisch aufgebrachten Substrats einsehen und die Position der Bezugsmarken speichern kann. Wird nun das Sieb oder die Schablone über das zu bedruckenden Substrat gefahren, so kann die Betrachtungseinheit entsprechend die Position der Bezugsmarken des Siebes und daraus die relative Lage des Siebes zum Substrat auf dem Drucktisch bestimmten. Durch eine entsprechende Korrektur der Position des Siebes können so die Bezugsmarken von Substrat und Sieb in Deckung gebracht werden.According to the DE 692 30 099 T2 a substrate to be printed on a printing table fixed. Both the substrate and the screen to be used have bezel marks. Above the printing table, a viewing device is mounted so that it can see the printing table, in particular the reference marks of the substrate applied to the printing table and store the position of the fiducial marks. If the screen or stencil is now moved over the substrate to be printed, the viewing unit can accordingly determine the position of the reference marks of the screen and therefrom the relative position of the screen to the substrate on the printing table. By a corresponding correction of the position of the screen so the reference marks of the substrate and screen can be brought into line.

Nachteilig hierbei ist, daß zum Ablesen des Bezugmarken des Substrats das Sieb jeweils aus dem durch die Betrachtungseinheit einsehbaren Bereich entfernt werden muß. Dies bedeutet eine Verringerung der Geschwindigkeit des Produktionsablaufes.The disadvantage here is that for reading the reference marks of the substrate, the screen must be removed in each case from the viewable by the viewing unit area. This means a reduction in the speed of the production process.

Ferner ist aus DE4233455 A1 eine Vorrichtung mit den Merkmalen des Oberbegriffs des Anspruchs 1 bekannt.Furthermore, it is off DE4233455 A1 a device having the features of the preamble of claim 1.

Herkömmlich werden das Substrat und der es umgebende Bereich des Drucktisches gut ausgeleuchtet und wird die Ist-Lage des Substrats bzw. die Ist-Lage der vorgegebenen Randabschnitte des Substrates mittels eines lichtelektrische Detektors, wie insbesondere einer CCD-Kamera erfasst. Das die Ist-Lage des Randabschnittes kennzeichnende elektrische Signal wird verarbeitet, und mittels der bei der Verarbeitung erzeugten Signale ist die relative Verstellung des Siebes gegenüber dem auf dem Drucktisch fixierten Substrat erreichbar.Conventionally, the substrate and the surrounding area of the printing table are well illuminated and the actual position of the substrate or the actual position of the predetermined edge portions of the substrate by means of a photoelectric detector, in particular a CCD camera detected. The electrical signal characterizing the actual position of the edge section is processed, and by means of the signals generated during the processing, the relative adjustment of the screen relative to the substrate fixed on the printing table can be achieved.

Bei einem handelsüblichen Positioniersystem im Solarzellenbereich wird mittels einer verfahrbaren CCD-Kamera die Lage des auf dem Drucktisch abgelegten und fixierten Substrats außerhalb des eigentlichen Druckbereichs durch nacheinander Anfahren der vorgegebenen Randabschnitte erreicht. Nach Erfassen der verschiedenen Randabschnitte wird durch Koordinatenberechnung die Lage berechnet. Zusammen mit der Berechnung und der sich anschließenden Verstellung des Siebes wird der Drucktisch in die Druckposition gefahren. Diese Vorgehensweise ist sehr zeitaufwendig und benötigt zahlreiche bewegbare Teile. Darüber hinaus müssen erhebliche Massen bewegt werden. Ferner ist eine sehr aufwendige Kalibrierung, insbesondere durch Vornahme von Probedrucken erforderlich. Werden zwei verfahrbare Drucktische verwendet, auf denen intermittierend gedruckt wird, so kann es zu unterschiedlichen Druckergebnissen kommen.In a commercially available positioning system in the solar cell region, the position of the substrate deposited and fixed on the printing table outside the actual printing area is achieved by successively approaching the predetermined edge sections by means of a movable CCD camera. After detecting the different edge sections, the position is calculated by coordinate calculation. Together with the calculation and the subsequent adjustment of the screen, the printing table is moved to the printing position. This procedure is very time consuming and requires numerous moving parts. In addition, significant masses have to be moved. Furthermore, a very complex calibration, in particular by making trial prints is required. If two movable printing tables are used on which intermittent printing is used, different printing results may occur.

Zur Überwindung bestimmter Probleme wird bei dem bekannten Positioniersystem in einer Weiterbildung die CCD-Kamera auch zur Erfassung der Lage des Siebes herangezogen, so dass die Positionierung des Siebes gegenüber dem Substrat etwas vereinfacht ist, insbesondere die Initialisierung bzw. Kalibrierung vereinfacht ist. Allerdings sind die Taktzeiten noch höher und ist die Vorrichtung insgesamt aufwendiger und enthält noch mehr bewegbare Teile.To overcome certain problems, the CCD camera is also used for detecting the position of the screen in the known positioning system in a development, so that the positioning of the screen relative to the substrate is somewhat simplified, in particular the initialization or calibration is simplified. However, the cycle times are even higher and the device is more complex overall and contains even more movable parts.

Bei einer weiteren herkömmlichen Vorgehensweise mit zwei Drucktischen, die horizontal verfahrbar sind, sind jeweils jedem vorgegebenen Randabschnitt zugeordnete Kameras zur Erfassung der Ist-Lage des Substrats vorgesehen. Im allgemeinen sind drei Kamerapositionen ausreichend, allerdings treten die vorher erwähnten Koordinierungsprobleme in verstärktem Masse zu Tage, wodurch es unterschiedliche Druckergebnisse gibt, wobei eben so die erwähnten Nachteile der zahlreichen zu bewegenden Teile auftreten.In a further conventional procedure with two printing tables, which can be moved horizontally, cameras assigned to each given edge section are provided for detecting the actual position of the substrate. In general, three camera positions are sufficient, but they occur before mentioned coordination problems to an increased extent, whereby there are different printing results, and just as the mentioned disadvantages of the numerous moving parts occur.

Aufgabe der vorliegenden Erfindung ist es somit, eine Vorrichtung und ein Verfahren zum Positionieren eines auf einem Drucktisch aufgebrachten Substrates bereitzustellen, bei welchem zur Positionskontrolle der relativen Lage des Substrates auf dem Drucktisch zu dem Sieb eine möglichst geringe Verschiebung des Siebs nötig ist, wodurch der Ablauf vereinfacht und beschleunigt wird.The object of the present invention is thus to provide a device and a method for positioning a substrate applied to a printing table, in which a minimum displacement of the screen is necessary for position control of the relative position of the substrate on the printing table to the screen, whereby the process simplified and accelerated.

Die Aufgabe wird bei einer Vorrichtung der genannten Art durch die Merkmale des Anspruches 1 und bei einem Verfahren durch die Merkmale des Anspruches 7 gelöst.The object is achieved in a device of the type mentioned by the features of claim 1 and in a method by the features of claim 7.

Die Erfindung wird durch die Merkmale der abhängigen Ansprüche weitergebildet.The invention is further developed by the features of the dependent claims.

Der Grundgedanke der vorliegenden Erfindung liegt darin, sowohl Beleuchtungsanordnung als auch lichtelektrischen Detektor im bzw. unter dem Drucktisch anzuordnen und das sehr stark angenäherte Sieb als diffusen Reflektor heranzuziehen, wodurch der Drucktisch ortsfest verbleiben kann und das Sieb abhängig von den bei der Erfassung ermittelten Werten für die Ist-Lage nur in geringem Umfang zu verstellen ist.The basic idea of the present invention is to arrange both the illumination arrangement and the photoelectric detector in or under the printing table and to use the very closely approximated screen as a diffuse reflector, whereby the printing table can remain stationary and the screen depends on the values determined during the detection the actual situation can only be adjusted to a limited extent.

Die Erfindung wird anhand des in der Zeichnung dargestellten Ausfübrungsbeispiels näher erläutert. Es zeigen

  • Fig. 1 schematisch den grundsätzlichen Aufbau der erfindungsgemäßen Vorrichtung,
  • Fig. 2 eine Detailansicht aus Fig. 1.
The invention will be explained in more detail with reference to the Ausfübrungsbeispiels shown in the drawing. Show it
  • Fig. 1 schematically the basic structure of the device according to the invention,
  • Fig. 2 a detailed view Fig. 1 ,

Fig. 1 zeigt eine Siebdruckeinrichtung 1, bestehend im wesentlichen aus einem Drucktisch 2 und einem Sieb 3. Fig. 1 shows a screen printing device 1, consisting essentially of a printing table 2 and a screen. 3

Mittels einer nicht dargestellten Anordnung, bei der es sich um eine Riementransporteinrichtung handeln kann, wird ein zu bedruckendes Substrat 4 in einer der Drucklage möglichst entsprechenden Lage auf der Tischfläche 5 des Drucktisches 2 abgelegt und mittels nicht näher dargestellter ansich bekannter Vakuumansaugeinrichtungen in der Lage fixiert. Die tatsächliche oder Ist-Lage des abgelegten Substrats 4 wird an bestimmten vorgegebenen Randabschnitten 6 genau erfasst. Im allgemeinen genügen drei derartige Randabschnitte, im Einzelfall können jedoch mehr oder weniger Randabschnitte erforderlich oder auch ausreichend sein, abhängig von der Art des Substrats und der Genauigkeit der aufzubringenden Bedruckung.By means of an arrangement, not shown, which may be a belt transport device, a substrate to be printed 4 is stored in a pressure position as possible corresponding position on the table surface 5 of the printing table 2 and fixed by means not shown ansich known Vakuumansaugeinrichtungen in position. The actual or actual position of the deposited substrate 4 is accurately detected at certain predetermined edge portions 6. In general, three such edge portions are sufficient, but in individual cases, more or fewer edge portions may be required or even sufficient, depending on the type of substrate and the accuracy of the applied printing.

Gemäß der vorliegenden Erfindung ist zum einen eine Beleuchtungsanordnung 7 vorgesehen, die von Seiten des Drucktisches 2 aus die gegenüberliegende Seite des Siebes 3 beleuchtet, und zwar im Bereich des betrachteten vorgegebenen Randabschnittes 6, wobei das Licht an dem Sieb 3 diffus gestreut wird. Hierdurch wird eine sehr gute Ausleuchtung des Substrats 4 in dem vorgegebenen Randabschnitt 6 erreicht, und zwar mit hohem Kontrast.According to the present invention, on the one hand, a lighting arrangement 7 is provided which illuminates the opposite side of the screen 3 from the side of the printing table 2, specifically in the area of the predetermined edge section 6 considered, wherein the light is diffused on the screen 3. As a result, a very good illumination of the substrate 4 is achieved in the predetermined edge portion 6, with high contrast.

Mittels einer jedem der vorgegebenen Randabschnitte 6 zugeordneten lichtelektrischen Anordnung, insbesondere einer CCD-Kamera 8 wird dieser starke Konstrast erfasst, also die Ist-Lage des vorgegebenen Randabschnittes 6 gegenüber dem Drucktisch 2 äußerst genau erfasst. Alternativ kann die lichtelektrische Anordnung auch durch eine geeignete Laservorrichtung oder eine Zeilenkamera gebildet sein. Diese genaue Erfassung erlaubt die Ableitung von Verstellsignalen zur Verstellung des Siebes 3 gegenüber dem Substrat 4 auf dem Drucktisch 2 entsprechend durch Pfeile 9, 10 und 11 dargestellten Verstellbewegungen des Siebes 3, durch Verschieben in der Horizontalebene und Drehen in dieser Horizontalebene. Die hierfür erforderlichen Verstellanordnungen sind nicht näher dargestellt, da sie handelsüblich sind. Auch die Auswerteschaltung der Erfassungssignale der CCD-Kameras 8 ist nicht dargestellt, da auch diese handelsüblich ist.By means of each of the predetermined edge portions 6 associated photoelectric arrangement, in particular a CCD camera 8, this strong contrast is detected, so the actual position of the predetermined edge portion 6 relative to the printing table 2 detected extremely accurate. Alternatively, the photoelectric device may also be formed by a suitable laser device or a line scan camera. This accurate detection allows the derivation of adjustment signals for adjusting the screen 3 relative to the substrate 4 on the printing table 2 in accordance with adjusting movements of the screen represented by arrows 9, 10 and 11 3, by moving in the horizontal plane and turning in this horizontal plane. The adjustment arrangements required for this purpose are not shown in detail, since they are commercially available. Also, the evaluation circuit of the detection signals of the CCD cameras 8 is not shown, since this is also commercially available.

Die CCD-Kamera 8 betrachtet dabei den vorgegebenen Randabschnitt 6 durch den Drucktisch 2 hindurch durch ein Sichtfenster 12, das im Bereich der Tischfläche 5 durch einen transparenten Einsatz, beispielsweise einen Acryl- oder Glaseinsatz 13 abgeschlossen ist, dessen dem Sieb 3 zugewandte Seite mit der Tischfläche 5 flächenbündig ist.The CCD camera 8 looks at the predetermined edge portion 6 through the printing table 2 through a viewing window 12, which is completed in the table surface 5 by a transparent insert, such as an acrylic or glass insert 13, the screen 3 facing side with the Table surface 5 is flush.

Die Beleuchtungsanordnung 7 ist ebenfalls dem jeweiligen vorgegebenen Randabschnitt 6 zugeordnet und beim Ausführungsbeispiel in den Drucktisch 2 in diesem Bereich integriert. Insbesondere ist mindestens ein lichtemittierendes Element, wie eine LED 14 in den Drucktisch 2 eingebaut und beleuchtet die zugewandte Seite des Siebes 3 durch ebenfalls einen transparenten Einsatz, beispielsweise einen Acryl- oder Glaseinsatz 15 hindurch, wobei dessen dem Sieb 3 zugewandte Seite ebenfalls flächenbündig mit der Tischfläche 5 des Drucktisches 2 ist. Beim Ausführungsbeispiel sind zwei derartige LED 14 mit entsprechenden Glaseinsätzen 15 vorgesehen. Die elektrischen Zuführleitungen sind nicht dargestellt. Es können mehr als zwei derartige LED 14 vorgesehen sein, wobei diese im wesentlichen konzentrisch zum Sichtfenster 12 angeordnet sind.The illumination arrangement 7 is also associated with the respective predetermined edge section 6 and integrated in the embodiment in the printing table 2 in this area. In particular, at least one light-emitting element, such as an LED 14 is installed in the printing table 2 and illuminates the facing side of the screen 3 by also a transparent insert, for example, an acrylic or glass insert 15 therethrough, wherein the screen 3 side facing also flush with the Table surface 5 of the printing table 2 is. In the embodiment, two such LED 14 are provided with corresponding glass inserts 15. The electrical supply lines are not shown. There may be more than two such LED 14 are provided, which are arranged substantially concentric with the viewing window 12.

Zweckmäßig ist es dabei, den Glaseinsatz 13 des Sichtfensters 12 der CCD-Kamera 8 und den Glaseinsatz 15 jeder LED 14 durch einen lichtundurchlässigen Steg 16 voneinander zu trennen. Hierdurch wird sichergestellt, dass kein Streulicht von der LED 14 und dessen Glaseinsatz 15 zum Sichtfenster 12 und dem Glaseinsatz 13 und damit zur CCD-Kamera 8 gelangen kann, sondern lediglich von dem Sieb 3 gestreutes Licht. Es zeigt sich darüber hinaus, dass etwaige Bedruckungen, Markierungen oder dergleichen auf der Fläche des Substrats 4, die auf der Tischfläche 5 des Drucktisches 2 unmittelbar aufliegt, so kontrastarm gegenüber dem Substrat 4 selbst sind, dass sie von der CCD-Kamera 8 nicht erfassbar sind. Auch werden Reflexionen, wie sie insbesondere bei multikristallinen Materialien auftreten können, jedenfalls weitgehend, wenn nicht vollständig, ausgeblendet bzw. unterdrückt. Die CCD-Kamera 8 erfasst somit ausschließlich und nur den vorgegebenen Randabschnitt 6.It is expedient to separate the glass insert 13 of the viewing window 12 of the CCD camera 8 and the glass insert 15 of each LED 14 by an opaque web 16 from each other. This ensures that no stray light from the LED 14 and its glass insert 15 can reach the viewing window 12 and the glass insert 13 and thus to the CCD camera 8, but only scattered by the screen 3 light. It also appears that any imprints, markings or the like on the surface of the substrate 4, which rests directly on the table surface 5 of the printing table 2, are so low in contrast to the substrate 4 itself that they can not be detected by the CCD camera 8 are. In any case, reflections, as they can occur in particular with multicrystalline materials, at least largely, if not complete, hidden or suppressed. The CCD camera 8 thus detects exclusively and only the predetermined edge section 6.

Vorteilhaft ist in dem Glaseinsatz 15 für die LED 14 ein Reflektor oder Spiegel 17 in einer solchen Lage eingesetzt, dass das von der LED 14 emittierte Licht im wesentlichen auf einen Bereich des Siebes 3 gerichtet bzw. fokussiert wird, der in etwa der Mitte des Erfassungsteils der CCD-Kamera 8, als etwa der Symmetrieachse des Sichtfensters 12 entspricht. Hierdurch wird die Genauigkeit der Erfassung des jeweiligen Randabschnittes 6 erhöht. Darüber hinaus wird eine Störung oder Beeinträchtigung der Erfassung bei einem anderen vorgegebenen Randabschitt auch dann sicher vermieden, wenn dieser räumlich gesehen sehr nahe ist. Alternativ zum Spiegel 17 kann das Licht auch durch eine andere geeignete Vorrichtung, wie z. B. einen Lichtleiter, auch das Sieb 3 gebildet werden.Advantageously, in the glass insert 15 for the LED 14, a reflector or mirror 17 is used in such a position that the light emitted by the LED 14 is directed or focused substantially on a region of the screen 3, which is approximately in the middle of the detection part the CCD camera 8, as corresponds approximately to the axis of symmetry of the viewing window 12. As a result, the accuracy of the detection of the respective edge portion 6 is increased. In addition, a disturbance or impairment of the detection at another predetermined Randabschitt is also avoided if this is spatially very close. As an alternative to the mirror 17, the light can also be replaced by another suitable device, such. B. a light guide, and the screen 3 are formed.

Fig. 1 zeigt neben der beschriebenen Anordnung aus Beleuchtungsanordnung 7 und CCD-Kamera 8 eine weitere entsprechende Anordnung aus einer zweiten Beleuchtungsanordnung 18 und einer zweiten CCD-Kamera 19, wobei diese beiden Anordnungen im wesentlichen den gleichen Aufbau und die gleiche Zuordnung zueinander haben. Diese zweite Anordnung aus Beleuchtungsanordnung 18 und CCD-Kamera 19 dient der Erfassung eines weiteren, hier nicht dargestellten vorgegebenen Randabschnittes. Dieser weitere Randabschnitt kann das gleiche Substrat 4 betreffen. Fig. 1 shows in addition to the described arrangement of illumination assembly 7 and CCD camera 8, a further corresponding arrangement of a second illumination assembly 18 and a second CCD camera 19, these two arrangements have substantially the same structure and the same assignment to each other. This second arrangement of illumination arrangement 18 and CCD camera 19 is used to detect a further, not shown here predetermined edge portion. This further edge section may relate to the same substrate 4.

Um die Siebdruckeinrichtung auch für die Bedruckung von Substraten anderen Formates geeignet und schnell einstellbar zu machen, können sich die zweite Beleuchtungsanordnung 18 und die zweite CCD-Kamera 19 in einer Lage befinden, welche einem vorgegebenen Randabschnitt eines Substrats anderen Formats entspricht. Dabei kann die LED dieser zweiten Beleuchtungsanordnung 18 bereits in den Drucktisch 2 integriert eingebaut vorgesehen sein, wobei sie nur in Betrieb genommen wird, wenn eine entsprechend zugeordneter oder vorgegebener Randabschnitt zu erfassen ist. Andererseits kann die CCD-Kamera 19 im gegebenen Fall auch ausgebaut sein. Schließlich kann eine CCD-Kamera auch mehreren Sichtfenstern zugeordnet und je nach Format des zu bedruckenden Substrats zwischen denen, gegebenenfalls auch automatisch, verfahrbar sein.In order to make the screen printing device also suitable for the printing of substrates of other formats and quickly adjustable, the second illumination arrangement 18 and the second CCD camera 19 can be in a position which corresponds to a predetermined edge section of a substrate of a different format. In this case, the LED of this second lighting arrangement 18 may be already integrated in the printing table 2 incorporated, wherein it is only put into operation when a correspondingly assigned or predetermined edge portion is to be detected. On the other hand, the CCD camera 19 may also be removed in the given case. After all, a CCD camera can also do several Assigned to viewing windows and, depending on the format of the substrate to be printed between which, if necessary, be moved automatically.

Von Vorteil bei der erfindungsgemäßen Vorrichtung ist ferner, dass nach dem Erfassen des vorgegebenen Randabschnittes 6 weder der Drucktisch 2 noch das Substrat 4 bewegt werden, wodurch höchstmögliche Genauigkeit bei der Erfassung und beim Druck sichergestellt sind. Da nach der Verstellung des Siebes 3 als Ergebnis der Erfassung der Lage des mindestens einen vorgegebenen Randabschnitts 6 des zu bedruckenden Substrats 4 lediglich nurmehr über einen sehr kurzen Weg (entsprechend Pfeil 20) auf das Substrat 4 zur Durchführung des Siebdruckes abgesenkt werden muss, ist auch hier höchstmögliche Genauigkeit erreicht, da jede Beeinträchtigung, die sich bei großen Bewegungswegen ergeben könnte, vermieden ist.An advantage of the device according to the invention is further that after detecting the predetermined edge portion 6 neither the printing table 2 nor the substrate 4 are moved, whereby the highest possible accuracy in the detection and printing are ensured. Since, after the adjustment of the screen 3 as a result of the detection of the position of the at least one predetermined edge portion 6 of the substrate to be printed 4 only on a very short path (as indicated by arrow 20) must be lowered to the substrate 4 to carry out the screen printing, is also achieves the highest possible accuracy, since any impairment that might arise in the case of long paths of movement is avoided.

Es zeigt sich insbesondere, dass der Abstand des Siebes 3 gegenüber der Tischfläche 5 nur durch die Dicke des Substrates 4 und die Gegebenheiten bestimmt ist, die erforderlich sind, um das Substrat 4 von außerhalb des Drucktisches 2 diesem zuzuführen und auf die Tischfläche 5 abzulegen. Dies erlaubt es, die Lage des Substrates 4 und des Siebes 3 in einem automatische Betriebsverfahren möglichst frühzeitig bereits in vorläufige oder grobe Deckung zu bringen, und die letztendliche Verstellung lediglich für das Ausrichten des Siebes 3 gegenüber dem Substrat 4 als Ergebnis der Signale der CCD-Kamera 8 herbeizuführen. Auch kann die Kalibrierung des Systems ohne weitere Mittel durchgeführt werden.It can be seen in particular that the distance of the wire 3 from the table surface 5 is determined only by the thickness of the substrate 4 and the conditions that are required to supply the substrate 4 from outside the printing table 2 and place it on the table surface 5. This makes it possible to bring the position of the substrate 4 and the screen 3 as early as possible in preliminary or coarse coverage in an automatic operating method, and the eventual adjustment only for the alignment of the screen 3 relative to the substrate 4 as a result of the signals of the CCD Camera 8 bring about. Also, the calibration of the system can be performed without further resources.

Da Solarzellen typisch eine Dicke von etwa 0,3 mm besitzen und der Abstand (Absprung) zwischen Sieb und zu bedruckendem Gut beim Siebdruckverfahren etwa bis zu 1..1,5 mm (typisch) beträgt, ist die Erfindung sehr tolerant bei Dickenschwankungen, vor allem, wenn der Abstand zwischen Sieb 3 und Tischfläche 5 bei der Durchführung der lichtelektrischen Erfassung etwa 5 mm beträgt.Since solar cells typically have a thickness of about 0.3 mm and the distance (jump) between the screen and to be printed Good in the screen printing process up to about 1..1.5 mm (typical), the invention is very tolerant of thickness variations, before in particular, when the distance between the sieve 3 and the table surface 5 when carrying out the photoelectric detection is about 5 mm.

Es zeigt sich, dass, da nur ein Drucktisch 2 verwendet wird und dieser nicht bewegt wird, ein sehr einfacher überschaubarer Aufbau möglich ist, wobei gleichbleibende Druckergebnisse erzielbar sind. Eine Anpassung an andere Konfigurationen, d. h. Druckmuster ist ebenfalls problemlos durchführbar.It turns out that since only one printing table 2 is used and this is not moved, a very simple manageable structure is possible, with consistent Print results can be achieved. An adaptation to other configurations, ie print pattern is also easily feasible.

Insbesondere hat sich gezeigt, dass die Bedruckung von Solarzellen mittels der vorliegenden Erfindung mit Taktzeiten von lediglich 3 Sekunden oder weniger pro Bedruckungsvorgang durchführbar ist.In particular, it has been found that the printing of solar cells by means of the present invention can be carried out with cycle times of only 3 seconds or less per printing process.

Selbstverständlich ist die Erfindung nicht auf die Bedruckung von Solarzellen beschränkt. Die Erfindung eignet sich auch zur Bedruckung von Dickschichthybriden, von LCD-Anordnungen, insbesondere Flachbildschirmen, von LTCCs und dergleichen.Of course, the invention is not limited to the printing of solar cells. The invention is also suitable for printing on thick film hybrids, of LCD arrangements, in particular flat screens, of LTCCs and the like.

Claims (9)

  1. Device for positioning a substrate (4) to be printed in accordance with a screen printing process, lying on a print table (2), with respect to the print template of the screen (3) of the screen printing device, comprising
    a transportation and placement arrangement for delivering a substrate (4) to be printed, placing and fixing thereof on the print table (2) and transportation away of the printed substrate (4) after printing,
    an illumination arrangement (7), being arranged that it illuminates the screen (3), and a photoelectric arrangement (8), being arranged for detecting, by using the illuminated screen (3), the actual position of the substrate (4) placed on the print table (2) and for generating adjustment signals corresponding to the deviation between actual position and desired position, and
    an adjustment device being arranged for adjusting the relative position of the screen (3) and therewith of the print template with respect to the print table (2) and therewith the substrate (4) fixed thereon and to be printed in dependence upon the adjustment signals corresponding to the desired position, provided for printing, of the substrate (4) fixed on the print table (2) with respect to the print template of the screen (3),
    characterized in that,
    the illumination arrangement (7) being so arranged that it illuminates the screen (3), in a raised position, with slight spacing from the fixed substrate (4) to be printed, from the print table side, and
    the photoelectric arrangement (8) being so configured and arranged that it detects the light diffusely reflected from the screen (3) in the region of predetermined edge sections (6) of the placed substrate (4), evaluates this detected light with regard to the actual position of the edge of the substrate (4) and derives therefrom the adjustment signals and delivers them to the adjustment device,
    the print table (2) being constituted to be light permeable in the region of the illumination device (7) and in the region of the photoelectric arrangement (8), the illumination arrangement (7) and the photoelectric arrangement (8) being arranged in or below the print table (2) in the respective region concerned, and the light permeable region of the illumination arrangement (7) and the light permeable region of the photoelectric arrangement (8) being separated (16) from one another by light impermeable means.
  2. Device according to claim 1,
    characterized in that,
    the light permeable constitution is formed in each case by means of an embedded acrylic glass or glass insert (13,15).
  3. Device according to any of claims 1 or 2,
    characterized in that,
    the light permeable region of the illumination arrangement (7) is substantially concentrically surrounding the light permeable region of the photoelectric arrangement (8).
  4. Device according to anyone of claims 1 to 3,
    characterized in that,
    the illumination arrangement is formed by means of LEDs (14).
  5. Device according to anyone of claims 1 to 4,
    characterized in that,
    the light permeable region of the illumination arrangement contains mirror surfaces (17) which deflect the emitted light onto a region of the screen (3) lying opposite to the associated photoelectric arrangement (8).
  6. Device according to anyone of claims 1 to 5,
    characterized in that,
    the photoelectric arrangement is formed by means of a CCD imaging apparatus (8).
  7. Method for positioning a substrate (4) to be printed in accordance with the screen printing method and lying on a print table (2), with respect to the print template of the screen (3) of a screen printing device, having steps for
    - adjusting the relative position of the screen (3) and of the substrate (4) with regard to the desired position wished for the printing in dependence upon the detection of the actual disposition,
    - in advance, placing and fixing the substrate (4) on the print table in a position approximately corresponding to the desired printing position,
    - detecting the actual position of the substrate (4) placed on the print table (2) at at least one predetermined edge section (6) of the substrate (4) by photoelectric measures by detecting of reflected light of an illumination arrangement,
    characterized by
    - bringing the screen (3) into its printing position with respect to the print table (2) with a still slight spacing to the substrate (4),
    - illuminating the side of the screen (3) towards the print table (2) from the region of the print table (2) in which the predetermined edge section (6) of the substrate (4) has been placed, and
    further steps of
    detecting of the actual position of the predetermined edge section (6) concerned of the substrate (4) by means of a fixedly arranged photoelectric detector (8) such that this receives light diffusely reflected from the screen (3) in the region of the predetermined edge section (6) concerned, and
    - adjusting of print table (2) and screen (3) with respect to one another such that the print template of the screen (3) is positioned in its desired position with respect to the substrate (4) in its actual position
    whereas the light permeable constitution is formed in each case by means of an embedded acrylic glass or glass insert (13,15), the illumination arrangement is formed by means of LEDs (14).
  8. Method according to claim 7,
    characterized by
    determining the relative position of the substrate (4) on the print table (2) with respect to the print template of the screen (3) by means of three predetermined edge sections (6) distributed over the edge of the substrate (4).
  9. Method according to claim 7 or 8,
    characterized in that,
    while maintaining the slight spacing of the screen (3) with respect to the substrate (4), the screen (3) is adjusted (9,10,11), in the corresponding closely neighboring plane parallel to the actual printing position, to the desired position for printing with respect to the substrate (4) in its actual disposition, and only then is brought (20) into the printing position for printing of the substrate (4).
EP03752760A 2002-05-17 2003-05-16 Device and method for positioning a substrate to be printed Expired - Lifetime EP1511629B1 (en)

Applications Claiming Priority (3)

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DE10222119 2002-05-17
DE10222119A DE10222119B4 (en) 2002-05-17 2002-05-17 Device and method for adjusting the relative position between a substrate to be printed and a print pattern
PCT/EP2003/005200 WO2003097357A2 (en) 2002-05-17 2003-05-16 Device and method for positioning a substrate to be printed

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TW567714B (en) * 2001-07-09 2003-12-21 Nippon Sheet Glass Co Ltd Light-emitting unit and illumination device and image reading device using light-emitting unit

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102615950A (en) * 2012-03-29 2012-08-01 东莞市嘉腾仪器仪表有限公司 Screen printer and contraposition method for same

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DE10222119B4 (en) 2004-11-11
WO2003097357A2 (en) 2003-11-27
JP4262675B2 (en) 2009-05-13
DK1511629T3 (en) 2011-03-14
PT1511629E (en) 2011-01-04
ATE491572T1 (en) 2011-01-15
CN1323834C (en) 2007-07-04
DE50313326D1 (en) 2011-01-27
ES2357891T3 (en) 2011-05-03
JP2005525953A (en) 2005-09-02
DE10222119A1 (en) 2003-12-04
WO2003097357A3 (en) 2004-06-10
US20050166772A1 (en) 2005-08-04
EP1511629A2 (en) 2005-03-09
CN1642739A (en) 2005-07-20
US7225734B2 (en) 2007-06-05

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