EP1506142B1 - Article de quartz fondu a devitrification maitrisee - Google Patents
Article de quartz fondu a devitrification maitrisee Download PDFInfo
- Publication number
- EP1506142B1 EP1506142B1 EP03724186.6A EP03724186A EP1506142B1 EP 1506142 B1 EP1506142 B1 EP 1506142B1 EP 03724186 A EP03724186 A EP 03724186A EP 1506142 B1 EP1506142 B1 EP 1506142B1
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- EP
- European Patent Office
- Prior art keywords
- cations
- metal
- furnace tube
- coating
- fused quartz
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims description 172
- 239000005350 fused silica glass Substances 0.000 title claims description 75
- 238000004031 devitrification Methods 0.000 title description 9
- 150000001768 cations Chemical class 0.000 claims description 86
- 238000000576 coating method Methods 0.000 claims description 59
- 239000011248 coating agent Substances 0.000 claims description 57
- 229910052751 metal Inorganic materials 0.000 claims description 49
- 239000002184 metal Substances 0.000 claims description 49
- 239000002002 slurry Substances 0.000 claims description 25
- 229910052906 cristobalite Inorganic materials 0.000 claims description 24
- 239000013078 crystal Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 14
- 229910052783 alkali metal Inorganic materials 0.000 claims description 13
- 150000001340 alkali metals Chemical class 0.000 claims description 13
- 229910052784 alkaline earth metal Inorganic materials 0.000 claims description 13
- 150000001342 alkaline earth metals Chemical class 0.000 claims description 13
- 229910052761 rare earth metal Inorganic materials 0.000 claims description 13
- 150000002910 rare earth metals Chemical class 0.000 claims description 13
- 229910052788 barium Inorganic materials 0.000 claims description 12
- DSAJWYNOEDNPEQ-UHFFFAOYSA-N barium atom Chemical compound [Ba] DSAJWYNOEDNPEQ-UHFFFAOYSA-N 0.000 claims description 12
- 239000008119 colloidal silica Substances 0.000 claims description 12
- 238000001035 drying Methods 0.000 claims description 8
- 230000007704 transition Effects 0.000 claims description 7
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 6
- 229910052791 calcium Inorganic materials 0.000 claims description 6
- 239000011575 calcium Substances 0.000 claims description 6
- 229910052712 strontium Inorganic materials 0.000 claims description 6
- CIOAGBVUUVVLOB-UHFFFAOYSA-N strontium atom Chemical compound [Sr] CIOAGBVUUVVLOB-UHFFFAOYSA-N 0.000 claims description 6
- 239000002253 acid Substances 0.000 claims description 3
- 150000007513 acids Chemical class 0.000 claims description 3
- 239000007789 gas Substances 0.000 claims description 3
- 150000004820 halides Chemical class 0.000 claims description 3
- 238000010438 heat treatment Methods 0.000 claims description 3
- 238000005498 polishing Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 2
- 238000002844 melting Methods 0.000 claims description 2
- 239000002019 doping agent Substances 0.000 description 11
- IWOUKMZUPDVPGQ-UHFFFAOYSA-N barium nitrate Chemical compound [Ba+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O IWOUKMZUPDVPGQ-UHFFFAOYSA-N 0.000 description 8
- 238000005245 sintering Methods 0.000 description 7
- 239000010453 quartz Substances 0.000 description 6
- 239000000243 solution Substances 0.000 description 5
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 5
- -1 but not limited to Chemical class 0.000 description 4
- 238000007524 flame polishing Methods 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 239000000835 fiber Substances 0.000 description 3
- 230000006911 nucleation Effects 0.000 description 3
- 238000010899 nucleation Methods 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 238000005507 spraying Methods 0.000 description 3
- 239000000725 suspension Substances 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 2
- 150000001553 barium compounds Chemical class 0.000 description 2
- XDFCIPNJCBUZJN-UHFFFAOYSA-N barium(2+) Chemical compound [Ba+2] XDFCIPNJCBUZJN-UHFFFAOYSA-N 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000007598 dipping method Methods 0.000 description 2
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 150000002484 inorganic compounds Chemical class 0.000 description 2
- 229910010272 inorganic material Inorganic materials 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000010422 painting Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- GRYLNZFGIOXLOG-UHFFFAOYSA-N Nitric acid Chemical compound O[N+]([O-])=O GRYLNZFGIOXLOG-UHFFFAOYSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 238000002425 crystallisation Methods 0.000 description 1
- 230000008025 crystallization Effects 0.000 description 1
- 239000008367 deionised water Substances 0.000 description 1
- 230000003292 diminished effect Effects 0.000 description 1
- 230000005670 electromagnetic radiation Effects 0.000 description 1
- 229910021485 fumed silica Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 238000001000 micrograph Methods 0.000 description 1
- 229910017604 nitric acid Inorganic materials 0.000 description 1
- 239000000382 optic material Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000013307 optical fiber Substances 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000007921 spray Substances 0.000 description 1
- PWYYWQHXAPXYMF-UHFFFAOYSA-N strontium(2+) Chemical compound [Sr+2] PWYYWQHXAPXYMF-UHFFFAOYSA-N 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/06—Surface treatment of glass, not in the form of fibres or filaments, by coating with metals
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B32/00—Thermal after-treatment of glass products not provided for in groups C03B19/00, C03B25/00 - C03B31/00 or C03B37/00, e.g. crystallisation, eliminating gas inclusions or other impurities; Hot-pressing vitrified, non-porous, shaped glass products
- C03B32/02—Thermal crystallisation, e.g. for crystallising glass bodies into glass-ceramic articles
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C10/00—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition
- C03C10/0009—Devitrified glass ceramics, i.e. glass ceramics having a crystalline phase dispersed in a glassy phase and constituting at least 50% by weight of the total composition containing silica as main constituent
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating
- C03C17/22—Surface treatment of glass, not in the form of fibres or filaments, by coating with other inorganic material
- C03C17/23—Oxides
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/213—SiO2
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
- C03C2217/00—Coatings on glass
- C03C2217/20—Materials for coating a single layer on glass
- C03C2217/21—Oxides
- C03C2217/24—Doped oxides
Definitions
- the invention relates to a vitreous silica furnace tube formed from fused quartz as defined in claim 1. More particularly, the invention relates to a vitreous silica furnace tube comprising fused quartz and having an outer coating containing metal cations. Even more particularly, the invention relates to a vitreous silica furnace tube having an outer coating containing metal cations, wherein the fused quartz undergoes a transition to a cristobalite crystal structure at a temperature of at least about 1000°C. The invention also relates to a method of forming a doped coating on an exposed surface of a body of a vitreous silica furnace tube as defined in claim 7with a coating containing a plurality of metal cations.
- Quartz also referred to hereinafter as "fused quartz" is used to form articles, such as tubes and crucibles, which are used in the processing of products, such as optical fibers and semiconducting materials, at high temperatures Quartz articles undergo viscous creep at high temperatures and are thus prone to failure. Quartz muffle tubes, for example, are used throughout the fiber optics industry during the sintering step in optical-quality glass boule production. In the sintering application, tubes are usually suspended vertically, and sintering takes place at temperatures around 1500°C. At such temperatures, the fused quartz muffle tubes undergo viscous creep, which can lead to muffle tube failure.
- US 4 102 666 A relates to quartz glass elements having improved thermal dimensional stability making them suitable for use at elevated temperatures for extended periods of time.
- EP 0 748 885 A relates to a fused quartz crucible having one or more surfaces which have been treated with a devitrification promoter.
- Fused quartz articles such as muffle tubes and crucibles, have limited service lifetimes due to viscous creep occurring at high temperatures of operation. Therefore, what is needed is a fused quartz article that is resistant to creep at high temperatures. What is also needed is a method of treating a fused quartz article to improve the creep resistance of the article.
- the present invention meets these and other needs by providing a vitreous silica furnace tube with enhanced creep resistance.
- the enhanced creep resistance is the result of controlled devitrification of the fused quartz article. Controlled devitrification is achieved by coating the tubes with a colloidal silica slurry doped with metal cations, such as, but not limited to, barium, strontium, and calcium.
- the metal cations in the slurry promote nucleation and growth of cristobalite crystals (also referred hereinafter as "cristobalite”) into the fused quartz at elevated temperatures.
- the cristobalite has significantly higher viscosity, and therefore greater creep resistance at elevated temperatures, than fused quartz.
- the vitreous silica furnace tube comprises: a body, the body comprising fused quartz; and a coating disposed on an exposed surface of the body, the coating comprising a plurality of metal cations, each having a valence of less than 4, wherein the plurality of metal cations comprises cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof.
- the plurality of metal cations is present within the coating in a concentration of at least about 0.1 atomic percent.
- the fused quartz within the body undergoes a transition to a cristobalite crystal structure at a temperature of at least about 1000°C.
- the outer coating comprises a plurality of metal cations, wherein the plurality of metal cations comprises cations of at least one of barium, calcium, strontium, and combinations thereof.
- the plurality of metal cations is present within the coating in a concentration of at least about 0.1 atomic percent.
- the plurality of cations catalyzes a transition of fused quartz within the fused quartz article to a cristobalite crystal structure at a temperature of at least about 1000°C.
- the fused quartz article comprises: a body comprising fused quartz; and an outer coating disposed on an exposed surface of the body, the outer coating comprising a plurality of metal cations, wherein the plurality of metal cations comprises cations of at least one of barium, calcium, strontium, and combinations thereof.
- the plurality of metal cations is present within the coating in a concentration of at least about 0.1 atomic percent.
- the plurality of cations catalyzes a transition of fused quartz within the body to a cristobalite crystal structure at a temperature of at least about 1000°C.
- the fused quartz article is transparent to visible light.
- Another aspect of the invention is to provide a method of forming a doped coating on an exposed surface of a vitreous silica furnace tube, as defined in claim 7, having a body comprising fused quartz.
- the doped coating comprises a plurality of metal cations, each having a valence of less than 4, wherein the plurality of metal cations comprises cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof, and wherein the plurality of metal cations is present within the coating in a concentration of at least about 0.1 atomic percent.
- the method comprises the steps of: providing a silica slurry, the silica slurry being doped with a plurality of metal cations comprising cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof; providing a fused quartz article; applying the silica slurry to an exposed surface of the fused quartz article; drying the silica slurry on the exposed surface; and fire polishing the exposed surface to form the doped coating on the exposed surface.
- a further aspect of the invention is to provide a method of improving the creep-resistance of a vitreous silica furnace tube as defined in claim 8.
- the vitreous silica furnace tube comprises a body of fused quartz.
- the method comprises the steps of: providing a silica slurry, the silica slurry being doped with a plurality of metal cations comprising cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof; providing a fused quartz article; applying the silica slurry to an exposed surface of the fused quartz article; drying the silica slurry on the exposed surface; fire polishing the exposed surface, wherein the silica slurry, after drying, forms a coating on the outer surface; and nucleating cristobalite crystals at a temperature of at least about 1000°C. on the outer surface, wherein the cristobalite crystals enhance the creep resistance of the fused quartz article.
- FIG. 1 is a micrograph, taken at 500x magnification, of a cross-section of a fused quartz muffle tube of the present invention.
- the present invention provides a vitreous silica furnace tube having enhanced creep resistance at high temperatures.
- the improvement in creep resistance is the result of controlled devitrification of the vitreous silica furnace tube.
- Controlled devitrification is achieved by coating the tubes with a colloidal silica slurry doped with cations of alkali metals, alkaline earth metals, and rare earth metals, such as, but not limited to, barium, strontium, and calcium.
- the metal cations in the slurry promote nucleation and growth of cristobalite crystals (also referred hereinafter as "cristobalite”) into the fused quartz at elevated temperatures.
- the cristobalite has significantly higher viscosity, and therefore greater creep resistance at elevated temperatures, than fused quartz.
- FIG. 1 is a cross-sectional representation of a portion of an article 100 of the present invention.
- Article 100 which is a fused quartz tube, such as a quartz muffle tubes used in the sintering of optical-quality glass boules, comprises a fused quartz body 102.
- Article 100 further includes coating 104, disposed on an exposed surface of fused quartz body 102. Coating 104 may comprise multiple coatings and may be disposed on more than one exposed surface of fused quartz body 102.
- article 100, fused quartz body 102, and coating 104 are all transparent to visible light (i.e., electromagnetic radiation ranging in wavelength from about 4000 angstroms to about 7700 angstroms). Transparency is a desirable feature of fused quartz article 100. In some applications, such as quartz muffle tubes, transparency permits viewing of the glass boule within the muffle tube during processing, as well as optical measurement of the boule temperature.
- article 100 has a melting temperature that is at least that of cristobalite (about 2270°C).
- article 100 is substantially inert to chemical attack by halide gases and acids. "Substantially inert" is understood to mean that little or no reaction between article 100 and either halide gases or acids occurs over time.
- Coating 104 comprises a plurality of metal cations, wherein each of the cations has a valence of less than 4, wherein the plurality of metal cations comprises cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof.
- the presence of the plurality of metal cations in the surface coating aids in the nucleation of cristobalite crystals on the surface of fused quartz body 102, and promotes rapid growth of these crystals into the bulk of fused quartz body 102.
- the plurality of cations comprises at least one of the divalent alkaline earth cations (also known as Group II cations), such as the divalent cations of barium (Ba 2+ ), calcium (Ca 2+ ), strontium (Sr 2+ ), and combinations thereof.
- the divalent alkaline earth cations also known as Group II cations
- the plurality of cations comprises barium (Ba 2+ ) cations.
- the plurality of cations is present within coating 104 in a concentration of at least about 0.1 atomic percent. In one embodiment, the concentration of the plurality of metal cations within coating 104 is at least 0.5 atomic percent. In another embodiment, the concentration of the plurality of metal cations within coating 104 is in the range from about 4 atomic percent to about 10 atomic percent.
- Coating 104 has a thickness in a range from about 50 nanometers to about 5 microns. In one embodiment, the thickness of coating 104 is in a range from about 500 nanometers to about 5 microns. In another embodiment, the thickness is in a range from about 2 microns to about 5 microns.
- Coating 104 is applied to fused quartz body 102 by spraying a slurry containing the plurality of metal cations onto the exposed surface of fused quartz body 102 to first form a film.
- the slurry is generally formed by first dissolving a salt of the metal to generate a solution containing a plurality of metal cations. The solution is then combined with fumed silica to form the slurry. Silica is added to control the final cation concentration at the exposed surface and to facilitate binding of the cation "dopant" to the surface via subsequent flame polishing. The slurry is then sprayed onto the exposed surface of fused quartz body 102. The film is then flame-polished to yield a dense, transparent surface coating 104. Subsequent heat treatment of the article 100, now comprising coating 104 and fused quartz body 102, results in devitrification-or conversion to the cristobalite crystal structure-of the fused quartz body.
- fused quartz At elevated temperatures, fused quartz exhibits significant viscous creep.
- Fused quartz articles such as muffle furnace tubes that are used in the sintering of fiber optic materials, are frequently maintained at high temperatures for prolonged periods of time.
- the creep rate is greatly diminished by the rapid crystallization, which originates at the location of the metal cations in coating 104, of the fused quartz.
- the reduction in creep rate extends the lifetime of article 100.
- Quartz muffle tubes for example, are used in the fiber optics industry during the sintering step in the production of optical-quality glass boules.
- the tubes are usually suspended vertically, and sintering takes place at a temperature of about 1500°C. At such temperatures, fused quartz undergoes viscous creep, which can lead to muffle tube failure.
- the creep properties of the muffle tube are greatly improved by producing a controlled devitrified layer of cristobalite on the outer diameter of the muffle tube. The presence of this crystalline outer layer extends the projected service time of such tubes to greater than one year in some cases.
- the present invention also includes a method of forming a doped coating on an exposed surface of a fused quartz article.
- a fused quartz article and a slurry of fused silica containing a dopant comprising a plurality of metal cations comprising cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof, with each cation having a positive valence of less than 4, are provided.
- the slurry is prepared by first preparing an aqueous solution of an inorganic compound that comprises the metal cation dopant.
- a soluble barium compound such as barium nitrate
- colloidal silica to form the silica slurry.
- concentration of the metal cation dopant is present within the silica slurry in a concentration range from about 13 ppm (parts per million) to about 2000 ppm. In one embodiment, the concentration of the metal cation dopant is present within the silica slurry in a concentration range from about 800 ppm to about 2000 ppm.
- the silica slurry is then applied to an exposed surface of the fused quartz article, typically by spraying the slurry onto the exposed surface, and allowed to dry, forming a film on the exposed surface.
- the fused quartz article may be preheated to a temperature in a range from about 50°C to about 70°C.
- the preheating step increases the evaporation rate of water from the slurry and helps produce a smooth, conformal, doped coating.
- the film is flame-polished to yield a dense, transparent surface coating that is doped with metal cations.
- the present invention further includes a method for improving the creep resistance of a fused quartz article.
- a fused quartz article and a slurry of fused silica containing a dopant comprising a plurality of metal cations comprising cations of at least one of an alkali metal, an alkaline earth metal, a rare earth metal, and combinations thereof, with each cation having a positive valence of less than 4, are provided.
- the slurry is prepared by first preparing an aqueous solution of an inorganic compound that comprises the metal cation dopant.
- a soluble barium compound such as barium nitrate, is dissolved in water, the solution is then mixed with colloidal silica to form the silica slurry.
- the concentration of the metal cation dopant is present within the silica slurry in a concentration range from about 13 ppm (parts per million) to about 2000 ppm. In one embodiment, the concentration of the metal cation dopant is present within the silica slurry in a concentration range from about 800 ppm to about 2000 ppm.
- the slurry is then applied to an exposed surface of the fused quartz article, typically by spraying the slurry onto the exposed surface and allowed to dry, forming a film on the exposed surface.
- the fused quartz article may be preheated to a temperature in a range from about 50°C to about 70°C. The preheating step increases the evaporation rate of water from the slurry and helps produce a smooth, conformal, doped coating. After drying, the film is flame-polished to yield a dense, transparent surface coating.
- the coated fused silica article is then heated to a temperature in a range from about 1000°C to about 1600°C, and, preferably, in a range from about 1350°C to about 1600°C, to form cristobalite crystals on the exposed surface of the fused quartz article.
- devitrification of the coated fused silica article is carried out at a temperature of about 1350°C.
- the cristobalite crystals enhance the creep resistance of the fused quartz article.
- a fused quartz tube having an outer diameter of 32 mm and an inner diameter of 24 mm, was coated with a barium-doped silica coating.
- barium nitrate In order to fuse the barium dopant onto the surface of the fused quartz, barium nitrate first was dissolved in water and mixed with colloidal silica to form a suspension. The amount of barium nitrate in the suspension was sufficient to provide about 4.5 atomic % barium substituted on the silicon sites within the coating following flame polishing. The silica was added to control the final barium concentration at the surface and also facilitate binding of the dopant to the surface via subsequent flame polishing.
- the colloidal silica was mixed into de-ionized water and adjusted to a pH of 1.0 by adding nitric acid to the solution.
- the resultant suspension contained 2.0 volume % colloidal silica.
- the coatings were applied to the outer surface of the tube using a pneumatic spray gun.
- the as-sprayed coating thickness was about 10 microns prior to flame polishing.
- the barium-doped colloidal silica coating was fused to the surface using a hydrogen burner attached to a glass-working lathe.
- the tube rotation rate was about 5 rpm, with the burner translating across the tube at approximately 12 inches/minute.
- a total of 3 coats were applied to the tube.
- Final coating thickness was in the range from about 5 microns to about 10 microns. Following coating, the tube was annealed at 1100°C for 30 minutes.
Claims (8)
- Tube-foyer de verre de silice comprenant :a) un corps, ledit corps comprenant du quartz fondu ; etb) un revêtement disposé sur une surface exposée dudit corps, ledit revêtement comprenant une pluralité de cations métalliques, possédant chacun une valence inférieure à 4, dans lequel ladite pluralité de cations métalliques comprend des cations d'au moins l'un d'un métal alcalin, d'un métal alcalino-terreux, d'un métal des terres rares, et de combinaisons de ceux-ci, dans lequel ladite pluralité de cations métalliques est présente à l'intérieur dudit revêtement dans une concentration d'au moins 0,1 pour cent atomique, et dans lequel le quartz fondu à l'intérieur de la masse dudit corps a subi une transition vers une structure de cristaux de cristobalite lors d'un chauffage du tube à une température dans une plage allant de 1000 °C à 1600 °C,dans lequel ladite pluralité de cations comprend des cations au moins de baryum.
- Tube-foyer de verre de silice selon la revendication 1, dans lequel ledit tube-foyer de verre de silice est transparent à la lumière visible.
- Tube-foyer de verre de silice selon la revendication 1, dans lequel ledit tube-foyer de verre de silice est sensiblement chimiquement inerte par rapport aux gaz et acides halogénures.
- Tube-foyer de verre de silice selon la revendication 1, dans lequel ledit tube-foyer de verre de silice a une température de fusion d'au moins celle de la cristobalite.
- Tube-foyer de verre de silice selon la revendication 1, dans lequel ledit revêtement a une épaisseur de 50 nm à 5 microns.
- Tube-foyer de verre de silice selon la revendication 1, dans lequel ladite pluralité de cations comprend en outre des cations d'au moins l'un du calcium, du strontium et de combinaisons de ceux-ci.
- Procédé de formation d'un revêtement dopé sur une surface exposée d'un corps d'un tube-foyer de verre de silice, le corps comprenant du quartz fondu, le revêtement dopé comprenant une pluralité de cations métalliques, ayant chacun une valence inférieure à 4, dans lequel la pluralité de cations métalliques comprend des cations d'au moins l'un d'un métal alcalin, d'un métal alcalino-terreux, d'un métal des terres rares et de combinaisons de ceux-ci ; dans lequel la pluralité de cations métalliques est présente dans le revêtement dopé à une concentration d'au moins 0,1 pour cent atomique, le procédé comprenant les étapes consistant à :appliquer une suspension colloïdale de silice à la surface exposée du corps du tube-foyer de verre de silice, la suspension colloïdale de silice étant dopée avec une pluralité de cations métalliques comprenant des cations d'au moins l'un d'un métal alcalin, d'un métal alcalino-terreux, d'un métal des terres rares et de combinaisons de ceux-ci ; etsécher la suspension colloïdale de silice sur la surface exposée,dans lequel ladite pluralité de cations comprend des cations au moins de baryum.
- Procédé pour améliorer la résistance au fluage d'un tube-foyer de verre de silice, le tube-foyer de verre de silice comprenant un corps comprenant du quartz fondu, le procédé comprenant les étapes consistant à :a) appliquer une suspension colloïdale de silice à la surface exposée du tube-foyer de verre de silice,
la suspension de silice étant dopée avec une pluralité de cations métalliques comprenant des cations d'au moins l'un d'un métal alcalin, d'un métal alcalino-terreux, d'un métal des terres rares et de combinaisons de ceux-ci ; etb) sécher la suspension de silice sur la surface exposée ;c) polir à la flamme la surface exposée, dans lequel la suspension de silice, après séchage forme un revêtement dopé sur la surface exposée, le revêtement dopé comprenant la pluralité de cations métalliques possédant chacun une valence inférieure à 4, dans lequel la pluralité de cations métalliques comprend des cations d'au moins l'un d'un métal alcalin, d'un métal alcalino-terreux, d'un métal des terres rares, et de combinaisons de ceux-ci, dans lequel ladite pluralité d'au moins un cation métallique est présente à l'intérieur du revêtement dans une concentration d'au moins 0,1 pour cent atomique ; etd) chauffer le tube-foyer de verre de silice et le revêtement dopé à une température dans une plage de 1000 °C à 1600 °C, dans lequel le quartz fondu du corps subit une transition vers des cristaux de cristobalite, entraînant ainsi la nucléation de cristaux de cristobalite sur la surface exposée d'une masse dudit corps, dans lequel les cristaux de cristobalite augmentent la résistance au fluage du tube-foyer de verre de silice, etdans lequel ladite pluralité de cations comprend des cations au moins de baryum.
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US63754 | 2002-05-10 | ||
US10/063,754 US6875515B2 (en) | 2002-05-10 | 2002-05-10 | Fused quartz article having controlled devitrification |
PCT/US2003/012599 WO2003095384A1 (fr) | 2002-05-10 | 2003-04-24 | Article de quartz fondu a devitrification maitrisee |
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EP1506142A1 EP1506142A1 (fr) | 2005-02-16 |
EP1506142B1 true EP1506142B1 (fr) | 2019-12-11 |
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EP03724186.6A Expired - Lifetime EP1506142B1 (fr) | 2002-05-10 | 2003-04-24 | Article de quartz fondu a devitrification maitrisee |
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US (2) | US6875515B2 (fr) |
EP (1) | EP1506142B1 (fr) |
JP (1) | JP4700340B2 (fr) |
KR (1) | KR100967034B1 (fr) |
CN (1) | CN1313407C (fr) |
AU (1) | AU2003231062A1 (fr) |
TW (1) | TW200400924A (fr) |
WO (1) | WO2003095384A1 (fr) |
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US6641663B2 (en) * | 2001-12-12 | 2003-11-04 | Heracus Shin-Estu America | Silica crucible with inner layer crystallizer and method |
US7118789B2 (en) * | 2001-07-16 | 2006-10-10 | Heraeus Shin-Etsu America | Silica glass crucible |
JP3970692B2 (ja) * | 2002-05-31 | 2007-09-05 | 信越化学工業株式会社 | プリフォーム製造方法 |
JP5050363B2 (ja) * | 2005-08-12 | 2012-10-17 | 株式会社Sumco | 半導体シリコン基板用熱処理治具およびその製作方法 |
US20070084397A1 (en) * | 2005-10-19 | 2007-04-19 | General Electric Company | Quartz glass crucible and method for treating surface of quartz glass crucible |
US9139932B2 (en) | 2006-10-18 | 2015-09-22 | Richard Lee Hansen | Quartz glass crucible and method for treating surface of quartz glass crucible |
DE102007036407B4 (de) | 2007-02-28 | 2010-01-28 | Schott Ag | Verfahren zur Herstellung einer beschichteten dreidimensional verformten Scheibe aus Glaskeramik |
JP5146402B2 (ja) * | 2009-05-19 | 2013-02-20 | トヨタ自動車株式会社 | 炭素粒子含有被膜の成膜方法、伝熱部材、パワーモジュール、及び車両用インバータ |
US20110129784A1 (en) * | 2009-11-30 | 2011-06-02 | James Crawford Bange | Low thermal expansion doped fused silica crucibles |
JP5610570B2 (ja) * | 2010-07-20 | 2014-10-22 | 株式会社Sumco | シリカガラスルツボ、シリコンインゴットの製造方法 |
CN102453956B (zh) * | 2010-10-27 | 2016-03-23 | 杭州先进石英材料有限公司 | 一种石英玻璃坩埚及其制备方法 |
WO2014004496A1 (fr) * | 2012-06-25 | 2014-01-03 | Silicor Materials Inc. | Revêtement de surfaces d'un creuset réfractaire pour la purification de silicium et procédé de purification de la masse fondue de silicium au moyen de ce ou de ces creusets en vue d'une fusion et d'une solidification directionnelle ultérieure |
CN105382673B (zh) * | 2015-11-09 | 2018-01-09 | 盐城工学院 | 利用复合粉末介质火抛水钻珠坯的方法 |
EP3428132B1 (fr) | 2017-07-10 | 2023-08-30 | Heraeus Quarzglas GmbH & Co. KG | Composant en verre de quartz à stabilité thermique élevée, semi-produit associé et son procédé de fabrication |
CN107793021B (zh) * | 2017-10-31 | 2021-07-30 | 江苏亨通光导新材料有限公司 | 适于光纤预制棒烧结炉的微晶化炉芯管及快速微晶化方法 |
CN113430479B (zh) * | 2021-06-25 | 2022-05-20 | 常州大学 | 钛及钛合金表面碳纳米材料改性的Ti-Al-Si-C镀层及其制备方法 |
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- 2003-04-24 EP EP03724186.6A patent/EP1506142B1/fr not_active Expired - Lifetime
- 2003-04-24 AU AU2003231062A patent/AU2003231062A1/en not_active Abandoned
- 2003-04-24 CN CNB03816275XA patent/CN1313407C/zh not_active Expired - Lifetime
- 2003-04-24 KR KR1020047018171A patent/KR100967034B1/ko active IP Right Grant
- 2003-04-24 JP JP2004503409A patent/JP4700340B2/ja not_active Expired - Lifetime
- 2003-04-24 WO PCT/US2003/012599 patent/WO2003095384A1/fr active Application Filing
- 2003-05-09 TW TW092112720A patent/TW200400924A/zh unknown
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Publication number | Publication date |
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AU2003231062A1 (en) | 2003-11-11 |
US20050081564A1 (en) | 2005-04-21 |
WO2003095384A1 (fr) | 2003-11-20 |
EP1506142A1 (fr) | 2005-02-16 |
CN1665751A (zh) | 2005-09-07 |
JP4700340B2 (ja) | 2011-06-15 |
JP2005525284A (ja) | 2005-08-25 |
TW200400924A (en) | 2004-01-16 |
US6875515B2 (en) | 2005-04-05 |
KR100967034B1 (ko) | 2010-06-30 |
CN1313407C (zh) | 2007-05-02 |
US20030211335A1 (en) | 2003-11-13 |
KR20050004851A (ko) | 2005-01-12 |
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