EP1496727A1 - Plasmabeschleuniger mit geschlossener Elektronenbahn - Google Patents

Plasmabeschleuniger mit geschlossener Elektronenbahn Download PDF

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Publication number
EP1496727A1
EP1496727A1 EP04291618A EP04291618A EP1496727A1 EP 1496727 A1 EP1496727 A1 EP 1496727A1 EP 04291618 A EP04291618 A EP 04291618A EP 04291618 A EP04291618 A EP 04291618A EP 1496727 A1 EP1496727 A1 EP 1496727A1
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EP
European Patent Office
Prior art keywords
magnetic field
anode
plasma accelerator
magnetic
accelerator according
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP04291618A
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English (en)
French (fr)
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EP1496727B1 (de
Inventor
Olivier Secheresse
Antonina Bougrova
Alexei Morozov
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Safran Aircraft Engines SAS
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SNECMA Moteurs SA
SNECMA SAS
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Publication of EP1496727A1 publication Critical patent/EP1496727A1/de
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F03—MACHINES OR ENGINES FOR LIQUIDS; WIND, SPRING, OR WEIGHT MOTORS; PRODUCING MECHANICAL POWER OR A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H—PRODUCING A REACTIVE PROPULSIVE THRUST, NOT OTHERWISE PROVIDED FOR
    • F03H1/00—Using plasma to produce a reactive propulsive thrust
    • F03H1/0037—Electrostatic ion thrusters
    • F03H1/0062—Electrostatic ion thrusters grid-less with an applied magnetic field
    • F03H1/0075—Electrostatic ion thrusters grid-less with an applied magnetic field with an annular channel; Hall-effect thrusters with closed electron drift
    • H—ELECTRICITY
    • H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
    • H05H—PLASMA TECHNIQUE; PRODUCTION OF ACCELERATED ELECTRICALLY-CHARGED PARTICLES OR OF NEUTRONS; PRODUCTION OR ACCELERATION OF NEUTRAL MOLECULAR OR ATOMIC BEAMS
    • H05H1/00—Generating plasma; Handling plasma
    • H05H1/54—Plasma accelerators

Definitions

  • the present invention relates to drift plasma accelerators closed electrons that constitute plasma sources of ions which can be used in particular as stationary plasma thrusters in the space domain but also in other technical fields, for example for the ionic treatment of mechanical parts.
  • an ion source comprises a cathode chamber with a gas distributor while a hollow anode forms an anode chamber connected to the cathode chamber through the outlet orifice formed in the wall of the latter.
  • An electrostatic system ensures the extraction of ions with the electro-isolated emission electrode placed in the outlet of the anode chamber.
  • a magnetic system creates in the cathode and anode chambers a magnetic field with an induction vector mainly in the axial direction.
  • the gas distributor of the cathode chamber is also used as an ignition electrode connected to the hollow anode.
  • An additional electrically insulated electrode with respect to the hollow anode and the cathode chamber is installed at the outlet of the cathode chamber and has an orifice whose diameter is much smaller than the inside diameter. maximum of the hollow anode. Ionization takes place in the anode and cathode chambers with a substantially longitudinal magnetic field while ion extraction and acceleration is produced by the electrostatic system. Such ionic sources operate in the field of small current densities (j i ⁇ 2mA / cm 2 ) and are effective only with high acceleration voltages (U> 1000 v), which limits their applications.
  • coaxial quasi-stationary plasma accelerator (described for example in the article by Volochko A. U. and others entitled "The study of the accelerator quasi-stationary two-stage coaxial plasma (KCPU) with the support electrodes "published in the journal Academy of Sciences of the USSR, Plasma Physics, vol. 16, ed. 2, M. "Science” in February 1990.
  • the KCPU includes, fixed on the edge flange (back) and isolated from this flange, an anode group, a cathode group and an ionic unit input.
  • the anode and cathode groups are separated using a annular disc insulator.
  • the anode group contains an anode cylindrical support made in the shape of "squirrel wheel", fixed on the transition flange.
  • Around the anode is established in addition a screen dielectric cylindrical contributing to the increase of the concentration of gas and plasma in the space outside the anode.
  • the group cathode is installed inside the "squirrel wheel" of the anode group and consists of two superimposed copper tubes, the ends of which are fixed slats forming the ellipsoid of rotation. On the inner tube are fixed 128 points, outlets with conical sharpening, which form eight rows in longitudinal section and are interposed between lamellae at intervals, repeating the shape of the cathode.
  • the ionic unit consists of four ionic input chambers connected to the source of active gas, which are introduced into an acceleration channel of KCPU by the orifices of the edge flange symmetrical with respect to the axis of the system. Each chamber contains an anode in the shape of a full cylinder and a full profile cathode.
  • the magnetic field in the KCPU is formed by currents passing through the plasma volume (thanks to the presence of the electrodes coaxial) and constitutes the own magnetic field. It follows that type of accelerator can only operate at high power. It is why currently its use as a driver in the space domains, for example, does not seem possible.
  • Document FR 2 693 770 also discloses a a closed-electron drift plasma accelerator in which significant improvements have been made with regard to ionization conditions of the active substance and the configuration of the magnetic field throughout the volume of the coaxial channel.
  • plasma accelerator comprises an ionization chamber or tranquilization and a discharge chamber with a coaxial channel ionization and acceleration with open output.
  • a hollow cathode of gas discharge is placed on the open side of the coaxial channel.
  • An annular anode is placed at the entrance of the coaxial channel.
  • a distributor annular gas is installed in the plenum without shut off access to the coaxial channel.
  • the discharge chambers and tranquilization are formed by the elements of the magnetic system of the accelerator, which includes a pair of magnetic poles, a circuit Magnetic and a generator of the magnetic field.
  • the poles Magnetics form one end of the accelerator on the output side open annular canal.
  • One of the magnetic poles is outside, the other is interior and therefore they delimit the chamber of discharge outside and inside.
  • Another end of the accelerator, on the side of the plenum, is formed by a magnetic circuit part, which is connected to the magnetic poles.
  • a cylindrical central mandrel and secondary support elements which are arranged evenly around the rooms so connect the ends of the accelerator.
  • a first magnetic field generator is arranged between the plenum and the outer pole magnet around the acceleration channel, a second generator of magnetic field is on the cylindrical central mandrel at neighborhood of the magnetic inner pole and a third generator of magnetic field is also arranged on the cylindrical central mandrel in the localization area of the annular anode and is therefore closer of the room of tranquilization.
  • the zone of ionization of the active gas does not coincide with the acceleration zone.
  • the magnetic system three generators provides formation in the annular channel of a field magnetic quasi-radial, whose gradient is characterized by an induction maximum at the exit of the channel.
  • the lines of force of the magnetic field are directed perpendicular to the axis of symmetry of the annular canal in the exit zone and these lines are slightly inclined in the area of the canal near the anode. Ionization of the active gas is ensured near the anode before it reaches the annular channel. It allowed increase the efficiency of the plasma motor by up to 60 to 70% and reduce the angle of divergence of the ion beam to 10 to 15%.
  • the present invention aims to overcome the disadvantages known plasma accelerators and aims in particular to improve the efficiency of the ionization of the active gas.
  • the invention also aims at enabling the use of substances various active substances with a high yield, to diminish the angle of divergence of the ion beam, to decrease the level of noise related to the process of acceleration of ions, to increase the efficiency by reducing power losses at the level of walls, to increase the service life by reducing the intensities of ionic and electronic abnormal erosions and expand the range of work in flow (thrust) and specific impulse.
  • a plasma accelerator according to the invention thus has a low level of noise with a well-located flow due to the introduction into the zone of tranquilization of the ionization chamber of a powered coil current, including the magnetic field, in combination with that of other sources of magnetic field, forms a particular configuration containing a force magnetic line, called a separation line or separator, having a point X with a magnetic field zero.
  • the acceleration channel of the plasma accelerator can receive a well-formed ion current, using the phenomenon of equipotentialization of magnetic lines of force and by creating a difference in acceleration of potentials.
  • the area of the point X with a zero magnetic field represents a trap for the ions that form the along the separator.
  • the magnetic field generating means include a fifth magnetic field generator arranged at vicinity of the annular gas distributor.
  • the magnetic circuit may further include elements ferromagnetic secondary support distributed around the chambers of ionization and acceleration and connecting the rear magnetic background to the pole external magnetic.
  • the field generating means magnetic further include a sixth field generator magnet comprising components arranged around said ferromagnetic elements of secondary support.
  • the magnetic field generating means can include electromagnetic coils but also at least part of the permanent magnets.
  • the ionization chamber has a radial dimension larger than that of the acceleration channel made of insulating material.
  • the coaxial annular coil and its polarized conductive sheath are mounted using elements of fastening rigidly connected to the ionization chamber.
  • the annular anode is mounted with radial clearance by relative to the wall of the acceleration channel.
  • the annular anode is connected by a power line directly to the positive pole of the first voltage source continues without being mechanically or electrically connected to the distributor annular gas or electrically conductive material parts internal walls of the ionization chamber otherwise than by via the second DC voltage source.
  • the second voltage source applies to the conductive sheath of the coaxial annular coil a positive voltage of a few tens of volts compared to the anode.
  • the second voltage source applies on the electrically conductive material of the inner faces of the walls of the annular ionization chamber a potential of about 20 to 40 volts per compared to the anode.
  • the magnetic field generating means are adapted to that the potential of the force magnetic line having an "X" point corresponding to a zero magnetic field is close to the potential of the anode.
  • the third generator magnetic field has first and second zones of different diameters, the first zone located in the vicinity of the anode with a diameter greater than that of the second zone at neighborhood of the ionization chamber.
  • the distance between the sheath conductor of the coaxial annular coil and the walls of the chamber ionization is greater than or equal to about 20 millimeters.
  • the plasma accelerator according to the invention can be applied to a spatial plasma engine constituting an electric thruster jet for satellite or other spacecraft.
  • the plasma accelerator according to the invention can also be applied to an ionic source of ionic treatment of mechanical parts.
  • Figure 3 shows an example of a plasma accelerator according to the invention.
  • Such a closed-electron drift plasma accelerator comprises a first chamber 2 delimited by walls 52 of material electrically insulating, whose inner faces are covered with a conductive material 9.
  • This first chamber 2 constitutes a chamber ionization or plenum.
  • a second chamber 3 comprises an annular acceleration channel 53 of electrically insulating material whose outlet 55 is open downstream.
  • the upstream part 54 of the canal acceleration 53 communicates with the cavity of the ionization chamber 2 which is coaxial with the acceleration chamber 3.
  • a hollow cathode 8 gas discharge is located outside the acceleration channel 53 in the vicinity of the output 55 thereof.
  • the reference 81 designates the electrical connection line of the cathode with the negative pole of a first DC voltage source 82 ( Figure 2).
  • the reference 88 designates the gas supply of the hollow cathode 8.
  • An annular anode 7 is located at the downstream end of the chamber of ionization 2 near the upstream input 54 of the acceleration channel 53 which constitutes the acceleration chamber 3.
  • the cathode 8 and the anode 7 are connected respectively to the negative pole and the positive pole of the source DC voltage 82, forming the circuit of the power supply.
  • the anode 7 is itself isolated from the conductive material 9 of the walls of the ionisation chamber 2.
  • An annular gas distributor 11 is disposed in the cavity of the ionization chamber 2 without closing the inlet 54 of the acceleration channel 53.
  • the gas distributor is placed on the upstream side of the ionization chamber 2.
  • the cathode 8 and the gas distributor 11 are respectively connected by lines 88 and 110 to sources of gas to be ionized that can be independent or common.
  • the gas introduced into the distributor annular gas 11 by the line 110 is distributed in the chamber of tranquilization 2 by orifices 111 distributed in this distributor 11.
  • the ionization or tranquilization chamber 2 has a dimension in the radial direction that is greater than that of the chamber 3 and may have a frustoconical profile in its downstream part 521 opening into the input 54 of the acceleration channel 53.
  • the annular anode 7 may itself have a shape truncated.
  • the closed-electron drift plasma accelerator comprises a magnetic circuit and magnetic field generators.
  • the magnetic circuit comprises a cylindrical central mandrel 60, internal magnetic poles 61 and outer 62 which define the output open downstream 55 of the acceleration channel 53 and a rear background 63 which forms the upstream end of the ionization chamber 2.
  • the magnetic circuit further comprises elements ferromagnetic secondary support 64 which can be distributed evenly around the generators of a cylinder around the chambers ionization 2 and acceleration 3 and connect the rear magnetic background 63 at the outer magnetic pole before 62.
  • These ferromagnetic elements of secondary supports 64 may be in the form of individual rods as shown in Figure 3, but could also be brought together under the shape of a cylindrical cage surrounding the ionization chambers 2 and acceleration 3.
  • the inner magnetic pole 61 and the rear end 63 of the magnetic circuit can be realized in the form of a single assembly with the cylindrical central mandrel 61.
  • the magnetic field generating means comprise a first magnetic field generator 21 disposed around the acceleration chamber 3 between the outer magnetic pole 62 and the ionization chamber 2.
  • This first magnetic field generator 21 can include a shielded electromagnetic coil.
  • a second magnetic field generator 22 is arranged around the cylindrical central mandrel 60 between the magnetic pole interior 61 and the upstream inlet 54 of the acceleration channel 53 located on the of the ionization chamber 2.
  • this second magnetic field generator 22 comprises also an electromagnetic coil.
  • the objective is to form the optimal geometry of the line magnetic force defining the ionized plasma inlet of the chamber of tranquilization 2 in the acceleration channel 53 (i.e. the spacing of the magnetic force lines of the walls of the chamber of plenum).
  • the coaxial coil 24 can be mounted using fasteners, rigidly connected to the chamber of tranquilization 2 and isolated from the magnetic circuit.
  • the turn 24 represents a fourth magnetic field generator.
  • the dimensions of the plenum 2 are chosen according to the request, such that the distance from the sheath 28 of the turn central 24 to the walls of the plenum chamber 2 about 16 Larmor rays. Given the temperature values electrons, the electronic temperature that must ensure ionization effective gas atoms is in the range 15 - 20 eV, and the value of the magnetic field on the separator H - 100 oersteds, the distance b, from the sheath 28 of the central turn 24 to the walls of the plenum 2, must be b ⁇ 20 - 25 mm.
  • the second additional generator 26 of magnetic field represents all the external elements, each of which is around a secondary support element 64.
  • this generator 26 can be realized by a single toroidal coil around the motor, the external support 64 of the circuit magnetic then being itself toric.
  • the structure of the magnetic system of the plasma accelerator allows to create by the choice of the inside diameters of the poles 61, 62, of the conforming arrangement of the central turn 24 with its current and magnetic generators 21 to 26, the Requested configuration of the magnetic field (see Figures 1 and 4).
  • This configuration is characterized by the field zero value in the positioning zone of the anode 7, by the angle between the branches of separators 27 ( Figure 2) equal to about 90 °, and by the fact that these separators 27 cross the walls of the canal with an angle about 45 ° and meet in the area of the anode 7, surrounding the central spire 24 without contact with the walls of the chamber of 2.
  • the direction of the separators 27 creates a magnetic field with an angle of 45 °, which ensures the condition of the separation of the channel wall flow and its focusing at middle of the surface of the discharge chamber 3 with a given gradient of the field (not less than 100 oersteds / cm) of the zero value in the area positioning the anode 7 to the maximum value at the output of the annular channel 53.
  • All magnetic field generators 21 to 26 can be manufactured using electromagnetic coils or magnets whose Curie point must remain above the temperature active plasma accelerator. Mixed use of coils is allowed electromagnetic and permanent magnets. If we choose generating generators with electromagnetic coils, they can be powered with different power sources and in a single direction or by a single current source (coils in series) and, in this case, it is necessary to select the number of turns in each coil to ensure the desired geometry of the field magnetic.
  • the annular anode 7 is positioned in the zone of the field zero magnetic, by directly joining the entrance of the acceleration channel 53. However, in this case, it is possible to re-spray the material of the insulating walls of the acceleration chamber 3 by the method of ion bombardment, following which we can see on the surface of the anode 7 a non-conductive film. Therefore, to maintain the active surface of the annular anode 7, it is better to put it with the game radial ⁇ relative to the wall of the acceleration channel 53.
  • the value of this game must be chosen according to optimal conditions. Firstly, the exaggerated increase of the game should not lead to the disturbance of the integrity of the flow nor the erosion of the anode 7 because of the bombardment ion.
  • the setting of the clearance ⁇ can be done by the link mechanics of the anode using rigid lintels. If these lintels are conductors, the electrical connection of the anode with the positive from the source through the line of the power supply.
  • any type of hollow gas-discharge cathode 8 can be installed.
  • this cathode 8 can be placed either on the motor side, or, according to a variant, inside the central mandrel and directed towards outside.
  • the operation of the plasma accelerator according to the present invention is the following: the magnetic field with the desired geometry is obtained using the generators of the magnetic field 21 to 26 as well than other elements of the magnetic system. After distributing the inert gas, for example xenon, to a pre-lit heated cathode 8 and to the annular gas distributor 11, the tension is applied to elements of the accelerator and the discharge then comes on in the first and second bedrooms 3, 2.
  • the inert gas for example xenon
  • the tranquilization stage 2 comprises an equipotential wall 9 (denoted SB), the annular turn 24 with its current and the anode 7 which fixes the potential in the zero zone of the magnetic field and plays the role of the cathode for this floor.
  • the fluid supply arrives on the back side of this stage 2.
  • the composition of the acceleration stage 3 is traditional. This stage comprises a dielectric channel 53 and a cathode 8 at the output of the generator.
  • the particularity of the tranquilization stage 2 is the anode 7 which constitutes a cathode of tranquilization. It ensures the discharge between the separator 27 and the equipotential wall 9 (SB) of the volume of plenum.
  • the second particularity is the "central spire" 24 with its current forming the annular conductor creating the separator and the trap for formed ions.
  • the operation of the acceleration stage 3 is traditional.
  • the magnetic field increases towards the output and has its maximum in the exit plan.
  • the gradient of the magnetic field is 100 oersteds / cm.
  • Magnetic lines of force have a convex geometry towards the anode 7. It is the electric field that makes the ions move. As for the electrons, these circulate in azimuth in the electric and magnetic crossed field.
  • the accelerator works like a two-stage system.
  • the tranquilization stage 2 only one problem is solved: the most complete ionization of the substance, while ion energy can be very weak.
  • the volume of the ionization zone has no limits and practically we can get the complete ionization of the substance active and not let neutrals pass through the acceleration channel 53.
  • the proportion of ionized neutrals in the acceleration and widen the range of operation in flow and specific impulse.
  • the requested profile was established of the magnetic field in the plenum 2 and a channel close to the ideal configuration of the magnetic field.
  • the divergence of the beam of ions has been reduced to a value of about ⁇ 10 ° or even ⁇ 3 °, the yield has been increased to 65 to 70% and, further important, we got the widening of the working range of the engine in push and in specific impulse.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Plasma Technology (AREA)
EP04291618A 2003-07-09 2004-06-28 Plasmabeschleuniger mit geschlossener Elektronenbahn Expired - Lifetime EP1496727B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
FR0308384 2003-07-09
FR0308384A FR2857555B1 (fr) 2003-07-09 2003-07-09 Accelerateur a plasma a derive fermee d'electrons

Publications (2)

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EP1496727A1 true EP1496727A1 (de) 2005-01-12
EP1496727B1 EP1496727B1 (de) 2008-04-30

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US (1) US7180243B2 (de)
EP (1) EP1496727B1 (de)
JP (1) JP4916097B2 (de)
DE (1) DE602004013401T2 (de)
FR (1) FR2857555B1 (de)
RU (1) RU2344577C2 (de)
UA (1) UA81616C2 (de)

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CN108953088A (zh) * 2018-08-07 2018-12-07 金群英 一种新型霍尔推力器
CN109026580A (zh) * 2018-08-07 2018-12-18 柳盼 一种霍尔推进器气体推进剂的输送方法

Families Citing this family (29)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7259378B2 (en) * 2003-04-10 2007-08-21 Applied Process Technologies, Inc. Closed drift ion source
KR100599094B1 (ko) * 2004-11-29 2006-07-12 삼성전자주식회사 코일의 권선수 조절에 의한 전자기 유도 가속장치
WO2008105736A2 (en) * 2007-03-01 2008-09-04 Plasmatrix Materials Ab Method, material and apparatus for enhancing dynamic stiffness
US7858949B2 (en) * 2008-07-18 2010-12-28 Brookhaven Science Associates, Llc Multi-anode ionization chamber
WO2010017185A1 (en) * 2008-08-04 2010-02-11 Agc Flat Glass North America, Inc. Plasma source and methods for depositing thin film coatings using plasma enhanced chemical vapor deposition
WO2010044641A2 (ko) * 2008-10-16 2010-04-22 주식회사 인포비온 빔폭 제어 가능한 전자빔 제공 장치
US20110199027A1 (en) * 2008-10-16 2011-08-18 Yong Hwan Kim Electron beam generator having adjustable beam width
US8468794B1 (en) * 2010-01-15 2013-06-25 The United States Of America As Represented By The Administrator Of National Aeronautics And Space Administration Electric propulsion apparatus
RU2465749C2 (ru) * 2010-04-02 2012-10-27 Государственное образовательное учреждение высшего профессионального образования "Московский государственный технический университет имени Н.Э.Баумана" Способ электромагнитной фокусировки ионного пучка в ускорителе плазмы с азимутальным дрейфом электронов
US9449793B2 (en) * 2010-08-06 2016-09-20 Lam Research Corporation Systems, methods and apparatus for choked flow element extraction
RU2458249C1 (ru) * 2011-03-31 2012-08-10 Государственный научный центр Российской Федерации - федеральное государственное унитарное предприятие "Исследовательский Центр имени М.В. Келдыша" Способ очистки рабочей части ускорительного канала стационарного плазменного двигателя от продуктов эрозии
RU2474984C1 (ru) * 2011-10-24 2013-02-10 Федеральное государственное бюджетное образовательное учреждение высшего профессионального образования "Московский авиационный институт (национальный исследовательский университет)" Плазменный ускоритель с замкнутым дрейфом электронов
US8618521B2 (en) 2012-03-03 2013-12-31 The Board Of Trustees Of The Leland Stanford Junior University Pluridirectional very high electron energy radiation therapy systems and processes
RU2540140C2 (ru) * 2013-04-24 2015-02-10 Мельников Юрий Константинович Ускоритель плазмы
EP3043863B1 (de) 2013-09-11 2019-12-04 The Board of Trustees of the Leland Stanford Junior University Anordnungen aus beschleunigungsstrukturen und schnelle bildgebung für schnelle radiotherapie
WO2015102681A2 (en) 2013-09-11 2015-07-09 The Board Of Trustees Of The Leland Stanford Junior University Methods and systems for rf power generation and distribution to facilitate rapid radiation therapies
US9196449B1 (en) * 2014-10-09 2015-11-24 Far-Tech, Inc. Floating grid electron source
MX2017007357A (es) 2014-12-05 2018-04-24 Agc Flat Glass Na Inc Fuente de plasma utilizando un revestimiento de reduccion de macro-particulas y metodo de uso de una fuente de plasma utilizando un revestimiento de reduccion de macro-particulas para la deposicion de revestimientos de pelicula delgada y modificacion de superficies.
EA201791234A1 (ru) 2014-12-05 2017-11-30 Эй-Джи-Си Гласс Юроуп, С.А. Плазменный источник с полым катодом
US9721765B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Plasma device driven by multiple-phase alternating or pulsed electrical current
US9721764B2 (en) 2015-11-16 2017-08-01 Agc Flat Glass North America, Inc. Method of producing plasma by multiple-phase alternating or pulsed electrical current
US10573499B2 (en) 2015-12-18 2020-02-25 Agc Flat Glass North America, Inc. Method of extracting and accelerating ions
US10242846B2 (en) 2015-12-18 2019-03-26 Agc Flat Glass North America, Inc. Hollow cathode ion source
IL256341A (en) * 2017-12-14 2018-01-31 Technion Res & Development Found Ltd The god engine has a narrow channel
EP3728844A1 (de) * 2017-12-19 2020-10-28 Aerojet Rocketdyne, Inc. Hallantrieb mit ringförmiger kathode
CN108894939A (zh) * 2018-04-23 2018-11-27 哈尔滨工业大学 大高径比霍尔推力器的磁场梯度调控方法
US11530690B2 (en) 2019-02-13 2022-12-20 Technion Research & Development Foundation Ltd. Ignition process for narrow channel hall thruster
CN110617186B (zh) * 2019-09-05 2020-10-09 上海空间推进研究所 一种放电室结构
FR3110641B1 (fr) 2020-05-19 2023-05-26 Inst Nat Polytechnique Toulouse Circuit magnétique de création d'un champ magnétique dans un canal annulaire principal d'ionisation et d'accélération de propulseur plasmique à effet Hall.

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2693770A1 (fr) * 1992-07-15 1994-01-21 Europ Propulsion Moteur à plasma à dérive fermée d'électrons.
US5763989A (en) * 1995-03-16 1998-06-09 Front Range Fakel, Inc. Closed drift ion source with improved magnetic field
US6215124B1 (en) * 1998-06-05 2001-04-10 Primex Aerospace Company Multistage ion accelerators with closed electron drift

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3935503A (en) * 1973-11-26 1976-01-27 The Kreidl Chemico Physical K.G. Particle accelerator
EP0463408A3 (en) * 1990-06-22 1992-07-08 Hauzer Techno Coating Europe Bv Plasma accelerator with closed electron drift
JPH09232097A (ja) * 1996-02-21 1997-09-05 Ulvac Japan Ltd 磁気中性線放電型プラズマ利用装置
WO1997037126A1 (en) * 1996-04-01 1997-10-09 International Scientific Products A hall effect plasma thruster
IL126415A0 (en) * 1996-04-01 1999-05-09 Int Scient Products A hall effect plasma accelerator
US6273022B1 (en) * 1998-03-14 2001-08-14 Applied Materials, Inc. Distributed inductively-coupled plasma source
US6331701B1 (en) * 1998-05-20 2001-12-18 Lee Chen RF-grounded sub-Debye neutralizer grid
IL139487A (en) * 1998-06-05 2004-02-19 Aerojet General Co Magnetic flux shaping in ion accelerators with closed electron drift
DE10130464B4 (de) * 2001-06-23 2010-09-16 Thales Electron Devices Gmbh Plasmabeschleuniger-Anordnung
JP3787079B2 (ja) * 2001-09-11 2006-06-21 株式会社日立製作所 プラズマ処理装置
US7327089B2 (en) * 2002-09-19 2008-02-05 Applied Process Technologies, Inc. Beam plasma source
US6903511B2 (en) * 2003-05-06 2005-06-07 Zond, Inc. Generation of uniformly-distributed plasma

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2693770A1 (fr) * 1992-07-15 1994-01-21 Europ Propulsion Moteur à plasma à dérive fermée d'électrons.
US5763989A (en) * 1995-03-16 1998-06-09 Front Range Fakel, Inc. Closed drift ion source with improved magnetic field
US6215124B1 (en) * 1998-06-05 2001-04-10 Primex Aerospace Company Multistage ion accelerators with closed electron drift

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN108953087A (zh) * 2018-08-07 2018-12-07 金群英 一种包括多个储气室的霍尔推进器
CN108953088A (zh) * 2018-08-07 2018-12-07 金群英 一种新型霍尔推力器
CN109026580A (zh) * 2018-08-07 2018-12-18 柳盼 一种霍尔推进器气体推进剂的输送方法

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US20050035731A1 (en) 2005-02-17
JP2005032728A (ja) 2005-02-03
RU2004120251A (ru) 2006-01-10
RU2344577C2 (ru) 2009-01-20
JP4916097B2 (ja) 2012-04-11
DE602004013401T2 (de) 2009-05-07
DE602004013401D1 (de) 2008-06-12
UA81616C2 (ru) 2008-01-25
FR2857555B1 (fr) 2005-10-14
US7180243B2 (en) 2007-02-20
FR2857555A1 (fr) 2005-01-14
EP1496727B1 (de) 2008-04-30

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