EP1476716A1 - Appareil interferometrique a basse coherence destine au balayage optique d'un objet - Google Patents

Appareil interferometrique a basse coherence destine au balayage optique d'un objet

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Publication number
EP1476716A1
EP1476716A1 EP03742908A EP03742908A EP1476716A1 EP 1476716 A1 EP1476716 A1 EP 1476716A1 EP 03742908 A EP03742908 A EP 03742908A EP 03742908 A EP03742908 A EP 03742908A EP 1476716 A1 EP1476716 A1 EP 1476716A1
Authority
EP
European Patent Office
Prior art keywords
light
scanning
selection device
path
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03742908A
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German (de)
English (en)
Inventor
Alexander KNÜTTEL
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Individual
Original Assignee
Individual
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Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of EP1476716A1 publication Critical patent/EP1476716A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B9/00—Measuring instruments characterised by the use of optical techniques
    • G01B9/02—Interferometers
    • G01B9/0209—Low-coherence interferometers
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/47—Scattering, i.e. diffuse reflection
    • G01N21/4795—Scattering, i.e. diffuse reflection spatially resolved investigating of object in scattering medium
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/20—Dispersive element for generating dispersion
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/35—Mechanical variable delay line
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2290/00—Aspects of interferometers not specifically covered by any group under G01B9/02
    • G01B2290/40—Non-mechanical variable delay line

Definitions

  • the invention relates to a low-coherence interferometric device for light-optical scanning of an object by detecting the position of light-emitting points which run at different distances from the device along a path in the scanning direction (ie in the direction of the detecting light beam; "z-direction") Scanning distance are localized.
  • This is referred to below as a low coherence distance scan (LCDS).
  • Such devices and the corresponding methods are used to examine different objects. They make it possible to determine or represent the distance to one or more scattering object points with maximum precision. Important areas of application are the automated measurement of object surfaces and the investigation of the optical scattering behavior within an object, the latter application being particularly important in the medical field (tissue diagnosis). In some applications, it is sufficient to examine the object one-dimensionally, that is to say only along a scanning path running in the beam direction. ("Longitudinalabtastung", English “longitudinal scan”). In the majority of applications, however, the aim is to obtain information about reflecting structures in a scanning plane or (three-dimensionally) about a volume section by means of an additional lateral scan. This requires a two- or three-dimensional scanning, which in the simplest case can be achieved by one- or two-dimensional lateral displacement of the interferometer. Such methods enable multidimensional image display and are usually referred to as OCT (Optical Coherence Tomography).
  • OCT Optical Coherence Tomography
  • the device contains an interferometer arrangement, which usually includes a beam splitter, a reference reflector and the detector in addition to the low-coherent light source.
  • the light paths between these elements form interferometer arms. The light from the light source reaches the beam splitter through a light source arm and is split there.
  • a first light component is radiated onto the object as a measuring light via an object arm in the scanning direction, while a second light component reaches the reference reflector as a reference light via a reflector arm. Both light components are reflected (the measuring light at light-emitting points (light reflecting sites) in the examination object, the reference light at the reference reflector) and returned to the beam splitter in the same light path (object arm or reference arm). There they are combined and fed to the detector as detection light via a detection arm.
  • the longitudinal scan position is varied in rapid succession. This is usually done by changing the relationship between the lengths of the reference light path and the measurement light path. This changes the position on the scanning path for which the prerequisite for the interference of the measuring light and the reference light (namely that the optical path length of the two light paths differ from one another by a maximum of the coherent length of the light source) is fulfilled.
  • the current scanning position is the position on the scanning path for which the optical length of the measuring light path matches the optical length of the reference light path (from beam splitting to beam combining) ("coherence condition").
  • the reference mirror is shifted in the direction of the reference beam, thereby shortening or lengthening the reference light path.
  • the invention relates specifically to applications in which extremely fast longitudinal scanning should be possible.
  • An important example is ongoing investigations of multi-layer films ("multi-films") for production monitoring or quality control.
  • the film runs past a measuring head at high speed and it must be continuously monitored whether a certain desired layer thickness (for example 100 ⁇ m) is maintained within predetermined limits.
  • a certain desired layer thickness for example 100 ⁇ m
  • Such applications place very high demands on the scanning speed. If one assumes, for example, that the diameter of the surface point ("spot") to which the examination relates is 8 ⁇ m and that the film web to be examined is transported at a speed of 10 m / sec, it should be every 0.8 ⁇ sec a measured value can be recorded. This results in a minimum sampling rate of 1.25 MHz. With 256 points per longitudinal scan, this results in a repetition rate of 4.9 kHz. Such high repetition rates cannot be achieved by moving a mirror.
  • KF Kwong et al "400-Hz echanical scanning optical delay line", Optics Letters 1993, 558-560 describes an optical delay path which can be arranged in the reference arm of an interferometer.
  • the variation in the optical path length is achieved by a combination of a dispersion grating and a mirror which can be pivoted within a narrow angular range.
  • a similar arrangement is also used in
  • a change in the optical path length can be achieved by piezoelectric stretching of optical fibers (piezoelectric fiber stretching).
  • piezoelectric fiber stretching requires a relatively large component and does not allow a sufficiently high repetition rate.
  • the energy requirement is also high.
  • the longitudinally displaceable mirror in the reference channel can be replaced by a rotating glass cube (see also US Patent 6,144,456).
  • a rotating glass cube see also US Patent 6,144,456.
  • the invention is based on the technical problem of providing an interferometric device which enables an extremely high repetition rate of the longitudinal scanning with reasonable effort.
  • a low-coherence interferometric device for light-optical scanning of an object by detecting the position of light-emitting points which are located along a scanning path running in a scanning direction with a short-coherence interferometer, which has a short-coherent light source, a reference reflector and one Detector, wherein the light emanating from the light source is divided into two light paths by means of a beam splitter, a first part of the light being radiated onto the object as measuring light and at a light-emitting point which is located at an adjustable scanning position on the scanning path, is reflected and a second part of the light is radiated as reference light onto the reference reflector and is reflected there, the adjustable scanning position on the scanning path is varied in order to carry out a scanning and the measuring light and the reference light on a street be brought together in such a way that the resulting detection light generates an interference signal when it strikes the detector, which information as a function of the strength of the reflection of the measurement light of the respectively
  • the scanning unit used for setting the scanning position is in the light path of the detection light after the combination of the reference light and the measurement light.
  • the change in the longitudinal scan position in the invention is not based on a change in the
  • a full longitudinal scan can be performed at a very high repetition rate (10-100 kHz). For many applications, particularly when monitoring moving objects, it is important that the sampling frequency per sampling point can be significantly higher (1 - 10 MHz).
  • the measuring head of the device can be miniaturized very well because the scanning unit is arranged in the detection light path, which can be connected via optical fibers to the other parts of the interferometer, which can be integrated into a compact measuring head.
  • the evaluation is not dependent on phase-sensitive information in the detection light path and is therefore very robust. The risk that misalignment can result in signal distortion is also relatively low.
  • the light intensity detected by the detector is high (in particular in comparison to DE 4309056) because no location-selective detection is necessary.
  • FIG. 1 is a schematic diagram of an LCDS device according to the invention
  • FIG. 2 shows a basic illustration of part of a first embodiment of a variable wavelength selection device
  • 3 shows a basic illustration of part of a second embodiment of a wavelength selection device
  • 4 shows a diagram to illustrate the analog and digital selection by means of a spatial light selection device
  • FIG. 6 shows a graphic representation of the k-profile of an interferometer when the measurement light is reflected at a light-emitting point in a defined scanning position
  • FIG. 7 shows a basic illustration of a first embodiment of a mechanically variable spatial light selection device
  • FIG. 8 shows a basic illustration of a second embodiment of a mechanically variable spatial light selection device
  • FIG. 8a shows an enlarged detail from FIG. 8,
  • FIG. 10 shows a basic illustration of part of a fourth embodiment of a wavelength selection device
  • 11 shows a basic illustration of part of a fifth embodiment of a wavelength selection device
  • 12 shows a basic illustration of part of a sixth embodiment of a wavelength selection device.
  • the LCDS device 1 shown in FIG. 1 consists of a measuring head 2, a scanning unit 3 and an electronics unit 4.
  • the illustration is not to scale and is highly schematic. Structural details that are insignificant for the function of the invention are not shown.
  • the measuring head 2 and the scanning unit 3 contain the optical components of a short-coherence interferometer 6.
  • the light from a light source 7 is coupled via a lens 8 into a single-mode optical fiber which forms the light source arm 9 of the interferometer 6.
  • the primary light transported in the light source arm 9 is evenly divided as a measuring light 16 into a sample arm 12 and as a reference light 22 into a reference arm 11 by means of an optical coupler 10 acting as a beam splitter, in which the light transport also takes place in optical fibers.
  • the measuring light 16 is coupled out into an objective 13, which consists of lenses 14 and 15.
  • the lens 15 refocuses the measuring light 16, which is emitted through a window 17 in the direction of an examination object 18.
  • a reflection takes place both in the sample arm 12 and in the reference arm 11, namely at a light-emitted point 20 of the measurement object 18 or at a reference reflector 21.
  • the reflected measurement light 16 and the reflected reference light 22 are again in the optical coupler 10 brought together and transported in a detection arm 23 as detection light 24 to the detector 25.
  • the construction of the interferometer 6 is essentially conventional and need not be explained in more detail.
  • another known design can also be used.
  • a free beam arrangement with a free beam beam splitter can be used instead of the fiber optic implementation with a fiber optic coupler 10.
  • the same optical element 10 is preferably used for the beam splitting and for the beam combining - as shown.
  • a special feature of the interferometer arrangement contained in the measuring head 2 is that neither the reference arm 11 nor the sample arm 12 contains means by which the lengths of both arms (more generally speaking, the lengths of the measuring light path and the reference light path) are changed relative to one another by the to vary the longitudinal scanning position along a scanning path 27 shown in dashed lines in FIG. 1 in the scanning direction symbolized by the arrow 28.
  • the variation of the scanning position required for performing the longitudinal scanning is rather effected by means of the scanning unit 3, which is arranged in the light path of the detection light 24 between the merging of the light by the optical coupler 10 and the detector 25.
  • the scanning unit 3 contains a variable wavelength selection device, denoted overall by 30, the essential parts of which can be seen more clearly in FIGS. 2 and 3 in two different embodiments.
  • it includes a spectral decomposition device 31 through which the Detection light 24 is spatially broken down depending on the light wavelength ⁇ .
  • the spectral decomposition device 31 is formed by a reflecting spectral grating 32, but other optical elements (transmission gratings, prisms) which are customary in spectral apparatuses can also be used.
  • the spectrally split light emitted by the spectral grating 32 is focused on a spatial light selection device 38 by means of an optical imaging system 36 consisting of two objectives 34 and 35.
  • the first objective 34 collimates the light emerging from the entrance pupil 37 of the wavelength selection device 30 onto the spectral decomposition device 31, while the second objective 35 focuses the light emerging from the spectral decomposition device 31 onto the light selection device 38.
  • the spatial light electron device 38 has light passage areas 39 and blocking areas 40 which alternate along a line which preferably runs straight in a spatial direction designated by x in the figures.
  • the line of the alternating light passage and blocking areas 39, 40 must run transversely to the optical axis A of the detection light 24 so that the light fanned out by the spectral decomposition device 31 depending on the wavelength strikes the alternating light passage and blocking areas along the line in such a way that it strikes is forwarded to the detector 25 with a correspondingly alternating wavelength-dependent intensity.
  • the detection light 24 also passes the light passage areas 39 less weakening compared to the restricted areas 40.
  • the light with the wavelength ⁇ 1 falling on the center of a light passage region 39 reaches the detector 25 almost without attenuation, while the light with the wavelength ⁇ 2 occurring in the center of a blocking region is blocked almost completely.
  • the light with the wavelengths ⁇ 3 that strikes between a light passage area and a blocking area is partially weakened.
  • the terms “light passage area” and “blocking area” are not to be understood as limiting in the sense of a transmission arrangement in which the light passes through an optical element. Rather, the alternately different attenuation can also be brought about by a reflective optical element.
  • FIG. 4 illustrates that both in the case of a transmitting spatial light selection device 42 according to FIG. 2 and in the case of a reflecting light selection device 43 shown in FIG. 3, the transmission T or reflection R of the element preferably varies analogously (in particular sinusoidally) depending on the position x , However, the digital selection shown in dashed lines in the figure is also possible. It is crucial that light preferably selectively reaches the detector 25 in accordance with the defined k-profile of the wavelength selection device 30. The difference between the minimum light attenuation of the wavelengths corresponding to the k-profile and the maximum light attenuation of the “blocked” wavelengths in between (“selection contrast”) should preferably be as large as possible. In the embodiments of the invention shown in FIGS.
  • variable selection of light wavelengths according to the k-profile of the wavelength selection device 30 is achieved in that, with constant angular dispersion of the wavelength-dependent decomposition of the light, the distance between the alternating light passage and blocking areas 39.40 of the spatial light selection device 38 is variable.
  • a spectral decomposition device 31 with variable angle dispersion in combination with a constant spatial light selection device 38. In principle, both elements could also be variable.
  • an electrically controllable LCD mask can be used as the transmitting variable spatial light selection device 38 (FIGS. 1 and 2).
  • the minimum distance between adjacent transmission areas is given by the double pixel distance of the mask. Larger distances can be set gradually as a multiple of this distance.
  • An approximately analog transmission curve can be achieved if the pixel distance is very much smaller than the shortest desired distance between the transmission areas.
  • DMD Digital Mirror Device
  • Such micromirror arrays are produced with very small pixel spacings, in particular for projection systems.
  • the zero point from which the distance ⁇ z is to be measured is defined by that point of the measuring light path for which the optical path lengths of the measuring light path and the reference light path are the same. It is referred to below as the point of coincidence of optical lengths. In the context of the invention, the point of coincidence has a double meaning:
  • the coincidence point is therefore the zero point of the longitudinal scanning according to the invention, at which the respective scanning position is at a distance ⁇ z from the coincidence point.
  • Such a spectrum can be observed experimentally if a reflector is arranged in the measuring light beam of an LCDS device according to FIG. 1 at a point on the scanning path 27 which is at a distance ⁇ z from the coincidence point of the interferometer and at the position of the spatial light selection device 38 the intensity curve in the x direction, ie the dependence of the intensity on the wavelength (with a position-sensitive or movable detector) along the line 55 is analyzed.
  • the k-profile of the interferometer in the k-space for the set value ⁇ z corresponds to this spectrum in the ⁇ -space.
  • Interference maxima of the k-profile of the interferometer are equidistant, provided that no dispersion differences between the measurement light path and the reference light path have to be taken into account.
  • a longitudinal scanning position at a distance ⁇ z from the coincidence point can accordingly be set by setting the variable wavelength selection device 30 to an equidistant sequence of the wave number k, the distances ⁇ k of which are calculated according to equation 1. Since the relationship between ⁇ and k is not linear (but reciprocal), the corresponding spectrum in ⁇ space is not strictly equidistant. When considering a relatively narrow-band spectrum, as shown in FIG. 6, the sequence of the selected ⁇ values is also approximately constant.
  • the k-profile of the wavelength selection device becomes that which is not equidistant when considering the dispersion T DE03 / 00288
  • Adjusted k-profile of the interferometer This can be done experimentally in a relatively simple manner by placing a reflector in succession in different scanning positions on the scanning path 27 provided and, for example as described above, measuring the resulting spectrum in the detection light path of the interferometer. In this way, a k-profile of the interferometer is obtained for each scanning position in the intended ⁇ z range.
  • the same k-profiles are also set in the wavelength selection device 30 for carrying out the scanning and varied throughout for carrying out a longitudinal scanning.
  • the selected light 24 strikes the light-sensitive surface of a detector 25.
  • the detector 25 is not location-selective, i.e. it converts the entire light intensity striking it into an electrical signal, which is forwarded to the electronics unit 4 and evaluated there.
  • a condenser lens 48 is arranged in front of the detector 25, which acts as a light-collecting element 49.
  • the intensity of the light detected by the detector 25 as a function of the setting of the k profile of the wavelength selection unit 30 is detected by means of an evaluation unit 50.
  • the corresponding value of the scanning position ⁇ z is assigned to each k-profile.
  • the intensity of the measured signal after subtracting a baseline corresponds to the strength the reflection at the respectively set scanning position.
  • the scanning is not based on a change in the ratio of the optical path lengths of the measurement light path (measured up to the point of coincidence) and the reference light path, this does not mean that the position of the reference reflector 21 in the reference light path must be fixed in terms of apparatus. Rather, for the purpose of adjusting the apparatus, it can be advantageous to make this position adjustable. However, the length of the reference light path remains constant during the scanning.
  • FIGS. 7 and 8 show two different embodiments of a mechanically variable light selection device 38, which have in common that strip-shaped light passage and blocking areas 39, 40 are provided on a rotatable disk 54 and 56, respectively, which run in such a way that they measured along a line 55 running across the surface of the pane
  • the light passage and blocking areas can be generated in any shape, for example, by photolithographic processing of metallized glass plates.
  • the light passage areas 39, 40 run straight and parallel.
  • the line 55 effective with respect to the wavelength selection i.e. the line on which the spectrum of the spectral separation device is mapped
  • the light passage and blocking areas run 39.40 at the edge of the disk 56 in sections towards each other over a length 1 such that their distance with respect to the line 55, onto which the spectrum is projected, decreases in each case during the rotation within the section 57.
  • a complete scanning process takes place during the passage of a section 57, so that a very high scanning speed is achieved. For example, with a rotation of 100 revolutions per second and 100 sections 57 (with replicated structures in each case) repetition rates of 10 kHz can be achieved. Since the line structure of the areas 39, 40 can be arbitrarily curved, it is possible to adapt the light selection to dispersion differences in the measurement and reference light path.
  • FIG. 9 Another example of this general principle is shown in FIG. 9.
  • the detection light 24 coming from the spectral decomposition device 31 is focused on the surface of an AOM (Acousto-Optical Modulator). Continuous sound waves are generated in the AOM. The resulting vibrations in the crystal (consisting of Te0 2 , for example) lead to spatial light selection taking place at an angle corresponding to first-order diffraction.
  • AOM Acoustic-Optical Modulator
  • the detector 25 and the condenser lens 48 are arranged at this diffraction angle to the optical axis of the light incident on the AOM 59.
  • the light passage and blocking areas 39, 40 of the spatial light selection device 38 formed by the AOM 59 are on the latter
  • the surface is not stationary, but runs continuously in the x direction. This does not affect the function of the invention.
  • FIG. 10 illustrates that the optical imaging required in the scanning unit 30 does not necessarily have to be effected by means of additional components.
  • a curved spectral grating 60 can be used as the spectral decomposition device 31, by means of which not only the spectral decomposition but also the collimation of the light emerging from the entrance pupil 37 onto the spatial light selection device 38 is effected.
  • FIG. 11 illustrates an alternative embodiment of the variable wavelength selection device 30, in which a spectral decomposition device 31 with variable spreading is used in combination with a constant spatial light selection device 38.
  • the detection light 24 is spectrally split by an AOBD (Acousto-Optic Beam Deflector) after it emerges from the entrance pupil 37 and collimates through the objective 34.
  • the AOBD forms a variable spectral grating, the grating spacing of which depends on the electrical frequency applied.
  • the resulting spectral components are focused on a constant spatial light selection device 38 by means of the second objective 35.
  • FIG. 12 shows a variable wavelength selection device 30, which differs fundamentally from the previously described embodiments in that it is not based on the combination of a spectral decomposition device with a spatial selection device.
  • the one emerging from the detection light guide 23 03 00288 is not based on the combination of a spectral decomposition device with a spatial selection device.
  • Detection light 24 is coupled into a light guide 64 with partially reflecting end faces, the refractive index of which depends on the electric field strength.
  • the light guide 64 is surrounded by two electrodes 65, 66, to which a variable voltage V can be applied in order to vary the electric field strength in the light guide 64. Due to the Fabry-Perot effect, the change in the refractive index in the light guide 64 associated with the change in the electric field strength results in a change in the optical light path, which in turn effects a light wave selection through interference.

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)

Abstract

L'invention concerne un appareil interférométrique à basse cohérence destiné au balayage optique d'un objet (18) par un interféromètre à basse cohérence (6). Cet appareil comprend une source lumineuse à basse cohérence (7), un réflecteur de référence (21) et un détecteur (25). La lumière sortant de la source lumineuse (7) est divisée en deux faisceaux (11,12), un premier faisceau étant dirigé sur l'objet comme faisceau lumineux de mesure (16) et un deuxième faisceau étant dirigé sur le réflecteur de référence (21) comme faisceau lumineux de référence (22). Après réflexion sur l'objet (18) et le réflecteur de référence (21), le faisceau lumineux de mesure (16) et le faisceau lumineux de référence (22) sont réunis au niveau d'un point de jonction (10). Pour un balayage rapide, on place un dispositif sélecteur de longueur d'onde (30) variable dans le trajet du faisceau lumineux de détection, entre le point de jonction (10) et le détecteur (25). Ce sélecteur de longueur d'onde permet de sélectionner le faisceau lumineux de détection (24) en fonction de sa longueur d'onde de telle manière que la lumière arrivant de façon sélective au détecteur (25) ait, de préférence, des longueurs d'ondes correspondant à une séquence de nombres d'ondes k réglés pour le balayage.
EP03742908A 2002-02-21 2003-02-01 Appareil interferometrique a basse coherence destine au balayage optique d'un objet Withdrawn EP1476716A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE10207186 2002-02-21
DE10207186A DE10207186C1 (de) 2002-02-21 2002-02-21 Niederkohärenz-interferometrisches Gerät zur lichtoptischen Abtastung eines Objektes
PCT/DE2003/000288 WO2003073041A1 (fr) 2002-02-21 2003-02-01 Appareil interferometrique a basse coherence destine au balayage optique d'un objet

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EP1476716A1 true EP1476716A1 (fr) 2004-11-17

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US (1) US7170610B2 (fr)
EP (1) EP1476716A1 (fr)
JP (1) JP4286667B2 (fr)
AU (1) AU2003215503B2 (fr)
CA (1) CA2476174C (fr)
DE (2) DE10207186C1 (fr)
WO (1) WO2003073041A1 (fr)

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WO2003073041A1 (fr) 2003-09-04
AU2003215503B2 (en) 2007-08-30
CA2476174C (fr) 2010-04-20
JP4286667B2 (ja) 2009-07-01
US20050190371A1 (en) 2005-09-01
DE10390785D2 (de) 2005-01-05
CA2476174A1 (fr) 2003-09-04
JP2005518535A (ja) 2005-06-23
US7170610B2 (en) 2007-01-30
AU2003215503A1 (en) 2003-09-09
DE10207186C1 (de) 2003-04-17

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