EP1466201A2 - Optischer mikrospiegelschalter und dessen herstellungsverfahren - Google Patents

Optischer mikrospiegelschalter und dessen herstellungsverfahren

Info

Publication number
EP1466201A2
EP1466201A2 EP03717342A EP03717342A EP1466201A2 EP 1466201 A2 EP1466201 A2 EP 1466201A2 EP 03717342 A EP03717342 A EP 03717342A EP 03717342 A EP03717342 A EP 03717342A EP 1466201 A2 EP1466201 A2 EP 1466201A2
Authority
EP
European Patent Office
Prior art keywords
optical
mirror
micro
layer
output
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03717342A
Other languages
English (en)
French (fr)
Inventor
Serge Valette
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Teem Photonics SA
Original Assignee
Teem Photonics SA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Teem Photonics SA filed Critical Teem Photonics SA
Publication of EP1466201A2 publication Critical patent/EP1466201A2/de
Withdrawn legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3514—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element moving along a line so as to translate into and out of the beam path, i.e. across the beam path
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3584—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details constructional details of an associated actuator having a MEMS construction, i.e. constructed using semiconductor technology such as etching
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/351—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements
    • G02B6/3512—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror
    • G02B6/3518—Optical coupling means having switching means involving stationary waveguides with moving interposed optical elements the optical element being reflective, e.g. mirror the reflective optical element being an intrinsic part of a MEMS device, i.e. fabricated together with the MEMS device
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3546—NxM switch, i.e. a regular array of switches elements of matrix type constellation
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/354—Switching arrangements, i.e. number of input/output ports and interconnection types
    • G02B6/3544—2D constellations, i.e. with switching elements and switched beams located in a plane
    • G02B6/3548—1xN switch, i.e. one input and a selectable single output of N possible outputs
    • G02B6/355—1x2 switch, i.e. one input and a selectable single output of two possible outputs
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3564—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details
    • G02B6/3568—Mechanical details of the actuation mechanism associated with the moving element or mounting mechanism details characterised by the actuating force
    • G02B6/357—Electrostatic force
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/26—Optical coupling means
    • G02B6/35—Optical coupling means having switching means
    • G02B6/3596—With planar waveguide arrangement, i.e. in a substrate, regardless if actuating mechanism is outside the substrate
EP03717342A 2002-01-18 2003-01-16 Optischer mikrospiegelschalter und dessen herstellungsverfahren Withdrawn EP1466201A2 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
FR0200598 2002-01-18
FR0200598A FR2835062B1 (fr) 2002-01-18 2002-01-18 Commutateur optique a micro-miroir et son procede de realisation
PCT/FR2003/000130 WO2003062889A2 (fr) 2002-01-18 2003-01-16 Commutateur optique a micro-miroir et son procédé de réalisation

Publications (1)

Publication Number Publication Date
EP1466201A2 true EP1466201A2 (de) 2004-10-13

Family

ID=27589513

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03717342A Withdrawn EP1466201A2 (de) 2002-01-18 2003-01-16 Optischer mikrospiegelschalter und dessen herstellungsverfahren

Country Status (5)

Country Link
US (1) US20050163417A1 (de)
EP (1) EP1466201A2 (de)
CA (1) CA2473080A1 (de)
FR (1) FR2835062B1 (de)
WO (1) WO2003062889A2 (de)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104345394A (zh) * 2013-07-25 2015-02-11 华为技术有限公司 光开关和光开关阵列

Family Cites Families (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3602653A1 (de) * 1986-01-29 1987-07-30 Siemens Ag Planares optisches koppelfeld
JPH08202510A (ja) * 1995-01-27 1996-08-09 Alps Electric Co Ltd 記録装置への記録データ送信方法
US5999303A (en) * 1997-03-24 1999-12-07 Seagate Technology Inc. Micro-machined mirror using tethered elements
US5867302A (en) * 1997-08-07 1999-02-02 Sandia Corporation Bistable microelectromechanical actuator
US6445840B1 (en) * 1999-05-28 2002-09-03 Omm, Inc. Micromachined optical switching devices
JP2001075026A (ja) * 1999-09-07 2001-03-23 Seikoh Giken Co Ltd 反射ミラー形光ファイバスイッチ
US6360036B1 (en) * 2000-01-14 2002-03-19 Corning Incorporated MEMS optical switch and method of manufacture
US6744173B2 (en) * 2000-03-24 2004-06-01 Analog Devices, Inc. Multi-layer, self-aligned vertical combdrive electrostatic actuators and fabrication methods
EP1164404A1 (de) * 2000-06-14 2001-12-19 Corning Incorporated Optischer Schalter mit Kopfanschlagdruckerbetätiger
WO2002005012A2 (en) * 2000-07-11 2002-01-17 Arizona State University Optical mems switching array with embedded beam-confining channels and method of operating same
TW531669B (en) * 2000-09-15 2003-05-11 Ibm Optical devices
AU2001292895A1 (en) * 2000-09-22 2002-04-02 Movaz Networks, Inc. Variable transmission multi-channel optical switch
US6632373B1 (en) * 2000-09-28 2003-10-14 Xerox Corporation Method for an optical switch on a substrate
US6542653B2 (en) * 2001-03-12 2003-04-01 Integrated Micromachines, Inc. Latching mechanism for optical switches
TW494251B (en) * 2001-10-18 2002-07-11 Ind Tech Res Inst Optical switch
US6850354B2 (en) * 2002-09-30 2005-02-01 Lucent Technologies Inc. Monolithic MEMS device for optical switches

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO03062889A2 *

Also Published As

Publication number Publication date
FR2835062B1 (fr) 2004-06-25
FR2835062A1 (fr) 2003-07-25
WO2003062889A2 (fr) 2003-07-31
CA2473080A1 (fr) 2003-07-31
US20050163417A1 (en) 2005-07-28
WO2003062889A3 (fr) 2004-03-11

Similar Documents

Publication Publication Date Title
EP0451047B1 (de) Vor Umwelteinflüssen geschützte integrierte optische Komponente und Verfahren zu ihrer Herstellung
EP0637764B1 (de) Herstellung einer optischen Kopplungsstruktur, die einen abgespaltenen optischen Wellenleiter und eine Halterung für optische Fasern integriert
FR3066615B1 (fr) Puce photonique a structure de collimation integree
EP1390794A2 (de) Herstellungsverfahren für einen optischen mikrospiegel und mikrospiegel oder matrixanordnung von mikrospiegeln
EP0722103A1 (de) Optische Vorrichtung für optomechanische Anwendung
WO1991013378A1 (fr) Procede de connexion entre une fibre optique et un microguide optique
FR2890758A1 (fr) Dispositif micro-optique
EP3404457A1 (de) Photonen-chip mit reflektierender struktur zur rückfaltung des lichtwegs
CA2394108A1 (fr) Procede de fabrication d'un composant optique microelectromecanique
EP0539298A1 (de) Integrierter elektro-optischer Modulator und dessen Herstellungsverfahren
EP1390793A2 (de) Kippbarer optischer mikrospiegel, matrixanordnung für solche mikrospiegel und zugehöriges herstellungsverfahren
FR2824188A1 (fr) Dispositif optique comportant une pluralite de cavites resonantes de longueurs differentes associees a differentes longueurs d'ondes
WO2002048777A2 (fr) Micro-actionneur optique, composant optique utilisant le micro-actionneur, et procede de realisation d'un micro-actionneur optique
EP1466201A2 (de) Optischer mikrospiegelschalter und dessen herstellungsverfahren
EP0547955A1 (de) Integriert-optischer Spiegel und Verfahren zu seiner Herstellung
EP0786840B1 (de) Herstellungsverfahren für eine um 45 Grad geneigte Kristallfläche auf einem InP Substrat und optische Vorrichtung
EP0587496A1 (de) Verfahren zur Vorbereitung einer Verbindung und Verfahren zum Verbinden durch Spleissen von einer integrierten optischen Vorrichtung mit einem optischen Kabel und Verbindungsuntereinheiten zur Ausführung des Verfahrens
FR2826459A1 (fr) Element de transfert d'une onde lumineuse entre des composants optiques et son procede de realisation
WO2005069057A1 (fr) Composants optiques et leur procede de realisation
WO2022003270A1 (fr) Procede de fabrication d'un composant thermo-optique
FR2807844A1 (fr) Commutateur optique a pieces mobiles et son procede de realisation, et dispositif de brassage optique utilisant le commutateur optique
WO2003029864A2 (fr) Support de positionnement et de maintien de fibres optiques et procede de realisation d'un tel support
FR2817629A1 (fr) Procede de fabrication d'un commutateur optique, commutateur optique obtenu par ledit procede, et matrice de tels commutateurs
EP1550894A1 (de) Optische Vorrichtung mit einem beweglichen optischen Element zur Interaktion mit einer optischer Referenzstruktur
FR2817050A1 (fr) Brasseur optique a voies guidees et procedes de realisation d'un tel brasseur

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

17P Request for examination filed

Effective date: 20040702

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT SE SI SK TR

17Q First examination report despatched

Effective date: 20050113

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20050524