EP1439563A3 - Heat treatment method and heat treatment furnace for plasma display panel substrate - Google Patents

Heat treatment method and heat treatment furnace for plasma display panel substrate Download PDF

Info

Publication number
EP1439563A3
EP1439563A3 EP04000787A EP04000787A EP1439563A3 EP 1439563 A3 EP1439563 A3 EP 1439563A3 EP 04000787 A EP04000787 A EP 04000787A EP 04000787 A EP04000787 A EP 04000787A EP 1439563 A3 EP1439563 A3 EP 1439563A3
Authority
EP
European Patent Office
Prior art keywords
heat treatment
heating
substrate
transporting
heating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04000787A
Other languages
German (de)
French (fr)
Other versions
EP1439563A2 (en
Inventor
Michiro Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of EP1439563A2 publication Critical patent/EP1439563A2/en
Publication of EP1439563A3 publication Critical patent/EP1439563A3/en
Withdrawn legal-status Critical Current

Links

Classifications

    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242Spacers between faceplate and backplate
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46Machines having sequentially arranged operating stations
    • H01J9/48Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Tunnel Furnaces (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Abstract

A heat treatment method for performing a uniform heat treatment on the whole substrate (22), by carrying out temperature control in such a manner that the temperatures of each of the respective heating means (14) provided in the heating chamber (25,26,27) are set at different values in the transporting direction of the object (22) to be thermally treated, and maintaining temperatures in the chamber (25,26,27) larger in deviation in temperature distribution than a target temperature distribution within the substrate (22) by using a heat treatment furnace. The furnace comprises a plurality of sectioned heating chambers (25,26,27); transporting means (20) for transporting the substrate (22) to the next heating chamber (25,26,27); and separated heating means (14) provided in each heating chamber (25,26,27) in the transporting direction; each heating means (14) being capable of separately controlling a temperature by an independent control system; and a radiant heating means for selectively heating the portion lower in atmosphere temperature.
EP04000787A 2003-01-16 2004-01-15 Heat treatment method and heat treatment furnace for plasma display panel substrate Withdrawn EP1439563A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003007793A JP2004218956A (en) 2003-01-16 2003-01-16 Method of heat-treating substrate and heat treatment furnace
JP2003007793 2003-01-16

Publications (2)

Publication Number Publication Date
EP1439563A2 EP1439563A2 (en) 2004-07-21
EP1439563A3 true EP1439563A3 (en) 2007-07-11

Family

ID=32588518

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000787A Withdrawn EP1439563A3 (en) 2003-01-16 2004-01-15 Heat treatment method and heat treatment furnace for plasma display panel substrate

Country Status (3)

Country Link
EP (1) EP1439563A3 (en)
JP (1) JP2004218956A (en)
CN (1) CN1517962A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100413020C (en) * 2004-10-04 2008-08-20 日本碍子株式会社 Continuous heat treatment furnace and heat treatment method
JP5216246B2 (en) * 2007-06-04 2013-06-19 光洋サーモシステム株式会社 Continuous firing furnace
KR101225785B1 (en) 2010-09-29 2013-01-23 현대제철 주식회사 Temperature control method of heating furnace
JP6240371B2 (en) 2011-09-05 2017-11-29 株式会社Ihi Heating furnace and continuous heating furnace
CN102721288B (en) * 2012-07-05 2014-12-31 河北新烨工程技术有限公司 High-efficiency intelligentized heating furnace control method
CN103543258B (en) * 2012-07-12 2015-09-02 艾博生物医药(杭州)有限公司 A kind of method of robotization flash baking sample reception pad
GB201317194D0 (en) * 2013-09-27 2013-11-13 Ebner Ind Ofenbau
CN104515383A (en) * 2013-09-30 2015-04-15 江苏高皓工业炉有限公司 Safe and stable bogie-hearth resistance furnace
CN104654819B (en) * 2014-05-23 2017-03-01 柳州钢铁股份有限公司 Larger gas store the temperature-controlled process of stove
CN104048503B (en) * 2014-06-30 2016-01-20 四川珩必鑫电子科技有限公司 A kind of circuit board tunnel oven
KR20170043936A (en) * 2015-10-14 2017-04-24 현대자동차주식회사 Blank heating device
CN107816888B (en) 2017-10-30 2023-06-20 京东方科技集团股份有限公司 Sintering device and sintering method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306322A (en) * 1989-06-29 1994-04-26 Sumitomo Electric Industries, Ltd. Process for thermal treatment of glass fiber preform
JPH1137660A (en) * 1997-07-17 1999-02-12 Chugai Ro Co Ltd Roller hearth type continuous sealing furnace
FR2767813A1 (en) * 1997-08-29 1999-03-05 Chugai Ro Kogyo Kaisha Ltd Method and apparatus for the treatment of a glass panel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306322A (en) * 1989-06-29 1994-04-26 Sumitomo Electric Industries, Ltd. Process for thermal treatment of glass fiber preform
JPH1137660A (en) * 1997-07-17 1999-02-12 Chugai Ro Co Ltd Roller hearth type continuous sealing furnace
FR2767813A1 (en) * 1997-08-29 1999-03-05 Chugai Ro Kogyo Kaisha Ltd Method and apparatus for the treatment of a glass panel

Also Published As

Publication number Publication date
CN1517962A (en) 2004-08-04
JP2004218956A (en) 2004-08-05
EP1439563A2 (en) 2004-07-21

Similar Documents

Publication Publication Date Title
EP1439563A3 (en) Heat treatment method and heat treatment furnace for plasma display panel substrate
CA2912922C (en) Transporting device for hot and thin-walled steel parts
US9308564B2 (en) Hot stamping system and method
WO2008008585A3 (en) Multizone heater for furnace
SE529299C2 (en) A method of adjusting the hardness of a sheet-like metal product
US20140045130A1 (en) Method for heating a shaped component for a subsequent press hardening operation and continuous furnace for regionally heating a shaped component preheated to a predetermined temperature to a higher temperature
TW200633567A (en) Method and apparatus for controlling spatial temperature distribution
RU2312821C2 (en) Method of heating of the glass panels for their hardening and the device using the given method
EP1681526A3 (en) Temperature control method, temperature control apparatus, heat treatment apparatus and program
JP2006518445A (en) Method and system for uniform heat treatment of materials
JP2008298404A (en) Continuous calcination furnace
IL135550A0 (en) Method and apparatus for temperature controlled vapor deposition on a substrate
JP3683166B2 (en) Substrate heat treatment method and continuous heat treatment furnace used therefor
JP3667270B2 (en) Substrate heat treatment method and furnace equipment therefor
CN102027581A (en) Optical cavity furnace for semiconductor wafer processing
KR20030057332A (en) Apparatus for uniform heat treatment
JP2008241076A (en) Heating method, intermittent feed-type tunnel furnace and batch furnace
CN104860524B (en) Suitable for the ceramic roller transmission speed adjusting method of annealing furnace
DE60019404D1 (en) ENDOTHERMIC HEAT TREATMENT OF SOLID BODIES ON TRUCKS IN A TUNNEL OVEN
JP2003077398A (en) Manufacturing method of plasma display panel and furnace equipment for same
WO2008042590A3 (en) Batch reaction chamber employing separate zones for radiant heating and resistive heating
EP1323995A3 (en) Multi-cell thermal processing unit
US5876198A (en) Sequential step belt furnace with individual concentric heating elements
JP2001012860A (en) Continuous heating furnace for large size glass substrate
JP2005291515A (en) Continuous baking furnace and continuous baking method

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE BG CH CY CZ DE DK EE ES FI FR GB GR HU IE IT LI LU MC NL PT RO SE SI SK TR

AX Request for extension of the european patent

Extension state: AL LT LV MK

RIC1 Information provided on ipc code assigned before grant

Ipc: H01J 9/24 20060101ALI20070606BHEP

Ipc: H01J 9/48 20060101AFI20040512BHEP

AKX Designation fees paid

Designated state(s): DE FR GB IT

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN

18D Application deemed to be withdrawn

Effective date: 20080112