EP1439563A3 - Heat treatment method and heat treatment furnace for plasma display panel substrate - Google Patents

Heat treatment method and heat treatment furnace for plasma display panel substrate Download PDF

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Publication number
EP1439563A3
EP1439563A3 EP04000787A EP04000787A EP1439563A3 EP 1439563 A3 EP1439563 A3 EP 1439563A3 EP 04000787 A EP04000787 A EP 04000787A EP 04000787 A EP04000787 A EP 04000787A EP 1439563 A3 EP1439563 A3 EP 1439563A3
Authority
EP
European Patent Office
Prior art keywords
heat treatment
heating
substrate
transporting
heating means
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP04000787A
Other languages
German (de)
French (fr)
Other versions
EP1439563A2 (en
Inventor
Michiro Aoki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NGK Insulators Ltd
Original Assignee
NGK Insulators Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NGK Insulators Ltd filed Critical NGK Insulators Ltd
Publication of EP1439563A2 publication Critical patent/EP1439563A2/en
Publication of EP1439563A3 publication Critical patent/EP1439563A3/en
Withdrawn legal-status Critical Current

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Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/24—Manufacture or joining of vessels, leading-in conductors or bases
    • H01J9/241—Manufacture or joining of vessels, leading-in conductors or bases the vessel being for a flat panel display
    • H01J9/242—Spacers between faceplate and backplate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00—Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/46—Machines having sequentially arranged operating stations
    • H01J9/48—Machines having sequentially arranged operating stations with automatic transfer of workpieces between operating stations

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Tunnel Furnaces (AREA)
  • Waste-Gas Treatment And Other Accessory Devices For Furnaces (AREA)

Abstract

A heat treatment method for performing a uniform heat treatment on the whole substrate (22), by carrying out temperature control in such a manner that the temperatures of each of the respective heating means (14) provided in the heating chamber (25,26,27) are set at different values in the transporting direction of the object (22) to be thermally treated, and maintaining temperatures in the chamber (25,26,27) larger in deviation in temperature distribution than a target temperature distribution within the substrate (22) by using a heat treatment furnace. The furnace comprises a plurality of sectioned heating chambers (25,26,27); transporting means (20) for transporting the substrate (22) to the next heating chamber (25,26,27); and separated heating means (14) provided in each heating chamber (25,26,27) in the transporting direction; each heating means (14) being capable of separately controlling a temperature by an independent control system; and a radiant heating means for selectively heating the portion lower in atmosphere temperature.
EP04000787A 2003-01-16 2004-01-15 Heat treatment method and heat treatment furnace for plasma display panel substrate Withdrawn EP1439563A3 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2003007793A JP2004218956A (en) 2003-01-16 2003-01-16 Method of heat-treating substrate and heat treatment furnace
JP2003007793 2003-01-16

Publications (2)

Publication Number Publication Date
EP1439563A2 EP1439563A2 (en) 2004-07-21
EP1439563A3 true EP1439563A3 (en) 2007-07-11

Family

ID=32588518

Family Applications (1)

Application Number Title Priority Date Filing Date
EP04000787A Withdrawn EP1439563A3 (en) 2003-01-16 2004-01-15 Heat treatment method and heat treatment furnace for plasma display panel substrate

Country Status (3)

Country Link
EP (1) EP1439563A3 (en)
JP (1) JP2004218956A (en)
CN (1) CN1517962A (en)

Families Citing this family (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100413020C (en) * 2004-10-04 2008-08-20 日本碍子株式会社 Continuous heat treatment furnace and heat treatment method
JP5216246B2 (en) * 2007-06-04 2013-06-19 光洋サーモシステム株式会社 Continuous firing furnace
KR101225785B1 (en) 2010-09-29 2013-01-23 현대제철 주식회사 Temperature control method of heating furnace
JP6240371B2 (en) 2011-09-05 2017-11-29 株式会社Ihi Heating furnace and continuous heating furnace
CN102721288B (en) * 2012-07-05 2014-12-31 河北新烨工程技术有限公司 High-efficiency intelligentized heating furnace control method
CN103543258B (en) * 2012-07-12 2015-09-02 艾博生物医药(杭州)有限公司 A kind of method of robotization flash baking sample reception pad
GB201317194D0 (en) * 2013-09-27 2013-11-13 Ebner Ind Ofenbau
CN104515383A (en) * 2013-09-30 2015-04-15 江苏高皓工业炉有限公司 Safe and stable bogie-hearth resistance furnace
CN104654819B (en) * 2014-05-23 2017-03-01 柳州钢铁股份有限公司 Larger gas store the temperature-controlled process of stove
CN104048503B (en) * 2014-06-30 2016-01-20 四川珩必鑫电子科技有限公司 A kind of circuit board tunnel oven
KR20170043936A (en) * 2015-10-14 2017-04-24 현대자동차주식회사 Blank heating device
CN107816888B (en) 2017-10-30 2023-06-20 京东方科技集团股份有限公司 Sintering device and sintering method thereof

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306322A (en) * 1989-06-29 1994-04-26 Sumitomo Electric Industries, Ltd. Process for thermal treatment of glass fiber preform
JPH1137660A (en) * 1997-07-17 1999-02-12 Chugai Ro Co Ltd Roller hearth type continuous sealing furnace
FR2767813A1 (en) * 1997-08-29 1999-03-05 Chugai Ro Kogyo Kaisha Ltd Method and apparatus for the treatment of a glass panel

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5306322A (en) * 1989-06-29 1994-04-26 Sumitomo Electric Industries, Ltd. Process for thermal treatment of glass fiber preform
JPH1137660A (en) * 1997-07-17 1999-02-12 Chugai Ro Co Ltd Roller hearth type continuous sealing furnace
FR2767813A1 (en) * 1997-08-29 1999-03-05 Chugai Ro Kogyo Kaisha Ltd Method and apparatus for the treatment of a glass panel

Also Published As

Publication number Publication date
CN1517962A (en) 2004-08-04
JP2004218956A (en) 2004-08-05
EP1439563A2 (en) 2004-07-21

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