EP1391647B1 - Soupape à voies multiples - Google Patents

Soupape à voies multiples Download PDF

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Publication number
EP1391647B1
EP1391647B1 EP03013664A EP03013664A EP1391647B1 EP 1391647 B1 EP1391647 B1 EP 1391647B1 EP 03013664 A EP03013664 A EP 03013664A EP 03013664 A EP03013664 A EP 03013664A EP 1391647 B1 EP1391647 B1 EP 1391647B1
Authority
EP
European Patent Office
Prior art keywords
valve
valve seat
bending actuator
multiway
seat body
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP03013664A
Other languages
German (de)
English (en)
Other versions
EP1391647A1 (fr
Inventor
Martin Maichl
Hannes Wirtl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Festo SE and Co KG
Original Assignee
Festo SE and Co KG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Festo SE and Co KG filed Critical Festo SE and Co KG
Publication of EP1391647A1 publication Critical patent/EP1391647A1/fr
Application granted granted Critical
Publication of EP1391647B1 publication Critical patent/EP1391647B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K11/00—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves
    • F16K11/02—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit
    • F16K11/04—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves
    • F16K11/044—Multiple-way valves, e.g. mixing valves; Pipe fittings incorporating such valves with all movable sealing faces moving as one unit comprising only lift valves with movable valve members positioned between valve seats
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F15—FLUID-PRESSURE ACTUATORS; HYDRAULICS OR PNEUMATICS IN GENERAL
    • F15B—SYSTEMS ACTING BY MEANS OF FLUIDS IN GENERAL; FLUID-PRESSURE ACTUATORS, e.g. SERVOMOTORS; DETAILS OF FLUID-PRESSURE SYSTEMS, NOT OTHERWISE PROVIDED FOR
    • F15B13/00—Details of servomotor systems ; Valves for servomotor systems
    • F15B13/02—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors
    • F15B13/04—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor
    • F15B13/042—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure
    • F15B13/043—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves
    • F15B13/0438—Fluid distribution or supply devices characterised by their adaptation to the control of servomotors for use with a single servomotor operated by fluid pressure with electrically-controlled pilot valves the pilot valves being of the nozzle-flapper type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16K—VALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00—Actuating devices; Operating means; Releasing devices
    • F16K31/004—Actuating devices; Operating means; Releasing devices actuated by piezoelectric means
    • F16K31/005—Piezoelectric benders
    • F16K31/006—Piezoelectric benders having a free end

Definitions

  • the invention relates to a multi-way valve, with a valve chamber, lead into the at least three valve channels, wherein two of the channel mouths on opposite long sides of a elongated, electrically activatable bending actuator provided and each framed by a valve seat.
  • a known from EP 1158182 A1 multi-way valve of this type is designed as a piezo valve and contains an elongated Piezo-bending actuator that works together with two swivel control paddles. In a middle position of the piezo bending actuator take the two control rockers each a closed position in which they rest against a valve seat and the associated Close channel mouth. By electrical activation can the piezo bending actuator in one or the other direction be deflected, so he on one or the other control rocker acts and these in one of the relevant valve seat lifted position pivoted. This way you can compactly constructed 3/3-way valve can be realized.
  • the two Valve seats each on a spring in the direction of the bending actuator preloaded movable valve seat body are taking and in a middle position of the bending actuator a closed position at the same time abut the bending actuator, so that the channel mouths are closed, the Bending actuator at a starting from the middle position Deflection in one direction or the other in the respective deflection direction upstream valve seat body while maintaining its closed position against the spring force can displace and at the same time from the valve seat of the other, hindered by a stop means on a successor Lift off the valve seat body and release its channel mouth can.
  • the two are from the bending actuator controlling valve seats on adjustable valve seat bodies and be in the middle position of the bending actuator by spring forces held in a voltage applied to the bending actuator closed position.
  • the bending actuator in one or the other direction displaced, he lifts from the valve seat of a valve seat body and thus releases its channel mouth.
  • the concerned Valve seat body against the spring force cooperating Slings prevent the spring-loaded Valve seat body undesirably follows the bending actuator.
  • a compliance ensures the valve seat body, so that the bending actuator the in the respective deflection direction upstream valve seat body displace when lifting from the other valve seat body can, in which respect the closed position is maintained.
  • the two controlled by the bending actuator valve channels optionally closed at the same time or, alternately, with a third valve channel opening into the valve chamber get connected.
  • This allows relatively easy the realization of a three-position valve, in particular a 3/3-way valve, with both a design as Switching valve as well as a configuration as a proportional valve can be made.
  • valve seat body could, for example, on the valve housing the multi-way valve in the deflection of the bending actuator be slidably mounted.
  • valve seat body extend along the bending actuator and in the Auslenkebene of the bending actuator are pivotable.
  • the valve seat body can in the middle position of the bending actuator about parallel to the bending actuator. With such an arrangement are very compact dimensions of the multi-way valve connected.
  • valve seat body via a solid state joint integral with the valve housing defining valve housing connected.
  • valve housing defining valve housing connected.
  • a production is for example by Injection molding very inexpensive possible.
  • an electrically activatable bending actuator is in particular a Piezo-bending actuator provided, in particular with a trimorph structure.
  • the spring preload can be a resilient Suspension of the valve seat body provided on the valve housing be. This is particularly easy with a one-piece Embodiment of the valve housing and the valve seat body realize. However, it is also possible to realize it the spring forces by separate spring means, on the one hand on the valve housing and on the other hand on the relevant valve seat body attack. Preferably, the spring means sit in the Valve chamber.
  • stop means in the direction of adjustment of the valve seat body are adjustable those taken in the middle position of the bending actuator Adjust the closed positions of the valve seat body very precisely, while at the same time being achieved that the one to be opened Channel muzzle having valve seat body practically at all no tracking movement and thus a relative large opening stroke of the bending actuator is possible.
  • the stop means resilient against an adjustable adjusting element, For example, an adjusting screw, biased. At the slings it may be projecting into the valve chamber Stop arms act.
  • an adjustable adjusting element For example, an adjusting screw, biased. At the slings it may be projecting into the valve chamber Stop arms act.
  • the stop means so arranged are that they are in the neighborhood of the valve seat with the associated valve seat body cooperate.
  • the designated in its entirety by reference numeral 1 multi-way valve includes a valve housing 2 with a preferred cuboid outer contour.
  • the valve housing 2 made of plastic material and has a multi-part construction. It has a first housing part 3a and a second housing part 3b each having a rectangular shape contoured bottom 4 and one of the wall projecting away circumferential side wall 5.
  • the two housing parts 3a, 3b are juxtaposed and under Waterproofing firmly connected. It is inside of the valve housing 2 defines a valve chamber 6.
  • the bending actuator 12 is electrically activated. In the of FIG 1 ground state he has a linear extension. According to the successful activation of the bending actuator 12 in a direction parallel to the plane Auslenkebene be deflected in one direction or the other. there he bends slightly.
  • Figures 2 and 3 show the bending actuator 12 in the direction of the first housing part 3a ( Figure 2) and in the direction of the second housing part 3b ( Figure 3) deflected position.
  • the bending reactor 12 is preferably designed as a piezo-bending actuator. It is a beam-like bending transducer, the front end portion 14 when creating a Voltage is deflected sideways across its longitudinal axis.
  • the piezo-bending actuator 12 is designed to start from deactivated ground state active to two opposite ones Directions can be deflected. He has to this purpose via two piezoelectrically active layers 14a, 14b, between which a piezoelectrically inactive, however However, electrically conductive intermediate layer 15 is arranged is.
  • an electrical circuit 16 can be connected to the two piezoelectrically active layers 14a, 14b selectively one Control voltage can be applied, which is a deformation of the which results in the deflection of the Bending actuator 12 results in one or the other direction.
  • the piezo-bending reactor 12 preferably has a trimorphic structure.
  • the bending actuator made of so-called memory metal, which at ambient temperature assumes a ground state from which it is deflected when heated by an electric current, and in which it returns, if it is after interruption of the Current flow cools.
  • a bimetal bending actuator would be conceivable. The list is not exhaustive.
  • the multi-way valve 1 of the embodiment is a 3/3-way valve designed, preferably as a proportional valve.
  • Valve housing 2 At the Valve housing 2 are provided outside three fluid ports 17, belonging to three valve channels 18, with their opposite Open the end into the valve chamber 6.
  • a fluid connection 17 In the preferred embodiment of the embodiment is a fluid connection 17, a feed port 17a, another fluid port 17 illustrates a consumer port 17b, and
  • the third fluid connection 17 is a discharge connection 17c.
  • the discharge port 17c one Venting port dar.
  • connections represent the associated valve channels 18 a feed channel 18a, a working channel 18b and a discharge channel 18c.
  • the working channel 18b opens into the valve chamber 6, that its canal mouth is constantly open and thus constantly communicates with the valve chamber 6.
  • this channel mouth is the end face of the front end area 13 of the bending reactor 12 at a distance opposite.
  • the channel mouths of the two other valve channels 18 - the one of the feed channel 18a as the first channel mouth 22, that of the relief channel 18c as a second channel mouth 23 - are in the deflection plane of the bending actuator 12 at the level of the front end portion 13 on opposite Long sides of the bending actuator 12 placed.
  • These first and second channel mouths 22, 23 are each of a first one or second valve seat 24, 25 bounded. Every valve seat 24, 25 is movable relative to the valve housing 2 provided first and second valve seat body and light sublime trained.
  • the two valve seat body 26, 27 extend in the embodiment on opposite longitudinal sides of the bending actuator 12 along this.
  • the bending actuator 12 When the bending actuator 12 is in his basic state, he takes the apparent from Figure 1 Middle position, wherein the two valve seat body 26, 27 extend approximately parallel to the bending actuator.
  • Each valve seat body 26, 27 is in the vicinity of the clamping point 7 integrally to form pivot joint portions 28 connected to the valve housing 2, such that each Valve seat body 26, 27 in one with the deflection plane of the Bending actuator 12 coincident pivot plane relative to Valve body 2 is pivotable.
  • the swivel joint area 28 is preferably formed by a solid-state joint 28 a, the a resilient suspension of the valve seat body 26, 27th causes.
  • the two valve seats 24, 25 are located at the free end portion of the respective valve seat body 26, 27, wherein they oriented sideways and facing the bending actuator 12.
  • the associated feed channel 18a and discharge channel 18c extends through the associated first and second valve seat body 26, 27, being at the front end portion is angled and at the rear end of the Swivel joint region 28 to the associated fluid connection 17 interspersed.
  • the first and second valve seat body 26, 27 are associated with first and second spring means 32, 33 which biases the relevant valve seat body 26, 27 with a biasing force F V resiliently in the direction of the bending actuator 12. If the bending actuator 12 is in the deactivated basic state, it assumes the center position resulting from FIG. 1, wherein the two valve seats 24, 25 rest on the facing outer surface of the bending reactor 12 by the spring bias of the associated valve seat bodies 26, 27. The associated channel openings 22, 23 are thereby closed by the bending reactor 12. The assumed position of the two valve seat body 26, 27 is referred to as the closed position.
  • the work connection 17b is connected to a consumer to be actuated, for example, to a actuated by fluid force Drive.
  • the bending actuator 12 in the manner resulting from Figure 2 electrically activated. He it curves to the side of the discharge channel 18c belonging second channel mouth 23 and lifts from the first valve seat 24 from, to the first channel mouth 22 of the feed channel 18a heard. That way the connection between the Feeding channel 18 a and the valve chamber 6 is released, and the Pressure medium can the indicated by arrow 34 flow path from the feed connection 17a via the valve chamber 6 to the working connection Take 17b.
  • the displacement of the second valve seat body 27 is under Overcoming the applied by the second spring means 33 Spring force.
  • the bending actuator 12 returns by appropriate control back to the middle position, followed by the second valve seat body 27 due to the spring loading after.
  • the first and second spring means 32, 33 are in the embodiment at least partially separate from the valve body 2 and the valve seat bodies 26, 27 are formed. They are attacking on the one hand on the valve housing 2 and on the other hand on acting first and second valve seat body 26, 27th at. The attack points on the first and second valve seat body 26, 27 are conveniently located at the front End region, in particular at least approximately at the same height with the two channel mouths 22, 23.
  • the spring means 32, 33 represent in particular compression spring means.
  • first and second spring means 32, 33 - and possibly also the other spring means 33a - is achieved that the two valve seats 24, 25 in the middle position of the bending actuator 12 with a certain contact pressure on the bending actuator 12th issue.
  • valve seat body 26, 27, the channel mouth 22, 23 is to be released the wegbedorfden bending actuator 12 does not follow.
  • the multiway valve 1 is therefore with first and second stop means 36, 37 equipped so with the valve seat bodies 26, 27 can work together to make them succeed of the bending actuator 12, when the bending actuator 12 in the direction is deflected to the other valve seat body.
  • the first and second stop means exist 36, 37 each consist of a valve housing fixed stop arm 38, which projects into the valve chamber 6 and on the bending actuator 12 facing side before a concerned Valve seat body 26, 27 provided stop surface 42nd protrudes.
  • the stop surfaces 42 are in the embodiment Projections of the relevant valve seat body 26, 27 formed, especially in the neighborhood of the assigned Valve seat 24, 25.
  • the first and second stop means 36, 37 are in the Direction of the adjustment of the valve seat body 26, 27th adjustable, which are indicated by the double arrows 43 should. This can be in the middle position of the bending actuator 12 existing degrees of preload, with which the valve seats 24, 25 are pressed against the bending actuator 12, after Set demand.
  • the production of the multi-way valve 1 is considerably simplified.
  • the two stop arms 28th by bias spring means 44 respectively in the direction of the associated Stop surface 42 anchored against a housing fixed Biasing element 45 biased.
  • the adjusting elements 45 are in the embodiment of adjusting screws formed, which screwed into the valve housing 2 are and in the valve chamber 6, to the stop arms 8, protrude.
  • the stop arms 38 extend from the front end portion 13 of the bending actuator 12 axially opposite side of the valve housing 2 ago in the valve chamber 6 inside. They preferably extend approximately parallel to the longitudinal axis of the undeformed bending actuator 12.
  • the biasing spring means 44 sit between the two stop arms 38 so that they are at the same time, too opposite Sides, apply.
  • the adjusting elements 45 protrude starting from the bottoms 4 from the side into the valve chamber 6 inside.
  • the multi-way valve 1 described by way of example is distinguished by a particularly simple manufacture and assembly out as well as by very compact dimensions. Also, the realized Design and storage of the valve seat body 26, 27 particularly recommended. However, also deviating configurations would be and bearings of the valve seat body 26, 27 in Frame of the invention possible. For example, the valve seat body could 26, 27 in the deflection plane of the bending actuator 12 be slidably mounted on the valve housing 2.
  • the multi-way valve 1 can be controlled by appropriate control the bending actuator 12 both as a three-position switching valve as well as a proportional valve.
  • the latter has the Advantage that the bending actuator 12 in addition to the center position and the two deflected illustrated by Figures 2 and 3 Positions also infinitely in intermediate positions is positionable to the flow cross section through the shared channel mouth 22, 23 variable pretend.

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Multiple-Way Valves (AREA)
  • Electrically Driven Valve-Operating Means (AREA)
  • Vehicle Body Suspensions (AREA)
  • Valve-Gear Or Valve Arrangements (AREA)
  • Fluid-Pressure Circuits (AREA)

Claims (15)

  1. Vanne à plusieurs voies avec une chambre de vanne (6) dans laquelle débouchent au moins trois canaux de vanne (18), deux des embouchures de canal (22, 23) étant prévues sur des côtés longitudinaux opposés d'un actionneur de flexion (12) allongé, activable électriquement, et étant entourées chacune par un siège de vanne (24, 25), caractérisée en ce que les deux sièges de vanne (24, 25) sont prévus chacun sur un corps de siège de vanne (26, 27) mobile, précontraint élastiquement en direction de l'actionneur de flexion (12), et s'appliquent, dans une position médiane de l'actionneur de flexion (12), simultanément contre l'actionneur de flexion (12) en prenant une position de fermeture, ce qui fait que les embouchures de canal (22, 23) sont fermées, l'actionneur de flexion (12) pouvant déplacer, à l'encontre de la force d'un ressort, lors d'une déviation s'effectuant à partir de la position médiane dans un sens ou dans l'autre, le corps de siège de vanne (26, 27) placé devant dans la direction de déviation respective, en conservant sa position de fermeture, et pouvant soulever en même temps du siège de vanne (25, 24) l'autre corps de siège de vanne (27, 26), que des moyens de butée (36, 37) empêchent de suivre, et pouvant dégager son embouchure de canal (23, 22).
  2. Vanne à plusieurs voies selon la revendication 1, caractérisée en ce que les corps de siège de vanne (26, 27) s'étendent le long de l'actionneur de flexion (12) et peuvent pivoter dans le plan de déviation de l'actionneur de flexion (12).
  3. Vanne à plusieurs voies selon la revendication 2, caractérisée en ce que les corps de siège de vanne (26, 27) s'étendent dans la position médiane de l'actionneur de flexion (12), approximativement parallèlement à l'actionneur de flexion (12).
  4. Vanne à plusieurs voies selon la revendication 2 ou 3, caractérisée en ce que l'actionneur de flexion (12) est serré à une extrémité solidairement avec le boítier, les zones d'articulation de pivotement (28) des corps de siège de vanne (26, 27) se trouvant à proximité du point de serrage (7) de l'actionneur de flexion (12).
  5. Vanne à plusieurs voies selon l'une des revendications 1 à 4, caractérisée en ce que les corps de siège de vanne (26, 27) sont reliés d'une seule pièce, par une articulation solide (28a) au boítier de vanne (2) définissant la chambre de vanne (6).
  6. Vanne à plusieurs voies selon l'une des revendications 1 à 5, caractérisée en ce que l'actionneur de flexion (12) est un piézo-actionneur de flexion.
  7. Vanne à plusieurs voies selon l'une des revendications 1 à 6, caractérisée en ce que les corps de siège de vanne (26, 27) sont suspendus de manière élastique au boítier de vanne (2).
  8. Vanne à plusieurs voies selon l'une des revendications 1 à 7, caractérisée en ce que pour produire la précontrainte de ressort il est prévu des moyens à ressort (33, 33a) agissant d'une part sur le boítier de vanne (2) et d'autre part sur le corps de siège de vanne (26, 27) concerné.
  9. Vanne à plusieurs voies selon la revendication 8, caractérisée en ce que les moyens à ressort (33) sont placés dans la chambre de vanne (6).
  10. Vanne à plusieurs voies selon l'une des revendications 1 à 9, caractérisée en ce que les moyens de butée (36, 37), prévus pour limiter la course de déplacement des corps de siège de vanne (26, 27), peuvent être ajustés dans la direction du mouvement de réglage des corps de siège de vanne (26, 27).
  11. Vanne à plusieurs voies selon la revendication 10, caractérisée en ce que les moyens de butée (36, 37) sont formés par des bras de butée (38) pénétrant à l'intérieur de la chambre de vanne (6).
  12. Vanne à plusieurs voies selon l'une des revendications 1 à 11, caractérisée en ce que les moyens de butée (36, 37) coopèrent, à proximité du siège de vanne (24, 25), avec le corps de siège de vanne (26, 27) associé.
  13. Vanne à plusieurs voies selon l'une des revendications 1 à 12, caractérisée par une réalisation en tant que vanne à trois positions.
  14. Vanne à plusieurs voies selon l'une des revendications 1 à 13, caractérisée par une forme de réalisation en tant que vanne à 3/3 voies.
  15. Vanne à plusieurs voies selon l'une des revendications 1 à 14, caractérisé par une forme de réalisation en tant que vanne proportionnelle.
EP03013664A 2002-08-17 2003-06-17 Soupape à voies multiples Expired - Lifetime EP1391647B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE20212649U DE20212649U1 (de) 2002-08-17 2002-08-17 Mehrwegeventil
DE20212649U 2002-08-17

Publications (2)

Publication Number Publication Date
EP1391647A1 EP1391647A1 (fr) 2004-02-25
EP1391647B1 true EP1391647B1 (fr) 2005-10-26

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EP03013664A Expired - Lifetime EP1391647B1 (fr) 2002-08-17 2003-06-17 Soupape à voies multiples

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EP (1) EP1391647B1 (fr)
AT (1) ATE308000T1 (fr)
DE (2) DE20212649U1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7040349B2 (en) 2002-03-27 2006-05-09 Viking Technologies, L.C. Piezo-electric actuated multi-valve manifold
US7021191B2 (en) 2003-01-24 2006-04-04 Viking Technologies, L.C. Accurate fluid operated cylinder positioning system
GB2415483B (en) * 2003-04-04 2006-08-23 Viking Technologies Lc Piezo-electric actuated multi-valve manifold
DE102020200172B4 (de) * 2020-01-09 2023-04-27 Festo Se & Co. Kg Ventilanordnung

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69124157T2 (de) * 1990-07-19 1997-08-21 Fisher Controls Int Mechanische Biegung zur Bewegungsvergrösserung und mit derselben ausgerüsteter Umformer
DE19961736A1 (de) * 1999-12-09 2001-06-21 Drei S Werk Praez Swerkzeuge G Piezoelektrisch betätigbares Ventil
WO2002041413A1 (fr) * 2000-11-20 2002-05-23 Festo Ag & Co Unite de transducteur a flexion piezo-electrique et soupape piezo-electrique equipee de celle-ci
DE10047705A1 (de) * 2000-09-25 2002-05-29 Festo Ag & Co Mikroventil

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1226843B (de) * 1956-08-25 1966-10-13 Elliott Brothers London Ltd Ventilaggregat fuer hydraulische Anlagen
FR2597630B1 (fr) * 1986-04-18 1988-06-17 Carre Maurice Dispositif de distribution d'un produit suivant des quantites dosees predeterminees
US6202669B1 (en) * 1998-12-29 2001-03-20 Honeywell International Inc. Self-aligning valve
EP1158182B1 (fr) 2000-05-25 2004-12-08 FESTO AG & Co Agencement de soupape

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE69124157T2 (de) * 1990-07-19 1997-08-21 Fisher Controls Int Mechanische Biegung zur Bewegungsvergrösserung und mit derselben ausgerüsteter Umformer
DE19961736A1 (de) * 1999-12-09 2001-06-21 Drei S Werk Praez Swerkzeuge G Piezoelektrisch betätigbares Ventil
DE10047705A1 (de) * 2000-09-25 2002-05-29 Festo Ag & Co Mikroventil
WO2002041413A1 (fr) * 2000-11-20 2002-05-23 Festo Ag & Co Unite de transducteur a flexion piezo-electrique et soupape piezo-electrique equipee de celle-ci

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Publication number Publication date
DE20212649U1 (de) 2002-10-10
DE50301465D1 (de) 2005-12-01
EP1391647A1 (fr) 2004-02-25
ATE308000T1 (de) 2005-11-15

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