EP1378669A1 - Procédé et dispositif minimisant le bruit d'un bloc soufflerie-filtre - Google Patents

Procédé et dispositif minimisant le bruit d'un bloc soufflerie-filtre Download PDF

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Publication number
EP1378669A1
EP1378669A1 EP03077576A EP03077576A EP1378669A1 EP 1378669 A1 EP1378669 A1 EP 1378669A1 EP 03077576 A EP03077576 A EP 03077576A EP 03077576 A EP03077576 A EP 03077576A EP 1378669 A1 EP1378669 A1 EP 1378669A1
Authority
EP
European Patent Office
Prior art keywords
filter unit
fan filter
fan
base plate
airflow
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP03077576A
Other languages
German (de)
English (en)
Inventor
Zong Tang Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyodo-Allied Industries Ltd
Original Assignee
Kyodo-Allied Industries Pte Ltd
Kyodo-Allied Industries Ltd
Kyodo Allied Industries Pte Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyodo-Allied Industries Pte Ltd, Kyodo-Allied Industries Ltd, Kyodo Allied Industries Pte Ltd filed Critical Kyodo-Allied Industries Pte Ltd
Priority claimed from PCT/SG1997/000040 external-priority patent/WO1999011984A1/fr
Publication of EP1378669A1 publication Critical patent/EP1378669A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D17/00—Radial-flow pumps, e.g. centrifugal pumps; Helico-centrifugal pumps
    • F04D17/08—Centrifugal pumps
    • F04D17/16—Centrifugal pumps for displacing without appreciable compression
    • F04D17/165—Axial entry and discharge
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/42—Casings; Connections of working fluid for radial or helico-centrifugal pumps
    • F04D29/4206—Casings; Connections of working fluid for radial or helico-centrifugal pumps especially adapted for elastic fluid pumps
    • F04D29/4226—Fan casings
    • F04D29/4246—Fan casings comprising more than one outlet
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/66—Combating cavitation, whirls, noise, vibration or the like; Balancing
    • F04D29/661—Combating cavitation, whirls, noise, vibration or the like; Balancing especially adapted for elastic fluid pumps
    • F04D29/663—Sound attenuation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F13/00—Details common to, or for air-conditioning, air-humidification, ventilation or use of air currents for screening
    • F24F13/24—Means for preventing or suppressing noise
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F24—HEATING; RANGES; VENTILATING
    • F24F—AIR-CONDITIONING; AIR-HUMIDIFICATION; VENTILATION; USE OF AIR CURRENTS FOR SCREENING
    • F24F7/00—Ventilation
    • F24F7/007—Ventilation with forced flow

Definitions

  • the present invention relates to a method and apparatus for minimising noise from air moving devices.
  • the present invention pertains to a system for reducing noise from a fan filter unit in clean room facility.
  • the problem associated with the particle contents in clean room facility is exacerbated in confined space or enclosures such as a multi-story wafer fabrication plant.
  • the present invention envisages the height of the ceiling to be less than three meters. Because of the low height clearance, the noise from fan filter units is particularly pronounced.
  • the present invention is a system of geometric guides and baffles for directing and diffusing the external air drawn from a fan blower before distributing the flow evenly to the outlet a fan filter unit. This arrangement not only reduces the turbulence within a fan filter unit but also maintains the particle count of air drawn through the same system. Furthermore, the present invention is implemented in dimensions substantially similar to that of the fan blower. As such, the present invention minimises noise of a fan filter unit even in confined clean room facility.
  • a method and apparatus for minimising noise from a fan filter unit is described.
  • numerous specific details are set forth such as guides and baffles, etc. in order to provide a thorough understanding of the present invention.
  • well-known parts such as the motors for the fan blower and ducts connected to the fan filter units are not shown in order not to obscure the present invention.
  • FIG. 1 is a exploded, right side, perspective elevational view of the present invention being integrated as part of a fan filter unit 10 (filter not shown).
  • the fan filter unit comprises a fan blower 12 disposed within a base plate 14, a top housing 16 and side housings 22 respectively.
  • the fan blower is supported in the base plate by a mounting 20 on the underside of the base plate.
  • a motor disposed underneath the fan blower 12 for providing rotational movement for the fan blower.
  • the fan filter unit draws air externally from an air inlet 18 and discharges it via outlet opening 19 as shown in FIG. 2.
  • a filter 32 for removing large particles or contaminants.
  • the fan filter unit is effectively is circulating or ventilating air in clean room facility, the noise generated by such unit is annoying.
  • insulating materials such as sponge, PVC foam, or fiber glass.
  • the fan filter unit becomes a source of contaminant. In the process, the output from clean room facility such as wafer die, compact discs or disk drives is contaminated.
  • the present invention is a method and apparatus for placing geometric guides and baffles in strategic locations along the path of airflow within the fan filter unit to minimise noise from it without contaminating the air flowing through it.
  • the present invention comprises at least a set of S shaped guides 24 disposed circumferentially the fan blower, another set of porous baffles 26 and curved baffles 28 for diffusing and directing air from the S shaped guides 24 and finally a V shaped baffle 30 below the fan blower for distributing air evenly to the filter 30.
  • FIG. 3 is a top, plan elevational view of section A-A in FIG. 2 highlighting the S shaped guide and curved baffle of the present invention.
  • the S shaped guides 24 are contoured to receive the discharged air from the fan blower 12 (shown in dotted circle) and guide the flow of air with minimum amount of turbulence towards a set of perforated baffles 26.
  • the S shaped guides are made of metallic material whose spring back effect enable the installer to install it easily by inserting it between a plurality of clips disposed on the base plate 14.
  • the perforated baffles 26 can be a sheet of metal with a matrix of holes. In the preferred embodiment of the present invention, the holes are 3.3 mm in diameter with about 50% spacing.
  • the perforated baffles disposed at angles of about 45 degree to diffused the air from the S shaped guides 24. Adjacent and below the lower edge of the perforated baffles 26 are disposed the curved baffles 28 for redirecting the flow of air below the base plate. Although the curved baffles 28 can take on a straight leading edge, the present invention recommends straight but sloping leading edges 35 as illustrated in FIGS 2 and 3. Note also in FIG. 3 that the placement of S shaped guides 24, the perforated baffles 26, and the curved baffles 28 are symmetrical to each other with reference to a rotational axis of 180 degrees centered at the fan blower. Last but not the least is the V shaped baffle 30 disposed below the fan blower mounting for distributing the air flow evenly before discharging it through the outlet opening 19 of the fan filter unit 10.
  • FIG. 5 is a chart comparing the average velocity of airflow of a fan filter unit with and without the present invention over a range of fan blower settings (measured in Hz). The average velocity of airflow is measured at fifteen different points in the fan filter unit and illustrated in FIG. 4 respectively. Referring to FIG. 5, one can appreciate that the average velocity of a fan filter unit with the present invention is higher and more even than that without the present invention. It is evident that pressure loss of a fan filter unit having the present invention is less than that without the present invention. As such, considerable energy saving over time can be achieved.
  • FIG. 6 is a chart comparing the noise level from a fan filter unit with and without the present invention and is measured at a location one meter directly below the outlet of the unit. Measured one meter below a fan filter unit, the present invention allows the fan filter unit to operate with far less noise than one without the present invention.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Filtering Of Dispersed Particles In Gases (AREA)
  • Ventilation (AREA)
  • Air-Conditioning Room Units, And Self-Contained Units In General (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
EP03077576A 1997-09-03 1997-09-03 Procédé et dispositif minimisant le bruit d'un bloc soufflerie-filtre Withdrawn EP1378669A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
PCT/SG1997/000040 WO1999011984A1 (fr) 1997-09-03 1997-09-03 Procede et appareil pour minimiser le bruit provenant d'une unite de filtrage a soufflerie
EP97945156A EP1019659B1 (fr) 1997-09-03 1997-09-03 Procede et appareil pour minimiser le bruit provenant d'une unite de filtrage a soufflerie

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
EP97945156A Division EP1019659B1 (fr) 1997-09-03 1997-09-03 Procede et appareil pour minimiser le bruit provenant d'une unite de filtrage a soufflerie

Publications (1)

Publication Number Publication Date
EP1378669A1 true EP1378669A1 (fr) 2004-01-07

Family

ID=20429567

Family Applications (1)

Application Number Title Priority Date Filing Date
EP03077576A Withdrawn EP1378669A1 (fr) 1997-09-03 1997-09-03 Procédé et dispositif minimisant le bruit d'un bloc soufflerie-filtre

Country Status (7)

Country Link
EP (1) EP1378669A1 (fr)
CN (1) CN100436836C (fr)
CA (1) CA2302177A1 (fr)
DE (1) DE69727322T2 (fr)
HK (1) HK1019629A1 (fr)
MY (1) MY111326A (fr)
TW (1) TW375760B (fr)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073563A1 (fr) * 2004-01-30 2005-08-11 Farmer Controls Plc Ventilateur electrique
WO2015100094A1 (fr) * 2013-12-23 2015-07-02 3M Innovative Properties Company Amortisseur de bruit curviligne
CN115111198A (zh) * 2022-06-24 2022-09-27 大连海事大学 一种多翼离心风机的陷窝结构及多翼离心风机

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI487558B (zh) * 2012-08-03 2015-06-11 Ping Fa Hung Foam-type snow machine improved
CN107795514B (zh) * 2017-11-29 2024-03-26 莱克电气股份有限公司 一种具有叶轮结构的离心风机
GB201808912D0 (en) * 2018-05-31 2018-07-18 Micromass Ltd Bench-top time of flight mass spectrometer
GB201808949D0 (en) 2018-05-31 2018-07-18 Micromass Ltd Bench-top time of flight mass spectrometer
GB201808932D0 (en) 2018-05-31 2018-07-18 Micromass Ltd Bench-top time of flight mass spectrometer
GB201808894D0 (en) 2018-05-31 2018-07-18 Micromass Ltd Mass spectrometer
CN108386889B (zh) * 2018-05-31 2024-03-08 广东美的厨房电器制造有限公司 吸油烟机
US11367607B2 (en) 2018-05-31 2022-06-21 Micromass Uk Limited Mass spectrometer
CN113685373B (zh) * 2020-05-19 2022-11-01 宁波方太厨具有限公司 一种风机系统的进风口圈的选定方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3065684A (en) * 1958-05-22 1962-11-27 Cortland N O'day Air distributor
US4023472A (en) * 1974-06-04 1977-05-17 Ciba-Geigy Corporation Apparatus for producing a laminar flow
US4560395A (en) * 1984-04-17 1985-12-24 Environmental Air Control, Inc. Compact blower and filter assemblies for use in clean air environments
US4768424A (en) * 1984-10-23 1988-09-06 Wilhelm Gebhardt And Co. Gmbh Roof ventilator

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1019659B1 (fr) * 1997-09-03 2004-01-21 Kyodo-Allied Industries Limited Procede et appareil pour minimiser le bruit provenant d'une unite de filtrage a soufflerie

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3065684A (en) * 1958-05-22 1962-11-27 Cortland N O'day Air distributor
US4023472A (en) * 1974-06-04 1977-05-17 Ciba-Geigy Corporation Apparatus for producing a laminar flow
US4560395A (en) * 1984-04-17 1985-12-24 Environmental Air Control, Inc. Compact blower and filter assemblies for use in clean air environments
US4768424A (en) * 1984-10-23 1988-09-06 Wilhelm Gebhardt And Co. Gmbh Roof ventilator

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2005073563A1 (fr) * 2004-01-30 2005-08-11 Farmer Controls Plc Ventilateur electrique
GB2426288A (en) * 2004-01-30 2006-11-22 Farmer Controls Plc Electric fan
GB2426288B (en) * 2004-01-30 2008-07-09 Farmer Controls Plc Electric fan
WO2015100094A1 (fr) * 2013-12-23 2015-07-02 3M Innovative Properties Company Amortisseur de bruit curviligne
US9752794B2 (en) 2013-12-23 2017-09-05 3M Innovative Properties Company Curvilinear sound absorber
CN115111198A (zh) * 2022-06-24 2022-09-27 大连海事大学 一种多翼离心风机的陷窝结构及多翼离心风机
CN115111198B (zh) * 2022-06-24 2024-05-07 大连海事大学 一种多翼离心风机的陷窝结构及多翼离心风机

Also Published As

Publication number Publication date
HK1019629A1 (en) 2000-02-18
CA2302177A1 (fr) 1999-03-11
CN100436836C (zh) 2008-11-26
CN1447031A (zh) 2003-10-08
DE69727322D1 (de) 2004-02-26
DE69727322T2 (de) 2004-11-25
TW375760B (en) 1999-12-01
MY111326A (en) 1999-11-30

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