EP1375149A4 - Microinjector having drive circuit and method for making the same - Google Patents

Microinjector having drive circuit and method for making the same

Info

Publication number
EP1375149A4
EP1375149A4 EP01983414A EP01983414A EP1375149A4 EP 1375149 A4 EP1375149 A4 EP 1375149A4 EP 01983414 A EP01983414 A EP 01983414A EP 01983414 A EP01983414 A EP 01983414A EP 1375149 A4 EP1375149 A4 EP 1375149A4
Authority
EP
European Patent Office
Prior art keywords
drive circuit
bubble generating
microinjector
fluid
generating member
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01983414A
Other languages
German (de)
French (fr)
Other versions
EP1375149B1 (en
EP1375149A1 (en
Inventor
Chihching Chen
Tsungwei Huang
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
BenQ Corp
Original Assignee
BenQ Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by BenQ Corp filed Critical BenQ Corp
Publication of EP1375149A1 publication Critical patent/EP1375149A1/en
Publication of EP1375149A4 publication Critical patent/EP1375149A4/en
Application granted granted Critical
Publication of EP1375149B1 publication Critical patent/EP1375149B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14016—Structure of bubble jet print heads
    • B41J2/14088—Structure of heating means
    • B41J2/14112—Resistive element
    • B41J2/14129—Layer structure
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1626—Manufacturing processes etching
    • B41J2/1629—Manufacturing processes etching wet etching
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1637—Manufacturing processes molding
    • B41J2/1639—Manufacturing processes molding sacrificial molding
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/1437—Back shooter
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2202/00—Embodiments of or processes related to ink-jet or thermal heads
    • B41J2202/01—Embodiments of or processes related to ink-jet heads
    • B41J2202/13—Heads having an integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
  • Reciprocating Pumps (AREA)
  • Apparatus Associated With Microorganisms And Enzymes (AREA)
  • Micro-Organisms Or Cultivation Processes Thereof (AREA)

Abstract

The present invention discloses a microinjector having drive circuit and method for making the same. The microinjector utilizes bubble as virtual valve to eject fluid medium, including manifold, multiple fluid chambers, multiple pairs of the first bubble generating member and the second bubble generating member, multiple nozzles and drive circuit, wherein, the drive circuit controls multiple pairs of the first bubble generating member and the second bubble generating member simultaneously to eject the fluid which in the corresponding fluid chamber from the corresponding nozzle, thereby attaining the effect for ejecting fluid; in addition, due to integrating the drive circuit with the bubble generating members in the same substrate, not only reduced the number of making steps, but also obtained the structure of less number of circuit unit and interconnecting lines. <IMAGE>
EP01983414A 2001-04-03 2001-08-20 Microinjector having drive circuit and method for making the same Expired - Lifetime EP1375149B1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
CN01112357 2001-04-03
CNB011123575A CN1165428C (en) 2001-04-03 2001-04-03 Mini projection head with driving circuit and its making method
PCT/CN2001/001230 WO2002081224A1 (en) 2001-04-03 2001-08-20 Microinjector having drive circuit and method for making the same

Publications (3)

Publication Number Publication Date
EP1375149A1 EP1375149A1 (en) 2004-01-02
EP1375149A4 true EP1375149A4 (en) 2005-05-04
EP1375149B1 EP1375149B1 (en) 2007-10-03

Family

ID=4659270

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01983414A Expired - Lifetime EP1375149B1 (en) 2001-04-03 2001-08-20 Microinjector having drive circuit and method for making the same

Country Status (5)

Country Link
EP (1) EP1375149B1 (en)
CN (1) CN1165428C (en)
AT (1) ATE374693T1 (en)
DE (1) DE60130806T2 (en)
WO (1) WO2002081224A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1317736C (en) * 2003-08-14 2007-05-23 明基电通股份有限公司 Method for preparing monolithic fluid spraying appratus
CN102858512B (en) * 2010-02-11 2016-12-07 谭永杰 A kind of system and method for manufacturing microstructure
TWI763992B (en) * 2019-05-06 2022-05-11 萬潤科技股份有限公司 Liquid material extrusion device

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4695853A (en) * 1986-12-12 1987-09-22 Hewlett-Packard Company Thin film vertical resistor devices for a thermal ink jet printhead and methods of manufacture
EP0317171A3 (en) * 1987-11-13 1990-07-18 Hewlett-Packard Company Integral thin film injection system for thermal ink jet heads and methods of operation
US4947192A (en) * 1988-03-07 1990-08-07 Xerox Corporation Monolithic silicon integrated circuit chip for a thermal ink jet printer
EP0378439B1 (en) * 1989-01-13 1995-01-04 Canon Kabushiki Kaisha Recording head
US5122812A (en) * 1991-01-03 1992-06-16 Hewlett-Packard Company Thermal inkjet printhead having driver circuitry thereon and method for making the same
CN1144680C (en) * 1998-01-23 2004-04-07 明碁电通股份有限公司 Apparatus and method for using bubble as virtual valve in microinjector to eject fluid

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
No further relevant documents disclosed *

Also Published As

Publication number Publication date
DE60130806T2 (en) 2008-07-03
DE60130806D1 (en) 2007-11-15
CN1377734A (en) 2002-11-06
CN1165428C (en) 2004-09-08
WO2002081224A1 (en) 2002-10-17
ATE374693T1 (en) 2007-10-15
EP1375149B1 (en) 2007-10-03
EP1375149A1 (en) 2004-01-02

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