EP1372186A3 - Apparatus for liquid treatment of wafers - Google Patents
Apparatus for liquid treatment of wafers Download PDFInfo
- Publication number
- EP1372186A3 EP1372186A3 EP03018179A EP03018179A EP1372186A3 EP 1372186 A3 EP1372186 A3 EP 1372186A3 EP 03018179 A EP03018179 A EP 03018179A EP 03018179 A EP03018179 A EP 03018179A EP 1372186 A3 EP1372186 A3 EP 1372186A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- mask
- disc
- wafers
- liquid treatment
- liquid
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000007788 liquid Substances 0.000 title abstract 2
- 235000012431 wafers Nutrition 0.000 title 1
- 239000012530 fluid Substances 0.000 abstract 1
- 125000006850 spacer group Chemical group 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/302—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to change their surface-physical characteristics or shape, e.g. etching, polishing, cutting
- H01L21/304—Mechanical treatment, e.g. grinding, polishing, cutting
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67063—Apparatus for fluid treatment for etching
- H01L21/67075—Apparatus for fluid treatment for etching for wet etching
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67011—Apparatus for manufacture or treatment
- H01L21/67017—Apparatus for fluid treatment
- H01L21/67028—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like
- H01L21/6704—Apparatus for fluid treatment for cleaning followed by drying, rinsing, stripping, blasting or the like for wet cleaning or washing
Landscapes
- Engineering & Computer Science (AREA)
- Microelectronics & Electronic Packaging (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Physics & Mathematics (AREA)
- Power Engineering (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- Weting (AREA)
- Cleaning Or Drying Semiconductors (AREA)
- Coating Apparatus (AREA)
- ing And Chemical Polishing (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Chemically Coating (AREA)
- Photographic Processing Devices Using Wet Methods (AREA)
Abstract
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP03018179A EP1372186B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers |
AT03018179T ATE417356T1 (en) | 2000-10-31 | 2000-10-31 | DEVICE FOR LIQUID TREATMENT OF DISK-SHAPED OBJECTS |
DE50015481T DE50015481D1 (en) | 2000-10-31 | 2000-10-31 | Device for liquid treatment of disc-shaped objects |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
EP00123714A EP1202326B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers-like objects |
EP03018179A EP1372186B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers |
Related Parent Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP00123714A Division EP1202326B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers-like objects |
EP00123714.8 Division | 2000-10-31 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP1372186A2 EP1372186A2 (en) | 2003-12-17 |
EP1372186A3 true EP1372186A3 (en) | 2005-10-26 |
EP1372186B1 EP1372186B1 (en) | 2008-12-10 |
Family
ID=8170251
Family Applications (3)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03018179A Expired - Lifetime EP1372186B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers |
EP03017235A Expired - Lifetime EP1369904B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers |
EP00123714A Expired - Lifetime EP1202326B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers-like objects |
Family Applications After (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP03017235A Expired - Lifetime EP1369904B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers |
EP00123714A Expired - Lifetime EP1202326B1 (en) | 2000-10-31 | 2000-10-31 | Apparatus for liquid treatment of wafers-like objects |
Country Status (8)
Country | Link |
---|---|
US (3) | US7172674B2 (en) |
EP (3) | EP1372186B1 (en) |
JP (2) | JP4911849B2 (en) |
KR (2) | KR100796709B1 (en) |
CN (1) | CN1175476C (en) |
AT (2) | ATE257277T1 (en) |
DE (2) | DE50015481D1 (en) |
SG (1) | SG128415A1 (en) |
Families Citing this family (59)
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---|---|---|---|---|
ATE211855T1 (en) * | 1999-04-28 | 2002-01-15 | Sez Semiconduct Equip Zubehoer | DEVICE AND METHOD FOR THE LIQUID TREATMENT OF DISK-SHAPED OBJECTS |
DE50015481D1 (en) * | 2000-10-31 | 2009-01-22 | Sez Ag | Device for liquid treatment of disc-shaped objects |
KR100800541B1 (en) * | 2001-07-11 | 2008-02-04 | 주식회사 포스코 | Blast furnace lower part belly activation operation method of Stave cooling form |
AT411335B (en) | 2002-03-06 | 2003-12-29 | Sez Ag | METHOD FOR WET TREATING DISC-SHAPED OBJECTS |
AT500984B1 (en) * | 2002-06-25 | 2007-05-15 | Sez Ag | DEVICE FOR LIQUID TREATMENT OF DISK OBJECTS |
US7032287B1 (en) * | 2002-07-19 | 2006-04-25 | Nanometrics Incorporated | Edge grip chuck |
US20040084144A1 (en) * | 2002-08-21 | 2004-05-06 | Dainippon Screen Mfg. Co., Ltd. | Substrate processing apparatus and substrate processing method |
US6992014B2 (en) * | 2002-11-13 | 2006-01-31 | International Business Machines Corporation | Method and apparatus for etch rate uniformity control |
KR101333288B1 (en) * | 2003-06-24 | 2013-11-27 | 램 리서치 아게 | Device and method for wet treating disc-like substrates |
DE20318462U1 (en) | 2003-11-26 | 2004-03-11 | Infineon Technologies Ag | Arrangement of electronic semiconductor components on a carrier system for treating the semiconductor components with a liquid medium |
US7350315B2 (en) | 2003-12-22 | 2008-04-01 | Lam Research Corporation | Edge wheel dry manifold |
KR100582837B1 (en) * | 2003-12-23 | 2006-05-23 | 동부일렉트로닉스 주식회사 | Appratus and method of wafer planarization |
US8082932B2 (en) * | 2004-03-12 | 2011-12-27 | Applied Materials, Inc. | Single side workpiece processing |
US20070110895A1 (en) * | 2005-03-08 | 2007-05-17 | Jason Rye | Single side workpiece processing |
US7938942B2 (en) * | 2004-03-12 | 2011-05-10 | Applied Materials, Inc. | Single side workpiece processing |
US20060000494A1 (en) * | 2004-06-30 | 2006-01-05 | Lam Research Corporation | Self-draining edge wheel system and method |
US7089687B2 (en) | 2004-09-30 | 2006-08-15 | Lam Research Corporation | Wafer edge wheel with drying function |
TWI366222B (en) * | 2004-11-23 | 2012-06-11 | Lam Res Ag | Apparatus and method for wet treatment of wafers |
WO2006060752A2 (en) * | 2004-12-03 | 2006-06-08 | Solid State Equipment Corporation | Wet etching of the edge and bevel of a silicon wafer |
JP4410119B2 (en) * | 2005-02-03 | 2010-02-03 | 東京エレクトロン株式会社 | Cleaning device, coating, developing device and cleaning method |
US20060205217A1 (en) * | 2005-03-10 | 2006-09-14 | Taiwan Semiconductor Manufacturing Co., Ltd. | Method and system for reducing wafer edge tungsten residue utilizing a spin etch |
TWI324799B (en) * | 2005-05-25 | 2010-05-11 | Lam Res Corp | Device and method for liquid treatment of wafer-shaped articles |
US20060266383A1 (en) * | 2005-05-31 | 2006-11-30 | Texas Instruments Incorporated | Systems and methods for removing wafer edge residue and debris using a wafer clean solution |
JP2007059664A (en) * | 2005-08-25 | 2007-03-08 | Pre-Tech Co Ltd | Cleaning apparatus of substrate |
JP2007115775A (en) | 2005-10-18 | 2007-05-10 | Nec Electronics Corp | Semiconductor wafer washing apparatus and method of washing semiconductor wafer |
US8104488B2 (en) * | 2006-02-22 | 2012-01-31 | Applied Materials, Inc. | Single side workpiece processing |
US8042254B1 (en) * | 2006-12-22 | 2011-10-25 | Kla-Tencor Corporation | Method for improving edge handling chuck aerodynamics |
JP2008251806A (en) * | 2007-03-30 | 2008-10-16 | Sumco Corp | Single wafer processing etching method and etching device for wafer thereof |
DE102007022016B3 (en) * | 2007-04-26 | 2008-09-11 | Ramgraber Gmbh | Galvanizing assembly holds flat wafers or other substrate by Bernoulli chuck during treatment |
TWI348934B (en) * | 2007-08-30 | 2011-09-21 | Lam Res Ag | Apparatus for wet treatment of plate-like articles |
JP5312923B2 (en) * | 2008-01-31 | 2013-10-09 | 大日本スクリーン製造株式会社 | Substrate processing equipment |
JP5012651B2 (en) * | 2008-05-14 | 2012-08-29 | 東京エレクトロン株式会社 | Coating device, coating method, coating, developing device and storage medium |
JP5012652B2 (en) * | 2008-05-14 | 2012-08-29 | 東京エレクトロン株式会社 | Substrate processing apparatus, substrate processing method, coating, developing apparatus, and storage medium |
US20100086735A1 (en) * | 2008-10-03 | 2010-04-08 | The United States Of America As Represented By The Secretary Of The Navy | Patterned Functionalization of Nanomechanical Resonators for Chemical Sensing |
CN102414782B (en) | 2009-02-22 | 2014-11-05 | 迈普尔平版印刷Ip有限公司 | Preparation unit for lithogrpahy machine |
GB2469112A (en) | 2009-04-03 | 2010-10-06 | Mapper Lithography Ip Bv | Wafer support using controlled capillary liquid layer to hold and release wafer |
GB2469113A (en) * | 2009-04-03 | 2010-10-06 | Mapper Lithography Ip Bv | Substrate Support Structure and Method for maintaining a substrate clamped to a substrate support Structure |
CN101866871B (en) * | 2009-04-15 | 2012-04-18 | 沈阳芯源微电子设备有限公司 | Clamping and protecting device for one-sided processing |
JP5341939B2 (en) * | 2011-03-31 | 2013-11-13 | 大日本スクリーン製造株式会社 | Substrate peripheral processing apparatus and substrate peripheral processing method |
JP5513432B2 (en) * | 2011-03-31 | 2014-06-04 | 大日本スクリーン製造株式会社 | Substrate periphery processing apparatus and substrate periphery processing method |
US8936994B2 (en) | 2011-04-28 | 2015-01-20 | Mapper Lithography Ip B.V. | Method of processing a substrate in a lithography system |
US9136155B2 (en) | 2011-11-17 | 2015-09-15 | Lam Research Ag | Method and device for processing wafer shaped articles |
US8877075B2 (en) * | 2012-02-01 | 2014-11-04 | Infineon Technologies Ag | Apparatuses and methods for gas mixed liquid polishing, etching, and cleaning |
US9685707B2 (en) * | 2012-05-30 | 2017-06-20 | Raytheon Company | Active electronically scanned array antenna |
US20140041803A1 (en) * | 2012-08-08 | 2014-02-13 | Lam Research Ag | Method and apparatus for liquid treatment of wafer shaped articles |
US9147593B2 (en) * | 2012-10-10 | 2015-09-29 | Lam Research Ag | Apparatus for liquid treatment of wafer shaped articles |
CN110610894B (en) * | 2012-11-27 | 2023-08-04 | 盛美半导体设备(上海)股份有限公司 | Method for cleaning back surface of substrate using substrate supporting device |
US9589818B2 (en) * | 2012-12-20 | 2017-03-07 | Lam Research Ag | Apparatus for liquid treatment of wafer shaped articles and liquid control ring for use in same |
US10707099B2 (en) | 2013-08-12 | 2020-07-07 | Veeco Instruments Inc. | Collection chamber apparatus to separate multiple fluids during the semiconductor wafer processing cycle |
JP2014030045A (en) * | 2013-09-24 | 2014-02-13 | Dainippon Screen Mfg Co Ltd | Substrate peripheral processing device, and substrate peripheral processing method |
JP6090113B2 (en) * | 2013-10-30 | 2017-03-08 | 東京エレクトロン株式会社 | Liquid processing equipment |
JP6121962B2 (en) * | 2014-09-22 | 2017-04-26 | 株式会社Screenホールディングス | Substrate peripheral processing method |
KR102490886B1 (en) * | 2015-10-16 | 2023-01-25 | 삼성디스플레이 주식회사 | Mask tension welding device for thin film deposition |
TWI797121B (en) | 2017-04-25 | 2023-04-01 | 美商維克儀器公司 | Semiconductor wafer processing chamber |
CN109411402B (en) * | 2018-08-08 | 2021-03-30 | 中芯集成电路(宁波)有限公司 | Wet cleaning equipment |
CN109887871B (en) * | 2019-03-26 | 2021-02-02 | 上海华力集成电路制造有限公司 | Wafer edge washing device and use method thereof and protective cover |
TWI748560B (en) * | 2020-07-15 | 2021-12-01 | 弘塑科技股份有限公司 | Automatic wafer positioning assembly |
WO2022126403A1 (en) * | 2020-12-16 | 2022-06-23 | Acm Research (Shanghai) , Inc. | Substrate supporting apparatus |
CN116264153A (en) * | 2021-12-14 | 2023-06-16 | 盛美半导体设备(上海)股份有限公司 | Wafer back surface cleaning method |
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JPH02309638A (en) * | 1989-05-24 | 1990-12-25 | Fujitsu Ltd | Wafer etching device |
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-
2000
- 2000-10-31 DE DE50015481T patent/DE50015481D1/en not_active Expired - Lifetime
- 2000-10-31 EP EP03018179A patent/EP1372186B1/en not_active Expired - Lifetime
- 2000-10-31 AT AT00123714T patent/ATE257277T1/en active
- 2000-10-31 EP EP03017235A patent/EP1369904B1/en not_active Expired - Lifetime
- 2000-10-31 DE DE50004935T patent/DE50004935D1/en not_active Expired - Lifetime
- 2000-10-31 EP EP00123714A patent/EP1202326B1/en not_active Expired - Lifetime
- 2000-10-31 AT AT03018179T patent/ATE417356T1/en active
-
2001
- 2001-10-24 KR KR1020010065596A patent/KR100796709B1/en active IP Right Grant
- 2001-10-24 SG SG200106579A patent/SG128415A1/en unknown
- 2001-10-31 US US09/984,707 patent/US7172674B2/en not_active Expired - Lifetime
- 2001-10-31 CN CNB011377011A patent/CN1175476C/en not_active Expired - Fee Related
- 2001-10-31 JP JP2001334983A patent/JP4911849B2/en not_active Expired - Lifetime
-
2004
- 2004-08-31 US US10/929,568 patent/US7799695B2/en not_active Expired - Fee Related
-
2006
- 2006-10-23 US US11/584,652 patent/US7988818B2/en not_active Expired - Fee Related
-
2007
- 2007-09-19 KR KR1020070095382A patent/KR100789337B1/en active IP Right Grant
-
2011
- 2011-11-25 JP JP2011257879A patent/JP5396456B2/en not_active Expired - Fee Related
Patent Citations (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0444714A1 (en) * | 1987-11-09 | 1991-09-04 | SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung Gesellschaft m.b.H. | Holder device for processing disc-like articles |
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EP0844646A2 (en) * | 1996-11-20 | 1998-05-27 | SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG | Holder for disc-like substrates |
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EP1052682A1 (en) * | 1999-04-28 | 2000-11-15 | SEZ Semiconductor-Equipment Zubehör für die Halbleiterfertigung AG | Device and process for the liquid treatment of disk-shaped objects |
Non-Patent Citations (1)
Title |
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PATENT ABSTRACTS OF JAPAN vol. 015, no. 102 (E - 1043) 12 March 1991 (1991-03-12) * |
Also Published As
Publication number | Publication date |
---|---|
SG128415A1 (en) | 2007-01-30 |
EP1202326A1 (en) | 2002-05-02 |
EP1369904A3 (en) | 2005-10-26 |
DE50015481D1 (en) | 2009-01-22 |
US20070084561A1 (en) | 2007-04-19 |
KR20070100210A (en) | 2007-10-10 |
EP1369904A2 (en) | 2003-12-10 |
US20020050244A1 (en) | 2002-05-02 |
ATE257277T1 (en) | 2004-01-15 |
EP1372186A2 (en) | 2003-12-17 |
DE50004935D1 (en) | 2004-02-05 |
CN1351368A (en) | 2002-05-29 |
JP4911849B2 (en) | 2012-04-04 |
JP5396456B2 (en) | 2014-01-22 |
EP1202326B1 (en) | 2004-01-02 |
US20050026448A1 (en) | 2005-02-03 |
KR100789337B1 (en) | 2007-12-28 |
ATE417356T1 (en) | 2008-12-15 |
US7988818B2 (en) | 2011-08-02 |
CN1175476C (en) | 2004-11-10 |
US7172674B2 (en) | 2007-02-06 |
EP1369904B1 (en) | 2009-01-21 |
JP2002246364A (en) | 2002-08-30 |
KR20020033527A (en) | 2002-05-07 |
JP2012080113A (en) | 2012-04-19 |
US7799695B2 (en) | 2010-09-21 |
EP1372186B1 (en) | 2008-12-10 |
KR100796709B1 (en) | 2008-01-21 |
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