JPS54101275A - One side masking method for plate material - Google Patents
One side masking method for plate materialInfo
- Publication number
- JPS54101275A JPS54101275A JP727178A JP727178A JPS54101275A JP S54101275 A JPS54101275 A JP S54101275A JP 727178 A JP727178 A JP 727178A JP 727178 A JP727178 A JP 727178A JP S54101275 A JPS54101275 A JP S54101275A
- Authority
- JP
- Japan
- Prior art keywords
- plate material
- adhesives
- masking
- support plate
- plate
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: To increase the working efficiency with complete and easy masking, by performing accurate masking for one side only through the utilization of capillary tube phenomenon of adhesives.
CONSTITUTION: In the masking method for one side of plate material by sticking thin and flat plate material 9 via the fluid adhesives 11 on the flat support plate 8, when the plate material 9 is approached to the support plate 8, small gap is caused only at the douthnut region along the circular circumference of the plate material 9 opposed to the support plate, the adhesives 11 is immersed by utilizing capillary tube phenomenon from the center or the external circumference of the plate material 9, and the adhesives is solidified with this condition and the plate material is fixed on the support plate, allowing to perform one side masking for the plate material.
COPYRIGHT: (C)1979,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP727178A JPS54101275A (en) | 1978-01-27 | 1978-01-27 | One side masking method for plate material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP727178A JPS54101275A (en) | 1978-01-27 | 1978-01-27 | One side masking method for plate material |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS54101275A true JPS54101275A (en) | 1979-08-09 |
Family
ID=11661357
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP727178A Pending JPS54101275A (en) | 1978-01-27 | 1978-01-27 | One side masking method for plate material |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS54101275A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1369904A2 (en) * | 2000-10-31 | 2003-12-10 | Sez Ag | Apparatus for liquid treatment of wafers |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946375A (en) * | 1972-09-05 | 1974-05-02 | ||
JPS51140484A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Method of etching wafer |
-
1978
- 1978-01-27 JP JP727178A patent/JPS54101275A/en active Pending
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS4946375A (en) * | 1972-09-05 | 1974-05-02 | ||
JPS51140484A (en) * | 1975-05-30 | 1976-12-03 | Hitachi Ltd | Method of etching wafer |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP1369904A2 (en) * | 2000-10-31 | 2003-12-10 | Sez Ag | Apparatus for liquid treatment of wafers |
EP1369904A3 (en) * | 2000-10-31 | 2005-10-26 | Sez Ag | Apparatus for liquid treatment of wafers |
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