EP1326737A1

EP1326737A1 - Device for multi-axis fine adjustable bearing of a component

Info

Publication number: EP1326737A1
Application number: EP01967008A
Authority: EP
Inventors: Tino Noll; Wolfgang Gudat; Heiner Lammert
Original assignee: Berliner Elektronenspeicherring-Gesellschaft fur Synchrotronstrahlung Mbh
Current assignee: Helmholtz Zentrum Berlin fuer Materialien und Energie GmbH
Priority date: 2000-08-20
Filing date: 2001-08-16
Publication date: 2003-07-16
Also published as: DE10042802A1; AU2001287536A1; JP2004506529A; US20030150288A1; DE10042802C2; WO2002016092A1

Abstract

Known component bearings either use six parallel double-jointed members (hexapods) that while being adjustable with six degrees of freedom and high accuracy can only be adjusted in mutual dependency of one another, or double-jointed members that are mounted in series via connecting bodies and whose joints can be rotated about one axis, that allow only two rotational deflections, under error summation, and that meet in a virtual point as the point of origin of a Cartesian coordinate system. The aim of the invention is to design a bearing that allows a movement of the component in all six degrees of freedom in a highly accurate, reproducible manner while maintaining the axial rigidity of the component. To this end, six parallel double-jointed members (2J1, 2J2, 2J3, 2J4, 2J5, 2J6) comprising two joints (J1, J2) each that can be rotated about three axes are distributed in the coordinate planes (XY, XZ, ZY) in such a manner that the rotational (xrot, yrot, zrot) and translational (xtrans, ytrans, ztrans) deflections can be achieved by adjusting, if possible, only one double-jointed member (2J1, 2J2, 2J3, 2J4, 2J5, 2J6) ( defined adjustment ). The joints (J1, J2) preferably used in the double-jointed members (2J1, 2J2, 2J3, 2J4, 2J5, 2J6) are flexible joints (J1, J2), especially elastic fiber joints. The inventive joints can be used in bearings of optical components, especially mirrors.

Description

Device for the multi-axis, finely adjustable mounting of a component.

description

The invention relates to a device for multi-axis, finely adjustable mounting of a component for small deflections by virtue of its multi-link connection to a multi-link frame with at least four two-joint members with high axial stiffness, the central axis of which runs through two spaced-apart and at least uniaxially rotatable joints and which are arranged in a static operative relationship to one another such that a) three two-bar links (2Jι, 2J ₂ , 2J ₃ ) have a virtual common intersection (P), b) this intersection (P) is the origin of a Cartesian coordinate system (x, y , z) is, c) two (2Jι, 2J ₂ ) of the three two-joint members (2J-ι, 2J ₂ , 2J ₃ ) according to point a) with their central axes (MA) in a first plane (YZ) of the coordinate system (x, y, z) lie, d) the third (2J ₃ ) of the three two-joint links (2Jι, 2J ₂ , 2J ₃ ) according to point a) with its central axis (MA) in one to the first plane (YZ) vertical second plane (XY) of the Cartesian coordinate system.

A frame with such a bearing is known from EP0665389 and can be used to support optical components, such as lenses or primarily mirrors, with a fine adjustment of the deflections of the frame up to 2 ° with an adjustment accuracy of 1 " The component to be mounted on the device can be rotated about a maximum of two axes, for rotation about one axis the device has two oblique articulated members, the imaginary extension of which gives the pivot as a virtual intersection The intersection lies in the known storage in the upper surface of the component to be stored. The two two-joint links lie in a first plane on which the axis of rotation is correspondingly perpendicular. Even though the description mentions the possibility of storage over a total of three two-bar links for mounting in two axes of rotation, storage over four two-bar links is generally preferred for this, since this is easier and more precisely to control. The two second two-joint links (or the third two-joint link) are also aligned with the intersection and lie in a second plane that is perpendicular to the first plane. The second axis of rotation is thus fixed in a statically determined system or a Cartesian coordinate system with its origin in the center of rotation. In the known storage, however, its third axis is ignored, since at most only a two-axis rotatable bearing is to be realized.

The joints disclosed in EP0665389, which always form a two-joint link in pairs and are arranged at its opposite ends, are of uniaxial design, so that the axial rigidity required for the high setting accuracy can be achieved. However, this leads to the fact that the two-joint members arranged in each case in one plane only permit uniaxial deflection. In order to realize a two-axis rotatable mounting, the two first two-joint members for the first direction of rotation with the two second two-joint members for the second direction of rotation in the known device are therefore arranged in a statically serial operative relationship to one another. The series connection of the corresponding two-joint links is achieved via a relatively complicated connecting body as a further construction element in the known frame, which must also be controlled automatically by a spherical linear motor. The aim is to achieve high tilting dynamics in a range up to 400 Hz. In principle, however, series connections of two-link elements are to be regarded as disadvantageous, since this results in an addition of those occurring at each two-link element Adjustment errors and a reduction in the axial rigidity of the frame required for the high setting accuracy. For this reason, at least one further two-joint member is provided in the known device, which is arranged in its longitudinal axis direction and only serves for the axial stiffening.

Series connections of the individual joint members are also known from various other prior art publications. I usually use guides in stacked arrangements. For example, from FR2761486 a device for fine adjustment in the μm range by a maximum of six degrees of freedom is known, which has three individual towers, each with three adjustable micrometer screws. A support for the component to be stored is connected to the three towers and can be finely adjusted in six axes relative to a frame. Furthermore, devices are known which implement a cardanic solution by means of a suitable arrangement of ball bearings and which implement the bearing by means of a combination with lifting tables and goniometers with spherical raceways.

The so-called "hexapode" is known as a classic embodiment, for example from FR2757440, as a device for a six-axis, axially rigid bearing with a statically parallel operative connection between the individual two joints. This is a six-legged adjustment arrangement with six length-adjustable rods arranged in a circle The rods are designed as two-joint links, each with a ball bearing at each end. However, ball bearings have a number of disadvantages that are not always tolerable, such as stochastic movement errors due to the manufacturing-related shape tolerances of the rolling surface of the balls and raceways, which ensure highly precise reproducibility If this unevenness is compensated by lubricants or coatings, such ball bearings are only of limited use, especially for one Operation under vacuum conditions is then no longer suitable. The greater disadvantage when using hexapods is, however, to be seen in the complicated interaction of the individual two-joint elements in order to achieve the multi-axis adjustments. Even for uniaxial adjustments, as a rule, all six two-joint links have to be moved or their length adjusted, the dependent dependencies not being readily recognizable. Manual adjustment is therefore difficult and if only with the help of previously complex tables. The only remedy here is a computer-assisted automatic control system, for which extensive and time-consuming computer programs have to be created. Due to the automatic control, which is particularly cost-intensive, electrically operated servomotors are also required to achieve the length changes, but their heat input into the overall system can have a sensitive disruptive effect and is therefore undesirable.

Starting from the first-mentioned document EP0665389, which discloses the prior art closest to the invention, the object of the present invention is to develop a device for the finely adjustable multi-axis mounting of a component of the above-mentioned type in such a way that the component to be stored in a maximum of six degrees of freedom can be moved around the origin of the Cartesian coordinate system. The deflections should be able to be implemented without great effort on the basis of arithmetic specifications and the drives to be controlled and should be simple and largely independent of one another as far as possible. The number of required positioning movements should be kept as low as possible. The axial rigidity of the bearing should be retained. A particularly sensitively adjustable, highly precise and vibration-resistant mechanical bearing should be realized with the lowest possible cost.

As a solution to this problem, the invention provides that the frame for a three-axis, in a maximum of six possible Cartesian axes Precisely adjustable mounting of the component is designed with six joints with six, three-axis joints, two-joint members and all two-joint members are arranged in a statically parallel working relationship, e) the fourth two-joint member with its central axis also lies in the second plane, f) a fifth two-joint member is provided, which also lies in the first plane with its central axis, and g) a sixth two-joint link is provided which lies with its central axis in the third plane spanned by the Cartesian coordinate system.

The device in accordance with the invention is characterized in its principle general form by an arrangement of six two-bar links for generating a three-axis deflection in a Cartesian coordinate system, that is to say a total of a maximum of six Cartesian axes (three rotatory, three translational). The basic assumption for the realization assumes that for small rotations of a strut-based system, the axes of rotation are defined by the theoretical intersection of the struts. As a result, the mode of operation of the device according to the invention is extremely simple; the individual deflections, which influence one another only extremely little, can be achieved by manual adjustment of one to a maximum of three two-articulated members, with certain deflection directions being able to be preferred accordingly. The storage of the device according to the invention is statically clearly determined and axially stable and vibration-proof to a particular degree. This enables the highest setting accuracy to be achieved. The statically parallel interrelation between the six two-bar links also contributes to a further improvement in these accuracies. By connecting them in parallel, occurring errors of a stochastic and systematic nature are not added up, so that the overall error is relatively low remains. Predefined settings can be reproduced with no play and with the greatest accuracy.

The first, second and third two-joint members form a first group of two-joint members which define the origin of a Cartesian coordinate system and the alignment of the three Cartesian planes. Two levels are determined by the position of the two-joint links, the third level automatically results from the orthogonality condition in the origin, so that there is no two-link link from the first group in this level. The fourth, fifth and sixth two-bar link form a second group of two-bar links, each lying in one of the three levels. Their arrangement is relevant for the deflections to be achieved. If the two-joint links lie in the planes with any, but of course technically sensible, orientation, there are combined deflections that may not be necessary.

Therefore, according to embodiments of the device according to the invention, it is particularly expedient and advantageous if at least one two-joint member from the second group formed by the fourth, fifth and sixth two-joint member is arranged at a defined distance from the origin of the Cartesian coordinate system in order to generate rotary deflections, or if it is used for generation of translational deflections, at least one two-joint member from the second group formed by the fourth, fifth and sixth two-joint member is arranged parallel to one two-joint member from the first group formed by the first, second and third two-joint member. For rotary deflections, a lever arm is generated in this way, which can be used directly manually or can also be used to fasten a drive. In the case of translational mobility, parallelograms are generated by the arrangement of the further two-articulated elements, which enable a parallel displacement of the corresponding body edges. The further mode of action of two-jointed members arranged in this way should not be discussed here to avoid repetition, reference is instead made to the exemplary embodiments in the special description part.

A wide variety of applications can be provided for the device according to the invention. A frequent application will be the mounting of a tilting mirror in order to be able to reflect a light beam striking its surface so precisely that even at a distance of 20 m to 30 m, precise adjustment is still possible with the greatest accuracy. However, especially in applications with optical components that interact with light beams, it is important that these are not hindered by other construction elements, in particular the storage of the component. Therefore, in a next embodiment of the invention, it is advantageously provided that the two-joint members are arranged slightly offset from the three levels of the Cartesian coordinate system. A change in the operating principle of the mounting of the device according to the invention is not brought about by this. However, the user is able to modify the arrangement of the individual two-joint links to a certain extent. This is to be expressed with the term "slightly", since an indication in mm does not seem to make sense here due to the dependency on other construction parameters. It is important that the respective two-articulated link is only removed from the corresponding plane to such an extent that the light beam is not shadowed Measures known from the prior art, such as providing free access from the underside of the component or constructive recesses in “disruptive” components, are not required in the invention.

A further modification of the arrangement of the individual two-joint elements in the device according to the invention is possible if, according to the next embodiment of the invention, the arrangement of the six two-joint elements in the six-articulated frame is also adapted to the dimensions of the component to be stored. Here too, the principle of operation of the arrangement is not changed. However, since in the distribution scheme of the individual two-joint members a plane can occur in which only one two-joint member is arranged, it is possible, for example in the case of flat, rectangular components (mirrors), to place this plane on the narrow end face of the component. Problems with the storage of the two-joint links are thus avoided. According to a next embodiment of the invention, it is assumed that the component axes are aligned coaxially with the Cartesian axes. Such an assignment, to which the parallel assignment belongs, to the individual levels and axes of the Cartesian coordinate system provides greater clarity in the assignment of the elements and the deflections to be achieved. However, it is not always necessary or possible. For example, cuboids can also be stored over a tip or balls.

The two-articulated members known from the prior art, which are initially based on the invention, are structurally not changeable and uniaxially constructed, that is, they allow tilting only along one axis in order to ensure the high required axial rigidity. The tilt angles are achieved by moving the entire two-joint links via a central drive that is guided on a spherical shell. However, what is important for this application is above all the high dynamic of the tilting movement that can be achieved with up to 400 adjustments per second. In applications which, however, are designed to have to make as few adjustments as possible in order to disturb the entire structure as little as possible, it can be advantageous, however, if, after a further development of the invention, the two-joint members are constructed to vary in length along their central axis. This can be achieved, for example, by a spindle construction that has the advantage of high axial rigidity. With such a construction it is then possible that according to a next embodiment of the invention for each deflection with respect to one of the six Cartesian Axes a separate device for changing the length or shifting the joints or two-joint links is provided. This can then involve the spindles mentioned. However, the individual two-articulated links can also be displaceably mounted in the frame, for example using micrometer screws.

The three-axis rotating design of the joints enables the simple deflection possibilities of the device according to the invention with a parallel arrangement of all two-joint members in the storage. However, it must be ensured that the joints also meet the requirements placed on them. The use of ball bearings as classic three-axis joints harbors the disadvantages already mentioned at the outset, in particular the high stochastic topographical errors due to the uneven rolling surfaces and the frequent unsuitability for operation in a vacuum. The same applies to cardanic arrangements made of rotary ball or slide bearings as well as spherical inserts that are stored in enveloping housings. Therefore, according to another embodiment of the invention, the three-axis joints can be designed as flexible joints. The axial rigidity of the bearing must be guaranteed. Flexible joints are known per se and meet the conditions imposed on them. Embodiments of such joints include leaf spring joints, which can also be arranged crosswise, cross spring joints and solid-state joints. These are monolithic solutions with corresponding material constrictions.

It is particularly advantageous if, according to a next embodiment of the invention, the flexible joint is designed as an elastic fiber joint with two rigid ends of the joint designed as sockets and a short piece of fiber material as the deformation region in between. In particular, according to a further embodiment, the fiber material can be designed as a steel cable. Such an elastic fiber joint is simple in its construction and in its manufacture. Due to the existence of suitable semi-finished products, constructive specifications that only have one Material processing can be avoided (constrictions). It combines the advantages of flexible joints (freedom from play, reproducibility, vacuum suitability) with the three-axis mobility of classic ball joints. The axial rigidity is very high compared to monolithic, flexible components. The possible bending angles are determined by the ratio of the exposed length of the fiber material between the joint ends to its diameter. The cross-section of the fiber material defines the load capacity as well as the axial tensile and compressive rigidity. Due to the fibrous structure of the deformation area, the fiber joint does not suddenly break when overstressed, but shows signs of fatigue in the form of a gradual unraveling of the fiber material. The fiber joint can therefore always be replaced in good time before damage. In the event of a large overload, the fiber joint can buckle or squeeze, but it holds the ends of the joint together so that the connection itself is maintained. Great damage can also be avoided in this way. A further increase in the axial rigidity is obtained if the fiber material consists of a large number of thin individual fibers which are twisted or intertwined with one another. In particular, the fiber material can then be designed in the form of a steel cable. Such steel cables can be obtained inexpensively and pre-assembled in a large number of different (designs (for example as a Bowden cable), dimensions and materials. Furthermore, in the case of such elastic fiber joints, it can be provided that the fiber material is firmly connected to the joint ends by clamping, dipping or gluing Such simple connection techniques support the simple manufacture of such a fiber joint and ensure safe operation.

Forms of embodiment of the invention are explained in more detail below with reference to the schematic figures. It shows: FIG. 1 shows a basic arrangement diagram of the six two-bar links as a detail of the device according to the invention,

2 shows the arrangement diagram according to FIG. 1 in a simplified spatial representation; FIG. 3 shows an orthogonal arrangement of the six two-articulated members as

Embodiment of the device according to the invention,

Figure 4 shows the arrangement of Figure 3 in a simplified spatial representation and

5 shows a control matrix for the arrangement according to FIGS. 3 and 4.

FIG. 1 shows a concave-shaped mirror on its upper surface S as component E, which is designed as a six-joint link. This relation arises from the fact that component E is supported in a six-joint frame by six two-joint members 2Jι, 2J ₂ , 2J _3j 2J ₄ , 2J ₅ and 2 β. For the sake of clarity, FIG. 1 shows only the respective connection point of the six two-joint links 2Jι, 2J ₂ , 2J ₃ , 2Ü ₄ , 2J ₅ and 2Jβ with the component E (gray background) for its storage. The second mounting in the six-jointed frame takes place at the opposite ends of the six two-jointed members 2Jι, 2J ₂ , 2J ₃ , 2J _4j 2Js and 2Jδ. A correspondingly shaped frame (indicated by a dashed line in the figure) can have any structurally possible structure and corresponds to the general technical knowledge for such frames. All six two-joint members 2Jι, 2J ₂ , 2J ₃₎ 2J ₄ , 2J ₅ and 2J ₆ are statically arranged parallel to each other between the frame and the component E to be stored.

This general arrangement is also shown in another constellation for mounting a component E having a shoulder in FIG. 2. For a better view, however, most of the auxiliary lines and levels as well as reference numerals for details have been omitted from FIG. 1. Only the six two-joint links 2J-ι, 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ and 2J ₆ and the coordinate system x, y, z at the intersection P are shown. It can be seen in FIG. 2, however, that two two-bar links 2J-ι, 2J ₂ , which also form the intersection P, are not designed to be movable. They serve to fix the component, a translational movement of the component in the direction of the y and z axes is not provided here. The possible movements are entered.

The two-joint links 2J _1s 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ and 2Jβ each have two joints Ji and J ₂ on their opposite sides, through which a central axis MA runs. They are axial, that is to say stiff along their central axis MA and have a length adjustment L in the selected exemplary embodiment. The joints Ji, J ₂ are also designed with three axes, in the selected exemplary embodiment symbolic ball joints are indicated. In real versions, flexible joints, in particular elastic fiber joints with a steel cable as the bending area, are to be preferred.

The three two-joint links 2J _1s 2J ₂ and 2J ₃ form a first group and are arranged such that they have a virtual common intersection point P in the surface S of the component E to be stored. The origin of a Cartesian coordinate system with the axes x, y and z and planes XY, XZ and YZ which are oriented orthogonally to one another is placed in this intersection point P. The axis designations of the coordinate system are, however, interchangeable, in the selected exemplary embodiment the orientation takes place along the body edges of component E. The two double-jointed members 2Jι and 2J ₂ lie with their central axes MA in a first plane YZ of the coordinate system. The third two-joint link 2J ₃ lies with its central axis MA in the second plane XY of the coordinate system, the orientation of which is fixed in all three planes and thus also in the third plane XZ. A second group is formed by the three two-joint members 2J ₎ 2J ₅ and 2J ₆ , of which the fourth two-joint member 2J _{4 is} also arranged in the second plane XY with its central axis MA. At the same time, the fifth two-joint link 2J ₅ also lies in the first plane YZ with its central axis MA. The first level YZ is thus occupied by a total of three two-jointed members 2Jι, 2J ₂ and 2J ₅ and the second level XY is occupied by two two-jointed members 2J ₃ and 2J ₄ . Finally, the sixth two-joint link 2Ü ₆ lies in the third plane XZ with its central axis MA, so that this plane XZ is occupied by only one two-joint link. Depending on the number of the two-joint elements incorporated, the planes can act as attack surfaces of the bearings of different sizes and can be adapted to the geometric surfaces S of the component E to be supported. A small component dimension can therefore preferably be placed in the direction of the y-axis, to which only the sixth two-joint member 2J ₆ is arranged perpendicularly.

A similar arrangement is shown in FIG. 3. This is the case where all the two-joint elements 2Jι, 2J ₂ , 2J _3j 2J, 2J ₅ and 2J ₆ are arranged orthogonally to one another. The component E here has the shape of a flat cuboid; in real use, it can be, for example, a tilting mirror with a concave surface S. In the exemplary embodiment, the tilting mirror E is mounted in such a way that its component dimension ES lies in the y-axis direction. The component axes EA are thus coaxial with the Cartesian axes x, y, z. To generate rotary deflections, in the exemplary embodiment shown, rotations about all three axes x _rot j Yrot, z _ro t are possible, all three two- _{joint members} 2J _4j 2J ₅ and 2J _{6 of} the second group are at a defined distance Ri, R ₂ and R ₃ (Lever arm) to the origin P of the Cartesian coordinate system. This distance can be referred to as the radius of rotation R and can be freely selected taking into account the static mechanics. The two-joint links 2J ₄ , 2J ₅ and 2J ₆ are then tangential to the corresponding rotation circle. These circles the three Cartesian levels of the component E result in circumferential theoretical lines along which the corresponding two-joint link can be arranged anywhere, so that a rotation (clockwise or counterclockwise) about the corresponding axis of rotation perpendicular to the plane of the circle of rotation is produced (see also FIG. 1).

Furthermore, translational deflections are possible, in the exemplary embodiment shown in FIG. 3, along all three axes x _t rans, ytrans, Ztrans. All of these three two-joint links 2J ₄ , 2Js and 2Jβ of the second group are additionally arranged parallel or perpendicular to the translations along the axes x _t ans, ytrans, Ztrans. This creates parallelograms that cause a corresponding parallel displacement or translation of the component sides along the Cartesian axes Xtrans, ytrans, z _tra ns.

FIG. 4 again shows a simplified perspective illustration of the two-joint constellation according to FIG. 3 for mounting a component E. In the exemplary embodiment shown here, component E is a concave tilting mirror which reflects an incident light beam with high precision. For a better view, most of the auxiliary lines and levels as well as reference numerals for details have been omitted from FIG. 3. Shown are six double joints 2J-ι, 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ and 2J ₆ , which serve to change the position of component E in all six Cartesian axes x _tr ans, ytransj z _tr ans, Xrotj yrot, z _ro t , The indicated ball joints serve to symbolize the three-axis rotatable articulation, and the changes in length shown are only intended to indicate the displaceability of the points of attack on the component E.

A table can be seen in FIG. In the illustrated

The control matrix shows which two-articulated links have to be controlled in order to make deflections with each of the maximum six possible

To be able to cause degrees of freedom. It can be clearly seen that Rotations around all three rotary axes x _ro t, y _ro t, Zro can be effected by adjusting or shifting only a single two-joint link 2J4, 2J ₅ , 2J ₆ . The translation in the x direction is also caused exclusively by the movement of the two-joint link 2J ₃ . These deflections are therefore extremely simple and reproducible with maximum precision by manual or automatic actuation of only one drive at a time. It is also important here that rotations have a much greater influence on component positioning than translations, especially with a mirror. The translation in the z direction requires the adjustment of two two-bar links 2J ₂ , 2J ₄ by the same amount, which can certainly still be described as simple adjustability. Maximai three three-joint links 2J-ι, 2J ₅ , 2J _{6 must} be adjusted by the same amount in order to achieve a translation in the y-direction.

LIST OF REFERENCE NUMBERS

E component

EA component axis

ES small component dimension of E

S surface of E

«M joint (m = 1, 2)

2J _n two-joint link (n = 1, 2,3,4,5,6)

L length adjustment from J _m

MA central axis of J _m

P virtual common intersection (origin)

R radius of rotation

R1, R ₂ , R3 defined distance to the origin P (lever arm) χ, y, z axes of the Cartesian coordinate system

Xrot, yrot, zrot axes as rotation axes

Xtrans, Ytrans, trans axes as translational axes

XY, XZ, YZ levels of the Cartesian coordinate system

Claims

claims

1.Device for the multi-axis, finely adjustable mounting of a component for small deflections by its multi-link connection to a multi-link frame with at least four two-joint members with high axial stiffness, the center axis of which runs through two joints which are arranged at a distance from one another and which can be rotated at least one axis and which run in one static interrelationships are arranged so that a) three two-bar links (2Jι, 2J ₂ , 2J ₃ ) have a virtual common intersection (P), b) this intersection (P) is the origin of a Cartesian coordinate system (x, y, z) , c) two (2Jι, 2J ₂ ) of the three two-joint members {2J ^, 2J ₂ , 2J ₃ ) according to point a) with their central axes (MA) in a first plane (YZ) of the coordinate system

(x, y, z), d) the third (2J ₃ ) of the three two-joint links (2J-ι, 2J, 2J ₃ ) according to point a) with its central axis (MA) in a perpendicular to the first plane (YZ) second level (XY) of the Cartesian coordinate system, characterized in that the frame for a three-axis, in a maximum of six possible Cartesian axes (x _red , y _red , z _ro t, X _t rans, y _t r _a n _s , z _r ans) finely adjustable mounting of the component (E) with six joints and six, three-axis rotatable joints (Ji, J ₂ ) with two-joint members (2Jι, 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ , 2J ₆ ) and all two-joint members (2J _{1 (} 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ , 2J ₆ ) are arranged in a statically parallel operative relationship to one another, e) the fourth two-joint link (2J ₄ ) with its central axis (MA) also lying in the second plane (XY) , f) a fifth two-joint member (2J ₅ ) is provided, which also lies in the first plane (YZ) with its central axis (MA), and g) a sixth two-joint link (2J ₆ ) is provided, which lies with its central axis (MA) in the third plane (XZ) spanned by the Cartesian coordinate system (x, y, z).

2. Device according to claim 1, characterized in that for generating rotary deflections (x _ro t, y _ro t, z _ro t) at least one two-joint member (2J ₄ , 2J ₅ , 2J ₆ ) from the fourth, fifth and sixth two-joint link (2J, 2J ₅ , 2J ₆ ) formed second group with a defined distance (Ri, R ₂ , R ₃ ) to the origin (P) of the Cartesian coordinate system (x, y, z) is arranged.

3. Device according to claim 1 or 2, characterized in that for generating translational deflections (x ^ ans, ytrans, z _tr ans) at least one two-joint member (2J ₄ , 2J ₅ , 2J ₆ ) from the fourth, fifth and sixth two-joint link (2J ₄ , 2J ₅ , 2J ₆ ) second group formed parallel to a two-joint link (2J-ι, 2J ₂ , 2J ₃ ) from that of the first, second and third two-link link (2Jι, 2J ₂ , 2J ₃ ) formed first group is arranged.

4. The device according to at least one of claims 1 to 3, characterized in that the two-joint members (2Jι, 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ , 2J ₆ ) slightly from the three levels (XY, XZ, ZY) of Cartesian Coordinate system (x, y, z) are arranged offset.

5. The device according to at least one of claims 1 to 4, characterized in that the arrangement of the six two-jointed members (2Jι, 2J ₂ , 2J ₃ , 2J ₄ , 2J5, 2J ₆ ) in the six-jointed frame in addition to the dimensions of the component to be stored (E) is adjusted.

6. The device according to at least one of claims 1 to 5, characterized in that the component axes (EA) are aligned coaxially to the Cartesian axes (x, y, z).

7. The device according to at least one of claims 1 to 6, characterized in that the virtual common intersection (P) is the origin of the Cartesian coordinate system (x, y, z) in the surface (S) of the component (E) to be stored.

8. The device according to at least one of claims 1 to 7, characterized in that the two-joint members (2J _t , 2J ₂ , 2J ₃ , 2J ₄ , 2J, 2J ₆ ) along their central axis (MA) are constructed variable in length (L).

9. The device according to at least one of claims 1 to 8, characterized in that for each deflection with respect to one of the six Cartesian axes (x _ro t, y _ro t, Zro _t , trans, ytrans, A separate device for length change (L) or displacement of the joints (J1, J2) or two-joint members (2Jι, 2J ₂ , 2J ₃ , 2J ₄ , 2J ₅ , 2J ₆ ) is provided.

10. The device according to at least one of claims 1 to 9, characterized in that the three-axis rotatable joints (Ji, J) are designed as flexible joints.

11. The device according to claim 10, characterized in that the flexible joint is designed as an elastic fiber joint with two rigid joint ends designed as sockets and a short piece of fiber material as a deformation region lying in between.

12. The apparatus according to claim 11, characterized in that the fiber material is designed as a steel cable.