JPH0989912A - Table mechanism - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a table mechanism which can move an object such as a sample or a probe in X-, Y- and Z-axial directions, independent from one another. SOLUTION: A main table 12 has three sets of rod-like springs 14x, 14y, 14z which are extend from three adjacent sides, perpendicular thereto, and are fixed to three orthogonal wall parts of a subtable 16. A stationary table has three sets of rod-like springs 20x, 20y, 20z which extend from three surfaces opposed to the wall surfaces of the subtable 16 and are fixed to the wall parts of the subtable 16. The stationary bed 22 is fixed at its one surface to a stationary frame 24, and accordingly, the subtable 16 is supported, being floated with respect to the stationary frame 24 which are fixed thereto with piezoelectric actuators 26x, 26y, 26x which are extended in x-, y- and z-axial directions, through holes 18x, 18y, 18z formed in the wall parts of the subtable 16, having their free ends located in the vicinity of the main table 12.

Description

Detailed Description of the Invention

[0001]

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a table mechanism for a scanning probe microscope, a scanning laser microscope or the like.

[0002]

2. Description of the Related Art A table mechanism used in a scanning probe microscope, a scanning laser microscope or the like has a function of scanning a sample placed through a sample table or a probe attached through a holder ( In other words, it has the function of displacing).

Known as means for realizing a three-dimensional scanning function are a cylindrical piezoelectric actuator and a tripod in which three laminated piezoelectric actuators are connected so as to be orthogonal to each other.

In a cylindrical piezoelectric actuator, its displacement is caused by expansion and contraction and bending of a cylindrical piezoelectric body.
Displacement in the x and y directions (curving direction) is accompanied by displacement in the z direction (expanding and contracting direction), and is not pure displacement in the x and y directions. The stroke is about 30 μm in the x and y directions, but only about several μm in the z direction.
The symmetry is not good.

The tripod has uniform strokes in the x, y, and z directions, but since three laminated piezoelectric actuators are connected orthogonally to each other, when one laminated piezoelectric actuator is expanded and contracted. , The other two laminated piezoelectric actuators interfere with the movement, and the displacement in that direction is accompanied by the displacement in the other direction.

As described above, it is not possible to easily obtain a specific displacement in one direction with the cylindrical piezoelectric actuator or the tripod. It is not impossible to obtain the displacement in only one specific direction, but for that purpose, in addition to the control related to that direction, control for compensating for the deviation is required, and a considerable load is required in terms of control.

In addition, in a uniaxial linear movement mechanism, a table mechanism that is not displaced in a direction other than the movement axis direction is already known. This table mechanism combines two sets of parallel springs at right angles to the direction of movement, and the depression by one parallel spring (movement in a direction different from the displacement direction) is offset by the depression by the other parallel spring. I am compensating.
Such a table mechanism is disclosed in, for example, Haruyuki Komori, Takashi Higashikawa "Nanometer Positioner and Its Application", Automation Technology No. 21.
Volume 8 (1989), pp. 65-67.
Further, it has been suggested that a plurality of uniaxial table mechanisms are overlapped and combined to form a two-dimensional movement mechanism.
However, although it is possible in principle to construct a three-dimensional moving mechanism by a combination of these, it is not practically usable in consideration of aspects such as driving balance. Considering the operation to a scanning probe microscope, etc.,
It is desirable that the table mechanism also mechanically has a three-dimensional scanning function (rather than a combination of uniaxial mechanisms).

The present invention has been made in view of such circumstances, and an object thereof is to provide a table mechanism having a three-dimensional scanning function, which can easily obtain displacement in a specific direction. Is to provide. In other words, it is to provide a table mechanism that makes it possible to independently move an object such as a sample or a probe in the x direction, the y direction, and the z direction.

[0009]

According to the present invention, in a table mechanism for moving an object to be loaded in x, y and z directions, two bar-shaped spring members are arranged on three adjacent surfaces of a hexahedron main table. This spring member is connected to the three surfaces of the sub-table that are orthogonal to each other, and two rod-shaped spring members in the same direction as the rod-shaped spring member surround the main table in the sub-table surface. It is characterized by being connected to a stand.

[0010]

BEST MODE FOR CARRYING OUT THE INVENTION Embodiments of the present invention will be described below with reference to FIGS. As can be seen from FIG. 1 and FIG. 2, the cube-shaped main table 12 has three sets of rod-shaped springs 14x, 14y from each of three adjacent surfaces.
14z extends vertically. Two rod-shaped springs 14 of each set
The directions in which x, 14y, and 14z are arranged are orthogonal to each other.
That is, the two rod-shaped springs 14x are spaced apart in the z direction, the two rod-shaped springs 14y are spaced apart in the x-direction, and the two rod-shaped springs 14z are spaced apart in the y-direction. positioned.

The sub-table 16 has three wall portions which are orthogonal to each other, the inner surface of the wall portion faces the above-mentioned three surfaces of the main table 12 in parallel, and each wall portion has three sets extending from the main table 12. The rod-shaped springs 14x, 14y, 14z are fixed. Holes 18x, 18 through which the piezoelectric actuators 26x, 26y, 26z pass are formed in each wall of the sub table 16.
y and 18z are two rod-shaped springs 14x and 14y of each set,
Spaced between the 14z roots.

An L-shaped fixed base 22 is located near the main table 12, and the fixed base 22 is one of the sub-tables.
6 sets of three bar-shaped springs 20 from three surfaces facing each wall surface.
x, 20y, 20z extend, and bar springs 20x, 2
0y and 20z are fixed to 16 wall portions of the sub table. The two rod-shaped springs 20x, 20y, 20z of each set are arranged in a direction orthogonal to each other, and the directions are respectively aligned with the direction in which the rod-shaped springs 14x, 14y, 14z are arranged. That is, the two rod-shaped springs 20x are spaced apart from each other in the z direction, the two rod-shaped springs 20y are spaced apart from each other in the x-direction, and the two rod-shaped springs 20z are spaced apart from each other in the y-direction. positioned. These twelve bar springs 14
x, 14y, 14z, 20x, 20y, 20z are both
They are made of the same material, have the same shape, and have the same elastic characteristics.

The fixed base 22 is firmly fixed by its outer surface 22a to the fixed frame 24 surrounding the structure described above by screwing or the like. Therefore, the sub table 16 is supported in a state of being floated from the inner surface of the fixed frame 24 with a predetermined space. Piezoelectric actuators 26x, 26y, and 26z extending in the x, y, and z directions are fixed to the fixed frame 24 through holes 18x, 18y, and 18z provided in the respective wall portions of the sub table 16. The other ends, ie, free ends of the piezoelectric actuators 26x, 26y, and 26z are located near or in contact with each surface of the main table 12, and press the main table 12 during driving (scanning). To move.

In this table mechanism, in order to move the main table 12 in the + x direction, the piezoelectric actuator 26 is used.
To extend x and then move it in the -x direction, the piezoelectric actuator 26x is contracted. By repeating this operation, the main table 12 is reciprocated (scanned) in the x direction. Similarly, when the main table 12 is moved in the ± y directions, the piezoelectric actuator 26y is expanded and contracted, and when it is moved in the ± z directions, the piezoelectric actuator 26z is expanded and contracted.

Next, the movement of the main table 12 at that time will be described with reference to FIG. 3 by taking the case of moving the main table 12 in the x direction as an example. In the figure, the state before the movement is shown by an imaginary line, and the state after the movement is shown by a solid line.

When the piezoelectric actuator 26x is extended and the main table 12 is pressed and moved in the + x direction, the two rod-shaped springs 14y connecting the main table 12 and the sub-table 16 are slanted with respect to the y-axis. Become. Therefore, the distance between the main table 12 and the sub table 16 is reduced by Δy. When the main table 12 is pushed in the + x direction, the sub table 16 also moves in the + x direction as the main table 12 moves. Therefore, the two rod-shaped springs 20y connecting the sub table 16 and the fixed base 22 are inclined with respect to the y-axis in the same direction in the opposite direction to the rod-shaped springs 14y. Therefore,
The distance between the fixed base 22 and the sub table 16 is also reduced by Δy. After all, the narrowing of the distance between the main table 12 and the sub-table 16 and the narrowing of the distance between the sub-table 16 and the fixed base 22 cancel each other out, so that the main table 12 does not shift in the y direction.

In other words, the main table 12 approaches the sub-table 16 by Δy, but the sub-table 16 also approaches the fixed base 22 by Δy. As a result, for the fixed base 22,
The main table 12 does not move in the y direction.

Such a bar-shaped spring 14y and a bar-shaped spring 20
With the movement of y, the z-direction shows a similar movement, that is, the sub-table 16 moves in the + x-direction, so that the subduction of the main table 12 in the −z-direction is automatically compensated. As a result, the main table 12 does not move in the z direction.

Therefore, the main table 12 does not move in the y-direction or the z-direction (strictly, it may move in the y-direction or the z-direction, but its amount is small), x Move only in the direction. Thereby, the main table 12 can be reciprocated (scanned) in the x direction with an amplitude of, for example, about 30 μm.

The movements when the main table 12 is moved in the x direction have been described above.
Also holds true when moving in the y and z directions. That is, when moving the main table 12 in the y direction,
By the action of the rod-shaped spring 14z and the rod-shaped spring 20z,
When the main table 12 is moved in the z direction, the sub-table 1 is moved by the action of the rod-shaped spring 14x and the rod-shaped spring 20x.
The subduction of the main table 12 towards 6 is compensated.

As described above, in the table mechanism of this embodiment, the main table 12 is independently moved with the same stroke in the x-direction, the y-direction, and the z-direction without being interfered by others. be able to. When applying this device to a scanning probe microscope, the main table 1
A sample stand on which a sample is placed, a probe for observation, and the like are attached to the unit 2. That is, the scanning object is indirectly held on the main table 12. Therefore, an object such as a sample or a probe can be independently moved in the x direction, the y direction, and the z direction with good symmetry.

The present invention is not limited to the above-described embodiments, but may include modifications that do not depart from the gist of the invention. The present invention includes the inventions of the following items.

1. A main table, a sub-table, a fixing member, and a first, second, which connects the main table and the sub-table,
Third main table supporting means, first, second and third sub table supporting means for connecting the sub table and the fixing member, and first force generating means for applying a force to the main table in the first direction. A table mechanism including a second force generating unit that applies a force to the main table in the second direction and a third force generating unit that applies a force to the main table in the third direction.

2. In the first item, each of the first, second, and third main table supporting means has two parallel bar-shaped spring members, and the first, second, and third sub-table supporting members are provided. A table mechanism wherein each of the means has two parallel bar-shaped spring members.

3. In the second item, the rod-shaped spring member of the first main table support means and the rod-shaped spring member of the first sub-table support means are positioned in parallel, and the rod-shaped spring member of the second main table support means and the second The bar-shaped spring members of the sub-table supporting means are parallel to each other, and the bar-shaped spring members of the third main table supporting means and the bar-shaped spring members of the third sub-table supporting means are positioned parallel to each other. .

4. In the third term, the arranging direction of the two bar-shaped spring members of the first main table supporting means and the arranging direction of the two bar-shaped spring members of the first sub-table supporting means are parallel to each other. The arranging direction of the two bar-shaped spring members of the main table supporting means and the arranging direction of the two bar-shaped spring members of the second auxiliary table supporting means are parallel to each other. A table mechanism in which the arranging direction of the rod-shaped spring members and the arranging direction of the two rod-shaped spring members of the third sub-table supporting means are parallel.

5. In the fourth item, both the bar-shaped spring member of the first main table supporting means and the bar-shaped spring member of the first sub-table supporting means are orthogonal to the first direction, and the bar-shaped spring member of the second main table supporting means is provided. Both the member and the bar-shaped spring member of the second sub-table support means are orthogonal to the second direction, and the bar-shaped spring member of the third main table support means and the bar-shaped spring member of the third sub-table support means are both A table mechanism that is orthogonal to the third direction.

6. In paragraph 5, the main table has first, second, and third planes orthogonal to each other, and the first direction coincides with the direction of the normal line set on the first plane. A table mechanism in which the second direction coincides with the direction of the normal line standing on the second plane and the third direction coincides with the direction of the normal line standing on the third plane.

7. In the sixth aspect, the bar-shaped spring member of the first main table supporting means and the bar-shaped spring member of the first sub-table supporting means are parallel to the third direction, and the bar-shaped spring member of the second main table supporting means is The bar-shaped spring member of the second auxiliary table supporting means is parallel to the first direction, and the bar-shaped spring member of the third main table supporting means and the bar-shaped spring member of the third auxiliary table supporting means are arranged in the second direction. Table mechanism that is parallel.

8. In the seventh aspect, the fixing member includes a fixing portion to which the rod-shaped spring member of the sub-table supporting means is connected, and a fixing frame that holds the fixing base. The main table, the sub-table, the fixing base, and the rod-shaped spring member are integrally formed. A table mechanism formed on the.

9. In paragraph 8, the first force generating means has a first laminated piezoelectric actuator having one end attached to the fixed frame and the other end located near the first plane of the main table. The second force generating means has a second laminated piezoelectric actuator having one end attached to the fixed frame and the other end located in the vicinity of the second plane of the main table. The force generating means has a third stacked piezoelectric actuator, one end of which is attached to the fixed frame and the other end of which is located in the vicinity of the third plane of the main table.

10. In the ninth aspect, the table mechanism in which the bar-shaped spring member of the second main table supporting means and the bar-shaped spring member of the second sub-table supporting means are aligned in the first direction.

[0033]

According to the present invention, it is possible to obtain a table mechanism which makes it possible to independently move an object such as a sample or a probe in the x direction, the y direction and the z direction.

[Brief description of drawings]

FIG. 1 is a perspective view of a table mechanism according to an embodiment of the present invention.

FIG. 2 is a trihedral view (front view, plan view, and right side view) of the table mechanism shown in FIG.

FIG. 3 is a diagram for explaining the movement when the main table is moved in the x direction.

[Explanation of symbols]

12 ... Main table, 14x, 14y, 14z ... Bar spring, 16 ... Sub table, 18x, 18y, 18z ... Hole,
20x, 20y, 20z ... bar springs, 22 ... fixing base, 2
4 ... Fixed frame, 26x, 26y, 26z ... Piezoelectric actuator.

Claims (3)

[Claims] 1. A table mechanism for moving an object to be loaded in x, y, and z directions, in which two bar-shaped spring members are provided on three adjoining surfaces of a main table forming a hexahedron. Are connected to the three surfaces of the sub-table that are orthogonal to each other, and two bar-shaped spring members in the same direction as the bar-shaped spring members are connected to the fixed base surrounding the main table in the sub-table surface. Characteristic table mechanism. 2. The piezoelectric actuator according to claim 1, wherein a piezoelectric actuator is inserted in a gap between the main table and the fixed base, and the piezoelectric actuator is arranged at the center between two rod-shaped spring members arranged on the main table. The table mechanism is characterized in that one end of the piezoelectric actuator is adhered to the fixed base, and one end of the other piezoelectric actuator is in contact with the main table by a pressing force. 3. The table mechanism according to claim 1, wherein the main table, the sub table, the fixed base, and the rod-shaped spring member are integrated.