EP1326097A3 - Process for forming a thin film and apparatus therefor - Google Patents

Process for forming a thin film and apparatus therefor Download PDF

Info

Publication number
EP1326097A3
EP1326097A3 EP02026463A EP02026463A EP1326097A3 EP 1326097 A3 EP1326097 A3 EP 1326097A3 EP 02026463 A EP02026463 A EP 02026463A EP 02026463 A EP02026463 A EP 02026463A EP 1326097 A3 EP1326097 A3 EP 1326097A3
Authority
EP
European Patent Office
Prior art keywords
light
forming
apparatus therefor
amount
thin film
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP02026463A
Other languages
German (de)
French (fr)
Other versions
EP1326097B1 (en
EP1326097A2 (en
Inventor
Yukihiro Hoya Corporation Takahashi
Takeshi Hoya Corporation Mitsuishi
Kenichi Hoya Corporation Shinde
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Publication of EP1326097A2 publication Critical patent/EP1326097A2/en
Publication of EP1326097A3 publication Critical patent/EP1326097A3/en
Application granted granted Critical
Publication of EP1326097B1 publication Critical patent/EP1326097B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements
    • G02B1/11—Anti-reflection coatings
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/54—Controlling or regulating the coating process
    • C23C14/542—Controlling the film thickness or evaporation rate
    • C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
    • C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B1/00—Optical elements characterised by the material of which they are made; Optical coatings for optical elements
    • G02B1/10—Optical coatings produced by application to, or surface treatment of, optical elements

Landscapes

  • Physics & Mathematics (AREA)
  • Chemical & Material Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Metallurgy (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Organic Chemistry (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Optical Elements (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
  • Inorganic Insulating Materials (AREA)
  • Optical Filters (AREA)

Abstract

To provide a process for forming a thin film which enables automatically forming thin films having constant optical properties in a great amount with stability and excellent reproducibility and to provide an apparatus therefor. <??>A material for vapor deposition (4) is vaporized by an electron gun (3) and an antireflection film is formed by vapor deposition on lenses (2a) held in a coat dome (2). The electric power applied to the electron gun (3) is control in a manner such that the transmitted or reflected amount of light measured by an optical film thickness meter (10) continuously during the film formation is close to or the same as a reference amount of light stored in a means for storing data of reference amounts of light which stores theoretically obtained reference amounts of light. <IMAGE>
EP02026463A 2001-12-28 2002-11-27 Process for forming a thin film and apparatus therefor Expired - Lifetime EP1326097B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2001401267A JP3848571B2 (en) 2001-12-28 2001-12-28 Thin film forming method and apparatus
JP2001401267 2001-12-28

Publications (3)

Publication Number Publication Date
EP1326097A2 EP1326097A2 (en) 2003-07-09
EP1326097A3 true EP1326097A3 (en) 2004-06-16
EP1326097B1 EP1326097B1 (en) 2007-01-03

Family

ID=19189749

Family Applications (1)

Application Number Title Priority Date Filing Date
EP02026463A Expired - Lifetime EP1326097B1 (en) 2001-12-28 2002-11-27 Process for forming a thin film and apparatus therefor

Country Status (7)

Country Link
US (1) US7182976B2 (en)
EP (1) EP1326097B1 (en)
JP (1) JP3848571B2 (en)
KR (1) KR100508007B1 (en)
CN (1) CN1253728C (en)
AT (1) ATE350679T1 (en)
DE (1) DE60217282T2 (en)

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US6972136B2 (en) * 2003-05-23 2005-12-06 Optima, Inc. Ultra low residual reflection, low stress lens coating and vacuum deposition method for making the same
KR100716704B1 (en) * 2004-03-03 2007-05-14 산요덴키가부시키가이샤 Measurement method of deposition thickness, formation method of material layer, deposition thickness measurement device and material layer formation device
JP4704711B2 (en) * 2004-08-31 2011-06-22 Ｈｏｙａ株式会社 Lens manufacturing method and program
TWI291047B (en) * 2005-08-08 2007-12-11 Ind Tech Res Inst Method and apparatus for inspection flexible display medium layer
CN100350278C (en) * 2005-11-15 2007-11-21 郑睿敏 Apparatus for controlling thickness of digital optical film
JP4626888B2 (en) * 2005-11-18 2011-02-09 富士ゼロックス株式会社 Document determination apparatus, document reading apparatus, image forming apparatus, and document determination method
EP1967891B1 (en) * 2005-12-28 2014-01-08 Tokai Optical Co., Ltd. Spectacle lens and spectacles
FR2916860B1 (en) * 2007-06-04 2010-10-01 Commissariat Energie Atomique METHOD FOR MANUFACTURING OPTICAL SILICA ELEMENT
JP4669522B2 (en) * 2008-01-08 2011-04-13 セイコーエプソン株式会社 Coloring structure manufacturing apparatus and manufacturing method of coloring structure
JP2009164020A (en) * 2008-01-09 2009-07-23 Sony Corp Manufacturing device of organic el element
WO2012078197A1 (en) * 2010-01-22 2012-06-14 Oakley, Inc. Eyewear with three-dimensional viewing capability
US8547635B2 (en) * 2010-01-22 2013-10-01 Oakley, Inc. Lenses for 3D eyewear
US8752959B2 (en) * 2010-07-13 2014-06-17 Shamir Optical Industry Ltd. Method and system for designing opthalmic lenses
GB2491151B (en) * 2011-05-24 2017-11-15 Qioptiq Ltd Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface
JP5949252B2 (en) 2011-12-02 2016-07-06 株式会社島津製作所 Sample preparation apparatus and sample preparation method for MALDI
CN102542107B (en) * 2011-12-28 2013-09-04 浙江大学 Method for controlling surface color of fluorine-doped tin oxide coated glass
JP6290637B2 (en) 2014-01-30 2018-03-07 浜松ホトニクス株式会社 Film thickness measuring method and film thickness measuring apparatus
US9657391B2 (en) * 2014-05-08 2017-05-23 Halliburton Energy Services, Inc. Optical transmission/reflection mode in-situ deposition rate control for ice fabrication
JP6600519B2 (en) * 2015-09-28 2019-10-30 株式会社Ｓｃｒｅｅｎホールディングス Film forming apparatus and data creation method
EP3346023A1 (en) * 2017-01-05 2018-07-11 Essilor International Method for layer by layer optimization of a thin film
EP3366804B1 (en) * 2017-02-22 2022-05-11 Satisloh AG Box coating apparatus for vacuum coating of substrates, in particular spectacle lenses
DE102017204861A1 (en) * 2017-03-23 2018-09-27 Carl Zeiss Smt Gmbh Method for determining a material removal and apparatus for the beam processing of a workpiece
CN107764523A (en) * 2017-11-30 2018-03-06 盛禛真空技术丹阳有限公司 Glasses lens plated visual monitor system and its application method
CN110793937B (en) * 2018-08-03 2022-08-16 张家港康得新光电材料有限公司 Membrane type determination method
CN117268270B (en) * 2023-11-23 2024-02-06 中国航发北京航空材料研究院 Real-time monitoring device and method for continuous chemical vapor deposition interface layer thickness

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408015A2 (en) * 1989-07-13 1991-01-16 Dainippon Screen Mfg. Co., Ltd. Method of measuring thickness of film
US5000575A (en) * 1989-09-06 1991-03-19 Rockwell International Corporation Method of fabricating gradient index optical films
US5425964A (en) * 1994-07-22 1995-06-20 Rockwell International Corporation Deposition of multiple layer thin films using a broadband spectral monitor
EP1094344A2 (en) * 1999-10-14 2001-04-25 Hoya Corporation Thin film forming method and apparatus

Family Cites Families (14)

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Publication number Priority date Publication date Assignee Title
US2472605A (en) * 1946-04-15 1949-06-07 Eastman Kodak Co Method of depositing optical interference coatings
US2771055A (en) * 1952-04-25 1956-11-20 Technicolor Corp Apparatus for coating optical interference layers
US3892490A (en) * 1974-03-06 1975-07-01 Minolta Camera Kk Monitoring system for coating a substrate
US4140078A (en) * 1974-03-16 1979-02-20 Leybold Heraeus Gmbh & Co. Kg Method and apparatus for regulating evaporating rate and layer build up in the production of thin layers
US4024291A (en) * 1975-06-17 1977-05-17 Leybold-Heraeus Gmbh & Co. Kg Control of vapor deposition
US4837044A (en) * 1987-01-23 1989-06-06 Itt Research Institute Rugate optical filter systems
JP2637820B2 (en) * 1989-03-27 1997-08-06 オリンパス光学工業株式会社 Optical film thickness measuring device
US5009485A (en) * 1989-08-17 1991-04-23 Hughes Aircraft Company Multiple-notch rugate filters and a controlled method of manufacture thereof
US5354575A (en) * 1993-04-16 1994-10-11 University Of Maryland Ellipsometric approach to anti-reflection coatings of semiconductor laser amplifiers
DE69522295T2 (en) * 1994-05-31 2002-04-18 Toray Industries METHOD AND DEVICE FOR PRODUCING A COATED SUBSTRATE
JP2001123269A (en) 1999-10-21 2001-05-08 Hoya Corp Method and apparatus for depositing thin film
JP3926073B2 (en) 1999-10-14 2007-06-06 Ｈｏｙａ株式会社 Thin film forming method and apparatus
JP3625736B2 (en) * 2000-04-27 2005-03-02 古河電気工業株式会社 Manufacturing method of optical filter
IL145699A (en) * 2001-09-30 2006-12-10 Nova Measuring Instr Ltd Method of thin film characterization

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0408015A2 (en) * 1989-07-13 1991-01-16 Dainippon Screen Mfg. Co., Ltd. Method of measuring thickness of film
US5000575A (en) * 1989-09-06 1991-03-19 Rockwell International Corporation Method of fabricating gradient index optical films
US5425964A (en) * 1994-07-22 1995-06-20 Rockwell International Corporation Deposition of multiple layer thin films using a broadband spectral monitor
EP1094344A2 (en) * 1999-10-14 2001-04-25 Hoya Corporation Thin film forming method and apparatus

Also Published As

Publication number Publication date
EP1326097B1 (en) 2007-01-03
US20030133124A1 (en) 2003-07-17
ATE350679T1 (en) 2007-01-15
DE60217282D1 (en) 2007-02-15
CN1253728C (en) 2006-04-26
DE60217282T2 (en) 2007-08-30
EP1326097A2 (en) 2003-07-09
JP2003202404A (en) 2003-07-18
KR20030057338A (en) 2003-07-04
KR100508007B1 (en) 2005-08-17
CN1430073A (en) 2003-07-16
US7182976B2 (en) 2007-02-27
JP3848571B2 (en) 2006-11-22

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