GB2491151B - Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface - Google Patents
Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surfaceInfo
- Publication number
- GB2491151B GB2491151B GB1108755.8A GB201108755A GB2491151B GB 2491151 B GB2491151 B GB 2491151B GB 201108755 A GB201108755 A GB 201108755A GB 2491151 B GB2491151 B GB 2491151B
- Authority
- GB
- United Kingdom
- Prior art keywords
- deposited
- inferring
- predicting
- apparatuses
- methods
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B21—MECHANICAL METAL-WORKING WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D—WORKING OR PROCESSING OF SHEET METAL OR METAL TUBES, RODS OR PROFILES WITHOUT ESSENTIALLY REMOVING MATERIAL; PUNCHING METAL
- B21D33/00—Special measures in connection with working metal foils, e.g. gold foils
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/046—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/54—Controlling or regulating the coating process
- C23C14/542—Controlling the film thickness or evaporation rate
- C23C14/545—Controlling the film thickness or evaporation rate using measurement on deposited material
- C23C14/547—Controlling the film thickness or evaporation rate using measurement on deposited material using optical methods
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/52—Controlling or regulating the coating process
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- General Chemical & Material Sciences (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1108755.8A GB2491151B (en) | 2011-05-24 | 2011-05-24 | Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface |
PCT/GB2012/000412 WO2012160321A1 (en) | 2011-05-24 | 2012-05-04 | Methods and apparatuses for measuring the thickness distribution of a deposited layer of coating material |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
GB1108755.8A GB2491151B (en) | 2011-05-24 | 2011-05-24 | Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface |
Publications (3)
Publication Number | Publication Date |
---|---|
GB201108755D0 GB201108755D0 (en) | 2011-07-06 |
GB2491151A GB2491151A (en) | 2012-11-28 |
GB2491151B true GB2491151B (en) | 2017-11-15 |
Family
ID=44279568
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
GB1108755.8A Active GB2491151B (en) | 2011-05-24 | 2011-05-24 | Methods and apparatuses for inferring or predicting the thickness distribution of a layer of coating material deposited or to be deposited on a curved surface |
Country Status (2)
Country | Link |
---|---|
GB (1) | GB2491151B (en) |
WO (1) | WO2012160321A1 (en) |
Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5084525A (en) * | 1973-12-04 | 1975-07-08 | ||
JPS57190735A (en) * | 1981-05-20 | 1982-11-24 | San Alum Kogyo Kk | Forming method for blade-shaped material formed by bending hard aluminum foil |
US5991018A (en) * | 1995-06-14 | 1999-11-23 | Kirin Beer Kabushiki Kaisha | Apparatus and method for inspecting coating layer |
EP1326097A2 (en) * | 2001-12-28 | 2003-07-09 | Hoya Corporation | Process for forming a thin film and apparatus therefor |
JP2004009105A (en) * | 2002-06-07 | 2004-01-15 | Canon Inc | Method and apparatus for forming curved plate shape reflecting optical element |
US20050263706A1 (en) * | 2004-05-25 | 2005-12-01 | Hyundai Heavy Industries Co., Ltd. | Method of measuring thickness of thin film using infrared thermal imaging system |
JP2008215957A (en) * | 2007-03-01 | 2008-09-18 | Toyota Motor Corp | Film thickness measuring apparatus, surface temperature measuring apparatus, film thickness measuring method and surface temperature measuring method |
JP2010018851A (en) * | 2008-07-10 | 2010-01-28 | Panasonic Corp | Film deposition apparatus |
JP2010207935A (en) * | 2009-03-09 | 2010-09-24 | Seiko Epson Corp | Wafer machining method and numerical control blasting device |
US20100316420A1 (en) * | 2009-06-16 | 2010-12-16 | Konica Minolta Business Technologies, Inc. | Image-supporting member and image-forming apparatus |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3752691A (en) * | 1971-06-29 | 1973-08-14 | Xerox Corp | Method of vacuum evaporation |
BE792316A (en) * | 1971-12-07 | 1973-06-05 | Philips Nv | PROCESS FOR MAKING MIRRORS FOR COLD LIGHT |
AU1940101A (en) * | 1999-12-03 | 2001-06-12 | Regents Of The University Of California, The | Method and system relating to thickness control of film vapor deposition |
-
2011
- 2011-05-24 GB GB1108755.8A patent/GB2491151B/en active Active
-
2012
- 2012-05-04 WO PCT/GB2012/000412 patent/WO2012160321A1/en active Application Filing
Patent Citations (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5084525A (en) * | 1973-12-04 | 1975-07-08 | ||
JPS57190735A (en) * | 1981-05-20 | 1982-11-24 | San Alum Kogyo Kk | Forming method for blade-shaped material formed by bending hard aluminum foil |
US5991018A (en) * | 1995-06-14 | 1999-11-23 | Kirin Beer Kabushiki Kaisha | Apparatus and method for inspecting coating layer |
EP1326097A2 (en) * | 2001-12-28 | 2003-07-09 | Hoya Corporation | Process for forming a thin film and apparatus therefor |
JP2004009105A (en) * | 2002-06-07 | 2004-01-15 | Canon Inc | Method and apparatus for forming curved plate shape reflecting optical element |
US20050263706A1 (en) * | 2004-05-25 | 2005-12-01 | Hyundai Heavy Industries Co., Ltd. | Method of measuring thickness of thin film using infrared thermal imaging system |
JP2008215957A (en) * | 2007-03-01 | 2008-09-18 | Toyota Motor Corp | Film thickness measuring apparatus, surface temperature measuring apparatus, film thickness measuring method and surface temperature measuring method |
JP2010018851A (en) * | 2008-07-10 | 2010-01-28 | Panasonic Corp | Film deposition apparatus |
JP2010207935A (en) * | 2009-03-09 | 2010-09-24 | Seiko Epson Corp | Wafer machining method and numerical control blasting device |
US20100316420A1 (en) * | 2009-06-16 | 2010-12-16 | Konica Minolta Business Technologies, Inc. | Image-supporting member and image-forming apparatus |
Also Published As
Publication number | Publication date |
---|---|
GB201108755D0 (en) | 2011-07-06 |
GB2491151A (en) | 2012-11-28 |
WO2012160321A1 (en) | 2012-11-29 |
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