EP1307657A1 - Two-shaft vacuum pump - Google Patents

Two-shaft vacuum pump

Info

Publication number
EP1307657A1
EP1307657A1 EP01960473A EP01960473A EP1307657A1 EP 1307657 A1 EP1307657 A1 EP 1307657A1 EP 01960473 A EP01960473 A EP 01960473A EP 01960473 A EP01960473 A EP 01960473A EP 1307657 A1 EP1307657 A1 EP 1307657A1
Authority
EP
European Patent Office
Prior art keywords
rotor
shaft
pump according
rotors
shafts
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01960473A
Other languages
German (de)
French (fr)
Other versions
EP1307657B1 (en
Inventor
Hartmut Kriehn
Lothar Brenner
Manfred Behling
Thomas Dreifert
Klaus Rofall
Heinrich Engländer
Michael Froitzheim
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Leybold GmbH
Original Assignee
Leybold Vakuum GmbH
Leybold Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Leybold Vakuum GmbH, Leybold Vacuum GmbH filed Critical Leybold Vakuum GmbH
Publication of EP1307657A1 publication Critical patent/EP1307657A1/en
Application granted granted Critical
Publication of EP1307657B1 publication Critical patent/EP1307657B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • F04C29/04—Heating; Cooling; Heat insulation
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F02—COMBUSTION ENGINES; HOT-GAS OR COMBUSTION-PRODUCT ENGINE PLANTS
    • F02B—INTERNAL-COMBUSTION PISTON ENGINES; COMBUSTION ENGINES IN GENERAL
    • F02B39/00—Component parts, details, or accessories relating to, driven charging or scavenging pumps, not provided for in groups F02B33/00 - F02B37/00
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/14—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons
    • F04C18/16—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with toothed rotary pistons with helical teeth, e.g. chevron-shaped, screw type

Definitions

  • the invention relates to a vacuum pump with two shafts and two rotors, which act on the shafts and work together, the rotors being overhung by means of the shafts.
  • the flying bearing is the cause of problems with the play-free fastening of the rotors on their shafts. It is known that in the case of a flying bearing it is expedient if the center of gravity of the rotating system is as close as possible to the bearing on the rotor side. This can be achieved by choosing the lightest possible material for the rotor, e.g. B. aluminum. However, aluminum has a significantly higher coefficient of thermal expansion (approx. 23 x 10 " ⁇ / K) than steel (12 x 10 " 6 / K), which is particularly suitable as a shaft material for flying bearings. Steel has a high modulus of elasticity, which is why it is possible to produce rigid shafts.
  • the present invention has for its object to provide a vacuum pump with the features mentioned that optimally meet the goals of the manufacturers and developers of these vacuum pumps. According to the invention, this object is achieved by the characterizing measures of the claims.
  • the shafts are made of a material with the highest possible modulus of elasticity (e.g. steel), precise guidance of the shafts and thus the rotors is ensured, so that the gaps between the rotors themselves and their housing walls can be kept small , The means for securing the rotors to the shafts without play also have this effect. Compared to the shaft material, light rotor materials allow the pumps to be operated at high speeds.
  • the means for securing the play-free fastening of the rotors on their shafts at all operating temperatures can be designed differently. If there are major differences in the expansion coefficients of the materials involved, the rotors and the shafts can be designed in such a way that the backlash is ensured by hot centering, cold centering and / or friction centering. Bandages that prevent the aluminum rotor attached to the steel shaft from expanding further are also possible. Finally, there can be cooling, supported or alone, that limits or prevents temperature fluctuations at the joints.
  • components with low densities e.g. plastics
  • the rotors are denoted by 1 (or 1 and 2 in FIG. 2) and their shafts by 3 (or 3, 4).
  • the rotors are overhung and equipped with axial hollow bores into which the free ends of the shafts 3, 4 extend.
  • the rotors 1, 2 are each attached to these shaft ends without play.
  • the rotor 1 has two end-side hollow bores 5 and 6, which are connected to one another approximately in the center of the rotor 1 via a narrower bore 7.
  • the suction-side opening of the hollow bore 6 is sealed with a disk 8 which, for. B. - as shown - is screwed into the opening of the hollow bore with the aid of a thread 9.
  • the annular, inwardly extending projection 12 is equipped with an axially directed collar 13, the direction and diameter of which are selected such that it faces the collar 11 of the shaft 1 from the inside is applied.
  • the shaft 3 is made of steel and the rotor 1 is made of aluminum with a larger expansion coefficient than steel and the collars 11, 13 are located at ambient temperature without play, there is an inner centering, which remains play-free even at higher temperatures.
  • axial bolts 14 are provided which are accessible from the hollow bore 6. They penetrate the projection 12 of the rotor 1 and are screwed into the collar 11 of the shaft.
  • a ring 15, which consists of the shaft material, is expediently assigned to the bolt heads. In addition to hot centering, this also results in friction centering.
  • shaft 3 and rotor 1 are equipped with a cooling channel system to reduce temperature problems.
  • the shaft 3 has a central bore 16.
  • this bore 16 there is a pipe section 17 which extends into the hollow bore 6 and serves to supply a coolant.
  • hollow (thin-walled) and / or light internals 18 fastened on the tube section 17 form an outer annular channel 19, which, inter alia, via the bore 7 with an outer annular channel 21 in the hollow bore 5, formed by the shaft 3 and the inner wall the hollow bore 5 is connected.
  • the coolant flows back via these ring channels 19, 21 and then via the ring channel 23 located in the shaft, formed by the tube section 17 and the inner wall of the bore 16.
  • a reverse flow direction of the coolant can also be useful.
  • the rotors 1, 2 are equipped on the bearing side with collars 25, 26 which surround the shafts 3, 4 from the outside. If the rotor material has a larger coefficient of expansion than the shafts, this type of external centering can cause play between the rotors and the shaft if the temperatures rise.
  • rings 27, 28 are provided, which in turn include the collars 25, 26. If the material of the rings 27, 28 has an expansion coefficient which is equal to or even less than the expansion coefficient of the shaft material, the rings 27, 28 prevent expansion of the collars 25, 26 and thus the undesired play when the temperatures rise.
  • a cooling system corresponding to the cooling system according to FIG. 1 is provided.
  • the ring channels 21, 22 extend into the area of the collars 25, 26. They reduce the maximum operating temperatures that occur and thus also eliminate the risk of play.
  • the rings 27, 28 are equipped with annular grooves in which piston rings, not shown, are located. Together with rings 29, 30 fixed to the housing, they form labyrinth seals 31, 32, which have the task of preventing the penetration of lubricant vapors from the bearings 33, 34 into the delivery spaces 35, 36 of the screw pump.
  • a disk 38 is used, which first has the task of closing the suction-side opening of the hollow bore 5.
  • the disc 38 is over Bolt firmly connected to the shaft 3 (bolt 39) as well as to the rotor (several bolts 41). If the rotor material has a larger coefficient of expansion than the shaft 3 and if the disk 38 is made of the shaft material, for example, then the fixed bolt connection prevents the development of play when the temperatures rise.
  • the disk 38 can be equipped with an axially directed collar 43 which engages in the hollow bore 5. This enables hot centering to be achieved at the same time. For this purpose, it is necessary that rotor 1, shaft 3 and disk 38 are installed without play when warm. Because of the above-mentioned ratios of the expansion coefficients, this fastening remains free of play with decreasing temperatures. This also applies to a rotor / shaft fastening without disk 38.
  • the rotor can also be attached to the shaft by means of a press fit connection. If the rotor is made of aluminum and the shaft is made of steel, then it is expedient that the ambient temperature at which this press fit connection is made corresponds approximately to the maximum temperature of the rotors (1, 2) that occurs when the two-shaft vacuum pump is in operation.
  • FIG. 3 also shows that the collar 43 and the end face of the shaft 3 lie against one another, preferably within an outer recess 44 in the shaft 3. Between the mutually facing bearing surfaces of the collar 43 and shaft 3 there is a fitting ring 45. By inserting fitting rings 45 with different thicknesses - or also by collars 43 with different heights - the axial position of the rotor 1 relative to the shaft 3 can be determined. This makes it possible to set the flank-flank play of the rotor 1 to the second rotor, not shown.
  • the disc 38 can simultaneously serve for balancing and / or for torque transmission (eg as a toothed disc).
  • FIG. 3 finally shows the possibility of arranging the rotor-side bearing 33 in a bearing-side recess 47 in the rotor 3.
  • An axially extending bearing bracket 48 engages in the recess 47.
  • the cooling channel system (bore 16 in the shaft 3, pipe section 17) extends to the bearing 33 in order to keep the bearing temperatures low.
  • the two shaft bearings 33, 51 have an O arrangement, as shown in FIG. 4.
  • the force application point moves through the pressure angle towards the rotor center of gravity.
  • a floating bearing 33 on the rotor side and a fixed bearing 51 on the side of the shaft 3 facing away from the rotor are also expedient.
  • Figure 5 shows this arrangement.
  • the force application point is in the middle of the bearing.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Combustion & Propulsion (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Abstract

The invention relates to a vacuum pump comprising two shafts (3, 4) and two rotors (1, 2) which co-operate with each other and which are fixed to the shafts. The rotors are cantilevered by means of the shafts. The invention aims to enable the rotors to be fixed to the shafts in a manner which is devoid of backlash, even during temperature changes. In order to achieve this, the shafts (3, 4) consist of a material having an elasticity module which is as high as possible, e.g. steel, the rotors (1, 2) consist of a material having a density which is as low as possible, e.g. aluminium or a titanium alloy, and means are provided to ensure that the rotors (1, 2) are fixed to the shafts (3, 4) in a manner which is devoid of backlash at all operating temperatures.

Description

Zweiwel1envaku pu peTwo-shaft vacuum pump
Die Erfindung betrifft eine Vakuumpumpe mit zwei Wellen und zwei auf den Wellen befestigten, zusammen wirkenden Rotoren, wobei die Rotoren mittels der Wellen fliegend gelagert sind.The invention relates to a vacuum pump with two shafts and two rotors, which act on the shafts and work together, the rotors being overhung by means of the shafts.
Die Entwickler und Hersteller von Pumpen der genannten Art, insbesondere Schraubenpumpen, verfolgen das Ziel, dass solche Pumpen bei vertretbaren Herstellkosten mit möglichst hohen Drehzahlen und möglichst kleinen Spaltleckagen betrieben werden können, um den Zweck - Vakuumerzeugung - möglichst effektiv zu erreichen. Voraussetzungen dafür sind eine präzise Lagerung und eine - auch im warmen Zustand - spielfreie Befestigung der Rotoren auf den Wellen. Bezüglich der Lagerung ist zu berücksichtigen, dass die Rotoren fliegend gelagert sein sollen. Das geschieht üblicherweise mit Hilfe von jeweils zwei Lagern, zwischen denen sich ein Antriebsmotor befindet. Gerade bei Schraubenvakuumpumpen hat sich diese Art der Lagerung als zweckmäßig erwiesen, da ihre Vorteile - keine Dichtung an der Saugseite, kostengünstiger als zweiflutige Lösungen - die Nachteile - höhere Anforderungen an Welle und Lagerung - überwiegen.The developers and manufacturers of pumps of the type mentioned, in particular screw pumps, pursue the goal that such pumps can be operated at the highest possible speeds and with the smallest possible gap leaks at reasonable manufacturing costs in order to achieve the purpose - vacuum generation - as effectively as possible. Preconditions for this are precise storage and - even when warm - the play-free attachment of the rotors to the shafts. With regard to the bearing, it should be taken into account that the rotors should be mounted on the fly. This is usually done with the help of two bearings, between which there is a drive motor. Especially with screw vacuum pumps, this type of bearing has proven to be useful, since its advantages - no seal on the suction side, less expensive than double-flow solutions - the disadvantages - higher demands on the shaft and bearing - outweigh the disadvantages.
Die fliegende Lagerung ist Ursache für Probleme mit der spielfreien Befestigung der Rotoren auf ihren Wellen. Es ist bekannt, dass es bei einer fliegenden Lagerung zweckmäßig ist, wenn sich der Schwerpunkt des rotierenden Systems möglichst in der Nähe des rotorseitigen Lagers befindet. Dieses lässt sich dadurch erreichen, dass ein möglichst leichter Werkstoff für den Rotor gewählt wird, z. B. Aluminium. Aluminium hat jedoch einen wesentlichen höheren Wärmeausdehnungskoeffizienten (ca. 23 x 10"δ/K) als Stahl (12 x 10"6/K) , der bei fliegenden Lagerungen als Wellenwerkstoff besonders geeignet ist. Stahl hat ein hohes Elastizitätsmodul, weshalb die Herstellung steifer Wellen möglich ist. Bei der Werkstoff- paarung Stahl / Aluminium ist es schwierig, eine bei allen Betriebstemperaturen (zwischen Umgebungstemperatur und etwa 200° C) spielfreie Befestigung des Rotors auf der Welle zu realisieren. Es besteht zwar die Möglichkeit, von der Ausdehnungsproblematik her günstigere Werkstoffe wie Stahl, Ti oder Keramik für den Rotor einzusetzen. Diese führen jedoch zu sehr schweren (St) oder teuren Rotoren (Ti, Keramik) . Auch kommt Aluminium auf Grund des geringen E-Moduls nicht als Wellenwerkstoff in Frage.The flying bearing is the cause of problems with the play-free fastening of the rotors on their shafts. It is known that in the case of a flying bearing it is expedient if the center of gravity of the rotating system is as close as possible to the bearing on the rotor side. This can be achieved by choosing the lightest possible material for the rotor, e.g. B. aluminum. However, aluminum has a significantly higher coefficient of thermal expansion (approx. 23 x 10 "δ / K) than steel (12 x 10 " 6 / K), which is particularly suitable as a shaft material for flying bearings. Steel has a high modulus of elasticity, which is why it is possible to produce rigid shafts. With the steel / aluminum material pairing, it is difficult to achieve a play-free fastening of the rotor to the shaft at all operating temperatures (between ambient temperature and around 200 ° C). It is possible to use cheaper materials such as steel, Ti or ceramic for the rotor due to the expansion problems. However, these lead to very heavy (St) or expensive rotors (Ti, ceramic). Because of the low modulus of elasticity, aluminum is also out of the question as a shaft material.
Aus der DE-199 63 171 A 1 ist eine Vakuumpumpe mit den eingangs genannten Merkmalen bekannt . Auf eine auch im warmen Zustand spielfreie Befestigung der Rotoren auf ihren Wellen wird nicht eingegangen.From DE-199 63 171 A 1 a vacuum pump with the features mentioned above is known. We will not go into detail about fastening the rotors to their shafts without any play even when warm.
Der vorliegenden Erfindung liegt die Aufgabe zugrunde, eine Vakuumpumpe mit den eingangs genannten Merkmalen zu schaffen, die die Ziele der Hersteller und Entwickler dieser Vakuumpumpen optimal erfüllen. Erfindungsgemäß wird diese Aufgabe durch die kennzeichnenden Maßnahmen der Patentansprüche gelöst.The present invention has for its object to provide a vacuum pump with the features mentioned that optimally meet the goals of the manufacturers and developers of these vacuum pumps. According to the invention, this object is achieved by the characterizing measures of the claims.
Dadurch, dass die Wellen aus einem Werkstoff mit einem möglichst hohen Elastizitätsmodul (z. B. Stahl) bestehen, ist eine präzise Führung der Wellen und damit der Rotoren sicher gestellt, so dass die Spalte zwischen den Rotoren selbst und ihren Gehäusewandungen klein gehalten werden können. Diese Wirkung haben auch die Mittel zur Sicherung einer spielfreien Befestigung der Rotoren auf den Wellen. Im Vergleich zum Wellenwerkstoff leichte Rotorwerkstoffe erlauben das Betreiben der Pumpen mit hohen Drehzahlen.Because the shafts are made of a material with the highest possible modulus of elasticity (e.g. steel), precise guidance of the shafts and thus the rotors is ensured, so that the gaps between the rotors themselves and their housing walls can be kept small , The means for securing the rotors to the shafts without play also have this effect. Compared to the shaft material, light rotor materials allow the pumps to be operated at high speeds.
Die Mittel zur Sicherung der spielfreien Befestigung der Rotoren auf ihren Wellen bei allen Betriebstemperaturen können verschieden ausgebildet sein. Bei größeren Differenzen der Ausdehnungskoeffizienten der beteiligten Werkstoffe können die Rotoren und die Wellen so ausgebildet sein, dass die Spielfreiheit durch Warmzentrierung, KaltZentrierung und/oder ReibZentrierung sichergestellt ist. Auch Bandagen, die die größere Ausdehnung des auf der Stahlwelle befestigten Aluminiumrotors verhindern, sind möglich. Schließlich kann - unterstützt oder allein - eine Kühlung vorhanden sein, die TemperaturSchwankungen der Fügestellen begrenzt o- der verhindert .The means for securing the play-free fastening of the rotors on their shafts at all operating temperatures can be designed differently. If there are major differences in the expansion coefficients of the materials involved, the rotors and the shafts can be designed in such a way that the backlash is ensured by hot centering, cold centering and / or friction centering. Bandages that prevent the aluminum rotor attached to the steel shaft from expanding further are also possible. Finally, there can be cooling, supported or alone, that limits or prevents temperature fluctuations at the joints.
Wie bereits erwähnt, wäre es einfach, Werkstoffe mit etwa gleichen Ausdehnungskoeffizienten einzusetzen. Dazu haben die Erfinder vorgeschlagen, pulvermetallurgisch hergestellte Aluminiumlegierungen einzusetzen, deren Hauptbestandteile Cu oder Si in der Legierung sind. Stahl und Aluminiumlegierungen dieser Art haben etwa gleiche Ausdehnungskoeffizienten (Dichte des Werkstoffes - Masse) , so dass durch Schrumpfverbindungen der üblichen Art eine spielfreie Befestigung der Rotoren auf den Wellen bei allen Betriebstemperaturen sichergestellt ist.As already mentioned, it would be easy to use materials with roughly the same expansion coefficient. To this end, the inventors proposed using aluminum alloys produced by powder metallurgy, the main components of which are Cu or Si in the alloy. Steel and aluminum alloys of this type have approximately the same expansion coefficients (density of the material - mass), so that shrink connections of the usual type ensure that the rotors are attached to the shafts at all operating temperatures without play.
Um zu erreichen, dass der Schwerpunkt der jeweils aus einem Rotor und einer Welle bestehenden Systeme zur Erzielung hoher Drehzahlen möglichst nahe beim rotorsei- tigen Lager liegt, können verschiedene Maßnahmen zweckmäßig sein:To achieve that the focus of the systems consisting of a rotor and a shaft to achieve high speeds is as close as possible to the rotor-side bearing, various measures can be expedient:
Hohlbohrung im Rotor, in welche die Stahlwelle nur teilweise eingreift; falls es zur Führung einer Kühlflüssigkeit nötig ist, können dazu Bauteile mit geringen Dichten (z.B. Kunststoffe) in der Bohrung untergebracht sein.Hollow bore in the rotor, in which the steel shaft only partially engages; if it is necessary to carry a coolant, components with low densities (e.g. plastics) can be accommodated in the bore.
Kurze Rotoren; dieses wird bei Schraubenpumpen in an sich bekannter Weise durch geeignete Steigungsänderung und/oder durch tief eingeschnittene Rotorprofile erreicht.Short rotors; In screw pumps, this is achieved in a manner known per se by suitable change in pitch and / or by deeply incised rotor profiles.
Unterbringung des rotorseitigen Wellenlagers in einer lagerseitigen Aussparung im Rotor.Housing the rotor-side shaft bearing in a bearing-side recess in the rotor.
O-Anordnung der beiden Wellenlager und/oder Loslager an der Rotorseite und Festlager an der dem Rotor abgewandten Seite der Welle. Weitere Vorteile und Einzelheiten sollen an Hand von in den Figuren 1 bis 5 schematisch dargestellten Ausfüh- rungsbeispielen erläutert werden. Es zeigen:O arrangement of the two shaft bearings and / or floating bearings on the rotor side and fixed bearing on the side of the shaft facing away from the rotor. Further advantages and details are to be explained on the basis of exemplary embodiments schematically illustrated in FIGS. 1 to 5. Show it:
In den Figuren sind die Rotoren mit 1 (bzw. 1 und 2 in Figur 2) und deren Wellen mit 3 (bzw. 3, 4) bezeichnet. Die Rotoren sind fliegend gelagert und mit axialen Hohlbohrungen ausgerüstet, in die hinein sich die freien Enden der Wellen 3, 4 erstrecken. Auf diesen Wellenenden sind die Rotoren 1, 2 jeweils spielfrei befestigt.In the figures, the rotors are denoted by 1 (or 1 and 2 in FIG. 2) and their shafts by 3 (or 3, 4). The rotors are overhung and equipped with axial hollow bores into which the free ends of the shafts 3, 4 extend. The rotors 1, 2 are each attached to these shaft ends without play.
Beim Ausführungsbeispiel nach Figur 1 weist der Rotor 1 zwei stirnseitige Hohlbohrungen 5 und 6 auf, die etwa in der Mitte des Rotors 1 über eine engere Bohrung 7 miteinander verbunden sind. Im zusammengebauten Zustand ist die saugseitige Öffnung der Hohlbohrung 6 mit einer Scheibe 8 dicht verschlossen, die z. B. - wie dargestellt - in die Öffnung der Hohlbohrung mit Hilfe eines Gewindes 9 eingeschraubt ist.In the exemplary embodiment according to FIG. 1, the rotor 1 has two end-side hollow bores 5 and 6, which are connected to one another approximately in the center of the rotor 1 via a narrower bore 7. In the assembled state, the suction-side opening of the hollow bore 6 is sealed with a disk 8 which, for. B. - as shown - is screwed into the opening of the hollow bore with the aid of a thread 9.
In der lagerseitigen Hohlbohrung 5 endet bereits die Welle 1, die stirnseitig mit einem axial gerichteten Kragen 11 ausgerüstet ist. Im Bereich der engeren, die Hohlbohrungen 5 und 6 miteinander verbindenden Bohrung 7 ist der ringförmige, sich nach innen erstreckende Vorsprung 12 mit einem axial gerichteten Kragen 13 ausgerüstet, dessen Richtung und Durchmesser so gewählt sind, dass er dem Kragen 11 der Welle 1 von innen anliegt. Besteht die Welle 3 aus Stahl und der Rotor 1 aus Aluminium mit einem im Vergleich zu Stahl größeren Ausdehnungskoeffizienten und liegen die Kragen 11, 13 bei Umgebungstemperatur einander spielfrei an, ergibt sich eine Innenzentrierung, die auch bei höheren Temperaturen spielfrei bleibt.The shaft 1, which is equipped with an axially directed collar 11 at the end, already ends in the bearing-side hollow bore 5. In the area of the narrower bore 7 connecting the hollow bores 5 and 6, the annular, inwardly extending projection 12 is equipped with an axially directed collar 13, the direction and diameter of which are selected such that it faces the collar 11 of the shaft 1 from the inside is applied. If the shaft 3 is made of steel and the rotor 1 is made of aluminum with a larger expansion coefficient than steel and the collars 11, 13 are located at ambient temperature without play, there is an inner centering, which remains play-free even at higher temperatures.
Zur Verbindung von Rotor 1 und Welle 3 sind axiale Bolzen 14 vorgesehen, die von der Hohlbohrung 6 her zugänglich sind. Sie durchsetzen den Vorsprung 12 des Rotors 1 und sind in den Kragen 11 der Welle eingeschraubt. Zweckmäßig ist den Bolzenköpfen ein Ring 15 zugeordnet, der aus dem Wellenwerkstoff besteht. Dadurch ergibt sich neben der Warmzentrierung noch eine Reibzentrierung.To connect the rotor 1 and shaft 3, axial bolts 14 are provided which are accessible from the hollow bore 6. They penetrate the projection 12 of the rotor 1 and are screwed into the collar 11 of the shaft. A ring 15, which consists of the shaft material, is expediently assigned to the bolt heads. In addition to hot centering, this also results in friction centering.
Im übrigen sind Welle 3 und Rotor 1 zur Reduzierung der Temperaturprobleme mit einem KühlkanalSystem ausgerüstet. Dazu weist die Welle 3 eine zentrale Bohrung 16 auf. In dieser Bohrung 16 befindet sich ein Rohrabschnitt 17, der sich bis in die Hohlbohrung 6 hinein erstreckt und der Zuführung eines Kühlmittels dient. In der Hohlbohrung 6 bilden hohle (dünnwandige) und/oder leichte, auf dem Rohrabschnitt 17 befestigte Einbauten 18 einen äußeren Ringkanal 19, der u.a. über die Bohrung 7 mit einem äußeren Ringkanal 21 in der Hohlbohrung 5, gebildet von der Welle 3 und der Innenwandung der Hohlbohrung 5, verbunden ist. Über diese Ringkanäle 19, 21 und danach über den in der Welle befindlichen Ringkanal 23, gebildet vom Rohrabschnitt 17 und der Innenwandung der Bohrung 16, strömt das Kühlmittel zurück. Eine umgekehrte Strömungsrichtung des Kühlmittels kann ebenfalls sinnvoll sein. In Figur 2 sind die Rotoren 1, 2 lagerseitig mit Kragen 25, 26 ausgerüstet, die die Wellen 3, 4 von außen umfassen. Hat der Rotorwerkstoff einen größeren Ausdehnungskoeffizienten als die Wellen, kann es bei einer Außenzentrierung dieser Art zu Spielen zwischen Rotoren und Welle kommen, wenn die Temperaturen ansteigen. Um das zu vermeiden, sind Ringe 27, 28 vorgesehen, die ihrerseits die Kragen 25, 26 umfassen. Hat der Werkstoff der Ringe 27, 28 einen Ausdehnungskoeffizienten, der gleich oder sogar kleiner als der Ausdehnungskoeffizient des Wellenwerkstoffes ist, verhindern die Ringe 27, 28 bei ansteigenden Temperaturen eine Ausdehnung der Kragen 25, 26 und damit die unerwünschten Spiele.In addition, shaft 3 and rotor 1 are equipped with a cooling channel system to reduce temperature problems. For this purpose, the shaft 3 has a central bore 16. In this bore 16 there is a pipe section 17 which extends into the hollow bore 6 and serves to supply a coolant. In the hollow bore 6, hollow (thin-walled) and / or light internals 18 fastened on the tube section 17 form an outer annular channel 19, which, inter alia, via the bore 7 with an outer annular channel 21 in the hollow bore 5, formed by the shaft 3 and the inner wall the hollow bore 5 is connected. The coolant flows back via these ring channels 19, 21 and then via the ring channel 23 located in the shaft, formed by the tube section 17 and the inner wall of the bore 16. A reverse flow direction of the coolant can also be useful. In Figure 2, the rotors 1, 2 are equipped on the bearing side with collars 25, 26 which surround the shafts 3, 4 from the outside. If the rotor material has a larger coefficient of expansion than the shafts, this type of external centering can cause play between the rotors and the shaft if the temperatures rise. To avoid this, rings 27, 28 are provided, which in turn include the collars 25, 26. If the material of the rings 27, 28 has an expansion coefficient which is equal to or even less than the expansion coefficient of the shaft material, the rings 27, 28 prevent expansion of the collars 25, 26 and thus the undesired play when the temperatures rise.
Ein dem Kühlsystem nach Figur 1 entsprechendes Kühlsystem ist vorgesehen. Die Ringkanäle 21, 22 erstrecken sich bis in den Bereich der Kragen 25, 26. Sie reduzieren die maximal auftretenden Betriebstemperaturen und beseitigen damit ebenfalls die Gefahr von Spielen.A cooling system corresponding to the cooling system according to FIG. 1 is provided. The ring channels 21, 22 extend into the area of the collars 25, 26. They reduce the maximum operating temperatures that occur and thus also eliminate the risk of play.
Von außen sind die Ringe 27, 28 mit ringförmigen Nuten ausgerüstet, in denen sich nicht dargestellte Kolbenringe befinden. Sie bilden gemeinsam mit gehäusefesten Ringen 29, 30 Labyrinthdichtungen 31, 32, die die Aufgabe haben, das Eindringen von Schmiermitteldämpfen von den Lagern 33, 34 in die Förderräume 35, 36 der Schraubenpumpe zu verhindern.From the outside, the rings 27, 28 are equipped with annular grooves in which piston rings, not shown, are located. Together with rings 29, 30 fixed to the housing, they form labyrinth seals 31, 32, which have the task of preventing the penetration of lubricant vapors from the bearings 33, 34 into the delivery spaces 35, 36 of the screw pump.
Beim Ausführungsbeispiel nach Figur 3 ist eine Reibzentrierung realisiert. Dazu dient eine Scheibe 38, die zunächst die Aufgabe hat, die saugseitige Öffnung der Hohlbohrung 5 zu verschließen. Die Scheibe 38 ist über Bolzen sowohl mit der Welle 3 (Bolzen 39) als auch mit dem Rotor (mehrere Bolzen 41) fest verbunden. Hat das Rotormaterial einen größeren Ausdehnungskoeffizienten als die Welle 3 und besteht die Scheibe 38 beispielsweise aus dem Wellenwerkstoff, dann verhindert die feste Bolzenverbindung bei ansteigenden Temperaturen die Entstehung eines Spiels .In the exemplary embodiment according to FIG. 3, friction centering is realized. For this purpose, a disk 38 is used, which first has the task of closing the suction-side opening of the hollow bore 5. The disc 38 is over Bolt firmly connected to the shaft 3 (bolt 39) as well as to the rotor (several bolts 41). If the rotor material has a larger coefficient of expansion than the shaft 3 and if the disk 38 is made of the shaft material, for example, then the fixed bolt connection prevents the development of play when the temperatures rise.
Wie in Figur 3 dargestellt, kann die Scheibe 38 mit einem axial gerichteten Kragen 43 ausgerüstet sein, der in die Hohlbohrung 5 eingreift. Dadurch kann gleichzeitig eine Warmzentrierung erreicht werden. Dazu ist es erforderlich, dass Rotor 1, Welle 3 und Scheibe 38 im warmen Zustand spielfrei montiert werden. Wegen der erwähnten Verhältnisse der Ausdehnungskoeffizienten bleibt diese Befestigung bei abnehmenden Temperaturen spielfrei. Dieses gilt auch für eine Rotor-/Welle-Befestigung ohne Scheibe 38.As shown in FIG. 3, the disk 38 can be equipped with an axially directed collar 43 which engages in the hollow bore 5. This enables hot centering to be achieved at the same time. For this purpose, it is necessary that rotor 1, shaft 3 and disk 38 are installed without play when warm. Because of the above-mentioned ratios of the expansion coefficients, this fastening remains free of play with decreasing temperatures. This also applies to a rotor / shaft fastening without disk 38.
Die Befestigung des Rotors auf der Welle kann auch mittels einer Presssitzverbindung erfolgen. Bestehen der Rotor aus Aluminium und die Welle aus Stahl, dann ist es dabei zweckmäßig, dass die Umgebungstemperatur, bei welcher diese Presssitzverbindung hergestellt wird, etwa der maximalen Temperatur der Rotoren (1, 2) entspricht, die beim Betrieb der Zweiwellenvakuumpumpe auftritt.The rotor can also be attached to the shaft by means of a press fit connection. If the rotor is made of aluminum and the shaft is made of steel, then it is expedient that the ambient temperature at which this press fit connection is made corresponds approximately to the maximum temperature of the rotors (1, 2) that occurs when the two-shaft vacuum pump is in operation.
Eine Verbindung dieser Art ist bei allen während des Betriebs der Zweiwellenvakuumpumpe auftretenden Betriebstemperaturen spielfrei. In Figur 3 ist noch dargestellt, dass Kragen 43 und Stirnseite der Welle 3 einander aufliegen, vorzugsweise innerhalb einer äußeren Aussparung 44 in der Welle 3. Zwischen den einander zugewandten Auflageflächen von Kragen 43 und Welle 3 befindet sich ein Passring 45. Durch Einlegen von Passringen 45 mit verschiedenen Dicken - oder auch durch Kragen 43 mit verschiedenen Höhen - kann die axiale Position des Rotors 1 zur Welle 3 bestimmt werden. Dadurch besteht die Möglichkeit, das Flanke-Flanke-Spiel des Rotors 1 zum zweiten, nicht dargestellten Rotor einzustellen. Die Scheibe 38 kann gleichzeitig zum Wuchtausgleich und/oder zur Drehmomentenübertragung (z.B. als Zahnscheibe) dienen.A connection of this type is free of play at all operating temperatures that occur during operation of the twin-shaft vacuum pump. FIG. 3 also shows that the collar 43 and the end face of the shaft 3 lie against one another, preferably within an outer recess 44 in the shaft 3. Between the mutually facing bearing surfaces of the collar 43 and shaft 3 there is a fitting ring 45. By inserting fitting rings 45 with different thicknesses - or also by collars 43 with different heights - the axial position of the rotor 1 relative to the shaft 3 can be determined. This makes it possible to set the flank-flank play of the rotor 1 to the second rotor, not shown. The disc 38 can simultaneously serve for balancing and / or for torque transmission (eg as a toothed disc).
Figur 3 zeigt schließlich die Möglichkeit, das rotor- seitige Lager 33 in einer lagerseitigen Aussparung 47 im Rotor 3 anzuordnen. In die Aussparung 47 greift ein sich axial erstreckender Lagerträger 48 ein. Das Kühlkanalsystem (Bohrung 16 in der Welle 3, Rohrabschnitt 17) erstreckt sich bis zum Lager 33, um die Lagertemperaturen niedrig zu halten.FIG. 3 finally shows the possibility of arranging the rotor-side bearing 33 in a bearing-side recess 47 in the rotor 3. An axially extending bearing bracket 48 engages in the recess 47. The cooling channel system (bore 16 in the shaft 3, pipe section 17) extends to the bearing 33 in order to keep the bearing temperatures low.
Um die gewünschten hohen Drehzahlen sicher zu erreichen, ist es zweckmäßig, wenn die beiden Wellenlager 33, 51 eine O-Anordnung aufweisen, wie sie in Figur 4 dargestellt ist. Bei Lagern dieser Art wandert der Kraftangriffspunkt durch den Druckwinkel in Richtung Rotorschwerpunkt. Unter diesem Gesichtspunkt ist auch ein Loslager 33 an der Rotorseite und ein Festlager 51 an der dem Rotor abgewandten Seite der Welle 3 zweckmäßig. Figur 5 zeigt diese Anordnung. Der Kraftangriffspunkt liegt in der Lagermitte. In order to reliably achieve the desired high speeds, it is expedient if the two shaft bearings 33, 51 have an O arrangement, as shown in FIG. 4. In bearings of this type, the force application point moves through the pressure angle towards the rotor center of gravity. From this point of view, a floating bearing 33 on the rotor side and a fixed bearing 51 on the side of the shaft 3 facing away from the rotor are also expedient. Figure 5 shows this arrangement. The force application point is in the middle of the bearing.

Claims

PATENTANSPRUCHE PATENT CLAIMS
1. Vakuumpumpe mit zwei Wellen (3, 4) und zwei auf den Wellen befestigten, zusammen wirkenden Rotoren (1, 2), wobei die Rotoren mittels der Wellen fliegend gelagert sind, dadurch gekennzeichnet, dass die Wellen (3, 4) aus einem Werkstoff mit möglichst hohem Elastizitätsmodul, z.B. Stahl, und die Rotoren (1, 2) aus einem Werkstoff mit möglichst geringer Dichte, z.B. Aluminium oder einer Titanlegierung, bestehen und dass Mittel zur Sicherung einer spielfreien Befestigung der Rotoren (1, 2) auf den Wellen (3, 4) bei allen Betriebstemperaturen vorgesehen sind.1. Vacuum pump with two shafts (3, 4) and two rotors (1, 2) fastened on the shafts, interacting, the rotors being overhung by means of the shafts, characterized in that the shafts (3, 4) consist of one Material with the highest possible modulus of elasticity, e.g. Steel, and the rotors (1, 2) made of a material with the lowest possible density, e.g. Aluminum or a titanium alloy, and that means for securing a play-free attachment of the rotors (1, 2) on the shafts (3, 4) are provided at all operating temperatures.
2. Pumpe nach Anspruch 1 , dadurch gekennzeichnet, dass Mittel zur Kaltzentrierung, Warmzentrierung und/oder Reibzentrierung des Rotors (1, 2) auf seiner Welle (3, 4) vorgesehen sind.2. Pump according to claim 1, characterized in that means for cold centering, hot centering and / or friction centering of the rotor (1, 2) on its shaft (3, 4) are provided.
3. Pumpe nach Anspruch 2 , dadurch gekennzeichnet, dass Mittel zur Warmzentrierung aus axial sich erstreckenden Kragenabschnitten (12, 13) am Rotor (1, 2) bzw. an der Welle (3, 4) bestehen und dass der Kragenabschnitt (13) des Rotors (1, 2) innen liegt.3. Pump according to claim 2, characterized in that means for warm centering consist of axially extending collar sections (12, 13) on the rotor (1, 2) or on the shaft (3, 4) and that the collar section (13) of the The rotor (1, 2) is inside.
4. Pumpe nach Anspruch 2 , dadurch gekennzeichnet, dass Mittel zur Reibzentrierung aus axial gerichteten Bolzen (14, 39, 41) bestehen, mit denen Rotor (1, 2) und Welle (3, 4) miteinander verbunden sind.4. Pump according to claim 2, characterized in that means for friction centering consist of axially directed bolts (14, 39, 41) with which the rotor (1, 2) and shaft (3, 4) are connected to one another.
5. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass der Rotor (1, 2) hohl gebohrt ist und dass eine auf der Saugseite des Rotors angeordnete Scheibe (38) vorgesehen ist.5. Pump according to claim 1, characterized in that the rotor (1, 2) is drilled hollow and that a disc (38) arranged on the suction side of the rotor is provided.
6. Pumpe nach Anspruch 5 , dadurch gekennzeichnet, dass die Scheibe (38) mit einem in die Hohlbohrung (5) des Rotors (1, 2) eingreifenden Kragen (43) ausgerüstet ist, der eine Kaltzentrierung bewirkt.6. Pump according to claim 5, characterized in that the disc (38) is equipped with a collar (43) engaging in the hollow bore (5) of the rotor (1, 2), which causes cold centering.
7. Pumpe nach Anspruch 6 , dadurch gekennzeichnet, dass Kragen (43) und Welle (3) einander aufliegen, und zwar über einen Passring (45) .7. Pump according to claim 6, characterized in that the collar (43) and shaft (3) rest on one another, specifically via a fitting ring (45).
8. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass der Rotor (1, 2) mit einem Kragen (25, 26) ausgerüstet ist, der die Welle (3, 4) umfasst, und dass eine Bandage (27, 28) vorgesehen ist, die ihrerseits den Kragen (25, 26) umfasst.8. Pump according to claim 1, characterized in that the rotor (1, 2) with a collar (25, 26) is equipped, which comprises the shaft (3, 4), and that a bandage (27, 28) is provided, which in turn comprises the collar (25, 26).
9. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sich in Höhe der Passstellen zwischen Welle (3, 4) und Rotor (1, 2) eine Kühlung befindet.9. Pump according to one of the preceding claims, characterized in that there is a cooling at the level of the fitting points between the shaft (3, 4) and rotor (1, 2).
10. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass die Ausdehnungskoeffizienten der Werkstoffe des Rotors (1, 2) und der Welle (3, 4) etwa gleich sind.10. Pump according to claim 1, characterized in that the expansion coefficients of the materials of the rotor (1, 2) and the shaft (3, 4) are approximately the same.
11. Pumpe nach Anspruch 10, dadurch gekennzeichnet, dass die Welle (3, 4) aus Stahl und der Rotor (1, 2) aus einer pulvermetallurgisch hergestellten A- luminiumlegierung besteht, deren Hauptbestandteile Cu oder Si in der Legierung sind.11. Pump according to claim 10, characterized in that the shaft (3, 4) made of steel and the rotor (1, 2) consists of a powder-metallurgically produced aluminum alloy, the main components of which are Cu or Si in the alloy.
12. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass der Rotor (1, 2) einen Hohlraum aufweist und dass die Welle (3, 4) den Hohlraum nur teilweise durchsetzt.12. Pump according to one of the preceding claims, characterized in that the rotor (1, 2) has a cavity and that the shaft (3, 4) only partially penetrates the cavity.
13. Pumpe nach Anspruch 12, dadurch gekennzeichnet, dass sich im von der Welle (3, 4) nicht besetzten Hohlraum leichte Bauteile (18) befinden, die eine Kühlmittelströmung führen.13. Pump according to claim 12, characterized in that there are light components (18) in the cavity not occupied by the shaft (3, 4), which conduct a coolant flow.
14. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die Rotoren (1, 2) in axialer Richtung möglichst kurz sind und dass das Gewinde eine von der Saugseite zur Druckseite abnehmende Steigung hat.14. Pump according to one of the preceding claims, characterized in that the rotors (1, 2) in Axial direction are as short as possible and that the thread has a decreasing slope from the suction side to the pressure side.
15. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass sich das rotorseitige Lager (33) in einer Aussparung (47) im Rotor (1,15. Pump according to one of the preceding claims, characterized in that the rotor-side bearing (33) in a recess (47) in the rotor (1,
2) befindet.2) is located.
16. Pumpe nach einem der vorhergehenden Ansprüche, dadurch gekennzeichnet, dass die beiden Lager (33, 51) der Welle (3, 4) eine O-Anordnung haben.16. Pump according to one of the preceding claims, characterized in that the two bearings (33, 51) of the shaft (3, 4) have an O arrangement.
17. Pumpe nach einem der Ansprüche 1 bis 15, dadurch gekennzeichnet, dass das dem Rotor (1, 2) benachbarte Lager (33) ein Loslager und dass vom Rotor17. Pump according to one of claims 1 to 15, characterized in that the rotor (1, 2) adjacent bearing (33) is a floating bearing and that of the rotor
(1, 2) entfernt gelegene Lager (51) ein Festlager ist.(1, 2) distant bearing (51) is a fixed bearing.
18. Verfahren zur Herstellung einer Einheit, bestehend aus einem hohl gebohrten, aus Aluminium bestehenden Rotor (1, 2) und einer die Hohlbohrung (5) im Rotor zumindest zum Teil durchsetzenden Welle (3, 4) aus Stahl, für eine Zweiwellenvakuumpumpe, dadurch gekennzeichnet, dass zwischen dem Rotor (1, 2) und der Welle (3, 4) eine Presssitzverbindung hergestellt wird und dass die Umgebungstemperatur, bei welcher diese Presssitzverbindung hergestellt wird, etwa der maximalen Temperatur der Rotoren18. A method for producing a unit, consisting of a hollow drilled, aluminum rotor (1, 2) and a hollow bore (5) in the rotor at least partially penetrating shaft (3, 4) made of steel, for a two-shaft vacuum pump, thereby characterized in that a press fit connection is established between the rotor (1, 2) and the shaft (3, 4) and that the ambient temperature at which this press fit connection is established is approximately the maximum temperature of the rotors
(1, 2) entspricht, die beim Betrieb der Zweiwel- 1envakuumpumpe auftritt. (1, 2) corresponds to that which occurs during the operation of the double-shaft vacuum pump.
EP01960473A 2000-08-10 2001-07-06 Two-shaft vacuum pump Expired - Lifetime EP1307657B1 (en)

Applications Claiming Priority (3)

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DE10039006A DE10039006A1 (en) 2000-08-10 2000-08-10 Two-shaft vacuum pump
DE10039006 2000-08-10
PCT/EP2001/007739 WO2002012726A1 (en) 2000-08-10 2001-07-06 Two-shaft vacuum pump

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EP1307657A1 true EP1307657A1 (en) 2003-05-07
EP1307657B1 EP1307657B1 (en) 2007-12-12

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JP (1) JP4944347B2 (en)
KR (1) KR100948988B1 (en)
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Families Citing this family (21)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19963171A1 (en) * 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Screw-type vacuum pump used in cooling circuits has guide components located in open bores in shafts serving for separate guiding of inflowing and outflowing cooling medium
DE10039006A1 (en) 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Two-shaft vacuum pump
US7963744B2 (en) 2004-09-02 2011-06-21 Edwards Limited Cooling of pump rotors
DE102004058056A1 (en) * 2004-12-02 2006-06-08 Leybold Vacuum Gmbh gearing
US20080121497A1 (en) * 2006-11-27 2008-05-29 Christopher Esterson Heated/cool screw conveyor
KR100900821B1 (en) * 2008-02-04 2009-06-04 (주)경인정밀기계 Apparatus for regulating backlash between reduction gears
KR101297743B1 (en) 2008-10-10 2013-08-20 가부시키가이샤 아루박 Dry pump
JP2010127119A (en) * 2008-11-25 2010-06-10 Ebara Corp Dry vacuum pump unit
JPWO2011019048A1 (en) 2009-08-14 2013-01-17 株式会社アルバック Dry pump
US8764424B2 (en) 2010-05-17 2014-07-01 Tuthill Corporation Screw pump with field refurbishment provisions
DE102010061202A1 (en) * 2010-12-14 2012-06-14 Gebr. Becker Gmbh vacuum pump
DE102011108092A1 (en) 2011-07-19 2013-01-24 Multivac Sepp Haggenmüller Gmbh & Co. Kg Cleaning method and system for vacuum pump
KR101253117B1 (en) 2011-12-16 2013-04-10 주식회사 동방플랜텍 Multi-stage screw vacuum-pump
EP2615307B1 (en) 2012-01-12 2019-08-21 Vacuubrand Gmbh + Co Kg Screw vacuum pump
KR101333056B1 (en) 2012-01-20 2013-11-26 주식회사 코디박 Screw rotor type vaccum pump with built in motor having cooling function
DE202013010195U1 (en) * 2013-11-12 2015-02-18 Oerlikon Leybold Vacuum Gmbh Vacuum pump rotor device and vacuum pump
EP3085964B1 (en) * 2015-04-21 2019-12-11 Pfeiffer Vacuum Gmbh Production of a vacuum pump part by metallic additive manufacturing
DE102018115732A1 (en) 2018-06-29 2020-01-02 Schaeffler Technologies AG & Co. KG Rolling bearings with integrated current discharge function
JP7003305B2 (en) * 2019-02-13 2022-01-20 三菱電機株式会社 Compressor and air conditioner
TW202037814A (en) * 2019-04-10 2020-10-16 亞台富士精機股份有限公司 Rotor and roots pump
CN112012931B (en) * 2020-09-04 2022-05-24 浙江思科瑞真空技术有限公司 Cooling method of pump rotor

Family Cites Families (33)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE413237C (en) 1924-07-29 1925-05-06 Heinrich Timmer Process for the production of hollow metal handles from seamlessly drawn tube for cutlery or similar blades
DE972862C (en) * 1953-10-27 1959-10-15 Svenska Rotor Maskiner Ab Rotary piston machine for the compression or expansion of a gas
FR1290239A (en) 1961-02-28 1962-04-13 Alsacienne Constr Meca Vacuum pump
DE3124247C1 (en) * 1981-06-19 1983-06-01 Boge Kompressoren Otto Boge Gmbh & Co Kg, 4800 Bielefeld Screw compressor
JPH0121192Y2 (en) * 1985-06-07 1989-06-23
JPS63243478A (en) * 1987-03-30 1988-10-11 Aisin Seiki Co Ltd Rotor for fluid equipment
JPH0672616B2 (en) 1987-04-21 1994-09-14 株式会社ゼクセル Steel shaft composite aluminum alloy rotor
JPS6466488A (en) * 1987-09-05 1989-03-13 Daihatsu Motor Co Ltd Composite rotor for supercharger
JPH03213688A (en) * 1990-01-17 1991-09-19 Hitachi Ltd Screw vacuum pump
JPH0533815A (en) * 1990-09-29 1993-02-09 Mazda Motor Corp Connecting structure of rotary shaft and rotor of rotary machine and manufacture thereof
JPH04298696A (en) * 1991-03-26 1992-10-22 Mazda Motor Corp Rotary compressor
JPH05164076A (en) * 1991-12-17 1993-06-29 Hitachi Ltd Screw type dry vacuum pump
JP2873888B2 (en) * 1991-12-27 1999-03-24 本田技研工業株式会社 Screw pump rotor
JP3569924B2 (en) * 1992-03-19 2004-09-29 松下電器産業株式会社 Fluid rotating device
JP3018720B2 (en) * 1992-03-19 2000-03-13 石川島播磨重工業株式会社 Composite material rotating body and method of manufacturing the same
JPH07301211A (en) * 1994-05-06 1995-11-14 Tochigi Fuji Ind Co Ltd Shaft fixing device
JPH08108459A (en) * 1994-10-06 1996-04-30 Japan Steel Works Ltd:The Cap for extruder and production thereof
JPH08261183A (en) * 1995-03-27 1996-10-08 Tochigi Fuji Ind Co Ltd Hollow rotor for screw fluid machine
DE19522558A1 (en) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Displacement pump for gases
DE19522559A1 (en) * 1995-06-21 1997-01-02 Sihi Ind Consult Gmbh Axial delivery compressor, especially screw compressor
PT834018E (en) 1995-06-21 2000-05-31 Sterling Ind Consult Gmbh HELICOIDAL FILL COMPRESSOR FOR MULTIPLE STATIONS
JPH09137731A (en) * 1995-11-16 1997-05-27 Tochigi Fuji Ind Co Ltd Screw type supercharger
JP3432679B2 (en) * 1996-06-03 2003-08-04 株式会社荏原製作所 Positive displacement vacuum pump
JPH10281089A (en) * 1997-04-03 1998-10-20 Matsushita Electric Ind Co Ltd Vacuum pump
DE19745615A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Screw vacuum pump with rotors
DE19745616A1 (en) * 1997-10-10 1999-04-15 Leybold Vakuum Gmbh Cooling system for helical vacuum pump
DE19817351A1 (en) * 1998-04-18 1999-10-21 Peter Frieden Screw spindle vacuum pump with gas cooling
DE19820523A1 (en) * 1998-05-08 1999-11-11 Peter Frieden Spindle screw pump assembly for dry compression of gases
DE19839501A1 (en) 1998-08-29 2000-03-02 Leybold Vakuum Gmbh Dry compacting screw pump
DE19963171A1 (en) 1999-12-27 2001-06-28 Leybold Vakuum Gmbh Screw-type vacuum pump used in cooling circuits has guide components located in open bores in shafts serving for separate guiding of inflowing and outflowing cooling medium
DE19963173B4 (en) * 1999-12-27 2011-05-19 Leybold Vakuum Gmbh Screw vacuum pump
JP2001193677A (en) * 2000-01-11 2001-07-17 Asuka Japan:Kk Screw fluid machine
DE10039006A1 (en) 2000-08-10 2002-02-21 Leybold Vakuum Gmbh Two-shaft vacuum pump

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
See references of WO0212726A1 *

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CN1273741C (en) 2006-09-06
CN1446291A (en) 2003-10-01
KR20030027009A (en) 2003-04-03
DE50113380D1 (en) 2008-01-24
US20040091380A1 (en) 2004-05-13
US6863511B2 (en) 2005-03-08
DE10039006A1 (en) 2002-02-21
TW538199B (en) 2003-06-21
KR100948988B1 (en) 2010-03-23
JP4944347B2 (en) 2012-05-30
WO2002012726A1 (en) 2002-02-14
JP2004506140A (en) 2004-02-26
EP1307657B1 (en) 2007-12-12
AU2001281962A1 (en) 2002-02-18

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