EP1201928A3 - Scheiben für eine Turbomolekularpumpe - Google Patents

Scheiben für eine Turbomolekularpumpe Download PDF

Info

Publication number
EP1201928A3
EP1201928A3 EP01122335A EP01122335A EP1201928A3 EP 1201928 A3 EP1201928 A3 EP 1201928A3 EP 01122335 A EP01122335 A EP 01122335A EP 01122335 A EP01122335 A EP 01122335A EP 1201928 A3 EP1201928 A3 EP 1201928A3
Authority
EP
European Patent Office
Prior art keywords
disks
molecular pump
turbo molecular
blades
dividing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP01122335A
Other languages
English (en)
French (fr)
Other versions
EP1201928B1 (de
EP1201928A2 (de
Inventor
Tobias Stoll
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Pfeiffer Vacuum GmbH
Original Assignee
Pfeiffer Vacuum GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Family has litigation
First worldwide family litigation filed litigation Critical https://patents.darts-ip.com/?family=7660850&utm_source=google_patent&utm_medium=platform_link&utm_campaign=public_patent_search&patent=EP1201928(A3) "Global patent litigation dataset” by Darts-ip is licensed under a Creative Commons Attribution 4.0 International License.
Application filed by Pfeiffer Vacuum GmbH filed Critical Pfeiffer Vacuum GmbH
Publication of EP1201928A2 publication Critical patent/EP1201928A2/de
Publication of EP1201928A3 publication Critical patent/EP1201928A3/de
Application granted granted Critical
Publication of EP1201928B1 publication Critical patent/EP1201928B1/de
Anticipated expiration legal-status Critical
Revoked legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • F04D19/042—Turbomolecular vacuum pumps
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/26—Rotors specially for elastic fluids
    • F04D29/32—Rotors specially for elastic fluids for axial flow pumps
    • F04D29/321—Rotors specially for elastic fluids for axial flow pumps for axial flow compressors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/40—Casings; Connections of working fluid
    • F04D29/52—Casings; Connections of working fluid for axial pumps
    • F04D29/54—Fluid-guiding means, e.g. diffusers
    • F04D29/541—Specially adapted for elastic fluid pumps
    • F04D29/542—Bladed diffusers
    • F04D29/544—Blade shapes
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2230/00—Manufacture
    • F05D2230/50—Building or constructing in particular ways
    • F05D2230/54—Building or constructing in particular ways by sheet metal manufacturing
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2300/00—Materials; Properties thereof
    • F05D2300/10—Metals, alloys or intermetallic compounds
    • F05D2300/17—Alloys
    • F05D2300/171—Steel alloys

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)

Abstract

Die Erfindung stellt Scheiben (1) für Turbomolekularpumpen vor, die aus einzelnen Teilscheiben (11, 12) bestehen. Diese Teilscheiben sind als Blechkörper ausgebildet, wobei die Schaufeln (31, 32) durch Stanzen und anschließendes Herausdrehen aus der Scheibenebene gebildet wurden. Die Teilscheiben werden so zusammengefügt, dass diese durch die Schaufeln (31, 32) und Schlitze (41, 42) eine gasfördernde Struktur mit optischer Dichtheit bilden.
EP01122335A 2000-10-24 2001-09-19 Scheiben für eine Turbomolekularpumpe Revoked EP1201928B1 (de)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
DE10052637.3A DE10052637B4 (de) 2000-10-24 2000-10-24 16.02.2001 Scheiben für eine Turbomolekularpumpe
DE10052637 2000-10-24

Publications (3)

Publication Number Publication Date
EP1201928A2 EP1201928A2 (de) 2002-05-02
EP1201928A3 true EP1201928A3 (de) 2003-04-16
EP1201928B1 EP1201928B1 (de) 2006-11-08

Family

ID=7660850

Family Applications (1)

Application Number Title Priority Date Filing Date
EP01122335A Revoked EP1201928B1 (de) 2000-10-24 2001-09-19 Scheiben für eine Turbomolekularpumpe

Country Status (4)

Country Link
US (1) US20020098088A1 (de)
EP (1) EP1201928B1 (de)
JP (1) JP4056725B2 (de)
DE (2) DE10052637B4 (de)

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102006020081A1 (de) * 2006-04-29 2007-10-31 Pfeiffer Vacuum Gmbh Rotor- oder Statorscheibe für eine Molekularpumpe
GB2440947A (en) * 2006-08-16 2008-02-20 Boc Group Plc A stator blade made of at least two stacked sheets
DE102007027370A1 (de) * 2007-06-11 2008-12-18 Wilo Ag Laufrad aus flächigem Material
US8221098B2 (en) * 2009-03-09 2012-07-17 Honeywell International Inc. Radial turbomolecular pump with electrostatically levitated rotor
CN102062121B (zh) * 2010-09-16 2013-03-27 格兰富水泵(苏州)有限公司 液体轴流式叶轮
TWI424121B (zh) * 2010-12-10 2014-01-21 Prosol Corp 渦輪分子泵浦之葉片結構改良
DE102014114326A1 (de) 2014-10-02 2016-04-07 Pfeiffer Vacuum Gmbh Verfahren zur Herstellung einer Rotor- oder Statorscheibe für eine Vakuumpumpe sowie Rotor- oder Statorscheibe für eine Vakuumpumpe
EP3032106B1 (de) * 2014-12-08 2020-02-12 Pfeiffer Vacuum Gmbh Vakuumpumpe
EP3051140B1 (de) * 2015-01-29 2018-01-10 Pfeiffer Vacuum Gmbh Statorscheibe für eine vakuumpumpe

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477381A (en) * 1966-12-30 1969-11-11 Pfeiffer Vakuumtechnik Turbo-molecular pump
GB1275386A (en) * 1970-04-10 1972-05-24 Balzers Patent Beteilig Ag Disc for a molecular vacuum pump
US3748055A (en) * 1970-07-15 1973-07-24 W Becker Rotor and stator wheel construction for a turbo molecular pump
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1071275B (de) * 1959-12-17
DE2717366B2 (de) * 1977-04-20 1979-10-11 Arthur Pfeiffer-Vakuumtechnik-Wetzlar Gmbh, 6334 Asslar Laufrad für eine Turbomolekularpumpe

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3477381A (en) * 1966-12-30 1969-11-11 Pfeiffer Vakuumtechnik Turbo-molecular pump
GB1275386A (en) * 1970-04-10 1972-05-24 Balzers Patent Beteilig Ag Disc for a molecular vacuum pump
US3748055A (en) * 1970-07-15 1973-07-24 W Becker Rotor and stator wheel construction for a turbo molecular pump
US4309143A (en) * 1976-11-29 1982-01-05 Kernforschungsanlage Julich Gmbh Vane-disk type turbomolecular pump and etching method of manufacture of vane disks
JPS5898696A (ja) * 1981-12-09 1983-06-11 Hitachi Ltd 分子ポンプのステ−タ

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 007, no. 199 (M - 240) 3 September 1983 (1983-09-03) *

Also Published As

Publication number Publication date
JP4056725B2 (ja) 2008-03-05
EP1201928B1 (de) 2006-11-08
DE50111402D1 (de) 2006-12-21
EP1201928A2 (de) 2002-05-02
JP2002161889A (ja) 2002-06-07
DE10052637A1 (de) 2002-05-02
US20020098088A1 (en) 2002-07-25
DE10052637B4 (de) 2021-03-11

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