EP1125065B1 - Molekularpumpe - Google Patents

Molekularpumpe Download PDF

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Publication number
EP1125065B1
EP1125065B1 EP99948619A EP99948619A EP1125065B1 EP 1125065 B1 EP1125065 B1 EP 1125065B1 EP 99948619 A EP99948619 A EP 99948619A EP 99948619 A EP99948619 A EP 99948619A EP 1125065 B1 EP1125065 B1 EP 1125065B1
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European Patent Office
Prior art keywords
supports
support
pump according
elements
pump
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Expired - Lifetime
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EP99948619A
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English (en)
French (fr)
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EP1125065A1 (de
Inventor
Pierre Vanden Brande
Alain Weymeersch
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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps

Definitions

  • the present invention relates to a molecular vacuum pump for evacuating a gas from an enclosure and thus creating in this enclosure a high vacuum which is generally between 10 Pa and 10 -6 Pa (0.1 mbar and 10 -8 mbar) and preferably between 1 Pa and 10 -4 Pa (10 -2 and 10 -6 mbar).
  • a diffusion pump by the fact that use is made of fluids to evaporate there, such as hydrocarbons and silicones, the vapors of which serve as a pumping motor, problems of contamination of the enclosure, in which the vacuum must be created, occur by the backscattering of vapors from the pump into the enclosure. In addition, this evaporation and condensation of these fluids results in very high energy and water consumption.
  • a diffusion pump must be strongly throttled to operate at a pressure greater than or equal to 10 -3 mbar in the enclosure under penalty of strong pressure oscillations and significant contamination of the vacuum chamber. In general, this constriction strongly limits the volumetric flow rate of the pump.
  • One of the essential aims of the present invention is to propose a molecular pump which makes it possible to remedy the disadvantages of these types of existing pumps.
  • the invention offers a pump with the characteristics stated to claim 1.
  • the above elements cooperate with means for subjecting them to a vibration having a component oriented towards the outlet opening.
  • the aforementioned element comprises a piezoelectric material fixed on the aforementioned support and covered, on its opposite face to that oriented towards the support, by a conductive coating of electricity, means being provided for applying to this element a alternating electrical voltage, so as to subject this material piezoelectric strain in a direction transverse to the support and, therefore, to the above coating a vibration corresponding.
  • Figure 1 is a schematic sectional view longitudinal, along line I-I of FIG. 2, with partial breaks, of a first embodiment of the pump according to the invention.
  • Figure 2 is a cross section along the line II-II of figure 1.
  • Figure 3 is, on a larger scale, a sectional view transverse of an essential part of the pump following this first embodiment.
  • FIG. 4 represents a variant of the form of realization shown in figure 3.
  • Figure 5 is a schematic view in longitudinal section similar to Figure 1 of a second embodiment of the pump according to the invention.
  • Figure 6 is a schematic view similar to Figures 1 and 5 of a third embodiment of the pump according to the invention.
  • Figure 7 is, on a larger scale, a detail view of part of Figure 6.
  • Figure 8 is a detail view of a first variant embodiments according to the preceding figures.
  • Figure 9 is a detail view of a second variant embodiments according to the preceding figures.
  • the invention relates to a new type of vacuum pump mainly intended for pumping in a pressure zone between 10 Pa and 10 -6 Pa (0.1 mbar and 10 -8 mbar). It is therefore a pump operating in a so-called molecular regime, that is to say a pump for which the collisions of the molecules with the walls of the pump strongly dominate the collisions between the molecules.
  • FIG. 1 A first embodiment of such a pump has been shown in Figures 1 and 2. It includes a box or carcass waterproof metal 1 having, at one of its sides, an opening input 2 intended to be connected to an enclosure, not shown, in which it is necessary to create a high vacuum. An exit opening 3 intended to be connected to a discharge pump, also not shown, is provided on the opposite side of this box 1.
  • these elements 4 are such as to allow to involve the gas molecules, coming from the above-mentioned enclosure, and coming into contact with the elements 4, a speed the result of which is oriented towards the outlet opening 3.
  • These elements 4 constitute the active parts of the pump and are placed in successive stages. They allow gas to be pumped from inlet opening 2 to outlet opening 3 in increasing the gas pressure from stage to stage. This is obtained in subjecting, on each stage, the molecules of the gas to a sequence of deceleration followed by acceleration by elements 4 of the latter to the elements of the next floor.
  • the molecular pump according to the invention must have a high pumping speed on stages near inlet opening 2 and lower pumping speed on the floors located near the outlet opening 3 where the pressure will be the highest.
  • stage gas pressure To allow the stage gas pressure to be increased by stage, so the pumping speed must decrease in proportion, this which translates, in practice, by a passage section 10 for the gas from one floor to the other decreasing towards the exit opening 3.
  • the aforementioned elements 4 are mounted on a fixed support 5, on the side of the latter, oriented towards the opening of aforementioned outlet 3 and are made in such a way as to be able to cooperate with means 9 for subjecting them to vibration having a component oriented towards the outlet opening 3.
  • means are provided to maintain the support supra 5 at a significantly reduced temperature, for example at the ambient temperature.
  • the support 5 and the box 1 are made in one heating material, in particular metal, and are connected in a way conductive heat between them to a cooling circuit 8 powered for example by water surrounding the box 1.
  • Each element 4 comprises a vibrating member 6 which, in the embodiment shown in Figure 1, is formed by a layer of piezoelectric material fixed on the metal support 5 and covered, on its face opposite to that facing the support 5, by a coating formed of an electrically conductive material 7.
  • Means 9, formed by a voltage generator alternative electrical, including sinusoidal, are provided for allow the piezoelectric material layer 6 to undergo a deformation in a direction transverse to the support 5 and, by Consequently, at the above-mentioned coating 7, a corresponding vibration.
  • the coating surface 7 subjected to this vibration transverse thus communicates a speed to the gas molecules essentially in the direction of pumping and actually plays the role of the rotor of a turbomolecular pump.
  • support 5 must be fixed relative to the pump frame, that is to say relative to the box 1 of the latter, while the surface 7 alone can be vibrated transverse under the effect of the intermediate layer 6 which is therefore preferably made of a piezoelectric material.
  • the vibration frequency and the amplitude thereof are linked by the fact that the speed of movement of the surface 7 must less reach a speed of the order of the so-called "thermal" speed of gas molecules under pumping conditions.
  • the operating principle may vary.
  • the vibrating member 6 could be, for example, a setting device magnetic vibration comprising an electromagnet, or a device electrostatic in which the support 5 and the surface 7 form together a capacitor subjected to an alternating electric voltage or a magnetostrictive transducer.
  • polymeric piezoelectric materials and in particular the aforementioned polymers are particularly advantageous insofar as their low acoustic impedance (4.10 6 kgm -2 s -1 ) and their low density make it possible to vibrate the surface 7 without communicating this vibration to the support 5 maintained at a relatively reduced temperature.
  • the characteristic dimension between two stages is preferably a few centimeters at most, while for a pressure of 1 Pa (0.01 mbar), this dimension changes to a few mm. and will even more reduced for pressures of the order of 10 Pa (0.1 mbar).
  • the sealed box 1, in which are arranged the vibrating elements 4 has a cross section square or rectangular, as shown clearly in Figure 2, and the metal supports 5 are arranged in successive stages and in staggered in this box.
  • These supports consist of blades extending parallel to each other between two opposite walls of the box 1.
  • these blades forming the supports 5 are cooled by thermal contact with these walls of the box 1.
  • These blades are located in planes parallel to each other, each of these planes determining a floor. In each stage the blades are located at a certain distance from each other to allow gas to flow from one floor to the other.
  • each of the support blades 5 is coated with a piezoelectric PVDF film which is plugged into a oscillating circuit 9, as shown in more detail in FIGS. 3 and 4, allowing this film to vibrate preferably at a frequency close to of its resonant frequency.
  • this oscillating circuit comprises a generator of alternating electric voltage 9 'which is connected, of a part, to the conductive coating 7 deposited on the piezoelectric film 6 and, on the other hand, to the metal support 5.
  • PVDF film can either be directly in contact with support 5 if the latter is electrically conductive, i.e. beforehand coated with a conductive film if the support 5 is not a conductor of electricity.
  • Figure 5 shows a second embodiment of a preferred configuration of the vibrating elements 4 in the box 1.
  • the first stages of the pump that is to say those close to the inlet opening 2 are inclined by relative to the longitudinal axis of the box 1 at an angle of about 45 ° so increase the pumping speed.
  • Figure 6 relates to a third configuration preferred shape and arrangement of supports 5 and vibrating elements 4.
  • FIG. 7 represents a detail of this same Fig.
  • the supports 5 are staggered and have a cross section transverse having substantially the shape of an isosceles triangle whose vertex is oriented towards the entrance opening 2.
  • the inclination of the oblique lateral sides 16 of these supports are such as to allow a maximum reflection of the molecules of gas striking these sides towards the base 17 of the supports provided with the vibrating element 7, as shown by the arrows 18.
  • the distance between the supports 5 is maximum in order to create a passage 10 which is maximum for molecules reflected by a stage towards the following stage of vibrating elements. In the following areas the floors get closer and closer one of the other and the passage sections 10 become more reduced.
  • the height of the triangular supports 5 also decreases and the sides obliques 16 have a concave shape whose curvature is fixed in depending on the opening of passage 10 so that a maximum molecules are transmitted to the next floor.
  • FIG. 6 and 7 An important feature of the configuration shown in Figures 6 and 7 is the presence of vibrating elements 19 similar to elements 4 and partially covering the oblique lateral sides 16 of supports 5.
  • these elements 19 consist of a layer intermediate 21 preferably made of a piezoelectric material covered with a conductive coating 20, and partially face the elements 4 of the previous floor.
  • These elements 19 make it possible to communicate kinetic energy to molecules in a series successive collisions with these vibrating elements rather than during of a single collision while bringing the molecules substantially towards the passage 10 allowing access to the next floor.
  • the kinetic energy of the excited molecules decreases during collisions with the parts of the oblique sides 16 not covered by the elements 19, thus causing an increase in pressure at this stage (P2) with respect to the pressure prevailing in the preceding stage (P1).
  • the essential advantage of this configuration is to allow to communicate the kinetic energy necessary to pump the molecules in several stages, which has the practical consequence of allow to work with values of the product of the pulsation and the amplitude of the vibration less than 500 m / s.
  • the base of the triangle could have a shape curved, both concave and convex.
  • the vibrating element 4 could possibly undergo, during its vibration, a deformation amplified and alternately go from a concave or flat shape to a convex or concave shape, so as to obtain an increase the amplitude of the vibration.
  • the vibrating element could be formed by a flexible blade held by its two ends in the support 5 in order to be able to undergo, under the effect of the oscillating circuit 9, a deformation of a substantially flat position, in the rest state, in a bent position, in the excited state, as shown in Figure 8.
  • the vibrating element 4 could consist of a piezoelectric blade fixed at a point 23 to the support 5 and undergo, under the effect of the oscillating circuit 9, a displacement between a rest position and a deformed position, somewhat of the same way as a bimetallic strip.
  • a piezoelectric blade fixed at a point 23 to the support 5 and undergo, under the effect of the oscillating circuit 9, a displacement between a rest position and a deformed position, somewhat of the same way as a bimetallic strip.
  • This example concerns a molecular pump of the type such as shown in figure 6 and includes 30 superimposed horizontal stages in which the supports 5 of the vibrating elements 4 are mounted in staggered.
  • Each of these supports 5 has the dimensions following cross-sections: 700 mm x 15 mm and are distributed in a box of rectangular horizontal section of 700 mm x 600 mm.
  • Each floor consists of 20 rectangular supports 5 of triangular appearance arranged in a similar manner to that of FIG. 6.
  • a PVDF film 6 partially facing the PVDF films 20 fixed on a part of the sides 16 of the supports 5 of the next stage.
  • Piezoelectric films which are excited at a frequency close to their resonance frequency of the order of 10 MHz make it possible to achieve a compression ratio of 2 from one stage to the other of the pump for a gas formed from 'nitrogen. This makes it possible to obtain a maximum compression ratio of 10 9 for the aforementioned 30 stages of the pump.
  • the nominal pumping speed is 24,000 I / s for nitrogen at 25 ° C and the maximum mass flow rate reached is 24 mbar.litre.sec -1 or 86.4 mbar.m 3 / h.
  • the support of a stage could be formed by a perforated plate on the face thereof, oriented towards the outlet opening 3, the vibrating elements are fixed.
  • the elements may be constituted by very varied means.
  • box 1 can be placed in different positions, for example with the inlet opening 2 facing downwards or towards the side.
  • This box 1 could also have other geometries than a prismatic shape. So it could for example present a cylindrical shape with circular section.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Reciprocating Pumps (AREA)
  • Fluid-Driven Valves (AREA)
  • Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
  • Structures Of Non-Positive Displacement Pumps (AREA)
  • Electron Beam Exposure (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Non-Positive Displacement Air Blowers (AREA)

Claims (13)

  1. Molekularpumpe, welche dazu dient, ein Gas aus einem Behältnis abzusaugen und dadurch in diesem letzteren ein hohes Vakuum zu erzeugen, und welche umfasst: ein ausgesprochen dichtes Gehäuse (1), das auf einer Seite eine Eintrittsöffnung (2), die für den Anschluss an das oben erwähnte Behältnis bestimmt ist, und auf der der oben erwähnten Seite gegenüber liegenden Seite eine Austrittsöffnung (3) aufweist, für die Durchleitung des Gases bestimmte Bauteile (4), welche zwischen diesen zwei Öffnungen (2) und (3) in einem gewissen Abstand voneinander auf in dem oben genannten Gehäuse (1) befestigten Halterungen (5) angeordnet sind, dadurch gekennzeichnet, dass die besagten Bauteile (4) auf den festen Halterungen (5) von der Seite dieser letzteren zur Austrittsöffnung (3) hin gerichtet dergestalt montiert sind, dass mit diesen Halterungen eine Folge von Dipolen festgelegt wird, deren aktive Teile, die von diesen Bauteilen gebildet werden, ebenfalls zur Austrittsöffnung gerichtet sind, und dass dadurch ermöglicht wird, den Gasmolekülen, die von dem oben genannten Behältnis kommen und mit diesen Bauteilen in Kontakt geraten, eine Beschleunigung in Richtung auf die Austrittsöffnung zu erteilen.
  2. Pumpe nach Anspruch 1, dadurch gekennzeichnet, dass die vorganannten Bauteile (4) mit Mitteln (9) zusammen wirken, welche es ermöglichen, dass diese in eine Schwingung versetzt werden, die eine auf die Austrittsöffnung zeigende Komponente aufweist.
  3. Pumpe nach einem der Ansprüche 1 und 2, dadurch gekennzeichnet, dass die Halterung (5) aus einem wärmespendenden und wärmeleitenden Material gefertigt und an einen Kühlkreislauf angeschlossen ist, wodurch diese Halterung (5) den kalten Teil eines Dipols bildet, und dass das Bauteil (4) von diesem kalten Teil durch einen Dämmstoff getrennt ist und den warmen Teil des Dipols bildet.
  4. Pumpe nach einem beliebigen der Ansprüche 1 bis 3, dadurch gekennzeichnet, dass die vorgenannten Bauteile (4) in der Form der Fünf auf dem Würfel angeordnet sind.
  5. Pumpe nach Anspruch 4, dadurch gekennzeichnet, dass Mittel vorhanden sind, um die vorgenannte Halterung (5) auf einer merklich niedrigen Temperatur, beispielsweise auf Umgebungstemperatur, zu halten.
  6. Pumpe nach Anspruch 5, dadurch gekennzeichnet, dass die Halterung (5) und das Gehäuse (1) aus einem wärmespendenden Material gefertigt und miteinander leitend verbunden sind, wobei die vorgenannten Mittel, die zur Aufrechterhaltung der relativ niedrigen Temperatur der Halterung dienen, einen Kühlkreislauf (8) umfassen, der das oben genannte Gehäuse (1) umgibt.
  7. Pumpe nach einem beliebigen der Ansprüche 4 bis 6, dadurch gekennzeichnet, dass das vorgenannte Bauteil (4) ein piezoelektrisches Material (6) enthält, welches an der vorgenannten Halterung (5) befestigt und auf der Seite, die der zur Halterung hin gerichteten Seite gegenüber liegt, mit einem elektrisch leitenden Überzug (7) bedeckt ist, wobei Mittel (9) vorhanden sind, um an dieses Bauteil (4) eine elektrische Wechselspannung in der Weise anzulegen, so dass dieses piezoelektrische Material (6) eine Verformung in einer zur Halterung (5) quer verlaufenden Richtung erfährt und folglich der oben genannte Überzug (7) in eine entsprechende Schwingung versetzt wird.
  8. Pumpe nach Anspruch 7, dadurch gekennzeichnet, dass die mit der Halterung in Kontakt befindliche Fläche des piezoelektrischen Materials (6) und der Überzug (7) auf Masse liegen.
  9. Pumpe nach einem der Ansprüche 7 oder 8, dadurch gekennzeichnet, dass das piezoelektrische Material (6) Bestandteil eines biegsamen Blattes ist, welches auf die Halterung montiert ist und eine elastische Verformung unter der Wirkung der oben genannten elektrischen Wechselspannung erleiden kann.
  10. Pumpe nach einem beliebigen der Ansprüche 4 bis 9, dadurch gekennzeichnet, dass die Halterungen (5) in der Form wie die Fünf auf dem Würfel angeordnet sind und in Querrichtung einen Querschnitt aufweisen, der die Form eines gleichschenkeligen Dreiecks hat, dessen Gipfel in Richtung auf diejenige Seite des Gehäuses (1) gerichtet ist, in welcher sich die Eintrittsöffnung (2) befindet, wobei die schrägen Seitenkanten (16) dieser Halterungen (5) dergestalt geneigt sind, dass sie eine Reflexion der auf diese Seiten prallenden Moleküle zur Basis (17) der Halterungen (5) der vorhergehenden Stufe ermöglichen.
  11. Pumpe nach Anspruch 10, dadurch gekennzeichnet, dass die schrägen Kanten (16) der Halterungen (5) wenigstens teilweise konkav sind.
  12. Pumpe nach einem beliebigen der Ansprüche 4 bis 11, dadurch gekennzeichnet, dass die Seiten (16) der Halterungen (5) einer bestimmten Stufe, die zu den Halterungen (5) einer vorausgehenden Stufe hin gerichtet sind, teilweise mit Bauteilen (19) bedeckt sind, welche in eine solche Schwingung versetzt werden können, die eine Komponente aufweist, welche auf die Bauteile (4), die auf der Seite (17) der Halterungen der auf die Austrittsöffnung (3) zeigenden vorausgehenden Stufe vorhanden sind, gerichtet ist, und zwar dergestalt, dass ermöglicht wird, dass die Moleküle durch eine Reihe von Mehrfachstößen mit den schwingenden Flächen (7) der Bauteile (4) und (19), auf die sie vor ihrem Weitertransport zur folgenden Stufe stoßen, einen Gewinn an kinetischer Energie erfahren.
  13. Pumpe nach einem beliebigen der Ansprüche 7 bis 11, dadurch gekennzeichnet, dass das piezoelektrische Material (6) aus Quarz, Rochettesalz (NaKC4H4O6NH2O), Lithiumsulfat (Li2SO4H2O), Bleimetaniobat (PbNb2O6), Bleititanat (PT), Bleititanzirkonat (PZT), Polyvinylidenfluorid (PVDF), Kopolymer von Polyvinylidenfluorid und Tetrafluorethylen (P(VDF-TeFE)) oder Kopolymer von Vinylidenzyanid und Vinylazetat (P(VDCN-VAC)). besteht.
EP99948619A 1998-10-20 1999-10-15 Molekularpumpe Expired - Lifetime EP1125065B1 (de)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP99948619A EP1125065B1 (de) 1998-10-20 1999-10-15 Molekularpumpe

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
EP98203502A EP0995908A1 (de) 1998-10-20 1998-10-20 Molekularpumpe
EP98203502 1998-10-20
EP99948619A EP1125065B1 (de) 1998-10-20 1999-10-15 Molekularpumpe
PCT/BE1999/000127 WO2000023715A1 (fr) 1998-10-20 1999-10-15 Pompe moleculaire

Publications (2)

Publication Number Publication Date
EP1125065A1 EP1125065A1 (de) 2001-08-22
EP1125065B1 true EP1125065B1 (de) 2002-07-17

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EP98203502A Withdrawn EP0995908A1 (de) 1998-10-20 1998-10-20 Molekularpumpe
EP99948619A Expired - Lifetime EP1125065B1 (de) 1998-10-20 1999-10-15 Molekularpumpe

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US (1) US6612816B1 (de)
EP (2) EP0995908A1 (de)
JP (1) JP2002527683A (de)
AT (1) ATE220765T1 (de)
AU (1) AU763828B2 (de)
CA (1) CA2347169A1 (de)
DE (1) DE69902187T2 (de)
DK (1) DK1125065T3 (de)
ES (1) ES2181480T3 (de)
PT (1) PT1125065E (de)
WO (1) WO2000023715A1 (de)
ZA (1) ZA200104022B (de)

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US7083398B2 (en) 2002-10-04 2006-08-01 Varian S.P.A. Vibrating pumping stage for molecular vacuum pumps, and molecular vacuum pump with vibrating pumping stages

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AU6183999A (en) 2000-05-08
ES2181480T3 (es) 2003-02-16
WO2000023715A1 (fr) 2000-04-27
DE69902187D1 (de) 2002-08-22
EP0995908A1 (de) 2000-04-26
ATE220765T1 (de) 2002-08-15
EP1125065A1 (de) 2001-08-22
DK1125065T3 (da) 2002-11-04
AU763828B2 (en) 2003-07-31
ZA200104022B (en) 2002-05-17
JP2002527683A (ja) 2002-08-27
DE69902187T2 (de) 2003-03-06
CA2347169A1 (fr) 2000-04-27
PT1125065E (pt) 2002-12-31
US6612816B1 (en) 2003-09-02

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