ATE220765T1 - Molekularpumpe - Google Patents
MolekularpumpeInfo
- Publication number
- ATE220765T1 ATE220765T1 AT99948619T AT99948619T ATE220765T1 AT E220765 T1 ATE220765 T1 AT E220765T1 AT 99948619 T AT99948619 T AT 99948619T AT 99948619 T AT99948619 T AT 99948619T AT E220765 T1 ATE220765 T1 AT E220765T1
- Authority
- AT
- Austria
- Prior art keywords
- outlet
- inlet
- piezo
- molecular pump
- housing
- Prior art date
Links
- 239000002305 electric material Substances 0.000 abstract 3
- 239000004020 conductor Substances 0.000 abstract 1
- NKZSPGSOXYXWQA-UHFFFAOYSA-N dioxido(oxo)titanium;lead(2+) Chemical compound [Pb+2].[O-][Ti]([O-])=O NKZSPGSOXYXWQA-UHFFFAOYSA-N 0.000 abstract 1
- HFGPZNIAWCZYJU-UHFFFAOYSA-N lead zirconate titanate Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ti+4].[Zr+4].[Pb+2] HFGPZNIAWCZYJU-UHFFFAOYSA-N 0.000 abstract 1
- 229910052451 lead zirconate titanate Inorganic materials 0.000 abstract 1
- INHCSSUBVCNVSK-UHFFFAOYSA-L lithium sulfate Inorganic materials [Li+].[Li+].[O-]S([O-])(=O)=O INHCSSUBVCNVSK-UHFFFAOYSA-L 0.000 abstract 1
- 229920000642 polymer Polymers 0.000 abstract 1
- 239000010453 quartz Substances 0.000 abstract 1
- 150000003839 salts Chemical class 0.000 abstract 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 1
- RBTVSNLYYIMMKS-UHFFFAOYSA-N tert-butyl 3-aminoazetidine-1-carboxylate;hydrochloride Chemical compound Cl.CC(C)(C)OC(=O)N1CC(N)C1 RBTVSNLYYIMMKS-UHFFFAOYSA-N 0.000 abstract 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D33/00—Non-positive-displacement pumps with other than pure rotation, e.g. of oscillating type
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04D—NON-POSITIVE-DISPLACEMENT PUMPS
- F04D19/00—Axial-flow pumps
- F04D19/02—Multi-stage pumps
- F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
- Fluid-Driven Valves (AREA)
- Transition And Organic Metals Composition Catalysts For Addition Polymerization (AREA)
- Structures Of Non-Positive Displacement Pumps (AREA)
- Electron Beam Exposure (AREA)
- Applications Or Details Of Rotary Compressors (AREA)
- Non-Positive Displacement Air Blowers (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| EP98203502A EP0995908A1 (de) | 1998-10-20 | 1998-10-20 | Molekularpumpe |
| PCT/BE1999/000127 WO2000023715A1 (fr) | 1998-10-20 | 1999-10-15 | Pompe moleculaire |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| ATE220765T1 true ATE220765T1 (de) | 2002-08-15 |
Family
ID=8234232
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| AT99948619T ATE220765T1 (de) | 1998-10-20 | 1999-10-15 | Molekularpumpe |
Country Status (12)
| Country | Link |
|---|---|
| US (1) | US6612816B1 (de) |
| EP (2) | EP0995908A1 (de) |
| JP (1) | JP2002527683A (de) |
| AT (1) | ATE220765T1 (de) |
| AU (1) | AU763828B2 (de) |
| CA (1) | CA2347169A1 (de) |
| DE (1) | DE69902187T2 (de) |
| DK (1) | DK1125065T3 (de) |
| ES (1) | ES2181480T3 (de) |
| PT (1) | PT1125065E (de) |
| WO (1) | WO2000023715A1 (de) |
| ZA (1) | ZA200104022B (de) |
Families Citing this family (46)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| ITTO20020859A1 (it) | 2002-10-04 | 2004-04-05 | Varian Spa | Stadio di pompaggio vibrante per pompe da vuoto e pompa da vuoto a stadi di pompaggio vibranti. |
| US10541070B2 (en) | 2016-04-25 | 2020-01-21 | Haier Us Appliance Solutions, Inc. | Method for forming a bed of stabilized magneto-caloric material |
| US10274231B2 (en) | 2016-07-19 | 2019-04-30 | Haier Us Appliance Solutions, Inc. | Caloric heat pump system |
| US10295227B2 (en) * | 2016-07-19 | 2019-05-21 | Haier Us Appliance Solutions, Inc. | Caloric heat pump system |
| US10281177B2 (en) | 2016-07-19 | 2019-05-07 | Haier Us Appliance Solutions, Inc. | Caloric heat pump system |
| US10443585B2 (en) | 2016-08-26 | 2019-10-15 | Haier Us Appliance Solutions, Inc. | Pump for a heat pump system |
| US10386096B2 (en) | 2016-12-06 | 2019-08-20 | Haier Us Appliance Solutions, Inc. | Magnet assembly for a magneto-caloric heat pump |
| US11009282B2 (en) | 2017-03-28 | 2021-05-18 | Haier Us Appliance Solutions, Inc. | Refrigerator appliance with a caloric heat pump |
| US10527325B2 (en) | 2017-03-28 | 2020-01-07 | Haier Us Appliance Solutions, Inc. | Refrigerator appliance |
| US10451320B2 (en) | 2017-05-25 | 2019-10-22 | Haier Us Appliance Solutions, Inc. | Refrigerator appliance with water condensing features |
| US10422555B2 (en) | 2017-07-19 | 2019-09-24 | Haier Us Appliance Solutions, Inc. | Refrigerator appliance with a caloric heat pump |
| US10451322B2 (en) | 2017-07-19 | 2019-10-22 | Haier Us Appliance Solutions, Inc. | Refrigerator appliance with a caloric heat pump |
| US10520229B2 (en) | 2017-11-14 | 2019-12-31 | Haier Us Appliance Solutions, Inc. | Caloric heat pump for an appliance |
| US11022348B2 (en) | 2017-12-12 | 2021-06-01 | Haier Us Appliance Solutions, Inc. | Caloric heat pump for an appliance |
| US10551095B2 (en) | 2018-04-18 | 2020-02-04 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly |
| US10648704B2 (en) | 2018-04-18 | 2020-05-12 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly |
| US10641539B2 (en) | 2018-04-18 | 2020-05-05 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly |
| US10876770B2 (en) | 2018-04-18 | 2020-12-29 | Haier Us Appliance Solutions, Inc. | Method for operating an elasto-caloric heat pump with variable pre-strain |
| US10782051B2 (en) | 2018-04-18 | 2020-09-22 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly |
| US10830506B2 (en) | 2018-04-18 | 2020-11-10 | Haier Us Appliance Solutions, Inc. | Variable speed magneto-caloric thermal diode assembly |
| US10648706B2 (en) | 2018-04-18 | 2020-05-12 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with an axially pinned magneto-caloric cylinder |
| US10648705B2 (en) | 2018-04-18 | 2020-05-12 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly |
| US10557649B2 (en) | 2018-04-18 | 2020-02-11 | Haier Us Appliance Solutions, Inc. | Variable temperature magneto-caloric thermal diode assembly |
| US10989449B2 (en) | 2018-05-10 | 2021-04-27 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with radial supports |
| US11054176B2 (en) | 2018-05-10 | 2021-07-06 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with a modular magnet system |
| US11015842B2 (en) | 2018-05-10 | 2021-05-25 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with radial polarity alignment |
| US10684044B2 (en) | 2018-07-17 | 2020-06-16 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with a rotating heat exchanger |
| US11092364B2 (en) | 2018-07-17 | 2021-08-17 | Haier Us Appliance Solutions, Inc. | Magneto-caloric thermal diode assembly with a heat transfer fluid circuit |
| US10788034B2 (en) | 2018-08-10 | 2020-09-29 | Frore Systems Inc. | Mobile phone and other compute device cooling architecture |
| US11464140B2 (en) | 2019-12-06 | 2022-10-04 | Frore Systems Inc. | Centrally anchored MEMS-based active cooling systems |
| US12089374B2 (en) | 2018-08-10 | 2024-09-10 | Frore Systems Inc. | MEMS-based active cooling systems |
| US11274860B2 (en) | 2019-01-08 | 2022-03-15 | Haier Us Appliance Solutions, Inc. | Mechano-caloric stage with inner and outer sleeves |
| US11168926B2 (en) | 2019-01-08 | 2021-11-09 | Haier Us Appliance Solutions, Inc. | Leveraged mechano-caloric heat pump |
| US11193697B2 (en) | 2019-01-08 | 2021-12-07 | Haier Us Appliance Solutions, Inc. | Fan speed control method for caloric heat pump systems |
| US11149994B2 (en) | 2019-01-08 | 2021-10-19 | Haier Us Appliance Solutions, Inc. | Uneven flow valve for a caloric regenerator |
| US11112146B2 (en) | 2019-02-12 | 2021-09-07 | Haier Us Appliance Solutions, Inc. | Heat pump and cascaded caloric regenerator assembly |
| US11015843B2 (en) | 2019-05-29 | 2021-05-25 | Haier Us Appliance Solutions, Inc. | Caloric heat pump hydraulic system |
| KR102677216B1 (ko) * | 2019-10-30 | 2024-06-24 | 프로리 시스템스 인코포레이티드 | Mems 기반 기류 시스템 |
| US11796262B2 (en) | 2019-12-06 | 2023-10-24 | Frore Systems Inc. | Top chamber cavities for center-pinned actuators |
| US12193192B2 (en) | 2019-12-06 | 2025-01-07 | Frore Systems Inc. | Cavities for center-pinned actuator cooling systems |
| US11510341B2 (en) | 2019-12-06 | 2022-11-22 | Frore Systems Inc. | Engineered actuators usable in MEMs active cooling devices |
| US12029005B2 (en) | 2019-12-17 | 2024-07-02 | Frore Systems Inc. | MEMS-based cooling systems for closed and open devices |
| US12033917B2 (en) | 2019-12-17 | 2024-07-09 | Frore Systems Inc. | Airflow control in active cooling systems |
| US11765863B2 (en) | 2020-10-02 | 2023-09-19 | Frore Systems Inc. | Active heat sink |
| US12167564B2 (en) | 2021-03-02 | 2024-12-10 | Frore Systems Inc. | Integration of airjets into computing devices |
| WO2022187160A1 (en) | 2021-03-02 | 2022-09-09 | Frore Systems Inc. | Exhaust blending for piezoelectric cooling systems |
Family Cites Families (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3374941A (en) * | 1964-06-30 | 1968-03-26 | American Standard Inc | Air blower |
| US3554669A (en) * | 1968-12-04 | 1971-01-12 | Gen Electric | Electric-fluid energy converter |
| DE3067101D1 (en) * | 1979-05-07 | 1984-04-26 | Piezo Electric Prod | Solid state blower |
| US4498851A (en) * | 1980-05-02 | 1985-02-12 | Piezo Electric Products, Inc. | Solid state blower |
| US4595338A (en) * | 1983-11-17 | 1986-06-17 | Piezo Electric Products, Inc. | Non-vibrational oscillating blade piezoelectric blower |
| US4780062A (en) * | 1985-10-09 | 1988-10-25 | Murata Manufacturing Co., Ltd. | Piezoelectric fan |
| DE3925749C1 (de) * | 1989-08-03 | 1990-10-31 | Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung Ev, 8000 Muenchen, De | |
| US5192197A (en) * | 1991-11-27 | 1993-03-09 | Rockwell International Corporation | Piezoelectric pump |
| SG44800A1 (en) * | 1993-12-28 | 1997-12-19 | Westonbridge Int Ltd | A micropump |
| WO1996018823A1 (en) * | 1994-12-15 | 1996-06-20 | The Whitaker Corporation | Metal enforced pvdf vibrational fan |
| US6071087A (en) * | 1996-04-03 | 2000-06-06 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Ferroelectric pump |
| US6042345A (en) * | 1997-04-15 | 2000-03-28 | Face International Corporation | Piezoelectrically actuated fluid pumps |
| US6074178A (en) * | 1997-04-15 | 2000-06-13 | Face International Corp. | Piezoelectrically actuated peristaltic pump |
| US6106245A (en) * | 1997-10-09 | 2000-08-22 | Honeywell | Low cost, high pumping rate electrostatically actuated mesopump |
-
1998
- 1998-10-20 EP EP98203502A patent/EP0995908A1/de not_active Withdrawn
-
1999
- 1999-10-15 CA CA002347169A patent/CA2347169A1/fr not_active Abandoned
- 1999-10-15 DK DK99948619T patent/DK1125065T3/da active
- 1999-10-15 AU AU61839/99A patent/AU763828B2/en not_active Ceased
- 1999-10-15 AT AT99948619T patent/ATE220765T1/de not_active IP Right Cessation
- 1999-10-15 WO PCT/BE1999/000127 patent/WO2000023715A1/fr not_active Ceased
- 1999-10-15 DE DE69902187T patent/DE69902187T2/de not_active Expired - Fee Related
- 1999-10-15 US US09/830,022 patent/US6612816B1/en not_active Expired - Fee Related
- 1999-10-15 ES ES99948619T patent/ES2181480T3/es not_active Expired - Lifetime
- 1999-10-15 JP JP2000577413A patent/JP2002527683A/ja active Pending
- 1999-10-15 EP EP99948619A patent/EP1125065B1/de not_active Expired - Lifetime
- 1999-10-15 PT PT99948619T patent/PT1125065E/pt unknown
-
2001
- 2001-05-17 ZA ZA200104022A patent/ZA200104022B/xx unknown
Also Published As
| Publication number | Publication date |
|---|---|
| AU6183999A (en) | 2000-05-08 |
| EP1125065B1 (de) | 2002-07-17 |
| ES2181480T3 (es) | 2003-02-16 |
| WO2000023715A1 (fr) | 2000-04-27 |
| DE69902187D1 (de) | 2002-08-22 |
| EP0995908A1 (de) | 2000-04-26 |
| EP1125065A1 (de) | 2001-08-22 |
| DK1125065T3 (da) | 2002-11-04 |
| AU763828B2 (en) | 2003-07-31 |
| ZA200104022B (en) | 2002-05-17 |
| JP2002527683A (ja) | 2002-08-27 |
| DE69902187T2 (de) | 2003-03-06 |
| CA2347169A1 (fr) | 2000-04-27 |
| PT1125065E (pt) | 2002-12-31 |
| US6612816B1 (en) | 2003-09-02 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| UEP | Publication of translation of european patent specification |
Ref document number: 1125065 Country of ref document: EP |
|
| REN | Ceased due to non-payment of the annual fee |