EP1083978A1 - Method for purifying process waste gases - Google Patents

Method for purifying process waste gases

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Publication number
EP1083978A1
EP1083978A1 EP99936351A EP99936351A EP1083978A1 EP 1083978 A1 EP1083978 A1 EP 1083978A1 EP 99936351 A EP99936351 A EP 99936351A EP 99936351 A EP99936351 A EP 99936351A EP 1083978 A1 EP1083978 A1 EP 1083978A1
Authority
EP
European Patent Office
Prior art keywords
exhaust gas
pollutants
amount
detector
operating parameters
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99936351A
Other languages
German (de)
French (fr)
Inventor
Gunter KRÖDEL
Lutz Fabian
Volkmar Hopfe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centrotherm Elektrische Anlagen GmbH and Co
Original Assignee
Centrotherm Elektrische Anlagen GmbH and Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centrotherm Elektrische Anlagen GmbH and Co filed Critical Centrotherm Elektrische Anlagen GmbH and Co
Publication of EP1083978A1 publication Critical patent/EP1083978A1/en
Withdrawn legal-status Critical Current

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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J15/00—Arrangements of devices for treating smoke or fumes
    • F23J15/02—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material
    • F23J15/04—Arrangements of devices for treating smoke or fumes of purifiers, e.g. for removing noxious material using washing fluids
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/346—Controlling the process
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
    • B01D—SEPARATION
    • B01D53/00—Separation of gases or vapours; Recovering vapours of volatile solvents from gases; Chemical or biological purification of waste gases, e.g. engine exhaust gases, smoke, fumes, flue gases, aerosols
    • B01D53/34—Chemical or biological purification of waste gases
    • B01D53/46—Removing components of defined structure
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G7/00—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals
    • F23G7/06—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases
    • F23G7/061—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating
    • F23G7/065—Incinerators or other apparatus for consuming industrial waste, e.g. chemicals of waste gases or noxious gases, e.g. exhaust gases with supplementary heating using gaseous or liquid fuel
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23G—CREMATION FURNACES; CONSUMING WASTE PRODUCTS BY COMBUSTION
    • F23G2209/00—Specific waste
    • F23G2209/14—Gaseous waste or fumes
    • F23G2209/142—Halogen gases, e.g. silane
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2215/00—Preventing emissions
    • F23J2215/30—Halogen; Compounds thereof
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F23—COMBUSTION APPARATUS; COMBUSTION PROCESSES
    • F23J—REMOVAL OR TREATMENT OF COMBUSTION PRODUCTS OR COMBUSTION RESIDUES; FLUES 
    • F23J2219/00—Treatment devices
    • F23J2219/40—Sorption with wet devices, e.g. scrubbers

Definitions

  • the invention relates to a method for cleaning process exhaust gases by introducing them into an exhaust gas purification system with a reaction chamber and aftertreatment of the reaction products leaving the reaction chamber in a washing or. Sorption chamber with associated detergent circuit.
  • a method has become known in which the process exhaust gases are burned / oxidized or thermally decomposed in a reaction chamber. This is done here with the aid of a flame fed by a fuel gas and oxygen and after which the exhaust gases leaving the reaction chamber are washed or washed. Sorption chamber are passed, in which the solid and / or soluble constituents are washed out of the exhaust gas with a sorbent.
  • a sorbent for example, hydrogen or natural gas can be considered as fuel gases.
  • the exhaust gases which have now been cleaned of harmful or toxic components, are subsequently discharged into the atmosphere via an air-conditioning system.
  • process exhaust gases in particular exhaust gases from CVD and / or etching processes and also chamber cleaning processes are cleaned in such a way that pollution of the environment with harmful or possibly toxic substances is avoided.
  • process exhaust gases from plants for the chemical processing of semiconductor substrates for the production of microelectronic components by means of CVD low-pressure processes (LP-CVD) can be cleaned with such a method or converted into harmless substances.
  • Such an exhaust gas purification method can be seen, for example, from EP 0 347 753 B1, according to which the process exhaust gases are burned in a reaction chamber with an excess of oxygen and are fed to a ventilation system via a washing or sorption chamber.
  • the structure of an exhaust gas purification device with which the process exhaust gases can be cleaned by the method mentioned at the outset is described, for example, in DE 195 01 914 C1.
  • This device consists of a combustion chamber inside an outer tube, in which a burner with a downward burner flame is arranged, and a sorption chamber above the combustion chamber. The exhaust gases leaving the combustion chamber are directed upwards into the sorption chamber within the outer tube and are discharged into the atmosphere through a filter and via an air-conditioning system.
  • the sorbent e.g. Water
  • the sorbent can, for example, also be sprayed conically against the flow direction of the exhaust gas.
  • the solid reaction products are rinsed down along the inner wall of the outer tube and passed into a treatment plant for the sorbent.
  • the process exhaust gases coming from a low-pressure CVD system can contain, for example, SiH 4 , PH 3 , N 2 0 in different oxidation levels and concentrations and also oil vapors and dusts (Si0 2 ). These process gases are in the flame of an oxyhydrogen burner with the said excess of oxygen operated, burned.
  • an oxyhydrogen burner which is preferably operated with a hydrogen / oxygen mixture as an internal mixing burner, a burner operated with natural gas or liquid gas can of course also be used.
  • the method according to the invention is preferably provided for those methods for exhaust gas purification in which the process exhaust gases are thermally treated in some way.
  • the process can of course also be used in connection with other processes for exhaust gas purification.
  • the process parameters are usually determined on the basis of empirical values or on the basis of a stoichiometric calculation. Since it is essential to guarantee that all pollutants are removed from the process exhaust gas, it is necessary to determine the process parameters, e.g. to measure the excess of oxygen and the amount of fuel gas supplied, or other process parameters, very abundantly.
  • the invention is therefore based on the object of providing a method for purifying process exhaust gases with which the disadvantages of the prior art are effectively eliminated.
  • the problem underlying the invention is achieved in a method of the type mentioned in that a continuous measurement of the type and the amount of pollutants in the process exhaust gas is carried out immediately before the process exhaust gases and at the same time the type and amount of pollutants of the exhaust gas purification system leaving reaction products is continuously determined directly at the outlet of the exhaust gas purification system and that the measurement signals are used directly for setting the operating parameters of the exhaust gas purification system.
  • the quantities of pollutants are preferably determined using a first and a second detector on the basis of selected pollutants, for example at least one of the perfluorocarbons C 2 F 6 , CF 4 , C 4 F 8 and O 2 on the first and on the second detector and on the second detector HF is also detected.
  • a further development of the invention is characterized in that when at least one of the pollutants is detected by the first detector, the operating parameters of the exhaust gas cleaning system are preset using values in relation to the amount of fuel gas, oxygen content (generally oxygen excess), amount of detergent in the detergent circuit and pH of the detergent is carried out.
  • the operating parameters are preset by a self-learning system based on comparatively determined exhaust gas species and concentrations of the pollutants. This has the particular advantage that the efficiency of the exhaust gas cleaning system and the basic settings are constantly optimized, which shortens the running-in phase of the exhaust gas cleaning system.
  • the operating parameters of the exhaust gas cleaning system are set as a function of the measured values of the second detector so that the concentration of the pollutants at the outlet of the exhaust gas cleaning system is regulated to a minimum.
  • the operating parameters are set so that the concentration of the pollutants drops closer to the measurement threshold.
  • Another embodiment of the invention is characterized in that the measurement signals are obtained non-invasively and without contact. This has the particular advantage that the sometimes particularly aggressive components of the process exhaust gases to be cleaned cannot influence the measurement result or the measuring device.
  • the measurement signals are preferably obtained by optical spectroscopy.
  • the type and amount of the pollutants are calculated simultaneously with an on-site computer on the basis of the measurement results of the first and the second detector and the operating parameters of the exhaust gas cleaning system are continuously regulated as a function of the input and output quantities of pollutants, the operating parameters being regulated taking into account the amount of process exhaust gas supplied.
  • the method according to the invention has the particular advantage that the fuel gas consumption is minimized and that long-term stability of the residual emissions can be guaranteed, so that the otherwise usual control measurements can be omitted.
  • the maintenance intervals can also be extended because deposits cannot be avoided, e.g. in the burner, any changes in the operating parameters can be automatically compensated.
  • the method ensures a large dynamic range of the measurable concentrations, so that only a single measuring device is sufficient for the entire range.
  • the measuring method is also suitable for system batteries.
  • the introduction of pollutants into the exhaust gas cleaning device can be logged continuously, so that a control of the upstream semiconductor process is also made possible.
  • Another particular advantage of the method according to the invention is that it can be used independently of the cleaning method used in the exhaust gas cleaning system.
  • the method according to the invention is therefore not tied to a specific type of exhaust gas purification, but is also suitable for non-thermal methods.
  • the only difference is that different operating parameters of the exhaust gas cleaning system are to be regulated.
  • the invention will be explained in more detail using an exemplary embodiment and an associated drawing figure.
  • the process exhaust gases are to be disposed of from a chamber cleaning process of a semiconductor CVD system.
  • C 2 F 6 and 0 2 are used for this chamber cleaning process.
  • the process exhaust gas from this chamber cleaning process contains reaction products, such as, in addition to the starting substances and pure nitrogen of the vacuum pump.
  • B. CF 4 and C 4 F 8 are reaction products, such as, in addition to the starting substances and pure nitrogen of the vacuum pump.
  • This process exhaust gas is passed to the exhaust gas purification system 1, which has a first detector 2 at the input 5, which analyzes the type and quantity of the process exhaust gas.
  • Gas phase FT-IR spectroscopy is used as the measurement method. Particular attention must be paid to the choice of materials for the IR measurement section with integrated nitrogen flushing, since the exhaust gas components e.g. T. are very aggressive.
  • a second detector 3 is arranged, the mode of operation of which is comparatively similar to that of the first detector 2.
  • the exhaust gas cleaning system 1 is preset via a connected computer 4 based on the gas types and their concentrations in terms of the amount of fuel gas, oxygen content (ia oxygen excess), amount of detergent Detergent cycle and pH of the detergent.
  • the perfluorocarbons C 2 F 6 , CF 4 and
  • C 4 F 8 also detects HF
  • HF is generated when the perfluorocarbons are converted into the flame. If the second detector 3 now measures a higher concentration than 1 ppm HF at the clean gas outlet 6, the pH value of the detergent and / or the amount of detergent circulation is increased, otherwise lower values can be used. The same procedure is followed with the perfluorocarbons, ie if the concentration at the pure gas outlet 6 is too high, the amount of fuel gas and or the amount of oxygen (depending on the species) is increased or otherwise decreased. With this method, the media consumption of the exhaust gas cleaning system 1 is constantly optimized, the operating costs are kept low and the exhaust gas is cleaned optimally.
  • the software used is self-learning, the determined optimal operating conditions are used as the basis for the presetting of the exhaust gas purification system 1 for comparative exhaust gas species and concentrations. As a result, the basic settings are also continuously optimized and the running-in phase of the exhaust gas cleaning system 1 is shortened.
  • C 2 F 6 can be expected as the reaction gas used with the highest concentration, CF 4 is the most chemically resistant perfluorocarbon, C 4 F 8 can be highly toxic
  • HF is formed in large quantities when the perfluorocarbons are reacted in the flame.

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  • Engineering & Computer Science (AREA)
  • Chemical & Material Sciences (AREA)
  • Environmental & Geological Engineering (AREA)
  • General Chemical & Material Sciences (AREA)
  • Biomedical Technology (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Oil, Petroleum & Natural Gas (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Treating Waste Gases (AREA)
  • Chimneys And Flues (AREA)
  • Incineration Of Waste (AREA)

Abstract

The invention relates to a method for purifying process waste gases by introducing them into a waste gas purification system that comprises a reaction chamber and by post-treating the reaction products that leave the reaction chamber in a washing chamber or sorbtion chamber with an associated washing agent circuit, whereby the type and amount of harmful substances in the process waste gas are continually measured before said waste gases enter the waste gas purification system (1); the type and amount of harmful substances in the reaction products that leave the waste gas purification system (1) are simultaneously determined directly at the exit of the said system (1); and the measuring signals are used directly in order to regulate the operating parameters of the waste gas purification system (1).

Description

Verfahren zur Reinigung von Prozeßabgasen Process exhaust gas purification processes
Die Erfindung betrifft ein Verfahren zur Reinigung von Prozeß- abgasen durch deren Einleitung in ein Abgasreinigungssystem mit einer Reaktionskammer und Nachbehandlung der die Reaktionskammer verlassenden Reaktionsprodukte in einer Waschbzw. Sorptionskaπvmer mit zugehörigem Waschmittelkreislauf.The invention relates to a method for cleaning process exhaust gases by introducing them into an exhaust gas purification system with a reaction chamber and aftertreatment of the reaction products leaving the reaction chamber in a washing or. Sorption chamber with associated detergent circuit.
Als Reinigungsverfahren für Prozeßabgase sind unterschiedliche Verfahren bekannt geworden, wobei bisher in der Hauptsache thermisch wirkende Abgasreinigungsverfahren angewendet werden.Different methods have become known as cleaning methods for process exhaust gases, so far mainly thermal exhaust gas cleaning methods have been used.
Beispielsweise ist ein Verfahren bekannt geworden, bei dem die Prozeßabgase in einer Reaktionskammer verbrannt/oxidiert bzw. thermisch zersetzt werden. Das erfolgt hier mit Hilfe einer durch ein Brenngas und Sauerstoff gespeisten Flamme und wonach die die Reaktionskammer verlassenden Abgase in eine Waschbzw. Sorptionskammer geleitet werden, in der die festen und/oder löslichen Bestandteile mit einem Sorptionsmittel aus dem Abgas ausgewaschen werden. Als Brenngase kommen beispielsweise Wasserstoff oder auch Erdgas in Betracht. Nachfolgend werden die nunmehr von schädlichen bzw. giftigen Bestandteilen gereinigten Abgase über eine lufttechnische Anlage in die Atmosphäre abgeleitet.For example, a method has become known in which the process exhaust gases are burned / oxidized or thermally decomposed in a reaction chamber. This is done here with the aid of a flame fed by a fuel gas and oxygen and after which the exhaust gases leaving the reaction chamber are washed or washed. Sorption chamber are passed, in which the solid and / or soluble constituents are washed out of the exhaust gas with a sorbent. For example, hydrogen or natural gas can be considered as fuel gases. The exhaust gases, which have now been cleaned of harmful or toxic components, are subsequently discharged into the atmosphere via an air-conditioning system.
Mit einem derartigen bekannten Verfahren werden Prozeßabgase, insbesondere mit Schadstoffen angereicherte Abgase aus CVD- und/oder Ätzprozessen und auch Chamber-Cleaning-Prozessen so gereinigt, daß eine Belastung der Umwelt mit schädlichen oder eventuell toxischen Substanzen vermieden wird. Insbesondere können Prozeßabgase aus Anlagen zur chemischen Bearbeitung von Halbleitersubstraten für die Herstellung mikroelektronischer Bauelemente mittels CVD-Niederdruckprozessen (LP-CVD) mit einem derartigen Verfahren gereinigt, bzw. zu unschädlichen Substanzen umgewandelt werden.With such a known method, process exhaust gases, in particular exhaust gases from CVD and / or etching processes and also chamber cleaning processes are cleaned in such a way that pollution of the environment with harmful or possibly toxic substances is avoided. In particular, process exhaust gases from plants for the chemical processing of semiconductor substrates for the production of microelectronic components by means of CVD low-pressure processes (LP-CVD) can be cleaned with such a method or converted into harmless substances.
Ein solches Abgasreinigungsverfahren geht beispielsweise aus der EP 0 347 753 Bl hervor, nach dem die Prozeßabgase in einer Reaktionskammer unter Sauerstoffüberschuß verbrannt und über eine Wasch- bzw. Sorptionskammer einer lufttechnischen Anlage zugeleitet werden. Der Aufbau einer Abgasreinigungsvorrich- tung, mit der die Prozeßabgase nach dem eingangs genannten Verfahren gereinigt werden können, ist beispielsweise in der DE 195 01 914 Cl beschrieben. Diese Vorrichtung besteht aus einem Brennraum innerhalb eines äußeren Rohres, in dem ein Brenner mit einer abwärts gerichteten Brennerflamme angeordnet ist, sowie einer Sorptionskammer oberhalb des Brennraumes. Die die Brennkammer verlassenden Abgase werden innerhalb des äußeren Rohres nach oben in die Sorptionskammer geleitet und durch einen Filter und über eine lufttechnische Anlage in die Atmosphäre abgeleitet. Zur intensiven Benetzung der durch die Sorp- tionskammer strömenden Abgase und dem sicheren Herausspülen der festen Reaktionsprodukte aus dieser, wird das Sorptionsmittel, z.B. Wasser, hier entgegen der Strömungsrichtung des Abgases gesprüht. Das Sorptionsmittel kann beispielsweise auch kegelförmig gegen die Strömungsrichtung des Abgases gesprüht werden. Die festen Reaktionsprodukte werden dabei entlang der Innenwandung des äußeren Rohres nach unten gespült und in eine Aufbereitungsanlage für das Sorptionsmittel geleitet.Such an exhaust gas purification method can be seen, for example, from EP 0 347 753 B1, according to which the process exhaust gases are burned in a reaction chamber with an excess of oxygen and are fed to a ventilation system via a washing or sorption chamber. The structure of an exhaust gas purification device with which the process exhaust gases can be cleaned by the method mentioned at the outset is described, for example, in DE 195 01 914 C1. This device consists of a combustion chamber inside an outer tube, in which a burner with a downward burner flame is arranged, and a sorption chamber above the combustion chamber. The exhaust gases leaving the combustion chamber are directed upwards into the sorption chamber within the outer tube and are discharged into the atmosphere through a filter and via an air-conditioning system. For intensive wetting of the exhaust gases flowing through the sorption chamber and the safe flushing out of the solid reaction products therefrom, the sorbent, e.g. Water, here sprayed against the flow direction of the exhaust gas. The sorbent can, for example, also be sprayed conically against the flow direction of the exhaust gas. The solid reaction products are rinsed down along the inner wall of the outer tube and passed into a treatment plant for the sorbent.
Die aus einer Niederdruck-CVD-Anlage kommenden Prozeßabgase können beispielsweise SiH4, PH3, N20 in unterschiedlichen Oxi- dationsstufen und Konzentrationen und auch Öldämpfe und Stäube (Si02) enthalten. Diese Prozeßabgase werden in der Flamme eines Knallgasbrenners, der mit besagtem SauerstoffÜberschuß betrieben wird, verbrannt. Anstelle des Knallgasbrenners, der mit einem Wasserstoff/Sauerstoff Gemisch bevorzugt als innenmischender Brenner betrieben wird, kann natürlich auch ein mit Erdgas oder Flüssiggas betriebener Brenner verwendet werden.The process exhaust gases coming from a low-pressure CVD system can contain, for example, SiH 4 , PH 3 , N 2 0 in different oxidation levels and concentrations and also oil vapors and dusts (Si0 2 ). These process gases are in the flame of an oxyhydrogen burner with the said excess of oxygen operated, burned. Instead of the oxyhydrogen gas burner, which is preferably operated with a hydrogen / oxygen mixture as an internal mixing burner, a burner operated with natural gas or liquid gas can of course also be used.
Es ist leicht einzusehen, daß es aus Gründen des Umweltschutzes und aus Kostengründen notwendig ist, so wenig wie möglich Brenngas und Zusatzsauerstoff einzusetzen. Dabei ist natürlich sicherzustellen, daß sämtliche in die Reaktions- kammer eingeleiteten toxischen Bestandteile des Prozeßabgases auch vollständig in unschädliche Substanzen umgewandelt werden.It is easy to see that it is necessary for environmental reasons and for reasons of cost to use as little fuel gas and additional oxygen as possible. It must of course be ensured that all toxic constituents of the process exhaust gas introduced into the reaction chamber are also completely converted into harmless substances.
Um das sicherzustellen, ist es notwendig, daß die genaue Zu- sammensetzung des Prozeßabgases bekannt ist, so daß es möglich ist, die benötigte Brenngasmenge und den Zusatzsauerstoff festzulegen. Darüberhinaus ist es notwendig, die Flamme ständig zu überwachen, um eine optimale Verbrennung sicherzustellen.In order to ensure this, it is necessary that the exact composition of the process exhaust gas is known, so that it is possible to determine the amount of fuel gas required and the additional oxygen. In addition, it is necessary to constantly monitor the flame to ensure optimal combustion.
Das erfindungsgemäße Verfahren bevorzugt für solche Verfahren zur Abgasreinigung vorgesehen, bei denen die Prozeßabgase in irgend einer Weise thermisch behandelt werden. Das Verfahren kann selbstverständlich auch im Zusamenhang mit anderen Ver- fahren zur Abgasreinigung eingesetzt werden.The method according to the invention is preferably provided for those methods for exhaust gas purification in which the process exhaust gases are thermally treated in some way. The process can of course also be used in connection with other processes for exhaust gas purification.
Da in der Regel die Zusammensetzung der Prozeßabgase bekannt ist, wie dies der Fall ist, wenn die Prozeßabgase aus nur einem Prozeß stammen, werden die Verfahrensparameter üblicher- weise anhand von Erfahrungswerten, oder anhand einer stöchio- metrischen Berechnung ermittelt. Da unbedingt garantiert werden muß, daß sämtliche Schadstoffe aus dem Prozeßabgas beseitigt werden, ist es unabhängig vom angewendeten Reinigungsverfahren notwendig, die Verfahrensparameter, z.B. den Sauer- stoffÜberschuß und die Menge des zugeführten Brenngases, oder andere Verfahrensparameter, sehr reichlich zu bemessen.Since the composition of the process exhaust gases is generally known, as is the case when the process exhaust gases originate from only one process, the process parameters are usually determined on the basis of empirical values or on the basis of a stoichiometric calculation. Since it is essential to guarantee that all pollutants are removed from the process exhaust gas, it is necessary to determine the process parameters, e.g. to measure the excess of oxygen and the amount of fuel gas supplied, or other process parameters, very abundantly.
Sind aber nacheinander oder gleichzeitig Prozeßabgase aus unterschiedlichen Prozessen, oder Prozeßabgase mit stark unterschiedlicher Zusammensetzung zu reinigen, führt das zu erheblichen Schwierigkeiten bei der Bestimmung der nötigen Verfahrensparameter. Daraus resultieren erhebliche Mehr- aufwendungen, die das Verfahren zur Abgasreinigung deutlich verteuern.However, process gases are off one after the other or simultaneously different processes, or cleaning process gases with very different compositions, leads to considerable difficulties in determining the necessary process parameters. This results in considerable additional expenses, which make the exhaust gas purification process significantly more expensive.
Der Erfindung liegt deshalb die Aufgabe zugrunde, ein Verfahren zur Reinigung von Prozeßabgasen zu schaffen, mit dem die Nachteile des Standes der Technik effektiv beseitigt werden.The invention is therefore based on the object of providing a method for purifying process exhaust gases with which the disadvantages of the prior art are effectively eliminated.
Die der Erfindung zugrundeliegende Aufgabenstellung wird bei einem Verfahren der eingangs genannten Art dadurch gelöst, daß unmittelbar vor Eintritt der Prozeßabgase in das Abgasreinigungssystem eine kontinuierliche Messung der Art und der Menge der Schadstoffe im Prozeßabgas vorgenommen wird und gleichzeitig die Art und Menge der Schadstoffe der das Abgasreinigungssystem verlassenden Reaktionsprodukte unmittelbar am Ausgang des Abgasreinigungssystems kontinuierlich bestimmt wird und daß die Meßsignale unmittelbar zur Einstellung der Betriebsparameter der Abgasreinigungsanlage verwendet werden.The problem underlying the invention is achieved in a method of the type mentioned in that a continuous measurement of the type and the amount of pollutants in the process exhaust gas is carried out immediately before the process exhaust gases and at the same time the type and amount of pollutants of the exhaust gas purification system leaving reaction products is continuously determined directly at the outlet of the exhaust gas purification system and that the measurement signals are used directly for setting the operating parameters of the exhaust gas purification system.
Die Bestimmung der Schadstoffmengen erfolgt bevorzugt mit Hilfe eines ersten und eines zweiten Detektors anhand von ausgewählten Schadstoffen, wobei beispielsweise am ersten und am zweiten Detektor wenigstens eines der Perfluorcarbone C2F6, CF4, C4F8 sowie 02 und am zweiten Detektor zusätzlich HF detek- tiert wird.The quantities of pollutants are preferably determined using a first and a second detector on the basis of selected pollutants, for example at least one of the perfluorocarbons C 2 F 6 , CF 4 , C 4 F 8 and O 2 on the first and on the second detector and on the second detector HF is also detected.
Vorteilhaft dabei ist es, wenn die Betriebsparameter in Abhängigkeit von den Schadstoffmengen im Prozeßabgas geregelt werden.It is advantageous here if the operating parameters are regulated as a function of the quantities of pollutants in the process exhaust gas.
Eine weitere Fortführung der Erfindung ist dadurch gekennzeichnet, daß bei der Detektierung wenigstens eines der Schadstoffe durch den ersten Detektor eine Voreinstellung der Betriebsparameter des Abgasreinigungssystemes anhand von Er- fahrungswerten in Bezug auf Brenngasmenge, Sauerstoffanteil (i.a. SauerstoffÜberschuß) , Waschmittelmenge des Waschmittelkreislaufes und pH-Wert des Waschmittels vorgenommen wird. Insbesondere erfolgt die Voreinstellung der Betriebsparameter durch ein selbstlernendes System auf der Basis von vergleichsweise ermittelten Abgasspezies und Konzentrationen der Schadstoffe. Das hat den besonderen Vorteil, daß der Wirkungsgrad des Abgasreinigungssystems und die Grundeinstellungen ständig optimiert werden, wodurch die Einlaufphase des Abgasreini- gungssystems verkürzt wird.A further development of the invention is characterized in that when at least one of the pollutants is detected by the first detector, the operating parameters of the exhaust gas cleaning system are preset using values in relation to the amount of fuel gas, oxygen content (generally oxygen excess), amount of detergent in the detergent circuit and pH of the detergent is carried out. In particular, the operating parameters are preset by a self-learning system based on comparatively determined exhaust gas species and concentrations of the pollutants. This has the particular advantage that the efficiency of the exhaust gas cleaning system and the basic settings are constantly optimized, which shortens the running-in phase of the exhaust gas cleaning system.
In einer weiteren Ausgestaltung der Erfindung werden die Betriebsparameter des Abgasreinigungssystems in Abhängigkeit von den Meßwerten des zweiten Detektors so eingestellt, daß die Konzentration der Schadstoffe am Ausgang des Abgasreinigungssystems auf ein Minimum geregelt wird.In a further embodiment of the invention, the operating parameters of the exhaust gas cleaning system are set as a function of the measured values of the second detector so that the concentration of the pollutants at the outlet of the exhaust gas cleaning system is regulated to a minimum.
Insbesondere werden die Betriebsparameter so eingestellt, daß die Konzentration der Schadstoffe in die Näher der Meßschwelle sinkt.In particular, the operating parameters are set so that the concentration of the pollutants drops closer to the measurement threshold.
Eine weitere Ausgestaltung der Erfindung ist dadurch gekennzeichnet, daß die Meßsignale nichtinvasiv und berührungslos gewonnen werden. Das hat den besonderen Vorteil, daß die teil- weise besonders aggressiven Bestandteile der zu reinigenden Prozeßabgase das Meßergebnis oder auch die Meßeinrichtung nicht beeinflussen können.Another embodiment of the invention is characterized in that the measurement signals are obtained non-invasively and without contact. This has the particular advantage that the sometimes particularly aggressive components of the process exhaust gases to be cleaned cannot influence the measurement result or the measuring device.
Bevorzugt werden die Meßsignale durch optische Spektroskopie gewonnen.The measurement signals are preferably obtained by optical spectroscopy.
In weiterer Fortführung der Erfindung werden bei der Detektie- rung einer erhöhten Konzentration von HF durch den zweiten Detektor der pH-Wert des Waschmittels und/oder dessen Menge erhöht.In a further development of the invention, when an elevated concentration of HF is detected by the second detector, the pH of the detergent and / or its amount is increased.
Wird hingegen eine erhöhte Konzentrationen von verbrenn-/oxi- dierbaren oder thermisch zersetzbaren Schadstoffen durch den zweiten Detektor detektiert, so wird die Brenngasmenge und/oder die Menge des zugeführten Sauerstoffs erhöht.In contrast, an increased concentration of combustible / oxidizable or thermally decomposable pollutants is caused by the second detector is detected, the amount of fuel gas and / or the amount of oxygen supplied is increased.
In einer vorteilhaften weiteren Ausgestaltung der Erfindung werden die Art und Menge der Schadstoffe mit einem anlageninternen Computer auf der Basis der Meßergebnisse des ersten und des zweiten Detektors simultan berechnet und die Betriebsparameter des Abgasreinigungssystems in Abhängigkeit von der eingangs- und ausgangsseitigen Schadstoffmengen kontinu- ierlich geregelt, wobei die Betriebsparameter unter Berücksichtigung der Menge des zugeführten Prozeßabgases geregelt werden.In an advantageous further embodiment of the invention, the type and amount of the pollutants are calculated simultaneously with an on-site computer on the basis of the measurement results of the first and the second detector and the operating parameters of the exhaust gas cleaning system are continuously regulated as a function of the input and output quantities of pollutants, the operating parameters being regulated taking into account the amount of process exhaust gas supplied.
Das erfindungsgemäße Verfahren hat den besonderen Vorteil, daß der Brenngasverbrauch minimiert wird und daß eine Langzeitstabilität der Restemission garantiert werden kann, so daß die sonst üblichen Kontrollmessungen entfallen können. Auch können die Wartungsintervalle verlängert werden, da durch nichtver- meidbare Ablagerungen, z.B. im Brenner, entstehende Änderungen der Betriebsparameter automatisch ausgeregelt werden können. Außerdem gewährleistet das Verfahren einen großen Dynamikbereich der meßbaren Konzentrationen, so daß für den gesamten Bereich nur eine einzige Meßvorrichtung genügt.The method according to the invention has the particular advantage that the fuel gas consumption is minimized and that long-term stability of the residual emissions can be guaranteed, so that the otherwise usual control measurements can be omitted. The maintenance intervals can also be extended because deposits cannot be avoided, e.g. in the burner, any changes in the operating parameters can be automatically compensated. In addition, the method ensures a large dynamic range of the measurable concentrations, so that only a single measuring device is sufficient for the entire range.
Das Meßverfahren ist auch für Anlagenbatterien geeignet. Da- rüberhinaus kann die Schadstoffeinleitung in die Abgsareini- gungsvorrichtung ständig protokolliert werden, so daß außerdem eine Kontrolle des vorgelagerten Halbleiterprozesses ermöglicht wird.The measuring method is also suitable for system batteries. In addition, the introduction of pollutants into the exhaust gas cleaning device can be logged continuously, so that a control of the upstream semiconductor process is also made possible.
Ein weiterer besonderer Vorteil des erfindungsgemäßen Verfahrens ist darin zu sehen, daß dieses unabhängig von dem in der Abgasreinigungsanlage angewandten Reinigungsverfahren eingesetzt werden kann. Das erfindungsgemäße Verfahren ist also nicht an eine bestimmte Art und Weise der Abgasreinigung, gebunden, sondern ist auch für nichtthermische Verfahren geeignet. Der Unterschied besteht nur darin, daß jeweils andere Betriebsparameter der Abgasreinigungsanlage zu regeln sind. Die Erfindung soll an einem Ausführungsbeispiel und einer zugehörigen Zeichnungsfigur näher erläutert werden.Another particular advantage of the method according to the invention is that it can be used independently of the cleaning method used in the exhaust gas cleaning system. The method according to the invention is therefore not tied to a specific type of exhaust gas purification, but is also suitable for non-thermal methods. The only difference is that different operating parameters of the exhaust gas cleaning system are to be regulated. The invention will be explained in more detail using an exemplary embodiment and an associated drawing figure.
In einem Abgasreinigungssystem 1, das nach dem Prinzip der thermischen Zersetzung bzw. Oxidation in einer Flamme mit anschließendem Auswaschen der Reaktionsprodukte arbeitet, sollen die Prozeßabgase aus einem Chamber-Cleaning-Prozeß einer Halbleiter-CVD-Anlage entsorgt werden. Für diesen Chamber-Cleaning-Prozeß werden C2F6 und 02 verwendet. Das Prozeß- abgas aus diesem Chamber-Cleaning-Prozeß enthält neben den Ausgangssubstanzen und Purgestickstoff der Vakuumpumpe Reaktionsprodukte, wie z. B. CF4 und C4F8.In an exhaust gas cleaning system 1, which works on the principle of thermal decomposition or oxidation in a flame with subsequent washing out of the reaction products, the process exhaust gases are to be disposed of from a chamber cleaning process of a semiconductor CVD system. C 2 F 6 and 0 2 are used for this chamber cleaning process. The process exhaust gas from this chamber cleaning process contains reaction products, such as, in addition to the starting substances and pure nitrogen of the vacuum pump. B. CF 4 and C 4 F 8 .
Dieses Prozeßabgas wird zu dem Abgasreingungssystem 1 gelei- tet, das am Eingang 5 einen ersten Detektor 2 besitzt, der das Prozeßabgas nach Art und Menge analysiert. Als Meßmethode wird die Gasphasen-FT-IR-Spektroskopie eingesetzt, wobei auf die Auswahl der Materialien für die IR-Meßstrecke mit integrierter StickstoffSpülung besondere Beachtung geschenkt werden muß, da die Abgasbestandteile z. T. sehr aggressiv sind.This process exhaust gas is passed to the exhaust gas purification system 1, which has a first detector 2 at the input 5, which analyzes the type and quantity of the process exhaust gas. Gas phase FT-IR spectroscopy is used as the measurement method. Particular attention must be paid to the choice of materials for the IR measurement section with integrated nitrogen flushing, since the exhaust gas components e.g. T. are very aggressive.
Am Reingasausgang 6 des Abgasreinigungssystems 1 wird ein zweiter Detektor 3 angeordnet, dessen Funktionsweise vergleichsweise mit der des ersten Detektors 2 ist.At the clean gas outlet 6 of the exhaust gas cleaning system 1, a second detector 3 is arranged, the mode of operation of which is comparatively similar to that of the first detector 2.
Detektiert der erste Detektor 2 am Eingang 5 des Abgasreinigungssystems 1 eines oder mehrere der oben genannten Gase, so erfolgt über einen angeschlossenen Computer 4 aufgrund der Gasarten und deren Konzentrationen eine Voreinstellung des Abgasreinigungssystems 1 in Bezug auf Brenngasmenge, Sauerstoffanteil (i.a. SauerstoffÜberschuß) , Waschmittelmenge des Waschmittelkreislaufes und pH-Wert des Waschmittels. Am Reingasausgang 6 werden neben den Perfluorcarbonen C2F6, CF4 undIf the first detector 2 detects one or more of the above-mentioned gases at the input 5 of the exhaust gas cleaning system 1, the exhaust gas cleaning system 1 is preset via a connected computer 4 based on the gas types and their concentrations in terms of the amount of fuel gas, oxygen content (ia oxygen excess), amount of detergent Detergent cycle and pH of the detergent. In addition to the perfluorocarbons, C 2 F 6 , CF 4 and
C4F8 auch HF detektiert,C 4 F 8 also detects HF,
Bei der Umsetzung der Perfluorcarbone in der Flamme entsteht u. a. HF. Wird nun vom zweiten Detektor 3 am Reingasausgang 6 beispielweise eine höhere Konzentration als 1 ppm HF gemessen, werden der pH-Wert des Waschmittels und oder die Waschmittelkreislaufmenge erhöht, anderenfalls kann mit niedrigeren Werten gearbeitet werden. Auf gleicher Weise wird mit den Per- fluorcarbonen verfahren, d. h. wenn die Konzentration am Rein- gasausgang 6 zu hoch ist, wird die Brenngasmenge und oder die Sauerstoffmenge (abhängig von den Spezies) erhöht oder anderenfalls erniedrigt. Durch diese Methode wird der Medienverbrauch des Abgasreinigungssystems 1 ständig optimiert, die Betriebskosten niedrig gehalten und eine optimale Reinigung des Abgases realisiert.HF is generated when the perfluorocarbons are converted into the flame. If the second detector 3 now measures a higher concentration than 1 ppm HF at the clean gas outlet 6, the pH value of the detergent and / or the amount of detergent circulation is increased, otherwise lower values can be used. The same procedure is followed with the perfluorocarbons, ie if the concentration at the pure gas outlet 6 is too high, the amount of fuel gas and or the amount of oxygen (depending on the species) is increased or otherwise decreased. With this method, the media consumption of the exhaust gas cleaning system 1 is constantly optimized, the operating costs are kept low and the exhaust gas is cleaned optimally.
Da die verwendete Software selbstlernend ist, werden die ermittelten optimalen Betriebsbedingungen als Grundlage für die Voreinstellung des Abgasreinigungssystems 1 bei vergleichs- weisen Abgasspezies und Konzentrationen verwendet. Dadurch werden auch die Grundeinstellungen ständig optimiert und die Einlaufphase des Abgasreinigungssystems 1 wird verkürzt.Since the software used is self-learning, the determined optimal operating conditions are used as the basis for the presetting of the exhaust gas purification system 1 for comparative exhaust gas species and concentrations. As a result, the basic settings are also continuously optimized and the running-in phase of the exhaust gas cleaning system 1 is shortened.
Natürlich entstehen bei der Umsetzung von C2F6 außer den o. g. Gasen weitere Reaktionsprodukte, die ebenfalls in die Auswertung mit einbezogen werden können. Bei zu vielen Komponenten wird allerdings die Auswertung und die zielgerichtete Einflußnahme auf die Betriebsbedingungen des Abgasreinigungs- sytems 1 erschwert, da die Zusammenhänge sehr komplex sind. Es wurden deshalb bewußt die o. g. Komponenten gewählt, weil:Of course, the reaction of C 2 F 6 produces other reaction products in addition to the gases mentioned above, which can also be included in the evaluation. If there are too many components, however, the evaluation and the targeted influence on the operating conditions of the exhaust gas purification system 1 are made more difficult, since the relationships are very complex. The above components were deliberately chosen because:
C2F6 als eingesetztes Reaktionsgas mit der höchsten Konzentration erwartet werden kann, CF4 das chemisch beständigste Perfluorcarbon ist C4F8 hoch toxisch sein kannC 2 F 6 can be expected as the reaction gas used with the highest concentration, CF 4 is the most chemically resistant perfluorocarbon, C 4 F 8 can be highly toxic
HF in großen Mengen bei der Umsetzung der Perfluorcarbone in der Flamme entsteht.HF is formed in large quantities when the perfluorocarbons are reacted in the flame.
Während die Umsetzung der Perfluorcarbone vorwiegend durch die Brenngasparameter beeinflußt werden, sind für die Entfernung der sauren Gasbestandteile (HF) die Waschmittelparameter entscheidend. While the conversion of the perfluorocarbons is mainly influenced by the fuel gas parameters, the detergent parameters are decisive for the removal of the acidic gas components (HF).
Verfahren zur Reinigung von AbgasenExhaust gas purification process
BezugszeichenlisteReference list
Abgasreinigungssystem erster Detektor zweiter Detektor Computer Eingang Reingasausgang Exhaust gas cleaning system first detector second detector computer input clean gas output

Claims

Verfahren zur Reinigung von AbgasenPatentansprüche Process for the purification of exhaust gases
1. Verfahren zur Reinigung von Prozeßabgasen durch deren Einleitung in ein Abgasreinigungssystem (1) mit einer Reaktionskammer und Nachbehandlung der die Reaktionskammer verlassenden Reaktionsprodukte in einer Wasch- bzw. Sorp- tionskammer mit zugehörigem Waschmittelkreislauf, d a d u r c h g e k e n n z e i c h n e t, daß unmittelbar vor Eintritt der Prozeßabgase in das Abgasreinigungssystem (1) eine kontinuierliche Messung der Art und der Menge der Schadstoffe im Prozeßabgas vorgenommen wird und gleich- zeitig die Art und Menge der Schadstoffe der das Abgasreinigungssystem (1) verlassenden Reaktionsprodukte unmittelbar am Ausgang des Abgasreinigungssystems (1) kontinuierlich bestimmt wird und daß die Meßsignale unmittelbar zur Einstellung der Betriebsparameter des Abgas- reinigungssystems (1) verwendet werden.1. Process for cleaning process exhaust gases by introducing them into an exhaust gas cleaning system (1) with a reaction chamber and aftertreatment of the reaction products leaving the reaction chamber in a washing or sorption chamber with an associated detergent circuit, characterized in that immediately before the process exhaust gases enter the exhaust gas cleaning system (1) a continuous measurement of the type and the amount of pollutants in the process exhaust gas is carried out and at the same time the type and amount of pollutants of the reaction products leaving the exhaust gas cleaning system (1) is continuously determined directly at the outlet of the exhaust gas cleaning system (1) and that the measurement signals can be used directly to set the operating parameters of the exhaust gas cleaning system (1).
2. Verfahren nach Anspruch 1, d a d u r c h g e k e n n z e i c h n e t, daß die Bestimmung der Schadstoffmengen mit Hilfe eines ersten und eines zweiten Detektors (2, 3) anhand von ausgewählten Schadstoffen erfolgt.2. The method of claim 1, d a d u r c h g e k e n n z e i c h n e t that the determination of the amounts of pollutants with the aid of a first and a second detector (2, 3) on the basis of selected pollutants.
3. Verfahren nach Anspruch 2, d a d u r c h g e k e n n z e i c h n e t, daß am ersten und am zweiten Detektor (2, 3) wenigstens einer der Schadstoffe und am zweiten Detektor (3) zusätzlich HF detektiert wird.3. The method according to claim 2, characterized in that on the first and on the second detector (2, 3) at least one of the pollutants and additionally HF is detected at the second detector (3).
4. Verfahren nach Anspruch 1 bis 3, d a d u r c h g e - k e n n z e i c h n e t, daß die Betriebsparameter in4. The method of claim 1 to 3, d a d u r c h g e - k e n n z e i c h n e t that the operating parameters in
Abhängigkeit von den Schadstoffmengen im Prozeßabgas geregelt werden.Depending on the amount of pollutants in the process exhaust gas are regulated.
5. Verfahren nach Anspruch 4, d a d u r c h g e k e n n - z e i c h n e t, daß bei der Detektierung wenigstens eines der Schadstoffe durch den ersten Detektor (2) eine Voreinstellung der Betriebsparameter des Abgasreinigungssystemes (1) anhand von Erfahrungswerten in Bezug auf Brenngasmenge, Sauerstoffanteil (i.a. SauerstoffÜberschuß ) , Wasch- mittelmenge des Waschmittelkreislaufes und pH-Wert des Waschmittels vorgenommen wird.5. The method according to claim 4, characterized in that when at least one of the pollutants is detected by the first detector (2), a presetting of the operating parameters of the exhaust gas purification system (1) is based on empirical values relating to the amount of fuel gas, oxygen content (ia oxygen excess), washing - medium amount of the detergent circuit and pH of the detergent is carried out.
6. Verfahren nach Anspruch 5, d a d u r c h g e k e n n z e i c h n e t, daß die Voreinstellung der Betriebspara- meter durch ein selbstlernendes System auf der Basis von vergleichsweise ermittelten Abgasspezies und Konzentrationen der Schadstoffe vorgenommen wird.6. The method as claimed in claim 5, so that the presetting of the operating parameters is carried out by a self-learning system on the basis of comparatively determined exhaust gas species and concentrations of the pollutants.
7. Verfahren nach Anspruch 1 bis 6, d a d u r c h g e - k e n n z e i c h n e t, daß die Betriebsparameter des7. The method according to claim 1 to 6, d a d u r c h g e - k e n n z e i c h n e t that the operating parameters of the
Abgasreinigungssystems (1) in Abhängigkeit von den Meßwerten des zweiten Detektors (3) so eingestellt werden, daß die Konzentration der Schadstoffe am Ausgang des Abgasreinigungssystems (1) auf ein Minimum geregelt wird.Exhaust gas cleaning system (1) depending on the measured values of the second detector (3) are set so that the concentration of pollutants at the outlet of the exhaust gas cleaning system (1) is regulated to a minimum.
8. Verfahren nach einem der Ansprüche 1 bis 7, d a d u r c h g e k e n n z e i c h n e t, daß die Meßsignale nichtin- vasiv und berührungslos gewonnen werden.8. The method according to any one of claims 1 to 7, so that the measurement signals are obtained non-invasively and without contact.
9. Verfahren nach Anspruch 8, d a d u r c h g e k e n n z e i c h n e t, daß die Meßsignale durch optische Spektroskopie gewonnen werden. 9. The method according to claim 8, characterized in that the measurement signals are obtained by optical spectroscopy.
10. Verfahren nach einem der Ansprüche 6 bis 9, d a d u r c h g e k e n n z e i c h n e t, daß bei der Detektierung einer erhöhten Konzentration von HF durch den zweiten Detektor (3) der pH-Wert des Waschmittels und/oder dessen Menge erhöht wird.10. The method according to any one of claims 6 to 9, so that the detection of an increased concentration of HF by the second detector (3) increases the pH of the detergent and / or its amount when detecting an increased concentration of HF.
11. Verfahren nach einem der Ansprüche 6 bis 9, d a d u r c h g e k e n n z e i c h n e t, daß bei der Detektion von erhöhten Konzentrationen von Schadstoffen durch den zwei- ten Detektor (3) die Brenngasmenge und/oder die Menge des zugeführten Sauerstoffs erhöht wird.11. The method according to any one of claims 6 to 9, so that the detection of increased concentrations of pollutants by the second detector (3) increases the amount of fuel gas and / or the amount of oxygen supplied when detecting increased concentrations of pollutants.
12. Verfahren nach den Ansprüchen 1 bis 11, d a d u r c h g e k e n n z e i c h n e t, daß die Art und Menge der Schadstoffe mit einem anlageninternen Computer (4) auf der Basis der Meßergebnisse des ersten und des zweiten Detektors simultan berechnet wird und daß die Betriebsparameter des Abgasreinigungssystems (1) in Abhängigkeit der eingangs- und ausgangsseitig bestimmten Schadstoffmengen kontinuierlich geregelt werden.12. The method according to claims 1 to 11, characterized in that the type and amount of pollutants is calculated simultaneously with an internal computer (4) on the basis of the measurement results of the first and the second detector and that the operating parameters of the exhaust gas purification system (1) in Dependency of the amount of pollutants determined on the input and output side are continuously regulated.
13. Verfahren nach einem der Ansprüche 1 bis 12, d a d u r c h g e k e n n z e i c h n e t, daß die Betriebsparameter unter Berücksichtigung der Menge des zugeführten Prozeß- abgases geregelt werden. 13. The method according to any one of claims 1 to 12, so that the operating parameters are regulated taking into account the amount of process exhaust gas supplied.
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