EP1026535A3 - Dispositif optique avec micro-obturateurs ou micromiroirs à commande magnétique - Google Patents

Dispositif optique avec micro-obturateurs ou micromiroirs à commande magnétique Download PDF

Info

Publication number
EP1026535A3
EP1026535A3 EP00830064A EP00830064A EP1026535A3 EP 1026535 A3 EP1026535 A3 EP 1026535A3 EP 00830064 A EP00830064 A EP 00830064A EP 00830064 A EP00830064 A EP 00830064A EP 1026535 A3 EP1026535 A3 EP 1026535A3
Authority
EP
European Patent Office
Prior art keywords
micro
shutters
mirrors
optical device
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP00830064A
Other languages
German (de)
English (en)
Other versions
EP1026535B1 (fr
EP1026535A2 (fr
Inventor
Marco Pizzi
Piero Perlo
Valerian Koniachkine
Vito Lambertini
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Centro Ricerche Fiat SCpA
Original Assignee
Centro Ricerche Fiat SCpA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Centro Ricerche Fiat SCpA filed Critical Centro Ricerche Fiat SCpA
Publication of EP1026535A2 publication Critical patent/EP1026535A2/fr
Publication of EP1026535A3 publication Critical patent/EP1026535A3/fr
Application granted granted Critical
Publication of EP1026535B1 publication Critical patent/EP1026535B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/0816—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements
    • G02B26/0833—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD
    • G02B26/085—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light by means of one or more reflecting elements the reflecting element being a micromechanical device, e.g. a MEMS mirror, DMD the reflecting means being moved or deformed by electromagnetic means
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/02—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the intensity of light

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electromagnetism (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Electrochromic Elements, Electrophoresis, Or Variable Reflection Or Absorption Elements (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Micromachines (AREA)
EP00830064A 1999-02-02 2000-01-28 Dispositif optique avec micro-obturateurs ou micromiroirs à commande magnétique Expired - Lifetime EP1026535B1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
IT1999TO000071A IT1307130B1 (it) 1999-02-02 1999-02-02 Dispositivo ottico a micro-otturatori o micro-specchi ad effettomagnetico.
ITTO990071 1999-02-02

Publications (3)

Publication Number Publication Date
EP1026535A2 EP1026535A2 (fr) 2000-08-09
EP1026535A3 true EP1026535A3 (fr) 2004-06-23
EP1026535B1 EP1026535B1 (fr) 2005-04-13

Family

ID=11417409

Family Applications (1)

Application Number Title Priority Date Filing Date
EP00830064A Expired - Lifetime EP1026535B1 (fr) 1999-02-02 2000-01-28 Dispositif optique avec micro-obturateurs ou micromiroirs à commande magnétique

Country Status (4)

Country Link
EP (1) EP1026535B1 (fr)
AT (1) ATE293258T1 (fr)
DE (1) DE60019353T2 (fr)
IT (1) IT1307130B1 (fr)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
ITTO20031034A1 (it) * 2003-12-23 2005-06-24 Fiat Ricerche Spettrofotometro con micro-filtri.
DE102008009215A1 (de) 2008-02-13 2009-08-20 Universität Kassel Bauelement zur Darstellung von Symbolen und damit hergestellte optische Anzeigevorrichtung

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0614101A2 (fr) * 1993-02-03 1994-09-07 Canon Kabushiki Kaisha Déflecteur optique et méthode de sa fabrication
US5784189A (en) * 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5784189A (en) * 1991-03-06 1998-07-21 Massachusetts Institute Of Technology Spatial light modulator
EP0614101A2 (fr) * 1993-02-03 1994-09-07 Canon Kabushiki Kaisha Déflecteur optique et méthode de sa fabrication

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
MILLER R A ET AL: "MICROMACHINED ELECTROMAGNETIC SCANNING MIRRORS", OPTICAL ENGINEERING, SOC. OF PHOTO-OPTICAL INSTRUMENTATION ENGINEERS. BELLINGHAM, US, vol. 36, no. 5, 1 May 1997 (1997-05-01), pages 1399 - 1407, XP000692371, ISSN: 0091-3286 *

Also Published As

Publication number Publication date
EP1026535B1 (fr) 2005-04-13
DE60019353T2 (de) 2005-09-29
EP1026535A2 (fr) 2000-08-09
IT1307130B1 (it) 2001-10-29
ITTO990071A1 (it) 2000-08-02
ATE293258T1 (de) 2005-04-15
DE60019353D1 (de) 2005-05-19

Similar Documents

Publication Publication Date Title
EP1130446A3 (fr) Actionneurs d'un arrangement en serpentin aux segments aternativement actionnants et opposés et procédés associés
EP1216730A3 (fr) Méthode de contrôle pour contrôler l'affichage d'un terminal et un terminal
EP1258979A3 (fr) Microactionneur
EP0938144A3 (fr) Porte-objet avec un moteur à ultrason et imprimante utilisant ce porte-objet
EP1287864A3 (fr) Dispositif de détection de l'orientation et appareil de jeu vidéo
EP2360298A3 (fr) Proédé pour le dépot d'un nano-fil semiconducteur
EP1009142A3 (fr) Appareil de communication sans fil et moyens de commande
WO2004041998A3 (fr) Appareil et procede pour capteurs d'energie, de force et de masse nanomecaniques sous vide
EP1010570A3 (fr) Système de commande de véhicule
EP1205726A3 (fr) Dispositif d'actionnement
EP1324182A3 (fr) Système et méthode pour fournir un recouvrement avec fonctionnalité virtuelle pour unité périphérique
WO2004113015A3 (fr) Appareil fixe flexible
EP1304462A3 (fr) Dispositif de commande d'un actionneur
EP1169989A3 (fr) Dispositif de positionnement pour invalide
EP0899944A3 (fr) Appareil de prise de vues utilisant le décalage des pixels
EP1211572A3 (fr) Elément de transfert et fixage simultané avec une couche extérieure de fluorosilicone
WO2002009632A3 (fr) Ensemble support de dispositif medical
EP1026535A3 (fr) Dispositif optique avec micro-obturateurs ou micromiroirs à commande magnétique
EP1316945A3 (fr) Mécanisme de support de tête magnétique et mécanisme de commande de positionnement pour tête magnétique
EP0974778A3 (fr) Vanne bidirectionnelle de régulation de débit
EP1085382A3 (fr) Procédé de positionnement et dispositif de positionnement
EP1354849A3 (fr) Flexion avec un actionneur integral
EP1176272A3 (fr) Actionneur
AU1463700A (en) Force feedback device including actuator with moving magnet
AU2002247747A1 (en) Emulsifiers, especially based on polyisobutylenamines

Legal Events

Date Code Title Description
PUAI Public reference made under article 153(3) epc to a published international application that has entered the european phase

Free format text: ORIGINAL CODE: 0009012

AK Designated contracting states

Kind code of ref document: A2

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Free format text: AL;LT;LV;MK;RO;SI

PUAL Search report despatched

Free format text: ORIGINAL CODE: 0009013

AK Designated contracting states

Kind code of ref document: A3

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AX Request for extension of the european patent

Extension state: AL LT LV MK RO SI

RIC1 Information provided on ipc code assigned before grant

Ipc: 7G 02B 26/02 B

Ipc: 7G 02F 1/00 B

Ipc: 7G 02B 26/08 A

17P Request for examination filed

Effective date: 20040729

GRAP Despatch of communication of intention to grant a patent

Free format text: ORIGINAL CODE: EPIDOSNIGR1

GRAS Grant fee paid

Free format text: ORIGINAL CODE: EPIDOSNIGR3

GRAA (expected) grant

Free format text: ORIGINAL CODE: 0009210

AKX Designation fees paid

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

AK Designated contracting states

Kind code of ref document: B1

Designated state(s): AT BE CH CY DE DK ES FI FR GB GR IE IT LI LU MC NL PT SE

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: NL

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

Ref country code: BE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

Ref country code: LI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

Ref country code: CH

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

Ref country code: FI

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

Ref country code: AT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

REG Reference to a national code

Ref country code: GB

Ref legal event code: FG4D

REG Reference to a national code

Ref country code: CH

Ref legal event code: EP

REG Reference to a national code

Ref country code: IE

Ref legal event code: FG4D

REF Corresponds to:

Ref document number: 60019353

Country of ref document: DE

Date of ref document: 20050519

Kind code of ref document: P

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GR

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050713

Ref country code: SE

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050713

Ref country code: DK

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050713

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: ES

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050724

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: PT

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050913

NLV1 Nl: lapsed or annulled due to failure to fulfill the requirements of art. 29p and 29m of the patents act
REG Reference to a national code

Ref country code: CH

Ref legal event code: PL

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060130

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: LU

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060131

Ref country code: MC

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20060131

PLBE No opposition filed within time limit

Free format text: ORIGINAL CODE: 0009261

STAA Information on the status of an ep patent application or granted ep patent

Free format text: STATUS: NO OPPOSITION FILED WITHIN TIME LIMIT

ET Fr: translation filed
26N No opposition filed

Effective date: 20060116

REG Reference to a national code

Ref country code: IE

Ref legal event code: MM4A

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: GB

Payment date: 20070124

Year of fee payment: 8

GBPC Gb: european patent ceased through non-payment of renewal fee

Effective date: 20080128

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: CY

Free format text: LAPSE BECAUSE OF FAILURE TO SUBMIT A TRANSLATION OF THE DESCRIPTION OR TO PAY THE FEE WITHIN THE PRESCRIBED TIME-LIMIT

Effective date: 20050413

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: GB

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20080128

PGFP Annual fee paid to national office [announced via postgrant information from national office to epo]

Ref country code: DE

Payment date: 20110126

Year of fee payment: 12

Ref country code: FR

Payment date: 20110128

Year of fee payment: 12

Ref country code: IT

Payment date: 20110111

Year of fee payment: 12

REG Reference to a national code

Ref country code: FR

Ref legal event code: ST

Effective date: 20120928

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: DE

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120801

REG Reference to a national code

Ref country code: DE

Ref legal event code: R119

Ref document number: 60019353

Country of ref document: DE

Effective date: 20120801

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: IT

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120128

PG25 Lapsed in a contracting state [announced via postgrant information from national office to epo]

Ref country code: FR

Free format text: LAPSE BECAUSE OF NON-PAYMENT OF DUE FEES

Effective date: 20120131