EP0973709B1 - Verfahren zur reinigung von mit c1-c3-kohlenwasserstoffen und/oder iso-butan verunreinigtem methylchlorid - Google Patents
Verfahren zur reinigung von mit c1-c3-kohlenwasserstoffen und/oder iso-butan verunreinigtem methylchlorid Download PDFInfo
- Publication number
- EP0973709B1 EP0973709B1 EP98910635A EP98910635A EP0973709B1 EP 0973709 B1 EP0973709 B1 EP 0973709B1 EP 98910635 A EP98910635 A EP 98910635A EP 98910635 A EP98910635 A EP 98910635A EP 0973709 B1 EP0973709 B1 EP 0973709B1
- Authority
- EP
- European Patent Office
- Prior art keywords
- methyl chloride
- distillation column
- stage
- condensation
- process according
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 title claims abstract description 96
- 229940050176 methyl chloride Drugs 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 40
- NNPPMTNAJDCUHE-UHFFFAOYSA-N isobutane Chemical compound CC(C)C NNPPMTNAJDCUHE-UHFFFAOYSA-N 0.000 title claims abstract description 26
- 239000001282 iso-butane Substances 0.000 title claims abstract description 12
- 229930195733 hydrocarbon Natural products 0.000 title abstract description 10
- 150000002430 hydrocarbons Chemical class 0.000 title abstract description 6
- 238000004140 cleaning Methods 0.000 title abstract description 5
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical class C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 claims abstract description 22
- 238000004519 manufacturing process Methods 0.000 claims abstract description 9
- 238000004821 distillation Methods 0.000 claims description 36
- 238000009833 condensation Methods 0.000 claims description 30
- 230000005494 condensation Effects 0.000 claims description 30
- 229910052710 silicon Inorganic materials 0.000 claims description 8
- 239000010703 silicon Substances 0.000 claims description 8
- NEHMKBQYUWJMIP-NJFSPNSNSA-N chloro(114C)methane Chemical compound [14CH3]Cl NEHMKBQYUWJMIP-NJFSPNSNSA-N 0.000 claims description 7
- 239000007788 liquid Substances 0.000 claims description 6
- 239000000203 mixture Substances 0.000 claims description 5
- 239000003054 catalyst Substances 0.000 claims description 4
- 230000015572 biosynthetic process Effects 0.000 claims description 3
- 238000003786 synthesis reaction Methods 0.000 claims description 3
- 239000012535 impurity Substances 0.000 abstract description 9
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 16
- 239000007789 gas Substances 0.000 description 14
- ATUOYWHBWRKTHZ-UHFFFAOYSA-N Propane Chemical compound CCC ATUOYWHBWRKTHZ-UHFFFAOYSA-N 0.000 description 12
- QQONPFPTGQHPMA-UHFFFAOYSA-N Propene Chemical compound CC=C QQONPFPTGQHPMA-UHFFFAOYSA-N 0.000 description 10
- 238000009835 boiling Methods 0.000 description 9
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 8
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 7
- 239000002826 coolant Substances 0.000 description 5
- 239000001301 oxygen Substances 0.000 description 5
- 229910052760 oxygen Inorganic materials 0.000 description 5
- 239000001294 propane Substances 0.000 description 5
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 4
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 4
- 229910052757 nitrogen Inorganic materials 0.000 description 4
- 238000012856 packing Methods 0.000 description 4
- OKKJLVBELUTLKV-UHFFFAOYSA-N Methanol Chemical compound OC OKKJLVBELUTLKV-UHFFFAOYSA-N 0.000 description 3
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000010992 reflux Methods 0.000 description 3
- 238000000926 separation method Methods 0.000 description 3
- 239000007787 solid Substances 0.000 description 3
- KZDCMKVLEYCGQX-UDPGNSCCSA-N 2-(diethylamino)ethyl 4-aminobenzoate;(2s,5r,6r)-3,3-dimethyl-7-oxo-6-[(2-phenylacetyl)amino]-4-thia-1-azabicyclo[3.2.0]heptane-2-carboxylic acid;hydrate Chemical compound O.CCN(CC)CCOC(=O)C1=CC=C(N)C=C1.N([C@H]1[C@H]2SC([C@@H](N2C1=O)C(O)=O)(C)C)C(=O)CC1=CC=CC=C1 KZDCMKVLEYCGQX-UDPGNSCCSA-N 0.000 description 2
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 2
- 230000002745 absorbent Effects 0.000 description 2
- 239000002250 absorbent Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 239000012267 brine Substances 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 238000002360 preparation method Methods 0.000 description 2
- 238000011084 recovery Methods 0.000 description 2
- 229920006395 saturated elastomer Polymers 0.000 description 2
- 229930195734 saturated hydrocarbon Natural products 0.000 description 2
- HPALAKNZSZLMCH-UHFFFAOYSA-M sodium;chloride;hydrate Chemical compound O.[Na+].[Cl-] HPALAKNZSZLMCH-UHFFFAOYSA-M 0.000 description 2
- 229930195735 unsaturated hydrocarbon Natural products 0.000 description 2
- 238000005406 washing Methods 0.000 description 2
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 1
- 239000004215 Carbon black (E152) Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 125000000217 alkyl group Chemical group 0.000 description 1
- 238000005660 chlorination reaction Methods 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000003795 desorption Methods 0.000 description 1
- 238000007700 distillative separation Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000000895 extractive distillation Methods 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000002798 polar solvent Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 238000005201 scrubbing Methods 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 239000002912 waste gas Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/16—Preparation thereof from silicon and halogenated hydrocarbons direct synthesis
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07C—ACYCLIC OR CARBOCYCLIC COMPOUNDS
- C07C17/00—Preparation of halogenated hydrocarbons
- C07C17/38—Separation; Purification; Stabilisation; Use of additives
Definitions
- the invention relates to a process for the preparation of methylchlorosilanes by reacting silicon with methyl chloride in the presence of catalysts and optionally promoters, which comprises the steps: separation of the resulting methylchlorosilanes in a distillation column; Feeding the gas mixture separated in the said distillation column, which contains methyl chloride, C 1 -C 3 hydrocarbons and isobutane, into a distillation column.
- the invention relates to a method for removing impurities from methyl chloride, which is used in the production of methylchlorosilanes.
- the methyl chloride to be recovered is used to suppress this accumulation usually compressed and condensed, with some of the low boiling Components such as methane, ethane and ethene are removed.
- methyl chloride is obtained, which still contains residues of methane, ethane and ethene and, as essential impurities, C 3 -hydrocarbons such as propane and propene and isobutane.
- C 3 -hydrocarbons such as propane and propene and isobutane.
- Isobutane is problematic in that it has a higher boiling point than MeCl, but forms a low-boiling azeotrope with it.
- a major disadvantage of removing low and low-boiling components from methyl chloride by condensation is that in this Process an exhaust gas is obtained that is low or light in addition to those mentioned boiling impurities also contains significant amounts of methyl chloride.
- the SU-B 141 153 proposed the exhaust gas with an absorbent for methyl chloride to wash.
- the disadvantage of this process is that the methyl chloride during desorption is contaminated by the absorbent.
- DE-A 3 610 706 describes a process in which the methyl chloride-containing Exhaust gases from the condensation in contact with polar solvents be brought and the impurities from the methyl chloride by a selective Exhaust gas scrubbing or an extractive distillation can be separated.
- the process uses high recovery rates of methyl chloride from the Exhaust gas reached, whereby the methyl chloride is obtained in high purity. This However, the process is comparatively complex.
- the object of the invention was therefore to provide a process for cleaning methyl chloride contaminated with low or low-boiling C 1 -C 3 hydrocarbons and / or isobutane, which allows effective removal of the hydrocarbons contaminating the methyl chloride and at the same time minimizes the losses of methyl chloride.
- the object could be achieved in that the methyl chloride contaminated with C 1 -C 3 hydrocarbons and / or isobutane is distilled and then condensed in several stages, the condensates being returned as reflux to the distillation column (10).
- This process can also be used for methyl chloride, as is customary in technical terms Chlorination of methane or by reacting methanol with HCl is obtained from Impurities are freed.
- the present invention thus relates to a process for the preparation of methylchlorosilanes by reacting silicon with methyl chloride in the presence of catalysts and, if appropriate, promoters, which comprises the steps: separation of the resulting methylchlorosilanes in a distillation column; Feeding the gas mixture separated in said distillation column, which contains methyl chloride, C 1 -C 3 hydrocarbons and isobutane, into a distillation column, which is characterized in that the vapor stream taken from the distillation column is condensed in several stages and at least one condensate as reflux is returned to the distillation column.
- a 2- to 5-stage, particularly preferably a 3-stage condensation is carried out.
- the outlet temperatures are preferably in a range from -70 to 40 ° C.
- the first stage has one Outlet temperature of 10 to 40 ° C, the second stage -20 to 10 ° C and the third Level an outlet temperature of -70 to -20 ° C.
- the 3-stage condensation does not apply as Level 2 condensation.
- the outlet temperatures are then preferably in the first stage at 25 to 35 ° C, in the second stage at -30 to -40 ° C.
- an additional condensation stage is preferably inserted between stages 2 and 3 of the 3-stage condensation.
- the outlet temperatures are then preferably as follows: step 1 25 to 35 ° C Level 2 -5 to -15 ° C level 3 -20 to -30 ° C Level 4 -30 to -40 ° C
- step 1 25 to 35 ° C Level 2 10 to -10 ° C level 3 -5 to -15 ° C Level 4 -20 to -30 ° C Level 5 -30 to -40 ° C
- both a packing column and also a tray column or a combination of packing and tray column be used.
- the number of theoretical stages in the distillation column is preferably 2 to 50, particularly preferably 10 to 20 theoretical levels.
- At least one condensate is returned to the distillation column.
- the condensates obtained in the multi-stage condensation are preferred either together or separately at the top in the distillation column given, it being advantageous to add the colder condensate above the warmer condensates.
- the distillation according to the invention can be carried out at a pressure of 1 to 60 bar operate.
- a pressure of 5 in the distillation column is preferably used set up to 20 bar.
- the temperatures of the individual condensation stages must be the selected ones Operating pressures can be adjusted.
- a methyl chloride obtained very high purity which is excellent as a raw material for production of methylchlorosilanes is suitable.
- the waste gas from the distillation contains only a small amount of methyl chloride, causing loss of methyl chloride be greatly minimized.
- methylchlorosilanes are first separated off in a distillation column, the resulting methyl chloride is fed to a further distillation, where low-boiling Impurities such as methane, ethane, ethene, propane, propene, hydrogen and oxygen from which methyl chloride is separated.
- This distillation is preferably also other, not from the methylchlorosilane synthesis derived ("fresh") methyl chloride added to residual levels to remove low-boiling contaminants from this feed.
- the addition of the "fresh" methyl chloride can of course also be done on others Places, such as, for example, before the methylchlorosilanes are separated off by distillation, respectively.
- the methyl chloride thus purified is then preferably the methylchlorosilane synthesis reactor fed.
- the process is preferably carried out at a pressure between 1 and 60 bar (absolute), particularly preferably between 5 and 20 bar.
- the contaminated stream of methyl chloride (1) occurs, preferably in vapor form, i.e. so as is customary in the methylchlorosilane production process after the methylchlorosilane separation occurs in the lower part of a distillation column (10), the is preferably designed as a pure amplifier column without energy supply.
- the column can be equipped with conventional distillation trays as a separating element. It can, however, also do any other technical installation for mass transfer processes be used, e.g. Packing or ordered packings.
- the vapor stream (2) emerges, which is in the first condensation stage (11) with a coolant at a temperature of 10 to 40 ° C, preferably Air or water is condensed out as much as possible. Will that Process carried out according to the invention at less than 5 bar, this can There is no condensation stage.
- the resulting liquid stream (6) is preferred fed into the upper part of the distillation column (10) as reflux.
- the residual gas from the first condensation stage (3) is used with a colder one Coolant than in the first condensation stage (11), e.g. Brine of -20 ° C or liquid ammonia, further cooled in the second condensation stage (12), whereby the resulting liquid stream (7) also returns to the column (10) is abandoned.
- the return is somewhat higher than the return from the first stage.
- the procedure in the third condensation stage (13) is analogous, which, however, operated at even lower temperatures than in the second stage (12) e.g. with brine of -45 ° C as a coolant.
- the stream (8) is condensed out and returned to the top of the distillation column (10) returned.
- the residual gas stream (5) after the 3rd condensation stage (13) the saturated and / or unsaturated hydrocarbons are in concentrated form, methyl chloride is only contained in small amounts.
- the liquid stream (9) or (9a) is used for cleaning Taken methyl chloride.
- Stream (8) or parts thereof can be liquid as a distillate (14) can be removed. However, operation without removal of is preferred Distillate (14).
- the described method can be simplified in that the return currents 6, 7 and 8 collected on the top of the distillation column (10) be given as a return.
- the invention also relates to the use of the according to the invention Process of purified methyl chloride in the production of alkyl halosilanes, preferably methylchlorosilanes, by the reaction of silicon with methyl chloride.
- methylchlorosilanes can e.g. according to those in US-A 2 380 991 and Wiss. Z. Techn. Univ. Dresden, 1633-1642 (1963) Procedure.
- the inventive method was in the apparatus shown in Fig. 1 carried out.
- the column was designed as a pure amplifier column and was 38 Bell floors equipped.
- the condensation system was designed in three stages. The top pressure was 12 bar, the vapor stream (2) left the column (10) 46.7 ° C.
- the coolants used to operate the individual condensation stages chosen so that in the product stream (3) a temperature of 30 ° C, in Set product stream (4) of -15 ° C and in product stream (5) of -30 ° C.
- the Column (10) was operated without liquid distillate removal (14).
- Product stream (5) contained 0.1% of the methyl chloride used, i.e. the distillation yield based on the methyl chloride was 99.9%.
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
Description
| Stufe 1 | 25 bis 35°C |
| Stufe 2 | -5 bis -15°C |
| Stufe 3 | -20 bis -30°C |
| Stufe 4 | -30 bis -40°C |
| Stufe 1 | 25 bis 35°C |
| Stufe 2 | 10 bis -10°C |
| Stufe 3 | -5 bis -15°C |
| Stufe 4 | -20 bis -30°C |
| Stufe 5 | -30 bis -40°C |
Claims (8)
- Verfahren zur Herstellung von Methylchlorsilanen durch Umsetzung von Silizium mit Methylchlorid in Anwesenheit von Katalysatoren und ggfs. Promotoren, das die Schritte umfasst:Abtrennung der entstandenen Methylchlorsilane in einer Destillationskolonne,Zuführen des in der genannten Destillationskolonne abgetrennten Gasgemisches, das Methylchlorid, C1-C3-Kohlenwasserstoffe und Iso-Butan enthält, in eine Destillationskolonne (10), dadurch gekennzeichnet, daß der aus der Destillationskolonne (10) entnommene Brüdenstrom (2) mehrstufig kondensiert wird und mindestens ein Kondensat als Rücklauf in die Destillationskolonne (10) zurückgeführt wird.
- Verfahren nach Anspruch 1, dadurch gekennzeichnet, daß eine 2- bis 5-stufige Kondensation durchgeführt wird.
- Verfahren nach einem der Ansprüche 1 oder 2, dadurch gekennzeichnet, daß die Kondensate in die Destillationskolonne (10) zurückgeführt werden.
- Verfahren nach einem oder mehreren der Ansprüche 1 bis 3, dadurch gekennzeichnet, daß die Kondensation in drei Stufen durchgeführt wird, wobei die erste Stufe bei Austrittstemperaturen von 10 bis 40° C, die zweite Stufe bei -20 bis 10° C und die dritte Stufe bei -70 bis -20 C° betrieben wird.
- Verfahren nach einem oder mehreren der Ansprüche 1 bis 4, dadurch gekennzeichnet, daß das verunreinigte Methylchlorid in einer Destillationskolonne (10) destilliert wird, die 2 bis 50 theoretische Stufen aufweist.
- Verfahren nach einem der Ansprüche 1 bis 5, dadurch gekennzeichnet, daß der Druck bei der Destillation in der Destillationskolonne (10) 1 bis 60 bar beträgt.
- Verfahren nach einem oder mehreren der Ansprüche 1 bis 6, dadurch gekennzeichnet, daß der Strom (8) oder Teile davon flüssig als Destillat (14) entnommen werden.
- Verfahren nach einem oder mehreren der Ansprüche 1 bis 7, dadurch gekennzeichnet, daß das aus der Destillationskolonne (10) resultierende gereinigte Methylchlorid (9) in die Methylchlorsilansynthese zurückgeführt wird und die C1-C3-Kohlenwasserstoffe und/oder Isobutan als Restgasstrom (5) abgetrennt werden.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DE19706649 | 1997-02-20 | ||
| DE19706649 | 1997-02-20 | ||
| PCT/EP1998/000701 WO1998037044A1 (de) | 1997-02-20 | 1998-02-09 | Verfahren zur reinigung von mit c1-c3-kohlenwasserstoffen und/oder iso-butan verunreinigtem methylchlorid |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| EP0973709A1 EP0973709A1 (de) | 2000-01-26 |
| EP0973709B1 true EP0973709B1 (de) | 2002-11-20 |
Family
ID=7820893
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP98910635A Expired - Lifetime EP0973709B1 (de) | 1997-02-20 | 1998-02-09 | Verfahren zur reinigung von mit c1-c3-kohlenwasserstoffen und/oder iso-butan verunreinigtem methylchlorid |
Country Status (6)
| Country | Link |
|---|---|
| EP (1) | EP0973709B1 (de) |
| JP (1) | JP4251506B2 (de) |
| AT (1) | ATE228107T1 (de) |
| AU (1) | AU6495498A (de) |
| DE (1) | DE59806360D1 (de) |
| WO (1) | WO1998037044A1 (de) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2486193C1 (ru) * | 2012-04-25 | 2013-06-27 | Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии элементоорганических соединений" (ФГУП "ГНИИХТЭОС") | Способ разделения смеси метилхлорсиланов и хлористого метила |
| CN108689798A (zh) * | 2018-06-28 | 2018-10-23 | 湖北兴瑞硅材料有限公司 | 一种提高有机硅单体合成回收氯甲烷质量的方法 |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN117209352A (zh) * | 2023-02-27 | 2023-12-12 | 广西精诚技术服务合伙企业(有限合伙) | 一种四氯化碳转一氯甲烷产品的分离提纯方法 |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CH253706A (fr) * | 1940-12-11 | 1948-03-31 | Landtmeters Joseph Charles | Installation pour la fabrication et la purification d'éthers halogénés. |
| DE3610706A1 (de) * | 1986-03-29 | 1987-10-08 | Bayer Ag | Reinigung von methylchlorid bei der kontinuierlichen methylchlorsilansynthese |
| SU1502557A1 (ru) * | 1987-07-02 | 1989-08-23 | Государственный научно-исследовательский институт химии и технологии элементоорганических соединений | Способ выделени метилхлорида из парогазовой смеси продуктов пр мого синтеза метилхлорсиланов |
| US5453113A (en) * | 1994-04-11 | 1995-09-26 | Uop | Process for separation and recovery of methyl chloride from vent streams containing isobutane |
-
1998
- 1998-02-09 JP JP53620898A patent/JP4251506B2/ja not_active Expired - Fee Related
- 1998-02-09 WO PCT/EP1998/000701 patent/WO1998037044A1/de not_active Ceased
- 1998-02-09 EP EP98910635A patent/EP0973709B1/de not_active Expired - Lifetime
- 1998-02-09 AT AT98910635T patent/ATE228107T1/de not_active IP Right Cessation
- 1998-02-09 AU AU64954/98A patent/AU6495498A/en not_active Abandoned
- 1998-02-09 DE DE59806360T patent/DE59806360D1/de not_active Expired - Lifetime
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| RU2486193C1 (ru) * | 2012-04-25 | 2013-06-27 | Федеральное государственное унитарное предприятие "Государственный ордена Трудового Красного Знамени научно-исследовательский институт химии и технологии элементоорганических соединений" (ФГУП "ГНИИХТЭОС") | Способ разделения смеси метилхлорсиланов и хлористого метила |
| CN108689798A (zh) * | 2018-06-28 | 2018-10-23 | 湖北兴瑞硅材料有限公司 | 一种提高有机硅单体合成回收氯甲烷质量的方法 |
| CN108689798B (zh) * | 2018-06-28 | 2021-10-12 | 湖北兴瑞硅材料有限公司 | 一种提高有机硅单体合成回收氯甲烷质量的方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| AU6495498A (en) | 1998-09-09 |
| DE59806360D1 (de) | 2003-01-02 |
| JP2002503217A (ja) | 2002-01-29 |
| EP0973709A1 (de) | 2000-01-26 |
| WO1998037044A1 (de) | 1998-08-27 |
| JP4251506B2 (ja) | 2009-04-08 |
| ATE228107T1 (de) | 2002-12-15 |
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