EP0973149A2 - Transducteurs ultrasonores - Google Patents

Transducteurs ultrasonores Download PDF

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Publication number
EP0973149A2
EP0973149A2 EP99305633A EP99305633A EP0973149A2 EP 0973149 A2 EP0973149 A2 EP 0973149A2 EP 99305633 A EP99305633 A EP 99305633A EP 99305633 A EP99305633 A EP 99305633A EP 0973149 A2 EP0973149 A2 EP 0973149A2
Authority
EP
European Patent Office
Prior art keywords
transducer
membrane
depressions
cavities
resonant
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP99305633A
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German (de)
English (en)
Other versions
EP0973149A3 (fr
Inventor
Frank Joseph Pompei
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Massachusetts Institute of Technology
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Massachusetts Institute of Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from US09/300,200 external-priority patent/US6775388B1/en
Application filed by Massachusetts Institute of Technology filed Critical Massachusetts Institute of Technology
Publication of EP0973149A2 publication Critical patent/EP0973149A2/fr
Publication of EP0973149A3 publication Critical patent/EP0973149A3/fr
Withdrawn legal-status Critical Current

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    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0688—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction with foil-type piezoelectric elements, e.g. PVDF
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/0292—Electrostatic transducers, e.g. electret-type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0611—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile
    • B06B1/0614—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements in a pile for generating several frequencies

Definitions

  • This invention relates to the transmission of sonic signals, and more specifically, to transducers for transmitting such signals through the air.
  • Ultrasonic signals are sound waves of frequencies above the audible range (generally 20 kHz). Many, if not most applications involving ultrasound require generation of a well-defined beam. Accordingly, ultrasonic transducers-which convert electrical signals into corresponding acoustic signals-should have highly directional transmission characteristics in addition to high conversion efficiency. Furthermore, the mechanical impedance of the transducer should match, as closely as practicable, the impedance of the propagation medium.
  • electrostatic and piezoclectric crystal devices Two important classes of ultrasound transducer for transmission through air are electrostatic and piezoclectric crystal devices.
  • electrostatic transducer a thin membrane is vibrated by the capacitive effects of an electric field, while in a piezoelectric transducer, an applied potential causes the piezo ceramic material to change shape and thereby generate sonic signals.
  • Both types of transducer exhibit various performance limitations, which can substantially limit their usefulness in certain applications. In particular, these performance limitations have inhibited the development of parametric loudspeakers, i.e., devices that produce highly directional audible sound through the nonlinear interaction of ultrasonic waves.
  • parametric loudspeakers i.e., devices that produce highly directional audible sound through the nonlinear interaction of ultrasonic waves.
  • a high-intensity ultrasonic signal that has been modulated with an audio signal will be demodulated as it passes through the atmosphere-a nonlinear propagation medium-thereby creating a highly directional au
  • Piezoelectric transducers generally operate at high efficiency over a limited bandwidth. In parametric applications the degree of distortion present in the audible signal is directly correlated with the available bandwidth of the transducer, and as a result, the use of a narrowband (e.g., piezoelectric) transducer will result in sound of poor quality. Piezoelectric transducers also tend to have high acoustic impedances, resulting in inefficient radiation into the atmosphere, which has a low impedance. Because of this mismatch, most of the energy applied to the transducer is reflected back into the amplifier (or into the transducer itself), creating heat and wasting energy. Finally, conventional piezoelectric transducers tend to be fragile, expensive, and difficult to electrically connect.
  • a conventional electrostatic transducer utilizes a metallized polymer membrane held against a conductive backplate by a DC bias.
  • the backplate contains depressions that create an acousto-mechanical resonance at a desired frequency of operation.
  • An AC voltage added to the DC bias source alternately augments and subtracts from the bias, thereby adding to or subtracting from the force drawing the membrane against the backplate. While this variation has no effect where the surfaces are in contact, it causes the membrane to vibrate above the depressions. Without substantial damping the resonance peak of an electrostatic transducer is fairly sharp, resulting in efficient operation at the expense of limited bandwidth. Damping (e.g., by roughening the surfacc of the membrane in contact with air) will somewhat expand the bandwidth, but efficiency will suffer.
  • the maximum driving power (and the maximum DC bias) of the transducer is limited by the size of the electric field that the membrane can withstand as well as the voltage the air gap can withstand. The strongest field occurs where the membrane actually touches the backplate (i.e., outside the depressions). Because the membrane is typically a very thin polymer film, even a material with substantial dielectric strength cannot experience very high voltages without charging or punchthrough failure. Similarly, because the use of a thin film means that the metallized surface of the film will be very close to the backplate, the electric field across the film and hence the capacitance of the device is quite high, resulting in large drive-current requirements.
  • Piezoelectric film transducers utilize light, flexible membrane materials such as polyvinylidene fluoride (PVDF) film, which changes shape in response to an applied potential.
  • the film can be made very light to enhance its acoustic-impedance match to the air, resulting in efficient ultrasonic transmission.
  • PVDF film is coated on both sides with a conductive material and placed atop a perforated metal plate. The plate represents the top of an otherwise closed volume, and a vacuum applied to the volume draws the membrane into the perforations.
  • An AC voltage source connected across the two metallized surfaces of the membrane causes the PVDF material to expand and contract, varying the degree of dimpling into the perforations and thereby causing the generation of sound waves.
  • the membranc is disposed beneath the perforated plate rather than above it, and a pressure source is substituted for the vacuum.
  • the AC source varies the degree to which the membrane protrudes into or through the perforations, once again creating sound.
  • the maximum power output of an ultrasonic transducer is not limited by the dielectric strength of the transducer membrane. Rather than placing the membrane directly against the surface of a conductor as in conventional devices (whereby the electric field across the membrane is very large), it is instead held against a dielectric spacer.
  • the transmission of ultrasound does not depend on the presence of a powerful electric field. Accordingly, relatively large bias and driving voltages can be applied across the membrane and spacer without risk of failure, because the spacer substantially reduces the electric field experienced by the membrane.
  • the spacer also reduces the capacitance of the transducer, the driving current requirements are correspondingly reduced, simplifying design of the power amplifier.
  • a sonic transducer in accordance with this aspect of the invention may include a conductive membrane, a backplate comprising at least one electrode and, disposed between the membrane and the backplate, a dielectric spacer comprising a series of depressions arranged in a pattern, the depressions forming cavities each resonant at a predetermined frequency.
  • the depressions may take any suitable form, e.g., annular grooves arranged concentrically, a pattern of distributed cylindrical depressions, etc., and may extend partially or completely through the dielectric spacer.
  • the depressions may vary in depth through the spacer in order to form cavities resonant at different frequencies; a different electrode may be assigned to each set of depressions of a single depth.
  • a sonic transducer in accordance with this aspect of the invention may comprise a substantially nonconductive piezoelectric membrane having a pair of opposed conductive surfaces, a backplate comprising at least one electrode, and means for creating a resonant cavity or structure between the membrane and the electrode(s).
  • the cavities may be formed by a dielectric spacer having depressions (such as cylindrical recesses or apertures, grooves, etc.) and disposed between the membrane and the electrode(s).
  • a DC bias urges the membrane into the resonant cavities and an AC source, connected across the membrane, provides the driving signals.
  • the transducers are preferably driven with circuits in which the capacitive transducers resonate with circuit inductances at the acoustical-mechanical resonant frequencies of the transducers. This provides a very efficient transfer of electrical energy to the transducers, thereby facilitating the use of relatively high carrier frequencies.
  • the efficiency and versatility of the transducers described herein makes them suitable for parametric as well as other ultrasonic applications such as ranging, flow detection, and nondestructive testing.
  • a plurality of transducers may be incorporated into a transducer module and the modules are arranged and/or electrically driven so as to provide, in effect, a large radiating surface and a large nonlinear interaction region.
  • an electrostatic transducer module 29 incorporating the invention may include a conical spring 30 that supports, in order, a conductive electrode unit 32, a dielectric spacer 34 provided with an array of apertures 36, and a metallized polymer membrane 38.
  • the components 32-38 are compressed against the spring 30 by an upper ring 40 that bears against the film 38 and threadably engages a base member 42 that supports the spring 30.
  • the module 29 comprises a plurality of electrostatic transducers, corresponding with the respective apertures 36 in the dieletric spacer 34.
  • the portion of the film 38 above each of the apertures and the portion of the electrode unit 32 beneath the aperture function as a single transducer, having a resonance characteristic that is the function, inter alia, of the tension and the area density of the film 38, the diameter of the aperture and the thickness of the polymer layer 34.
  • a varying electric field between each portion of the membrane 38 and electrode unit 32 deflects that portion of the membrane toward or away from the electrode unit 32, the frequency of movement corresponding to the frequency of the applied field.
  • the electrode unit 32 may be divided by suitable etching techniques into separate electrodes 32a below the respective apertures 36, with individual leads extending from these electrodes to one or more driver units as discussed below.
  • the module 29 is readily manufactured using conventional flexible circuit materials and therefore has a low cost; for example, spacer 34 may be a polymer such as the PYRALUX material marketed by duPont, and the membrane 38 may be a metallized MYLAR film (also marketed by duPont).
  • drive unit components can placed directly on the same substrate, e.g., the tab portion 32b.
  • the structure is light in weight and can be flexible for easy deployment, focusing and/or steering in an array configuration.
  • geometries in particular the depths of the apertures 36, may vary so that the resonance characteristics of the individual transducers in the module 29 span a desired frequency range, thereby broadening the overall response of the module as compared with that of a single transducer or an array of transducers having a single acousto-mechanical resonance frequency.
  • This can be accomplished, as shown in Fig. 1B, by using a dielectric spacer 34 that comprises two (or more) layers 34a and 34b.
  • the upper layer 34a has a full complement of aperturcs 36a.
  • the lower layer 34b on the other hand, has a set of apertures 36b that register with only selected ones of the apertures 36a in the layer 34a.
  • the aperture depth is greater than that of an aperture in the layer 34a above an unapertured portion of the layer 34b.
  • the electrode unit 32 has electrodes 32b beneath the apertures in the layer 34b and electrodes 32c beneath only the apertures in the layer 34a. This provides a first set of transducers having higher resonance frequencies (shallower apertures) and a second set having lower resonance frequencies (deeper apertures). Other processes, such as screen printing or etching, can also produce these geometrics.
  • module 29 has a single electrode 32, and the cavities formed by layers 34a, 34b have different depths d, d' depending on whether an aperture 36a is registcred with an aperture 36b; not shown is structure urging the membrane 38 against spacer 34.
  • a DC bias source 40 added to an AC source 42 (which produces the modulated signal for transmission) are connected across the module 29, i.e., to electrode 32 and the metallized surface 38m of membrane 38. Although the same signal is applied to all cavities 36, their different resonance peaks broaden the bandwidth of the module 29 as a whole.
  • the different sets of electrodes 32b, 32c may each be connected to a different source 42a, 42b of AC driving signals.
  • Each signal source 42a, 42b is electrically resonant at the mechanical resonance frequency f 1 , f 2 of the cavities it drives.
  • This "segregated multiresonance" arrangement optimizes response and maximizes power transfer by pairing each set of resonance cavities with an amplifier tuned thereto.
  • the resistors 43a, 43b isolate electrodes 32b, 32c while allowing DC to pass through them. (Inductors could be used instead.)
  • the capacitance of different areas of the transducer 29 can be varied (e.g., by using materials of different dielectric constant for different regions of spacers 34a, 34b) to produce multiple electrical resonance circuits.
  • the electrical resonance affects the efficiency of power transfer from the amplifier (i.e., the more closely the transducer impedance matches that of the amplifier, the more output power will coupled into the transducer with concomitant reduction in current draw), so varying electrical resonance within a single transducer ⁇ regardless of whether mechanical resonance is also varied ⁇ can be employed to broaden the tolerance of the transducer to different amplifier configurations.
  • Signal sources 42a, 42b can be realized as shown in Fig. 2C.
  • the modulated output signal is fed to a pair of filters 44a, 44b, which split the signal into different frequency bands and distribute these to a pair of tuned amplifiers 46a, 46b.
  • Amplifier 46a is tuned to f 1 ⁇ i.e., the inductance of amplifier 46a in series with the measured capacitance across the cavities to which amplifier 46a is connected results in an electrical resonance frequency equal to the mechanical resonance frequency of those cavities-and amplifier 46b is tuned to f 2 .
  • Filters 44a, 44b may be bandpass filters or a lowpass and a highpass filter that partition the modulated signal between f 1 and f 2 .
  • the resonance cavities of module 29 need not be of circular cross-section as illustrated. Instead, they may have a different cross-section (e.g., square, rectangular, or other polygonal shape), or may take the form of annular grooves (square, V-shaped, rounded, etc.) arranged concentrically on spacer 34, or have other volumctric shapes appropriate to the chosen application (or desired method of manufacture).
  • Backplate electrodes for driving concentrically grooved transducer arrangements are shown in Figs. 3A and 3B, where the conductive pattern of the electrode units 52 comprises rings 53, 55 and 57 so that grooves of different depths may be individually driven. The spacings of the rings and the relative phases of the applied signals can be selected so as to shape the ultrasonic beams projected from the transducer modules.
  • the resonant frequency is also affected by the membrane tension, groove width, and DC bias.
  • the hole/feature depth h is 74 ⁇ m (3 mils). If this cavity depth produces a capacitance of, for example, 500 pF, an inductance (typically the secondary of a transformer) of 12 mH is chosen to achieve 65 kHz rcsonance.
  • a reasonable bandwidth for efficient driving is 10 kHz (i.e., 60-70 kHz). It may therefore be desirable to employ a second set of transducers with a 75 kHz resonance frequency to widen the useful output bandwidth. Using the same design approach, achieving a 75 kHz resonance requires a 56 ⁇ m (2 mil) feature depth.
  • Figs. 3C and 3D illustrate arrays of transducer modules in which the modules have alternative configurations.
  • each of the modules has a hexagonal horizontal outline, which provides close packing of the modules.
  • the modules have a square configuration, which also permits close packing.
  • the patterns are well-suited for multiple-beam generation and phased-array beam steering. It should be noted that, in all of the foregoing transducer embodiments, any electrical crosstalk among electrodes can be mitigated by placing so-called “guard tracks" between the power electrodes. It should also be appreciated that transducers having multiple electrical (but not necessarily acousto-mechanical) resonances can be employed to increase the efficiency of amplification over a wide bandwidth.
  • the transducer module 60 includes a piezoelectric (e.g., PVDF) membrane 62, a conductive backplate 64, and a dielectric spacer 66 with apertures 68 therethrough that form resonance cavities.
  • the cavities 68 may be of varying rather than unitary depth, and backplate 64 may comprise a series of electrodes matched to different ones of the cavities 68.
  • Membrane 62 is preferably dielectric in nature and metallized on both top and bottom surfaces thereof.
  • a DC bias provided by a circuit 70, is connected between the backplate 64 and the conductive top surface of membrane 62, thereby urging the membrane into the cavities 68.
  • This provides a reliable mechanical bias for the membrane 62 so that it can function linearly to generate acoustical signals in response to the electrical outputs of the drive circuit 72, which is connected across the membrane 62 in the manner of conventional piezo transducer drives. Consequently, the membrane is held in place by electrostatic forces but driven piezoelectrically.
  • DC bias circuit 70 can include components that isolate it from the AC drive circuit 72.
  • the membrane may be formed or mechanically tensioned so as to be drawn it into cavities 68; the piezoelectrically induced contractions and dilations move the biased film to create sonic signals.
  • a piezo driver 72a is connected across membrane 62 as discussed above, an electrostatic driver 72b is connected, like DC bias circuit 70, between the metallized top surface of membrane 62 and backplate 64.
  • an electrostatic driver 72b is connected, like DC bias circuit 70, between the metallized top surface of membrane 62 and backplate 64.
  • piezoelectric and electrostatic forces are used in conjunction to drive membrane 62.
  • drivers 72a, 72b may be driven in phase or out of phase (so the forces reinforce rather than oppose each other).
  • an electric field is used to replace the vacuum employed in prior-art devices to draw the membrane through perforations toward the backplate.
  • the transducer module 80 in Fig. 4C includes a piezoelectric membrane 62 metallized on top and bottom surfaces and in contact with a perforated top plate 82 (which may be conductive or non-conductive).
  • top plate 82 is spaced above backplate 64 by a side wall 84.
  • a DC bias, provided by circuit 70, is connected between backplate 64 and the conductive surface of membrane 62, thereby urging membrane 62 into the apertures 86 in the plate 82. This provides a reliable mechanical bias for the membrane 62 so that it can function linearly to generate acoustical signals in response to the electrical outputs of the piezo drive circuit 72.
  • Fig. 4A can be further simplified by using a conductive, grooved (e.g., V-grooved) metal backplate rather than the illustrated spacer and backplate.
  • the grooves serve the same function as the spaccr gaps, with the DC-biased backplate (or mechanical formation as discussed above) drawing membrane 62 into the grooves.
  • transducer embodiments can be used for reception as well as transmission, and that it is frequently possible to mount drive and related circuitry directly onto the transducer substrate.

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  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Transducers For Ultrasonic Waves (AREA)
EP99305633A 1998-07-16 1999-07-15 Transducteurs ultrasonores Withdrawn EP0973149A3 (fr)

Applications Claiming Priority (4)

Application Number Priority Date Filing Date Title
US11627198A 1998-07-16 1998-07-16
US116271 1998-07-16
US300200 1999-04-27
US09/300,200 US6775388B1 (en) 1998-07-16 1999-04-27 Ultrasonic transducers

Publications (2)

Publication Number Publication Date
EP0973149A2 true EP0973149A2 (fr) 2000-01-19
EP0973149A3 EP0973149A3 (fr) 2000-12-27

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EP99305633A Withdrawn EP0973149A3 (fr) 1998-07-16 1999-07-15 Transducteurs ultrasonores

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JP (1) JP4294798B2 (fr)

Cited By (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1247350A1 (fr) * 2000-01-14 2002-10-09 Frank Joseph Pompei Systeme audio parametrique
EP1403212A2 (fr) * 2002-09-26 2004-03-31 Samsung Electronics Co., Ltd. Transducteur flexible micro-électromécanique (mems) et procédé de fabrication dudit transducteur, et microphone flexible micro-électromécanique
US6771785B2 (en) 2001-10-09 2004-08-03 Frank Joseph Pompei Ultrasonic transducer for parametric array
WO2007029134A2 (fr) 2005-09-09 2007-03-15 Nxp B.V. Procede de fabrication de microphone a condensateur mems, empilement de feuilles comprenant ce microphone a condensateur mems, dispositif electronique comprenant ce microphone a condensateur mems et utilisation de ce dispositif electronique
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
EP2114085A1 (fr) * 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Microphone composite, ensemble de microphone et son procédé de fabrication
US8027488B2 (en) 1998-07-16 2011-09-27 Massachusetts Institute Of Technology Parametric audio system
WO2013158348A1 (fr) * 2012-04-19 2013-10-24 Massachusetts Institute Of Technology Transducteur ultrasonore piézoélectrique micro-usiné muni d'électrodes à motifs
WO2013188514A3 (fr) * 2012-06-12 2014-03-06 Frank Joseph Pompei Transducteur à ultrasons
WO2014202248A1 (fr) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore
EP2743919A3 (fr) * 2012-10-25 2015-02-25 BANDELIN patent GmbH & Co. KG Dispositif de sollicitation de fluides liquides avec des ultrasons via une membrane et système à ultrasons
CN112073884A (zh) * 2020-08-27 2020-12-11 西北工业大学 一种基于pvdf的夹持式发射换能器
EP3815794A4 (fr) * 2018-06-29 2022-03-16 Center for Advanced Meta-Materials Unité d'amplification d'ondes ultrasonores et transducteur d'ondes ultrasonores sans contact mettant en oeuvre une telle unité d'amplification d'ondes ultrasonores

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JP4706578B2 (ja) 2005-09-27 2011-06-22 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの設計方法、静電型超音波トランスデューサの設計装置、静電型超音波トランスデューサの設計プログラム、製造方法及び表示装置
JP4682927B2 (ja) 2005-08-03 2011-05-11 セイコーエプソン株式会社 静電型超音波トランスデューサ、超音波スピーカ、音声信号再生方法、超音波トランスデューサの電極の製造方法、超音波トランスデューサの製造方法、超指向性音響システム、および表示装置
JP5103873B2 (ja) 2005-12-07 2012-12-19 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4802998B2 (ja) 2005-12-19 2011-10-26 セイコーエプソン株式会社 静電型超音波トランスデューサの駆動制御方法、静電型超音波トランスデューサ、これを用いた超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
JP4844411B2 (ja) 2006-02-21 2011-12-28 セイコーエプソン株式会社 静電型超音波トランスデューサ、静電型超音波トランスデューサの製造方法、超音波スピーカ、音声信号再生方法、超指向性音響システム及び表示装置
KR100781467B1 (ko) * 2006-07-13 2007-12-03 학교법인 포항공과대학교 공기중 파라메트릭 트랜스미팅 어레이를 이용한 초지향성초음파 거리측정을 위한 멤스 기반의 다공진 초음파트랜스듀서
KR102077741B1 (ko) 2013-10-23 2020-02-14 삼성전자주식회사 초음파 변환기 및 이를 채용한 초음파 진단장치
KR102163729B1 (ko) 2013-11-20 2020-10-08 삼성전자주식회사 전기 음향 변환기
KR101529814B1 (ko) * 2014-01-09 2015-06-17 성균관대학교산학협력단 하이브리드 발전소자
KR102250185B1 (ko) 2014-01-29 2021-05-10 삼성전자주식회사 전기 음향 변환기
CN110460941B (zh) * 2019-07-23 2020-12-18 武汉理工大学 收发一体式石墨烯声传感器
KR102267072B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 전달 구조체
KR102267074B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 초음파 트랜스듀서의 음향 초투과형 커버 유닛
KR102267073B1 (ko) * 2019-11-11 2021-06-21 재단법인 파동에너지 극한제어 연구단 능동형 초음파 전달 구조체

Citations (3)

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US3816671A (en) * 1972-04-06 1974-06-11 Thermo Electron Corp Electret transducer cartridge and case
JPS59171300A (ja) * 1983-03-17 1984-09-27 Matsushita Electric Ind Co Ltd コンデンサ型マイクロホン

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US8027488B2 (en) 1998-07-16 2011-09-27 Massachusetts Institute Of Technology Parametric audio system
US7391872B2 (en) 1999-04-27 2008-06-24 Frank Joseph Pompei Parametric audio system
EP1247350A1 (fr) * 2000-01-14 2002-10-09 Frank Joseph Pompei Systeme audio parametrique
US8953821B2 (en) 2000-01-14 2015-02-10 Frank Joseph Pompei Parametric audio system
EP1247350A4 (fr) * 2000-01-14 2005-12-28 Frank Joseph Pompei Systeme audio parametrique
US7319763B2 (en) 2001-07-11 2008-01-15 American Technology Corporation Power amplification for parametric loudspeakers
US6771785B2 (en) 2001-10-09 2004-08-03 Frank Joseph Pompei Ultrasonic transducer for parametric array
US7657044B2 (en) 2001-10-09 2010-02-02 Frank Joseph Pompei Ultrasonic transducer for parametric array
US8369546B2 (en) 2001-10-09 2013-02-05 Frank Joseph Pompei Ultrasonic transducer for parametric array
US8472651B2 (en) 2001-10-09 2013-06-25 Frank Joseph Pompei Ultrasonic transducer for parametric array
CN100411968C (zh) * 2002-09-26 2008-08-20 三星电子株式会社 柔性微机电系统换能器及其制造方法和无线扩音器
EP1403212A2 (fr) * 2002-09-26 2004-03-31 Samsung Electronics Co., Ltd. Transducteur flexible micro-électromécanique (mems) et procédé de fabrication dudit transducteur, et microphone flexible micro-électromécanique
EP1403212A3 (fr) * 2002-09-26 2005-07-13 Samsung Electronics Co., Ltd. Transducteur flexible micro-électromécanique (mems) et procédé de fabrication dudit transducteur, et microphone flexible micro-électromécanique
WO2007029134A3 (fr) * 2005-09-09 2007-07-26 Nxp Bv Procede de fabrication de microphone a condensateur mems, empilement de feuilles comprenant ce microphone a condensateur mems, dispositif electronique comprenant ce microphone a condensateur mems et utilisation de ce dispositif electronique
WO2007029134A2 (fr) 2005-09-09 2007-03-15 Nxp B.V. Procede de fabrication de microphone a condensateur mems, empilement de feuilles comprenant ce microphone a condensateur mems, dispositif electronique comprenant ce microphone a condensateur mems et utilisation de ce dispositif electronique
CN101304942B (zh) * 2005-09-09 2011-12-07 Nxp股份有限公司 Mems电容器麦克风及制造方法、箔片叠层、电子设备及使用
US8731226B2 (en) 2008-04-28 2014-05-20 Nederlandse Organisatie Voor Toegepast-Natuurwetenschappelijk Onderzoek Tno Composite microphone with flexible substrate and conductors
WO2009134127A1 (fr) * 2008-04-28 2009-11-05 Nederlandse Organisatoe Voor Toegepast Natuurwetenschappelijk Onderzoek Tno Microphone composite, ensemble microphone et leur procédé de fabrication
EP2114085A1 (fr) * 2008-04-28 2009-11-04 Nederlandse Centrale Organisatie Voor Toegepast Natuurwetenschappelijk Onderzoek TNO Microphone composite, ensemble de microphone et son procédé de fabrication
WO2013158348A1 (fr) * 2012-04-19 2013-10-24 Massachusetts Institute Of Technology Transducteur ultrasonore piézoélectrique micro-usiné muni d'électrodes à motifs
US11076242B2 (en) 2012-06-12 2021-07-27 Frank Joseph Pompei Ultrasonic transducer
US11706571B2 (en) 2012-06-12 2023-07-18 Frank Joseph Pompei Ultrasonic transducer
WO2013188514A3 (fr) * 2012-06-12 2014-03-06 Frank Joseph Pompei Transducteur à ultrasons
US10182297B2 (en) 2012-06-12 2019-01-15 Frank Joseph Pompei Ultrasonic transducer
US10587960B2 (en) 2012-06-12 2020-03-10 Frank Joseph Pompei Ultrasonic transducer
EP2743919A3 (fr) * 2012-10-25 2015-02-25 BANDELIN patent GmbH & Co. KG Dispositif de sollicitation de fluides liquides avec des ultrasons via une membrane et système à ultrasons
CN105636711A (zh) * 2013-06-20 2016-06-01 罗伯特·博世有限公司 超声波转换装置和具有超声波转换装置的机动车
WO2014202248A1 (fr) * 2013-06-20 2014-12-24 Robert Bosch Gmbh Ensemble transducteur ultrasonore et véhicule automobile pourvu d'un ensemble transducteur ultrasonore
EP3815794A4 (fr) * 2018-06-29 2022-03-16 Center for Advanced Meta-Materials Unité d'amplification d'ondes ultrasonores et transducteur d'ondes ultrasonores sans contact mettant en oeuvre une telle unité d'amplification d'ondes ultrasonores
CN112073884A (zh) * 2020-08-27 2020-12-11 西北工业大学 一种基于pvdf的夹持式发射换能器

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JP4294798B2 (ja) 2009-07-15
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