EP0947003A2 - Mecanisme d'entrainement par inertie, piezo-electrique ou electrostrictif pour deplacer et positionner des objets particulierement lourds - Google Patents

Mecanisme d'entrainement par inertie, piezo-electrique ou electrostrictif pour deplacer et positionner des objets particulierement lourds

Info

Publication number
EP0947003A2
EP0947003A2 EP97945790A EP97945790A EP0947003A2 EP 0947003 A2 EP0947003 A2 EP 0947003A2 EP 97945790 A EP97945790 A EP 97945790A EP 97945790 A EP97945790 A EP 97945790A EP 0947003 A2 EP0947003 A2 EP 0947003A2
Authority
EP
European Patent Office
Prior art keywords
actuator
force transmission
transmission element
clamping device
piezoelectric
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP97945790A
Other languages
German (de)
English (en)
Inventor
Artur Zrenner
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ZRENNER, ARTUR
Original Assignee
Zrenner Artur
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Zrenner Artur filed Critical Zrenner Artur
Publication of EP0947003A2 publication Critical patent/EP0947003A2/fr
Withdrawn legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/10—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors
    • H02N2/101—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing rotary motion, e.g. rotary motors using intermittent driving, e.g. step motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N2/00—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction
    • H02N2/02—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors
    • H02N2/021—Electric machines in general using piezoelectric effect, electrostriction or magnetostriction producing linear motion, e.g. actuators; Linear positioners ; Linear motors using intermittent driving, e.g. step motors, piezoleg motors
    • H02N2/025—Inertial sliding motors

Definitions

  • Piezoelectric or electrostrictive inertial drive for moving or positioning particularly heavy objects
  • the invention relates to an electromechanical inertia drive with a preferably piezoelectric actuator, wherein the displacement and positioning of an object can take place both within the change in length of the actuator and in steps.
  • Piezoelectric inertial drives work on the principle that when the length of the piezoelectric actuator changes abruptly by suitable electrical control, the inertial force of the mass, which is firmly connected to the actuator, exceeds the static friction force at the clamping point and the inertial force of the clamped mass. As a result, the clamped mass is shifted step by step, only the sliding friction, which is significantly smaller in comparison to static friction, being effective at the clamping point during the shifting process.
  • Piezoelectric inertial drives are used as coarse adjusters for light objects such as. Miniature tools, instruments and optics, used in scanning probe microscopy or in the field of nanotechnologies.
  • a preferred tubular piezo actuator is firmly connected to a mass on one side in the direction of expansion or contraction.
  • a second mass is clamped with a clamping device on the inner surface of the tubular actuator, which serves as a friction surface, one of the masses being stationary and the other mass being positioned.
  • the positioning according to the principle of inertia takes place, as explained above, by means of an abrupt change in length of the actuator caused by a corresponding electrical control, which leads to a displacement of the masses relative to one another when the static friction between the clamped mass and the actuator is overcome.
  • This arrangement has several fundamental disadvantages: The maximum possible displacement is determined by the length of the actuator. - In addition, the static and sliding friction is determined by the friction surface between the surface of the actuator and the clamped mass, which disadvantageously leads to wear on the actuator, especially in the case of high static friction.
  • the object to be positioned is itself fixed with the actuator connected and clamped to a fixed reference mass with a clamping device or the object is connected to a force transmission element which is mounted on the reference mass via a clamping device and is fixedly connected to the actuator.
  • the actuator is firmly connected in the direction of expansion and contraction on the opposite side to the object or to the guide element with a self-supporting countermass. As explained above, an abrupt change in length of the actuator also leads to a displacement of the object.
  • the force resulting from the static friction and the inertia of the object mass and possibly the mass of the guide element must not be greater than the blocking force of the actuator.
  • the friction and inertia of the object are therefore mutually limited. This means that heavy objects can be caught with less static friction than light objects.
  • the required operating voltage of the actuator increases disadvantageously with the object mass.
  • Another disadvantage is that in such arrangements the object can only be moved step by step using the inertia principle explained above, but continuous positioning of the object by changing the length of the actuator as a function of an applied voltage is not possible.
  • the invention is based on the object of reducing or eliminating the above-mentioned disadvantages of displacement devices with piezoelectric / electrostrictive actuators, and of improving the displacement devices so that, among other things, heavy objects which are stored with high static friction can be positioned exactly.
  • the object is understood to mean a mass to be moved and positioned, which is also composed of an arrangement of masses, eg. made of different materials can assemble, and can have elements for adaptation and attachment to the piezoelectric / electrostrictive actuator.
  • the actuator with the power transmission element, for example. is rod-shaped
  • the reference mass is the reference mass or the object with a clamping device, for example. a spring, firmly connected.
  • the object can be composed of the actual instrument and an additional mass attached in order to achieve that the mass of the object is advantageously significantly larger than the mass of the force transmission element.
  • the object with small static and sliding friction can, for example, under certain circumstances. be mounted on the reference mass via ball bearings or guide rails.
  • the object is, for example. a runner of a positioning table, possibly with structures such as mirrors, tools and instruments with fastening devices, etc.
  • the reference mass is a large mass which is generally stationary and to which the clamping device or one side of the piezoelectric / electrostrictive actuator is fastened or is located . It may have a holder or other arrangements for fastening the clamping device and / or adaptation and fastening elements for fastening to the piezoelectric / electrostrictive actuator.
  • the reference mass is, for example. the stator of a positioning device to which the piezoelectric / electrostrictive actuator or the clamping device is attached.
  • the piezoelectric / electrostrictive actuator that essentially expands or contracts in one dimension is, for example. a linearly expanding piezo element, so none
  • Shear piezo element With appropriate electrical control of the actuator, a change in length in the direction of displacement is brought about, which exerts a force on the object or the reference mass and the force transmission element.
  • the force transmission element is fixedly connected to the actuator and is generally rod-shaped, and consists of hard materials, such as, for example. hard steel alloys, tungsten carbide, etc., and together with the clamping device serves to hold the object by means of static friction, and to transmit the electrical expansion of the piezoelectric / electrostrictive actuator to the clamping point between the force transmission element and the clamping device.
  • the force transmission element can have adaptation and fastening elements for fastening to the piezoelectric / electrostrictive actuator.
  • Power transmission element has a significantly smaller cross-sectional area at the clamping point than the cross-sectional area at the actuator.
  • the clamping device can, for example. consist of a ceramic plate and a clamping spring, between which the force transmission element is mounted, the force of the clamping spring on the force transmission element, for example. can be adjusted via a screw.
  • Bearing the power transmission element in or on the clamping device, for example. can also represent only one friction surface, it is understood that the force transmission element is displaceably arranged in or on the clamping device with a certain static friction, regardless of whether the force transmission element or the clamping device is connected to the movable mass and moves.
  • the clamping device can also consist of only one friction surface on the object mass or on the reference mass for the force transmission element.
  • the size of the static friction is, for example. depending on the material properties of the power transmission element and the clamping device, on their surface quality, their shape and on the force between the friction surfaces.
  • the inertia of the object mass advantageously brings about an inertia force which leads to overcoming the static friction between the force transmission element and the clamping device.
  • the inertia force of the object does not have to be overcome when the force transmission element is displaced in addition to the static friction force, so it does not counteract the desired movement.
  • the static friction is advantageously set on the clamping device, as explained above, and is therefore independent of the surface condition and shape of the actuator.
  • Object mass and static friction are not mutually limited, ie large object masses can advantageously be very strong via the force transmission element on the clamping device can be clamped and irrespective of the object mass, static friction forces can be overcome up to close to the blocking force of the actuator.
  • the maximum possible static friction can be overcome and a maximum possible, uniform displacement and displacement speed can be achieved over the entire length of the force transmission element.
  • a shift can be caused.
  • the total possible displacement path depends on the length of the force transmission element and is only limited by its hardness, the elasticity of the force transmission element limiting the maximum force exerted by the actuator to the clamping point.
  • the high adjustable static friction and the high force per area that the force transmission element can generate at the clamping point makes the displacement essentially independent of the surface condition of the force transmission element and the clamping device, i.e. regardless of e.g. Corrosion, pollution, etc. and leads to a play and hysteresis-free, and essentially uniform and reproducible shift.
  • no lubrication of the clamping device is required, which, for example. is important for low temperature and vacuum applications.
  • the object can advantageously be moved step by step, for example. in the cm range by shifting the force transmission element, as well as being finely positioned in the nanometer range by adjusting an expansion on the actuator via a static or slowly varying voltage. It can be advantageous to attach the object to the surface of the actuator and the clamping device to the reference mass. In this arrangement, the inertial force of the object acts in the direction of the displacement in the event of an abrupt change in length of the actuator.
  • the object does not have to be provided with a clamping device, which is particularly the case with very small objects or applications in which the object has to be very compact, for example. for miniature instruments, is an advantage.
  • it can be advantageous to fasten several actuators with force transmission elements to the object and / or reference mass on both sides in the direction of movement in order to move heavy objects, to obtain very high static friction and to store the object without play.
  • the force transmission element or the clamping device can advantageously also be designed as a guide element or guide device for the object.
  • the power transmission element can, for example. be needle-shaped, for example. is mounted in a V-shaped clamping device.
  • the force transmission element has the smallest possible mass, for example. needle-shaped made of light but hard material.
  • Power transmission elements with the smallest possible cross-sectional area according to claim 1 can advantageously have particularly small masses.
  • very small mass therefore, given the electrical control of the actuator, very large static frictional forces, in the limit case up to close to the blocking force of the actuator, can advantageously be overcome and, according to the conservation of momentum, very large displacement steps per applied voltage pulse, which practically correspond to the change in length of the actuator, and large displacement speeds can be achieved.
  • the very small inertia of the force transmission element leads to an advantageously low operating voltage for overcoming the static friction.
  • multilayer piezo elements as an actuator in the arrangement according to the invention makes it possible, according to claim 4, to operate the inertial drive with small operating voltages, such as, for example. less than 10 V, and relatively large even at low voltages
  • platelet-shaped multilayer piezo elements with electrical fields of the voltage applied to the actuator in the direction of movement and with thin piezoceramic layers have relatively large deflections at low voltages.
  • they have a compact shape and are therefore advantageously very unbreakable in the Comparison to tubular piezo elements.
  • Another advantage is that, compared to shear piezo elements, the connection points from the above piezo elements to the force transmission element and the object or reference mass are only subjected to compressive and tensile loads and essentially no shear forces occur.
  • a leaf spring which is pressed into the V-groove with adjustable spring force, can advantageously be realized in a technically simple manner, the advantages explained above, in particular the guiding function of the force transmission element and clamping device, being able to be used in this simple embodiment.
  • the embodiment according to claim 5 can easily be retrofitted into existing constructions.
  • the force transmission element is mounted in a clamping device, which consist of clamping units that are flexible and / or movable substantially perpendicular to the direction of movement.
  • Power transmission element is therefore not mounted on a rigid part of the clamping device which is fixed with respect to the object or the reference mass.
  • Eg. can be a clamping device according to claim 6 formed as a compression fitting, consisting of a screw-like element which has a bore and is slotted, and a screw-on threaded sleeve.
  • the power transmission element is mounted in the bore, the static friction is set by screwing on the threaded sleeve.
  • This clamping device advantageously has a spring action only perpendicular to the direction of movement, in the direction of movement the clamping device is extremely rigid. As a result, the maximum force, which is caused by a sudden change in length of the actuator, is effective for overcoming the static friction.
  • Squeeze fittings easily retrofitted into existing threaded holes, e.g. to accommodate adjusting screws.
  • Power transmission element is an advantage.
  • the parts of the surfaces that serve as the friction surface between the force transmission element and the clamping device are rough and the parts of the surfaces that the friction surface between the force transmission element and Represent clamp spring, be as smooth as possible.
  • This measure advantageously achieves a high static friction, the clamping spring experiencing only a small force in the direction of movement in the event of a sudden change in length of the actuator, and the maximum impact force for overcoming the static friction at the clamping point thus becomes effective.
  • the slider of a sliding table with the arrangement according to the invention can be moved and positioned as an object, since this compact arrangement according to the invention is particularly suitable for moving heavy objects and can be easily retrofitted in, for example.
  • manually integrated sliding tables can be integrated, which can then be electronically, e.g. can be adjusted with computer with high positioning accuracy.
  • complex drives e.g. on electric motors with gears.
  • the object may be advantageous to store the object on force transmission elements which are arranged on both sides of the object in the direction of movement.
  • Both actuators with the force transmission elements and clamping devices can be firmly connected to the object or the reference mass, for example. an actuator on one side in the direction of movement and two clamping devices on the opposite side in the direction of movement of the object.
  • the advantage of this arrangement is that the object is supported completely free of play with a high static friction by the at least three clamping devices.
  • the object can represent a rotor, the reference mass a stator of a sliding table.
  • the rotor of a sliding table is mounted on three force transmission elements, which are firmly connected to piezoelectric / electrostrictive actuators, at clamping devices on the stator of the sliding table, the rotor is advantageously statically determined and supported without play.
  • the piezoelectric / electrostrictive actuators are activated in a time and voltage correlated manner.
  • Tilting mirrors can advantageously be adjusted with the arrangement according to the invention.
  • the tilting mirror as the object to be positioned is, for example. fixed with two actuators and one joint, e.g. Solid-state joint, connected, the two force transmission elements being mounted on the stator as reference mass via clamping devices with greater static friction.
  • the tilting mirror can be adjusted electrically in two dimensions, which is otherwise only possible with one complex mechanics, consisting for example. from electric motors and gears.
  • the arrangement according to the invention is particularly suitable for such applications, since large masses such as the mirror can be positioned, high displacement speeds can be achieved and high static friction can be overcome, as explained above.
  • the piezoelectric / electrostrictive actuator and the elements attached to it have similar coefficients of thermal expansion to prevent destruction of the piezoelectric / electrostrictive actuator by thermal stresses.
  • the force transmission element and the object or the reference mass preferably have layer-like adaptation elements which are connected to the actuator.
  • These adjustment elements e.g. Hard ceramics, with a similar coefficient of thermal expansion as the actuator, advantageously prevent thermal stresses caused by the force transmission element and the object or the reference mass from occurring on the actuator.
  • the inertial drive also enables rotary movements to be carried out on rotatably arranged objects and to position objects by rotation.
  • polarizers are aligned in the optics, or e.g. Samples are positioned on rotary tables.
  • FIG. 3a and 3b a positioning table, the rotor is mounted on three power transmission elements and can be moved.
  • 4a and 4b show an arrangement according to the invention for a positioning device which, for example. is suitable for low temperature applications.
  • 5 shows an arrangement for a turntable.
  • no electrical connections of the piezo elements and the circuitry are shown; known circuits and electrical voltage signals can be used to control piezo elements, such as, for example. in references to inertial drives cited in the prior art.
  • Fig.la an arrangement according to the invention is shown with zero voltage applied to the piezoelectric / electrostrictive actuator 1, consisting of a piezoelectric / electrostrictive actuator 1, an object 2 to be positioned, a force transmission element 3, a clamping device 5/5 'with a clamping 5 and a flat metal surface 5 'and a fixed reference mass 4 which is fixed to the piezoelectric / electrostrictive actuator 1, consisting of a piezoelectric / electrostrictive actuator 1, an object 2 to be positioned, a force transmission element 3, a clamping device 5/5 'with a clamping 5 and a flat metal surface 5 'and a fixed reference mass 4 which is fixed to the piezoelectric / electrostrictive actuator 1, consisting of a piezoelectric / electrostrictive actuator 1, an object 2 to be positioned, a force transmission element 3, a clamping device 5/5 'with a clamping 5 and a flat metal surface 5 'and a fixed reference mass 4 which is fixed to the piezoelectric
  • Clamping device 5/5 ' is connected.
  • Object 2 is, for example. by gluing, firmly connected to one of the surfaces of the actuator 1 in the direction of expansion or contraction, that is to say in the direction of movement.
  • the force transmission element 3 is firmly connected to the opposite surface of the actuator 1 and clamped in the clamping device 5/5 '.
  • the static friction at the clamping point is determined by the surface condition of the force transmission element 3 and the clamping device 5/5 'and by the contact pressure of the clamping 5.
  • the sudden expansion of the actuator 1 leads to an inertial force of the object 2 in the direction of movement that is greater than the static friction force at the clamping point between the force transmission element 3 and the clamping device 5 / 5 ', which is connected to the fixed reference mass 4, the inertial force counteracting the advantageously small mass of the force transmission element 3.
  • the inertia force of the object 2 advantageously acts in the direction of displacement and essentially serves to overcome the static friction force if the inertia of the force transmission element 3 is negligible.
  • the force transmission element 3 is displaced in the clamping device 5/5 'against the substantially smaller sliding friction force, the displacement step essentially corresponding to the expansion of the actuator 1 in the case of a force transmission element mass 3 which is negligible in relation to the object mass 2.
  • a temporally linear, step-wise displacement of the object 2 can therefore advantageously take place with a preferably sawtooth-shaped electrical control ( compare Fig.la and ld) as well as a continuous positioning in the nanometer range (compare Fig.lc and ld) with a slowly varying voltage at the actuator 1.
  • the actuator 1 is preferably selected in the form of a plate, on the one hand achieving a high breaking strength of the arrangement and, on the other hand, through a corresponding shape of the force transmission element 3, as shown in FIG Force per surface, effective on a small friction surface at the clamping point between the force transmission element 3 and the clamping device 5/5 'is achieved. Due to the arrangement, a play and hysteresis-free, very smooth and reproducible movement can be achieved over the entire length of the force transmission element 3.
  • the displacement and positioning of the object 2 is achieved by the interaction of the object 2 with the other components of the displacement device (1, 3, 4, 5/5 '), the object 2 itself represents an important component of the drive.
  • this arrangement can be used to advantageously move and move heavy objects 2 which are mounted with high static friction be positioned.
  • the reference mass 4 and object 2 can be interchanged in the arrangement in FIG. La-d, object 2 then having to be fastened to the clamping device 5/5 '.
  • FIGS. 2a and 2b show the front view and top view of a sliding table, consisting of a rotor as the object 2 to be positioned, which is mounted on the stator as a reference mass 4 via guide rails 7 with a small static and sliding friction.
  • the drive itself consists of the rotor 2, the piezoelectric electrostrictive actuator 1, the force transmission element 3 with a round cross section, which also acts as a guide element, and the clamping device 5/5 'attached to the stator 4.
  • the drive itself consists of the rotor 2, the piezoelectric electrostrictive actuator 1, the force transmission element 3 with a round cross section, which also acts as a guide element, and the clamping device 5/5 'attached to the stator 4.
  • the required static friction can be adjusted using the screw 6 and the hardness of the leaf spring 5.
  • Such an arrangement is technically easy to implement, and can easily be retrofitted into existing constructions of sliding tables, eg. with manual adjustment, integrate. This allows the rotor 2 to be moved electromechanically and positioned exactly. Generally complicated electric drives, such as electric motors, can be dispensed with.
  • FIGS. 2a and 2b show a sliding table similar to that in FIGS. 2a and 2b, with instead of the rotor 2 being supported on guide rails 7, the rotor 2 is fixed by three force transmission elements 3, which also represent guide elements, via the clamping device 5/5 ' is clamped on the stator 4, the V-groove 5 'of the clamping device 5/5' also acting as a guide device.
  • This arrangement an object 2, which is mounted on both sides in the direction of movement on force transmission elements 3, advantageously leads to the rotor 2 being absolutely free of play, especially since the rotor 2 can be clamped according to the invention with high static friction forces.
  • the high static friction of the overall system is advantageously made up of the individual

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  • General Electrical Machinery Utilizing Piezoelectricity, Electrostriction Or Magnetostriction (AREA)

Abstract

L'invention vise à perfectionner des mécanismes d'entraînement par inertie servant à des opérations de déplacement et de positionnement avec des actionneurs piézo-électriques ou électrostrictifs à extension linéaire, de manière que des objets lourds, serrés sans jeu avec un frottement par adhérence important atteignant approximativement la force de blocage des actionneurs, puissent être déplacés de manière très constante et sans hystérèse sur des longueurs de l'ordre du cm, à une vitesse de déplacement relativement élevée, et être positionnés sur des longueurs de l'ordre du nm. A cet effet, l'objet est solidarisé avec l'actionneur dans le sens d'extension ou de contraction dudit actionneur ou dans le dispositif de serrage où est monté un élément de transmission de force sous forme d'aiguille, fixé sur l'actionneur. L'inertie de la matière constituant l'objet n'agit pas à l'encontre du déplacement lorsque la longueur de l'actionneur varie par saccades sous l'effet d'une excitation électrique appropriée, de qui permet d'atteindre les avantages précités. La possibilité de déplacer des objets sur des longueurs de l'ordre du cm avec une grande précision de positionnement ouvre de nouvelles perspectives d'application pour les dispositifs de déplacement piézo-électriques ou électrostrictifs.
EP97945790A 1996-10-26 1997-10-26 Mecanisme d'entrainement par inertie, piezo-electrique ou electrostrictif pour deplacer et positionner des objets particulierement lourds Withdrawn EP0947003A2 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE1996144550 DE19644550C1 (de) 1996-10-26 1996-10-26 Piezoelektrischer oder elektrostriktiver Trägheitsantrieb zum Verschieben oder Positionieren von insbesondere schweren Objekten
DE19644550 1996-10-26
PCT/DE1997/002482 WO1998019347A2 (fr) 1996-10-26 1997-10-26 Mecanisme d'entrainement par inertie, piezo-electrique ou electrostrictif pour deplacer et positionner des objets particulierement lourds

Publications (1)

Publication Number Publication Date
EP0947003A2 true EP0947003A2 (fr) 1999-10-06

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EP97945790A Withdrawn EP0947003A2 (fr) 1996-10-26 1997-10-26 Mecanisme d'entrainement par inertie, piezo-electrique ou electrostrictif pour deplacer et positionner des objets particulierement lourds

Country Status (3)

Country Link
EP (1) EP0947003A2 (fr)
DE (1) DE19644550C1 (fr)
WO (1) WO1998019347A2 (fr)

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DE19909913B4 (de) * 1999-03-06 2004-01-15 NMI Naturwissenschaftliches und Medizinisches Institut an der Universität Tübingen Elektromechanische Antriebsvorrichtung
DE10057065C1 (de) * 2000-11-17 2002-06-20 Koenig & Bauer Ag Positionierantrieb
GB2369489B (en) 2000-11-23 2004-03-10 Khaled Karrai Inertial rotation device
DE602005001844T2 (de) * 2005-02-17 2007-12-13 Agie S.A., Losone Piezoelektrisches Antriebselement
DE102005026708B4 (de) * 2005-06-09 2007-05-03 Attocube Systems Ag Positionierer mit Festkörpergelenk
EP1984961B8 (fr) * 2005-08-24 2012-05-09 SmarAct GmbH Dispositif d'entrainement inertiel rotatif
DE102006052175B4 (de) * 2006-11-02 2013-03-07 SmarAct Holding GmbH Trägheitsantriebsvorrichtung
DE102010010982B4 (de) 2010-03-10 2020-09-24 Artur Zrenner Verschiebevorrichtung und Verfahren zu deren Ansteuerung
DE102012221892B4 (de) 2012-11-29 2016-05-19 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen oder rotatorischen Positionierung
EP2916450B1 (fr) 2014-03-03 2017-06-28 Picofine GmbH Dispositif d'entraînement et procédé pour la génération d'un mouvement guidé, linéaire ou rotatif
DE102014221001A1 (de) 2014-10-16 2016-04-21 Picofine GmbH Antriebsvorrichtung und -verfahren zur linearen und/oder rotatorischen Positionierung
DE102017127745B4 (de) 2017-11-23 2020-10-15 Picofine GmbH Vorgespannter Trägheitsantrieb
DE102018217709A1 (de) * 2018-10-16 2020-04-16 Physik Instrumente (Pi) Gmbh & Co. Kg Linearantrieb
DE102021103462A1 (de) 2021-02-15 2022-08-18 SmarAct Holding GmbH Vorrichtung und Verfahren zur linearen oder rotatorischen Positionierung

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Also Published As

Publication number Publication date
WO1998019347A2 (fr) 1998-05-07
WO1998019347A3 (fr) 1998-06-25
DE19644550C1 (de) 1998-06-10

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