EP0921003A1 - Tête d'impression à jet d'encre - Google Patents

Tête d'impression à jet d'encre Download PDF

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Publication number
EP0921003A1
EP0921003A1 EP98204010A EP98204010A EP0921003A1 EP 0921003 A1 EP0921003 A1 EP 0921003A1 EP 98204010 A EP98204010 A EP 98204010A EP 98204010 A EP98204010 A EP 98204010A EP 0921003 A1 EP0921003 A1 EP 0921003A1
Authority
EP
European Patent Office
Prior art keywords
channels
channel plate
nozzles
channel
plate elements
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
EP98204010A
Other languages
German (de)
English (en)
Inventor
Franciscus Richard Blom
Hendrik Willem Ellenkamp
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Production Printing Netherlands BV
Original Assignee
Oce Technologies BV
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Oce Technologies BV filed Critical Oce Technologies BV
Priority to EP98204010A priority Critical patent/EP0921003A1/fr
Publication of EP0921003A1 publication Critical patent/EP0921003A1/fr
Withdrawn legal-status Critical Current

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Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2/14201—Structure of print heads with piezoelectric elements
    • B41J2/14274—Structure of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/145—Arrangement thereof
    • B41J2/155—Arrangement thereof for line printing
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1607—Production of print heads with piezoelectric elements
    • B41J2/1612—Production of print heads with piezoelectric elements of stacked structure type, deformed by compression/extension and disposed on a diaphragm
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1632—Manufacturing processes machining
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/14—Structure thereof only for on-demand ink jet heads
    • B41J2002/14379—Edge shooter

Definitions

  • the invention relates to an ink jet array printhead and methods for manufacturing the same.
  • US-A-5 410 340 discloses an ink jet array printhead comprising a channel plate composed of a plurality of channel plate elements, wherein each channel plate element has formed therein a plurality of parallel channels separated from one another by partition walls, each channel has an open end forming a nozzle, and the channel plate elements are arranged side by side so that the nozzles form a linear array.
  • This known device is a so-called bubble jet printhead in which a heating element is associated with each of the channels in order to temporarily heat the ink in the channel, thereby to create a bubble in the ink and to generate a pressure sufficient for expelling an ink droplet out of the nozzle.
  • the manufacturing process for this printhead includes the steps of forming heating elements arranged in a row on the surface of a silicon wafer, dicing the wafer into tiles which have the same size as the channel plate elements, and sandwiching the tiles and the channel plate elements so that the positions of the heating elements coincide with those of the channels.
  • at least the first and the last heating element of each tile are slightly displaced inwardly so that they are slightly offset from the center of the corresponding channel.
  • EP-A-0 402 172 discloses an array printhead in which the necessary pressure for expelling ink droplets is generated by means of piezoelectric actuators.
  • the actuators are respectively disposed above the ink channels with the interposition of a flexible plate which flexes in accordance with the expansion and retraction strokes of the piezoelectric actuators so that pressure waves are generated in the ink volume in the channels.
  • the width of the end of the channel forming the nozzle should be reduced so that the width of the channel itself is larger than the width of the nozzle.
  • the channel plate elements have to be butted appropriately in order to achieve a continuous nozzle array with constant pitch. This, however, leads to the problem that only a limited space is available for outer walls limiting the channels adjacent to the butted edges of the channel plate elements.
  • the thickness of these outer walls could not be larger than half the thickness of the partition walls separating the individual channels within the channel plate. Since the thickness of the partition walls is comparatively small already, it would be problematic to manufacture outer walls having only half this thickness, and this would again increase the likelihood of defects.
  • the channels of each channel plate element are arranged with a constant pitch which is smaller than that of the nozzles.
  • the positions of the nozzles relative to the channels vary over the width of the nozzle plate element.
  • the width of the channel plate element were infinite, there would occur "blind channels” which are skipped in the sequence of nozzles and do not overlap with any nozzle.
  • the locations of these "blind channels” are suitable for placing dicing cuts separating the channel plate into individual channel plate elements, thereby providing enough space for making the outer walls of the adjacent channels thicker.
  • the thickness of the outer walls adjacent to the edges of the channel plate elements have the same thickness as the partition walls. This eliminates variations in the droplet generation processes in the various channels which might otherwise be caused by differences in the mechanical strength of the walls limiting the channels.
  • the center to center distance between two channels situated on either side of a boundary between two channel plate elements may be twice the pitch of the channels within the channel plate elements.
  • the actuators that are located at the boundaries of the channel plate elements and accordingly have no channel associated therewith, will of course not be actuated and may serve as support members for bearing the reaction forces generated by the active actuators.
  • One method of manufacturing the printhead according to the invention comprises the steps of forming channels and nozzles in the surface of a wafer such that the pitch of the channels is smaller than that of the nozzles, and cutting the wafer at appropriate positions in order to obtain a plurality of channel plate elements from one and the same wafer.
  • An alternative method of manufacturing a printhead according to the invention comprises the steps of forming channels in the surface of a wafer, dicing the wafer into a plurality of channel plate elements, arranging the channel plate elements side by side to form the complete channel plate, preparing a nozzle plate with orifices defining the nozzles arranged with pitch different from that of the channels and mounting the nozzle plate in front of the channel plate so that each nozzle falls within the cross section of an open end of one of the channels.
  • the nozzle plate may be divided into several elements according to the same pattern as the channel plate or according to a different pattern.
  • each of the actuators 30 is disposed above one of the channels 22, 24, whereas the support members 32 are disposed directly above partition walls 34 separating the individual channels.
  • the printhead 10 further comprises an ink supply system for supplying liquid ink to each of the channels 22, 24 as well as electrodes and electronic control means for energizing the actuators 30 individually.
  • an ink supply system for supplying liquid ink to each of the channels 22, 24 as well as electrodes and electronic control means for energizing the actuators 30 individually.
  • These components are generally known in the art and are therefore not shown and described here.
  • one of the actuators 30 When, in operation, one of the actuators 30 is energized, it first performs a retraction stroke so that the portion of the flexible plate 16 connected to this actuator is flexed upwardly and additional ink is sucked into the associated channel. Then, the actuator performs an expansion stroke so that the flexible plate 16 is flexed downwardly into the channel, and the liquid in this channel is pressurized so that an ink droplet is expelled from the nozzle 26.
  • the nozzles 26 are arranged at a constant pitch Dn throughout the printhead, i.e. the distance between two adjacent nozzles belonging to the same channel plate element 36 is the same as the distance between two nozzles disposed on either side of a boundary 38.
  • Dn the distance between two adjacent nozzles belonging to the same channel plate element 36 is the same as the distance between two nozzles disposed on either side of a boundary 38.
  • the channel plate element 36 in Figs. 1 and 2 is shown to comprise only eight channels 22, 24. In practice, however, the number of channels per channel plate element may be considerably larger, e.g. 150 or more.
  • the channels 22, 24 belonging to the same channel plate element 36 are also arranged with a constant pitch Dc. However, as is shown in Fig. 2, this pitch Dc is slightly smaller than the pitch Dn of the nozzles 26.
  • the width of the nozzles 26 is considerably smaller than the width of the channels 22, 24. In a practical example the width of the nozzles may be 40 ⁇ m whereas the width of each channel may be approximately 300 ⁇ m.
  • the nozzles 26 are positioned substantially at the center of the channel, whereas, the more one approaches to the lateral ends of the channel plate element, the more the nozzle is offset outwardly from the center of the channel.
  • the center to center distance Dc' of the two channels 24 situated on either side of a boundary 38 is considerably larger than the regular pitch Dc of the channels.
  • the individual channel plate elements 36 are so positioned on the support plate 12 that the distance between the nozzles of the channels 24 adjacent to the boundary 38 is equal to Dn, and a small gap is formed between the channel plate elements.
  • this gap may be filled with an appropriate spacer element or the outer walls 40 may be made thicker so that the channel plate elements 36 can directly be butted against each other.
  • Figs. 1 and 2 there is a one-two-one relationship between the channel plate elements 36 and the actuator members 28.
  • a plurality of channel plate elements 36 can efficiently be manufactured by forming the channels 22, 24 and the nozzles 26 in the surface of a larger wafer 42 a portion of which is shown in plan view in Fig. 3, and then performing dicing cuts 44 to form the individual channel plate elements.
  • the distance between the channels 24 can be selected appropriately in view of the width of the dicing cut 42.
  • the thickness of the outer walls 40 can be made either larger or smaller than that of the partition walls 34. It is preferable, however, that the thickness of the outer walls 40 is larger than half the thickness of the partition walls 34.
  • each channel plate element 36 has an even number of channels.
  • the actuators 30 are sufficiently spaced away from the partition walls 34 and the outer walls 40 of the channels. This is why, in Fig. 1, the fingers 30 and 32 are arranged in a non-regular pattern, which may however be problematic from the viewpoint of manufacturing.
  • Fig. 4 illustrates a modification in which all the fingers 30 and 32 of the actuator member 28 are arranged with equal spacings.
  • the channels 46, 48 of the channel plate 14 are arranged in pairs corresponding to the pairs of actuators 30.
  • a sufficient spacing of the actuators from the partition walls and end walls of the channels is achieved by slightly displacing the two channels 46 and 48 of each pair outwardly relative to the associated support finger 32.
  • the channels 46, 48 of the channel plate element 36 are no longer arranged with a constant pitch. It is possible however to define an effective pitch Dc as one half of the distance between two adjacent pairs of channels 46, 48. This effective pitch Dc is then constant over the whole channel plate element 36.
  • the nozzles 26 are formed in the channel plate 14 by converging the channels in the end portion forming the nozzle.
  • Figs. 5 and 6 show an embodiment in which the channels 50 are formed by straight grooves, and the nozzles 52 are defined by orifices formed in a separate nozzle plate 54 which is fixed to the front face of the channel plate 14, the flexible plate 16, etc..
  • the channel plate elements 36 according to this embodiment can simply be manufactured by cutting a regular pattern of straight grooves into the surface of the wafer 42, regardless of the boundaries between the channel plate elements to be formed therefrom. Then, dicing cuts 44 are formed along the center lines of some of the grooves 50' which will thereby be removed.

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)
EP98204010A 1997-12-03 1998-11-27 Tête d'impression à jet d'encre Withdrawn EP0921003A1 (fr)

Priority Applications (1)

Application Number Priority Date Filing Date Title
EP98204010A EP0921003A1 (fr) 1997-12-03 1998-11-27 Tête d'impression à jet d'encre

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP97203798 1997-12-03
EP97203798 1997-12-03
EP98204010A EP0921003A1 (fr) 1997-12-03 1998-11-27 Tête d'impression à jet d'encre

Publications (1)

Publication Number Publication Date
EP0921003A1 true EP0921003A1 (fr) 1999-06-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
EP98204010A Withdrawn EP0921003A1 (fr) 1997-12-03 1998-11-27 Tête d'impression à jet d'encre

Country Status (1)

Country Link
EP (1) EP0921003A1 (fr)

Cited By (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2001089844A1 (fr) * 2000-05-24 2001-11-29 Silverbrook Research Pty. Ltd. Systeme de buses d'une tete d'impression a jet d'encre
US6328417B1 (en) 2000-05-23 2001-12-11 Silverbrook Research Pty Ltd Ink jet printhead nozzle array
WO2004056572A2 (fr) * 2002-12-20 2004-07-08 Xaar Technology Limited Appareil de depot de gouttelettes
AU2005203479B2 (en) * 2000-05-24 2006-11-23 Memjet Technology Limited Inkjet printhead with paired nozzle rows
EP1817169A1 (fr) * 2004-11-29 2007-08-15 Ricoh Company, Ltd. Tete de decharge de liquide, dispositif de decharge de liquide et dispositif de formation d'image
EP1845566A2 (fr) 2006-04-14 2007-10-17 Ricoh Company, Ltd. Actionneur piézoélectrique et son procédé de fabrication, tête d'éjection de liquide et appareil de formation d'image
SG152034A1 (en) * 2000-05-24 2009-05-29 Silverbrook Res Pty Ltd An ink jet printhead incorporating an array of nozzle assemblies
US7845769B2 (en) 2006-04-07 2010-12-07 Océ-Technologies B.V. Ink jet printhead
US10093097B2 (en) 2014-08-26 2018-10-09 Oce-Technologies B.V. Multi-chip print head

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5584678A (en) * 1978-12-20 1980-06-26 Ricoh Co Ltd Multi-ink-jet-head
EP0402172A1 (fr) 1989-06-09 1990-12-12 Sharp Kabushiki Kaisha Tête pour imprimante à jet d'encre
EP0615845A2 (fr) * 1993-03-19 1994-09-21 Compaq Computer Corporation Méthode pour la fabrication d'une tête d'impression par jet d'encre piézoélectrique ayant la largeur d'une page
US5410340A (en) 1993-11-22 1995-04-25 Xerox Corporation Off center heaters for thermal ink jet printheads
EP0670222A2 (fr) * 1994-03-04 1995-09-06 Canon Kabushiki Kaisha Tête d'enregistrement par jet d'encre
EP0707965A2 (fr) * 1994-10-21 1996-04-24 Canon Kabushiki Kaisha Substrat pour tête à jet liquide, tête à jet liquide l'utilisant et appareil à jet liquide utilisant cette tête
EP0755791A2 (fr) * 1995-07-24 1997-01-29 Seiko Epson Corporation Organe d'actionnement pour une tête d'enregistrement à jet d'encre et procédé de fabrication de celle-ci

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5584678A (en) * 1978-12-20 1980-06-26 Ricoh Co Ltd Multi-ink-jet-head
EP0402172A1 (fr) 1989-06-09 1990-12-12 Sharp Kabushiki Kaisha Tête pour imprimante à jet d'encre
EP0615845A2 (fr) * 1993-03-19 1994-09-21 Compaq Computer Corporation Méthode pour la fabrication d'une tête d'impression par jet d'encre piézoélectrique ayant la largeur d'une page
US5410340A (en) 1993-11-22 1995-04-25 Xerox Corporation Off center heaters for thermal ink jet printheads
EP0670222A2 (fr) * 1994-03-04 1995-09-06 Canon Kabushiki Kaisha Tête d'enregistrement par jet d'encre
EP0707965A2 (fr) * 1994-10-21 1996-04-24 Canon Kabushiki Kaisha Substrat pour tête à jet liquide, tête à jet liquide l'utilisant et appareil à jet liquide utilisant cette tête
EP0755791A2 (fr) * 1995-07-24 1997-01-29 Seiko Epson Corporation Organe d'actionnement pour une tête d'enregistrement à jet d'encre et procédé de fabrication de celle-ci

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
PATENT ABSTRACTS OF JAPAN vol. 004, no. 125 (M - 030) 3 September 1980 (1980-09-03) *

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6328417B1 (en) 2000-05-23 2001-12-11 Silverbrook Research Pty Ltd Ink jet printhead nozzle array
SG152034A1 (en) * 2000-05-24 2009-05-29 Silverbrook Res Pty Ltd An ink jet printhead incorporating an array of nozzle assemblies
US7380905B1 (en) 2000-05-24 2008-06-03 Silverbrook Research Pty Ltd Ink jet printhead nozzle array
US7654643B2 (en) 2000-05-24 2010-02-02 Silverbrook Research Pty Ltd Inkjet printhead nozzle assembly having a raised rim to support an ink meniscus
AU2004202405B2 (en) * 2000-05-24 2005-05-19 Memjet Technology Limited An ink jet printhead incorporating an array of nozzle assemblies
AU2005203479B2 (en) * 2000-05-24 2006-11-23 Memjet Technology Limited Inkjet printhead with paired nozzle rows
US7984968B2 (en) 2000-05-24 2011-07-26 Silverbrook Research Pty Ltd Inkjet printhead nozzle assembly having a raised rim to support an ink meniscus
WO2001089844A1 (fr) * 2000-05-24 2001-11-29 Silverbrook Research Pty. Ltd. Systeme de buses d'une tete d'impression a jet d'encre
WO2004056572A3 (fr) * 2002-12-20 2004-10-07 Xaar Technology Ltd Appareil de depot de gouttelettes
WO2004056572A2 (fr) * 2002-12-20 2004-07-08 Xaar Technology Limited Appareil de depot de gouttelettes
EP1817169A1 (fr) * 2004-11-29 2007-08-15 Ricoh Company, Ltd. Tete de decharge de liquide, dispositif de decharge de liquide et dispositif de formation d'image
EP1817169A4 (fr) * 2004-11-29 2008-10-29 Ricoh Kk Tete de decharge de liquide, dispositif de decharge de liquide et dispositif de formation d'image
US7665830B2 (en) 2004-11-29 2010-02-23 Ricoh Company, Ltd. Liquid discharge head, liquid discharge device, and image forming device
US7845769B2 (en) 2006-04-07 2010-12-07 Océ-Technologies B.V. Ink jet printhead
CN101049760B (zh) * 2006-04-07 2011-04-13 奥西-技术有限公司 喷墨打印头
US7764006B2 (en) 2006-04-14 2010-07-27 Ricoh Company, Ltd. Piezoelectric actuator and manufacturing method thereof, liquid ejecting head, and image forming apparatus
EP1845566A3 (fr) * 2006-04-14 2009-06-03 Ricoh Company, Ltd. Actionneur piézoélectrique et son procédé de fabrication, tête d'éjection de liquide et appareil de formation d'image
US8047637B2 (en) 2006-04-14 2011-11-01 Ricoh Company, Ltd. Piezoelectric actuator and manufacturing method thereof, liquid ejecting head, and image forming apparatus
EP1845566A2 (fr) 2006-04-14 2007-10-17 Ricoh Company, Ltd. Actionneur piézoélectrique et son procédé de fabrication, tête d'éjection de liquide et appareil de formation d'image
US10093097B2 (en) 2014-08-26 2018-10-09 Oce-Technologies B.V. Multi-chip print head

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