EP0914022A3 - Elément chauffant en nitrure d'aluminium - Google Patents
Elément chauffant en nitrure d'aluminium Download PDFInfo
- Publication number
- EP0914022A3 EP0914022A3 EP98308840A EP98308840A EP0914022A3 EP 0914022 A3 EP0914022 A3 EP 0914022A3 EP 98308840 A EP98308840 A EP 98308840A EP 98308840 A EP98308840 A EP 98308840A EP 0914022 A3 EP0914022 A3 EP 0914022A3
- Authority
- EP
- European Patent Office
- Prior art keywords
- aluminum nitride
- compound
- silicon
- percent
- terms
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- PMHQVHHXPFUNSP-UHFFFAOYSA-M copper(1+);methylsulfanylmethane;bromide Chemical compound Br[Cu].CSC PMHQVHHXPFUNSP-UHFFFAOYSA-M 0.000 title abstract 3
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract 2
- 150000001875 compounds Chemical class 0.000 abstract 2
- 229910052710 silicon Inorganic materials 0.000 abstract 2
- 239000010703 silicon Substances 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 229910001316 Ag alloy Inorganic materials 0.000 abstract 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 abstract 1
- 239000000919 ceramic Substances 0.000 abstract 1
- 238000010438 heat treatment Methods 0.000 abstract 1
- 230000000737 periodic effect Effects 0.000 abstract 1
- 150000003377 silicon compounds Chemical class 0.000 abstract 1
- 229910052709 silver Inorganic materials 0.000 abstract 1
- 239000004332 silver Substances 0.000 abstract 1
- 230000007704 transition Effects 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/20—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater
- H05B3/22—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible
- H05B3/26—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base
- H05B3/265—Heating elements having extended surface area substantially in a two-dimensional plane, e.g. plate-heater non-flexible heating conductor mounted on insulating base the insulating base being an inorganic material, e.g. ceramic
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05B—ELECTRIC HEATING; ELECTRIC LIGHT SOURCES NOT OTHERWISE PROVIDED FOR; CIRCUIT ARRANGEMENTS FOR ELECTRIC LIGHT SOURCES, IN GENERAL
- H05B3/00—Ohmic-resistance heating
- H05B3/10—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor
- H05B3/12—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material
- H05B3/14—Heating elements characterised by the composition or nature of the materials or by the arrangement of the conductor characterised by the composition or nature of the conductive material the material being non-metallic
- H05B3/141—Conductive ceramics, e.g. metal oxides, metal carbides, barium titanate, ferrites, zirconia, vitrous compounds
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Ceramic Engineering (AREA)
- Resistance Heating (AREA)
- Surface Heating Bodies (AREA)
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP29807697A JP3820706B2 (ja) | 1997-10-30 | 1997-10-30 | 窒化アルミニウムヒーター |
JP298076/97 | 1997-10-30 | ||
JP29807697 | 1997-10-30 |
Publications (3)
Publication Number | Publication Date |
---|---|
EP0914022A2 EP0914022A2 (fr) | 1999-05-06 |
EP0914022A3 true EP0914022A3 (fr) | 1999-09-15 |
EP0914022B1 EP0914022B1 (fr) | 2002-11-27 |
Family
ID=17854847
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
EP98308840A Expired - Lifetime EP0914022B1 (fr) | 1997-10-30 | 1998-10-28 | Elément chauffant en nitrure d'aluminium |
Country Status (7)
Country | Link |
---|---|
US (1) | US6084221A (fr) |
EP (1) | EP0914022B1 (fr) |
JP (1) | JP3820706B2 (fr) |
KR (1) | KR100539634B1 (fr) |
CA (1) | CA2251875C (fr) |
DE (1) | DE69809687T2 (fr) |
HK (1) | HK1017564A1 (fr) |
Families Citing this family (11)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CA2252113A1 (fr) * | 1997-10-29 | 1999-04-29 | Yoshihiko Numata | Substrat et procede pour le produire |
WO2001055758A1 (fr) * | 2000-01-28 | 2001-08-02 | Sumitomo Electric Industries, Ltd. | Module de rechauffage et module guide d'ondes optiques |
DE10042000A1 (de) * | 2000-08-26 | 2002-05-16 | Bosch Gmbh Robert | Heizeinrichtung, insbesondere für ein Sensorelement zur Analyse von Gasen |
JP2002151236A (ja) * | 2000-11-07 | 2002-05-24 | Sumitomo Electric Ind Ltd | 流体加熱用ヒータ |
US20030000938A1 (en) * | 2000-12-01 | 2003-01-02 | Yanling Zhou | Ceramic heater, and ceramic heater resistor paste |
JP3949483B2 (ja) * | 2001-04-27 | 2007-07-25 | ハリソン東芝ライティング株式会社 | 板状ヒータおよび定着装置ならびに画像形成装置 |
US7106167B2 (en) * | 2002-06-28 | 2006-09-12 | Heetronix | Stable high temperature sensor system with tungsten on AlN |
US9574774B2 (en) * | 2014-03-27 | 2017-02-21 | Kyocera Corporation | Heater and ignition apparatus equipped with the heater |
JP7018307B2 (ja) * | 2017-12-26 | 2022-02-10 | 京セラ株式会社 | ヒータ |
JP7025258B2 (ja) | 2018-03-20 | 2022-02-24 | 京セラ株式会社 | ヒータ |
CN112335334B (zh) | 2018-09-11 | 2022-12-09 | 京瓷株式会社 | 加热器以及具备该加热器的加热用具 |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
EP0773485A2 (fr) * | 1995-11-13 | 1997-05-14 | Sumitomo Electric Industries, Ltd. | Elément chauffant et unité de chauffage ou de fixage comprenant cet élément |
US5663865A (en) * | 1995-02-20 | 1997-09-02 | Shin-Etsu Chemical Co., Ltd. | Ceramic electrostatic chuck with built-in heater |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01203270A (ja) * | 1988-02-08 | 1989-08-16 | Sumitomo Electric Ind Ltd | 高熱伝導性窒化アルミニウム焼結体及びその製造法 |
US5264388A (en) * | 1988-05-16 | 1993-11-23 | Sumitomo Electric Industries, Inc. | Sintered body of aluminum nitride |
JP2567491B2 (ja) * | 1990-04-17 | 1996-12-25 | 住友電気工業株式会社 | 高熱伝導性着色窒化アルミニウム焼結体およびその製造方法 |
JP3214890B2 (ja) * | 1991-05-30 | 2001-10-02 | 京セラ株式会社 | 窒化アルミニウム焼結体およびその製法、並びにそれを用いた焼成用治具 |
US5744411A (en) * | 1993-07-12 | 1998-04-28 | The Dow Chemical Company | Aluminum nitride sintered body with high thermal conductivity and its preparation |
DE69530678T2 (de) * | 1994-02-03 | 2004-04-01 | Ngk Insulators, Ltd., Nagoya | Aluminiumnitrid-sinterkörper und herstellungsverfahren dafür |
JPH0881267A (ja) * | 1994-09-16 | 1996-03-26 | Toshiba Corp | 窒化アルミニウム焼結体、その製造方法と窒化アルミニウム回路基板、その製造方法 |
-
1997
- 1997-10-30 JP JP29807697A patent/JP3820706B2/ja not_active Expired - Lifetime
-
1998
- 1998-10-27 CA CA002251875A patent/CA2251875C/fr not_active Expired - Fee Related
- 1998-10-28 DE DE69809687T patent/DE69809687T2/de not_active Expired - Fee Related
- 1998-10-28 EP EP98308840A patent/EP0914022B1/fr not_active Expired - Lifetime
- 1998-10-28 US US09/181,341 patent/US6084221A/en not_active Expired - Lifetime
- 1998-10-29 KR KR1019980045746A patent/KR100539634B1/ko not_active IP Right Cessation
-
1999
- 1999-06-02 HK HK99102432A patent/HK1017564A1/xx not_active IP Right Cessation
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5663865A (en) * | 1995-02-20 | 1997-09-02 | Shin-Etsu Chemical Co., Ltd. | Ceramic electrostatic chuck with built-in heater |
EP0773485A2 (fr) * | 1995-11-13 | 1997-05-14 | Sumitomo Electric Industries, Ltd. | Elément chauffant et unité de chauffage ou de fixage comprenant cet élément |
Also Published As
Publication number | Publication date |
---|---|
HK1017564A1 (en) | 1999-11-19 |
JPH11135234A (ja) | 1999-05-21 |
DE69809687D1 (de) | 2003-01-09 |
JP3820706B2 (ja) | 2006-09-13 |
DE69809687T2 (de) | 2003-04-10 |
KR100539634B1 (ko) | 2006-02-28 |
US6084221A (en) | 2000-07-04 |
EP0914022B1 (fr) | 2002-11-27 |
EP0914022A2 (fr) | 1999-05-06 |
CA2251875C (fr) | 2004-01-06 |
CA2251875A1 (fr) | 1999-04-30 |
KR19990037488A (ko) | 1999-05-25 |
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