EP0902848B1 - Soupape d'injection de carburant - Google Patents

Soupape d'injection de carburant Download PDF

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Publication number
EP0902848B1
EP0902848B1 EP97949953A EP97949953A EP0902848B1 EP 0902848 B1 EP0902848 B1 EP 0902848B1 EP 97949953 A EP97949953 A EP 97949953A EP 97949953 A EP97949953 A EP 97949953A EP 0902848 B1 EP0902848 B1 EP 0902848B1
Authority
EP
European Patent Office
Prior art keywords
coding
perforated
component according
component
marks
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
EP97949953A
Other languages
German (de)
English (en)
Other versions
EP0902848A1 (fr
Inventor
Jörg HEYSE
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Robert Bosch GmbH
Original Assignee
Robert Bosch GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Robert Bosch GmbH filed Critical Robert Bosch GmbH
Publication of EP0902848A1 publication Critical patent/EP0902848A1/fr
Application granted granted Critical
Publication of EP0902848B1 publication Critical patent/EP0902848B1/fr
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Classifications

    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/08—Perforated or foraminous objects, e.g. sieves
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C—CHEMISTRY; METALLURGY
    • C25—ELECTROLYTIC OR ELECTROPHORETIC PROCESSES; APPARATUS THEREFOR
    • C25D—PROCESSES FOR THE ELECTROLYTIC OR ELECTROPHORETIC PRODUCTION OF COATINGS; ELECTROFORMING; APPARATUS THEREFOR
    • C25D1/00—Electroforming
    • C25D1/003—3D structures, e.g. superposed patterned layers
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24802—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.]
    • Y10T428/24917—Discontinuous or differential coating, impregnation or bond [e.g., artwork, printing, retouched photograph, etc.] including metal layer
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/24—Structurally defined web or sheet [e.g., overall dimension, etc.]
    • Y10T428/24942—Structurally defined web or sheet [e.g., overall dimension, etc.] including components having same physical characteristic in differing degree
    • Y10T428/2495—Thickness [relative or absolute]
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10T—TECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T428/00—Stock material or miscellaneous articles
    • Y10T428/249921—Web or sheet containing structurally defined element or component
    • Y10T428/249953—Composite having voids in a component [e.g., porous, cellular, etc.]
    • Y10T428/249967—Inorganic matrix in void-containing component
    • Y10T428/24997—Of metal-containing material

Definitions

  • the invention is based on a micro electroplating manufactured component according to the genus of the main claim.
  • the component according to the invention with the characteristic Features of the main claim has the advantage that simple way of building and Contouring of the component are accessible. This will be done at the micro-galvanic production of the component, i.e. during of the electroplating process provided coding characters that very easy to evaluate or decode optically or otherwise are, which gives a lot of information to the Characteristic data of the component is available.
  • the coding characters are available at no additional cost Achieving the desired geometry of the component, e.g. the Opening geometry of a perforated disk through which fluid flows, required manufacturing steps can be produced.
  • the production of a coding character is done offside the important contours for fulfilling the functions of the Component identical to the production of other opening areas.
  • the coding characters advantageously become the same co-shaped in the first electroplating step by photolithographic masks can be used. Thus lie the coding characters from the outset on an outer Limiting side of the component.
  • Coding characters are advantageously binary-coded before, i.e. Cutouts and filled metallic areas ("Defects") correspond to values "0" and "1” and form thus a binary code that can be decoded very easily can.
  • Embodiments of the invention are in the drawing shown in simplified form and in the following Description explained in more detail.
  • 1 shows it partially illustrated injector with a micro-electroplated component in the form of a Perforated disk
  • Figure 2 shows a first perforated disk in a Top view
  • Figure 2a shows a perforated disc in section along the Line IIa-IIa in Figure 2
  • Figure 3 shows a second perforated disc in a plan view
  • Figure 4 shows a third perforated disc in a Top view
  • Figure 5 shows a fourth perforated disc in a Bottom view.
  • FIG 1 is a valve in the form of a Injector for fuel injection systems from mixture-compression-ignition internal combustion engines partially shown, which has a perforated disc 23, the an embodiment of an inventive represents micro-electroplated component.
  • perforated disks 23 not only for the Use on injectors are provided; you can rather z. B. in spray nozzles, in inhalers, at Inkjet printers or in freeze-drying processes to Spraying or injecting liquids, such as. B. drinks, used to atomize medication.
  • the perforated disks 23 themselves in turn only provide one Embodiment of a micro-electroplated component Also micro-electroplated components with completely from the perforated disks 23 differing shapes, Contours, proportions and purposes course training according to the invention have, so that in no way a limitation to Perforated disks 23 are present.
  • a tubular valve seat support 1 in the concentric a longitudinal opening 3 is formed for a longitudinal valve axis 2 is.
  • a longitudinal opening 3 is formed for a longitudinal valve axis 2 is.
  • B. spherical valve closing body 7 the extent of which, for example, five flattenings 8 Passing fuel are provided, fixed connected is.
  • the injection valve is actuated in a known manner Way, for example electromagnetic.
  • a known manner Way for example electromagnetic.
  • For axial Movement of the valve needle 5 and thus to open against the Spring force of a return spring (not shown) or Closing the injection valve is used schematically indicated electromagnetic circuit with a magnetic coil 10, an anchor 11 and a core 12.
  • the anchor 11 is with the end facing away from the valve closing body 7 Valve needle 5 by z. B. one using a laser produced welded joint and on the core 12th aligned.
  • Valve seat body 16 which is in the downstream end of the valve seat support 1 in the longitudinal opening 3 Welding is tightly mounted.
  • the valve seat body 16 is with a z. B. cup-shaped perforated disc carrier 21 concentrically and firmly connected, so at least with an outer ring region 22 directly on the Valve seat body 16 abuts.
  • a component designed according to the invention, here the Perforated disk 23 is upstream of a through opening 20 arranged in the perforated disc carrier 21 such that it is the Through opening 20 completely covered.
  • the Perforated disc carrier 21 is with a bottom part 24 and one Holding edge 26 executed.
  • the connection of the valve seat body 16 and perforated disc carrier 21 takes place, for example a circumferential and dense, by means of a laser trained first weld seam 25.
  • the perforated disk carrier 21 is in the region of the holding edge 26 with the Wall of the longitudinal opening 3 in the valve seat support 1 for example by a circumferential and dense second Weld 30 connected.
  • the in the area of the passage opening 20 within the circular weld 25 between the perforated disc carrier 21 and the valve seat body 16 clampable perforated disk 23 is, for example, staged.
  • An upper one smaller diameter than a base region 32 Perforated disk region 33 projects into a downstream one tapered valve seat surface 29 following cylindrical outlet opening 31 of the Valve seat body 16 dimensionally accurate.
  • the one about the Perforated disk area 33 protruding radially and thus pinchable base region 32 of the perforated disk 23 lies on Valve seat body 16 on.
  • the perforated disc area 33 e.g. B.
  • two functional levels, namely a middle and one upper functional level, which comprises perforated disk 23 forms a lower functional level the basic area 32 alone.
  • a Functional level should be about their axial extent each have a largely constant opening contour.
  • a functional level of the perforated disk 23 represents a position, over the axial extent of which the contour, including the arrangement of all openings to one another and the geometry of each individual opening, remains largely constant.
  • a layer is to be understood as meaning the position of the perforated disk 23 built up in an electroplating step.
  • a layer can have several functional levels, which, for. B. can be produced with the so-called lateral overgrowth.
  • a plurality of functional levels (for example, in the case of a perforated disk 23 comprising three functional levels, the middle and the upper functional level) are formed, which represent a coherent layer.
  • the respective functional levels have different opening contours (inlet, outlet openings, channels) to the immediately following functional level.
  • the individual layers of the perforated disk 23 are successively electrodeposited, so that the subsequent layer firmly bonds to the underlying layer due to galvanic adhesion, and all the layers together then form a one-piece perforated disk 23.
  • Characteristic of the process of successive application of photolithographic steps (UV depth lithography) and subsequent micro electroplating is that it is also in large scale a high precision of the structures ensures that it is ideal for mass production with very large quantities can be used. Can on a wafer a large number of perforated disks 23 are manufactured simultaneously become.
  • the starting point for the process is a flat and stable one Carrier plate, the z. B. made of metal (titanium, copper), Silicon, glass or ceramic can exist.
  • On the Carrier plate is optionally at least one Auxiliary layer galvanized. It is about for example an electroplating start layer (e.g. Cu), the for electrical wiring for later micro electroplating is needed.
  • the electroplating start layer can also be used as Sacrificial layer serve to easily separate the later To enable perforated disk structures by etching.
  • the Application of the auxiliary layer happens z. B. by sputtering or by currentless Metal deposition. After this pretreatment the A carrier plate becomes a photoresist on the auxiliary layer (Photoresist) applied all over.
  • the thickness of the photoresist should be the thickness of the Metal layer correspond to that in the later one Electroplating process is to be realized, i.e. the thickness of the lower layer or functional level of the perforated disk 23. Die metal structure to be realized should be created with the help of a photolithographic mask inversely in the photoresist be transmitted. One way is to Photoresist directly over the mask using UV exposure expose (UV depth lithography).
  • the negative structure ultimately created in the photoresist later functional level of the perforated disk 23 is galvanic filled with metal (e.g. Ni, NiCo) (metal deposition).
  • metal e.g. Ni, NiCo
  • the metal clings to the metal by electroplating Contour of the negative structure so that the given Contours are faithfully reproduced in it.
  • the Steps from the optional application of the auxiliary layer repeated according to the number of layers desired be, z. B. two functional levels in one Electroplating step can be generated (lateral overgrowth).
  • the perforated disks 23 are separated. To do this, the sacrificial layer is etched away, causing the Lift off perforated disks 23 from the carrier plate. After that the galvanic starting layers are removed by etching and the remaining photoresist from the metal structures detached.
  • FIG 2 shows an embodiment of a perforated disc 23 in a top view.
  • the perforated disc 23 is a flat, circular component executed that several, for example three, axially consecutive Has functional levels.
  • the one Sectional view along a line IIa-IIa in Figure 2 is clarifies the structure of the perforated disk 23 with their three functional levels, with the lower one being built first Functional level 35, that of the first deposited layer or corresponds to the base area 32 of the perforated disk 23, has a larger outer diameter than the two subsequently built functional levels 36 and 37, the together form the perforated disc area 33 and z.
  • B. in are produced in an electroplating step.
  • the upper Functional level 37 has an inlet opening 40 with a as large as possible on a contour similar to a stylized bat (or a double H).
  • the Inlet opening 40 has a cross section which as partially rounded rectangle with two each opposite, rectangular constrictions 45 and three protruding beyond the constrictions 45 Inlet areas 46 is writable. With z. B. each equal distance to the valve longitudinal axis 2 and thus to Center axis of the perforated disk 23 and around this, for example are also arranged symmetrically in the lower Functional level 35 four rectangular outlet openings 42 intended.
  • the rectangular / square Outlet openings 42 are in a projection of all Functional levels 35, 36, 37 in one level partially or largely in the constrictions 45 of the upper Function level 37 and have an offset to Inlet opening 40.
  • the offset can be different Directions can be different sizes.
  • a channel 41 (cavity) trained, which represents a cavity.
  • One contour a channel 41 having a rounded rectangle such a size that the projection of the Inlet opening 40 completely covered and especially in the Areas of constrictions 45 well above that Inlet opening 40 protrudes, that is, a greater distance from Center axis of the perforated disk 23 as the constrictions 45 Has.
  • a plurality of coding characters 60 are provided in the areas between the middle Inlet areas 46 of the inlet opening 40 and the outer edge of the base area 32 or the perforated disk area 33 of the Perforated disk 23 of the Perforated disk 23, a plurality of coding characters 60 are provided.
  • the individual coding characters 60 largely square Contours.
  • the coding characters 60 can be used individually or in Groups can be arranged, the grouped Coding characters 60 ultimately more complex together Represent coding characters 60 and as coding fields be designated.
  • Figure 2 form on one side next to the inlet opening 40 three with one corner each mutually encoding characters 60 a complex (Coding field) while on the other side next to the Inlet opening 40 two coding characters 60 with little Distance are formed such that the one another facing boundary edges of the coding characters 60 run in parallel.
  • the electroplating process is used to manufacture the Coding characters 60 in the lower functional level 35, the corresponds to the layer deposited first, in addition to the outlet openings 42 by means of appropriate masks Cutouts provided. These as coding characters 60 serving recesses are available at no additional cost Achieving the desired opening geometry required Manufacturing steps can be produced.
  • the making of a Coding character 60 is identical to that Production of the outlet openings 42.
  • the second Functional level 36 which e.g. in a next Galvanic step is built up, covers the recesses e.g. upwards so that the coding characters 60 have a depth have the thickness of the lower functional level 35 corresponds ( Figure 2a left side).
  • Coding characters 60 are on the lower face of the Perforated disc 23 visible as wells and with known Technologies can be scanned contactlessly and for example optically evaluable.
  • the square Coding characters 60 have e.g. Edge lengths from 100 to 200 ⁇ m.
  • the structuring is the smallest possible controllable cross-sectional dimension of a coding symbol 60 is equal to the structure height or depth of the Coding character 60, which is the resist thickness of the photoresist corresponds.
  • the coding characters 60 is a variety of information about the contouring of the perforated disk 23 encryptable, so that on an elaborate and clear More space-consuming labeling with numbers or Letters can be dispensed with.
  • the information is for example housed in a binary code. Is e.g.
  • a coding symbol 60 metallic filled in this can correspond to a value "0" while a coding character 60 present as a recess Value "1" corresponds.
  • One of these two coding characters 60 complex coding field formed can thus as "01" or "10" can be read.
  • the definition of a recess or a completed coding character 60 can of course also exactly the opposite. With each coding character 60 more in a coding field or with additional ones Coding fields can contain significantly more information be encrypted. Coding fields can be made from spaced or touching coding characters 60 consist.
  • FIG. 3 shows a perforated disk 23 which has several for example has three inlet openings 40.
  • Everyone Inlet opening 40 is exactly one channel 41 and exactly one Outlet opening 42 assigned.
  • the perforated disk 23 has three Functional units, each with an inlet opening 40, one Channel 41 and an outlet opening 42.
  • the functional units are asymmetrical or eccentric about the valve longitudinal axis 2, which is always the Corresponds to the central axis of the perforated disk 23. With this seemingly disordered division is very good individual beam directions can be achieved.
  • the perforated disc 3 connects a channel 41 with im Cross-section circular sector-shaped contour a crescent-shaped or annular segment-shaped inlet opening 40 with a circular outlet opening 42. Undermine the channels 41 or cover the respectively assigned inlet openings 40 and outlet openings 42 are always complete.
  • the Outlet openings 42 are arranged so that the Because of the beam pattern an asymmetrical cone results because the Individual rays divergent, that is, in themselves widening in a main direction obliquely to Aim longitudinal valve axis 2.
  • the perforated disk 23 according to FIG. 3 has a coding field three square, as a triangle spaced from each other arranged coding characters 60 and a circular Coding characters 60 on, all in places of Perforated disk 23 are provided where the actual Basic functions of the perforated disk 23 are not impaired become. These are usually marginal areas away the outlet openings 42.
  • the contours of the coding characters 60 are also triangular, rectangular, oval, etc. Cross sections conceivable.
  • FIG. 4 Another embodiment of a perforated disc 23 with Figure 4 shows several, here two inlet openings 40 the two inlet openings 40 face each other completely deviating opening contours, because these perforated disks too 23 the oblique beam generation or generation asymmetrical spray patterns should serve. While the one Inlet opening 40 three legs 55 and thus a T-shape has, the second inlet opening 40 has the contour a circular ring section with a variable width.
  • the three are designed like tunnel portals Outlet openings 42, one of which annular section-shaped inlet opening 40 and the adjoining circular sector-shaped channel 41 and two the T-shaped inlet port 40 and the downstream one following semicircular channel 41 are assigned in the areas between the legs 55 or in the Annular portion of an inlet opening 40 enclosed interior embedded.
  • the Coding characters 60 for example, again have square contours and can be different with respect to individual edges of the opening contours. So run e.g. two edges each of the coding characters 60 on the right side in Figure 4 parallel to one Boundary edge of the T-shaped inlet opening 40, whereas with the coding characters 60 on the left side none Parallelism of an edge with boundary edges of the inlet or outlet openings 40, 42 is present.
  • FIG. 5 shows a perforated disk 23 in a bottom view, an elongated rectangular inlet opening 40 and four square, largely over the perforated disc surface has equally distributed outlet openings 42.
  • Channel 41 in the middle functional level 36 has a largely circular contour, in two opposite places Has V-shaped notches. In the projection of everyone The channel 41 covers the functional levels of the perforated disk 23 the inlet opening 40 and the outlet openings 42 completely.
  • the coding characters 60 are, for example, in FIGS Notches of the channel 41 are arranged.
  • the two Coding fields are T-shaped or V-shaped and each consist of three square coding characters 60 together in the form mentioned above. Both Coding fields can be in the binary code e.g. as "100" or "001” or if the number of recesses is reversed or Pads can be read as "011” or "110". Separate Coding characters 60 can be changed at any time by more extend as only one functional level 35.
  • the scanning of the coding characters 60 is usually done done without contact.
  • For scanning and subsequent Evaluation of the encoded in the coding characters 60 Various procedures are available for information. So can an optical evaluation, for example by means of a known CCD camera take place, this application a computer-aided pattern recognition and evaluation. On the other hand, there is also an optical evaluation via a Laser scanning for the detection of depressions possible. Echosounder methods provide additional options Ultrasound or scanning using a Infrared camera.

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  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Electroplating Methods And Accessories (AREA)
  • Fuel-Injection Apparatus (AREA)

Claims (10)

  1. Pièce fabriquée par un procédé de dépôt microgalvanique ayant une structure tridimensionnelle obtenue par lithographie profonde,
    caractérisée en ce que
    sur un côté de la pièce (23) qui en constitue une surface extérieure, on prévoit au moins un signe de codage (60) réalisé au cours du procédé de dépôt galvanique et qui peut se détecter.
  2. Pièce selon la revendication 1,
    caractérisée en ce qu'
    au moins un signe de codage (60) correspond à un creux ou à une zone métallique remplie, prédéterminée.
  3. Pièce selon la revendication 2,
    caractérisée en ce qu'
    un signe de codage (60), qui représente un creux a une profondeur correspondant à l'épaisseur de couche d'une structure de la pièce déposée au cours d'une première étape de dépôt galvanique.
  4. Pièce selon l'une quelconque des revendications 1 ou 2,
    caractérisée en ce que
    plusieurs signes de codage (60) sont regroupés en un champ de codage.
  5. Pièce selon la revendication 4,
    caractérisée en ce que
    les signes de codage (60) d'un champ de codage sont distants les uns des autres.
  6. Pièce selon la revendication 4,
    caractérisée en ce que
    les signes de codage (60) d'un champ de codage se touchent.
  7. Pièce selon la revendication 6,
    caractérisée en ce que
    les signes de codage (60) sont disposés suivant des champs de codage complexes ayant une forme de T ou de V.
  8. Pièce selon l'une quelconque des revendications précédentes,
    caractérisée en ce que
    les signes de codage (60) ont une section carrée, rectangulaire, triangulaire, ovale ou circulaire.
  9. Pièce selon l'une quelconque des revendications 1 ou 2,
    caractérisée en ce que
    des informations de construction ou de contour de la pièce sont intégrées dans les signes de codage (60).
  10. Pièce selon l'une quelconque des revendications précédentes,
    caractérisée en ce qu'
    au moins un signe de codage (60) est exploitable par voie optique ou aux ultrasons.
EP97949953A 1997-01-29 1997-11-19 Soupape d'injection de carburant Expired - Lifetime EP0902848B1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
DE19703080 1997-01-29
DE19703080A DE19703080A1 (de) 1997-01-29 1997-01-29 Mikrogalvanisch hergestelltes Bauteil
PCT/DE1997/002708 WO1998033958A1 (fr) 1997-01-29 1997-11-19 Soupape d'injection de carburant

Publications (2)

Publication Number Publication Date
EP0902848A1 EP0902848A1 (fr) 1999-03-24
EP0902848B1 true EP0902848B1 (fr) 2001-10-10

Family

ID=7818600

Family Applications (1)

Application Number Title Priority Date Filing Date
EP97949953A Expired - Lifetime EP0902848B1 (fr) 1997-01-29 1997-11-19 Soupape d'injection de carburant

Country Status (6)

Country Link
US (1) US6280832B1 (fr)
EP (1) EP0902848B1 (fr)
JP (1) JP4102447B2 (fr)
KR (1) KR100752060B1 (fr)
DE (2) DE19703080A1 (fr)
WO (1) WO1998033958A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE19955975A1 (de) 1999-11-19 2001-05-23 Inst Mikrotechnik Mainz Gmbh Lithographisches Verfahren zur Herstellung von Mikrobauteilen
US7229542B2 (en) * 2002-05-07 2007-06-12 Microfabrica Inc. Methods of and apparatus for molding structures using sacrificial metal patterns
DE102010062596A1 (de) * 2010-12-08 2012-06-14 Robert Bosch Gmbh Ausrichtverfahren und Vorrichtung für elektrochemische Bearbeitung
DE102018203065A1 (de) * 2018-03-01 2019-09-05 Robert Bosch Gmbh Verfahren zur Herstellung eines Injektors

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63290289A (ja) * 1987-05-20 1988-11-28 Seiko Epson Corp 光ディスク用スタンパの製造方法
JPS63290285A (ja) 1987-05-21 1988-11-28 Matsushita Electric Ind Co Ltd 犠牲陽極装置
US5190637A (en) 1992-04-24 1993-03-02 Wisconsin Alumni Research Foundation Formation of microstructures by multiple level deep X-ray lithography with sacrificial metal layers
DE19607288A1 (de) 1995-03-29 1996-10-02 Bosch Gmbh Robert Verfahren zur Herstellung einer Lochscheibe

Also Published As

Publication number Publication date
KR100752060B1 (ko) 2008-11-06
JP4102447B2 (ja) 2008-06-18
JP2000508715A (ja) 2000-07-11
EP0902848A1 (fr) 1999-03-24
DE19703080A1 (de) 1998-07-30
WO1998033958A1 (fr) 1998-08-06
US6280832B1 (en) 2001-08-28
KR20000064777A (ko) 2000-11-06
DE59704877D1 (de) 2001-11-15

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