EP0892419A3 - Micro electro-mechanical system (MEMS) switch - Google Patents

Micro electro-mechanical system (MEMS) switch Download PDF

Info

Publication number
EP0892419A3
EP0892419A3 EP98112740A EP98112740A EP0892419A3 EP 0892419 A3 EP0892419 A3 EP 0892419A3 EP 98112740 A EP98112740 A EP 98112740A EP 98112740 A EP98112740 A EP 98112740A EP 0892419 A3 EP0892419 A3 EP 0892419A3
Authority
EP
European Patent Office
Prior art keywords
switch
mems
micro electro
forming
metal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
EP98112740A
Other languages
German (de)
French (fr)
Other versions
EP0892419B1 (en
EP0892419A2 (en
Inventor
John J. Berenz
George W. Mciver
Alfred E. Lee
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Northrop Grumman Corp
Original Assignee
TRW Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TRW Inc filed Critical TRW Inc
Publication of EP0892419A2 publication Critical patent/EP0892419A2/en
Publication of EP0892419A3 publication Critical patent/EP0892419A3/en
Application granted granted Critical
Publication of EP0892419B1 publication Critical patent/EP0892419B1/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01P—WAVEGUIDES; RESONATORS, LINES, OR OTHER DEVICES OF THE WAVEGUIDE TYPE
    • H01P1/00—Auxiliary devices
    • H01P1/10—Auxiliary devices for switching or interrupting
    • H01P1/12—Auxiliary devices for switching or interrupting by mechanical chopper
    • H01P1/127—Strip line switches
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01H—ELECTRIC SWITCHES; RELAYS; SELECTORS; EMERGENCY PROTECTIVE DEVICES
    • H01H59/00—Electrostatic relays; Electro-adhesion relays
    • H01H59/0009—Electrostatic relays; Electro-adhesion relays making use of micromechanics
    • H01H2059/0054—Rocking contacts or actuating members

Landscapes

  • Micromachines (AREA)
  • Waveguide Switches, Polarizers, And Phase Shifters (AREA)

Abstract

An RF switch formed as a micro electro-mechanical switch (MEMS) which can be configured in an array forming a micro electro-mechanical switch array (MEMSA). The MEMS is formed on a substrate. A pin, pivotally carried by the substrate defines a pivot point. A rigid beam or transmission line is generally centrally disposed on the pin forming a teeter-totter configuration. The use of a rigid beam and the configuration eliminates the torsional and bending forces of the beam which can reduce reliability. The switch is adapted to be monolithically integrated with other monolithic microwave integrated circuits (MMIC) for example from HBTs and HEMTs, by separating such MMICs from the switch by way of a suitable polymer layer, such as polyimide, enabling the switch to be monolithically integrated with other circuitry. In order to reduce insertion losses, the beam is formed from all metal, which improves the sensitivity of the switch and also allows the switch to be used in RF switching applications. By forming the beam from all metal, the switch will have lower insertion loss than other switches which use SiO2 or mix metal contacts.
EP19980112740 1997-07-18 1998-07-09 Micro electro-mechanical system (MEMS) switch Expired - Lifetime EP0892419B1 (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US89707597A 1997-07-18 1997-07-18
US897075 1997-07-18

Publications (3)

Publication Number Publication Date
EP0892419A2 EP0892419A2 (en) 1999-01-20
EP0892419A3 true EP0892419A3 (en) 1999-07-07
EP0892419B1 EP0892419B1 (en) 2005-11-16

Family

ID=25407303

Family Applications (1)

Application Number Title Priority Date Filing Date
EP19980112740 Expired - Lifetime EP0892419B1 (en) 1997-07-18 1998-07-09 Micro electro-mechanical system (MEMS) switch

Country Status (3)

Country Link
EP (1) EP0892419B1 (en)
JP (1) JP3207161B2 (en)
DE (1) DE69832333T2 (en)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6645145B1 (en) * 1998-11-19 2003-11-11 Siemens Medical Solutions Usa, Inc. Diagnostic medical ultrasound systems and transducers utilizing micro-mechanical components
US6160230A (en) * 1999-03-01 2000-12-12 Raytheon Company Method and apparatus for an improved single pole double throw micro-electrical mechanical switch
JP3374804B2 (en) * 1999-09-30 2003-02-10 日本電気株式会社 Phase shifter and method of manufacturing the same
DE10195354T1 (en) * 2000-02-03 2003-05-08 Medtronic Inc Variable infusion flow rate catheter
US6749581B2 (en) 2001-02-02 2004-06-15 Medtronic, Inc. Variable infusion rate catheter
US6562000B2 (en) 2001-02-02 2003-05-13 Medtronic, Inc. Single-use therapeutic substance delivery device with infusion rate control
US6781208B2 (en) 2001-08-17 2004-08-24 Nec Corporation Functional device, method of manufacturing therefor and driver circuit
US6635506B2 (en) * 2001-11-07 2003-10-21 International Business Machines Corporation Method of fabricating micro-electromechanical switches on CMOS compatible substrates
US6798315B2 (en) 2001-12-04 2004-09-28 Mayo Foundation For Medical Education And Research Lateral motion MEMS Switch
JP3818176B2 (en) * 2002-03-06 2006-09-06 株式会社村田製作所 RFMEMS element
US7123119B2 (en) * 2002-08-03 2006-10-17 Siverta, Inc. Sealed integral MEMS switch
JP3862633B2 (en) * 2002-08-14 2006-12-27 東京エレクトロン株式会社 Method for manufacturing non-radiative dielectric line
CN100403476C (en) * 2004-09-27 2008-07-16 东南大学 Single-pole double throw membrane switch of RF microelectronic machinery and its mfg method

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0484142A2 (en) * 1990-11-01 1992-05-06 Hughes Aircraft Company Micro-machined switch and method of fabrication
EP0712022A2 (en) * 1994-11-14 1996-05-15 Texas Instruments Incorporated Improvements in or relating to micromechanical devices
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0484142A2 (en) * 1990-11-01 1992-05-06 Hughes Aircraft Company Micro-machined switch and method of fabrication
EP0712022A2 (en) * 1994-11-14 1996-05-15 Texas Instruments Incorporated Improvements in or relating to micromechanical devices
US5578976A (en) * 1995-06-22 1996-11-26 Rockwell International Corporation Micro electromechanical RF switch

Also Published As

Publication number Publication date
JP3207161B2 (en) 2001-09-10
JPH11144596A (en) 1999-05-28
DE69832333T2 (en) 2006-07-20
DE69832333D1 (en) 2005-12-22
EP0892419B1 (en) 2005-11-16
EP0892419A2 (en) 1999-01-20

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