EP0858666A1 - Transformateur a.f. utilisant des structures polymeres metalliques multicouches - Google Patents
Transformateur a.f. utilisant des structures polymeres metalliques multicouchesInfo
- Publication number
- EP0858666A1 EP0858666A1 EP96937708A EP96937708A EP0858666A1 EP 0858666 A1 EP0858666 A1 EP 0858666A1 EP 96937708 A EP96937708 A EP 96937708A EP 96937708 A EP96937708 A EP 96937708A EP 0858666 A1 EP0858666 A1 EP 0858666A1
- Authority
- EP
- European Patent Office
- Prior art keywords
- transformer
- layer
- polymer
- deposited
- metal spiral
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Withdrawn
Links
- 239000002184 metal Substances 0.000 title claims abstract description 46
- 229910052751 metal Inorganic materials 0.000 title claims abstract description 46
- 229920000642 polymer Polymers 0.000 title claims abstract description 27
- 230000008878 coupling Effects 0.000 claims abstract description 27
- 238000010168 coupling process Methods 0.000 claims abstract description 27
- 238000005859 coupling reaction Methods 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 25
- 239000000758 substrate Substances 0.000 claims abstract description 18
- 239000012212 insulator Substances 0.000 claims abstract description 17
- 230000008569 process Effects 0.000 claims abstract description 13
- 230000008901 benefit Effects 0.000 claims abstract description 10
- 239000010409 thin film Substances 0.000 claims abstract description 10
- 230000001939 inductive effect Effects 0.000 claims abstract description 8
- 239000011521 glass Substances 0.000 claims abstract description 7
- 239000003989 dielectric material Substances 0.000 claims abstract description 5
- 238000010521 absorption reaction Methods 0.000 claims abstract 2
- 239000002861 polymer material Substances 0.000 claims abstract 2
- UMIVXZPTRXBADB-UHFFFAOYSA-N benzocyclobutene Chemical group C1=CC=C2CCC2=C1 UMIVXZPTRXBADB-UHFFFAOYSA-N 0.000 claims description 19
- 238000004804 winding Methods 0.000 description 22
- 239000003990 capacitor Substances 0.000 description 10
- 238000000151 deposition Methods 0.000 description 10
- 230000008021 deposition Effects 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 230000001965 increasing effect Effects 0.000 description 9
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 8
- 238000004519 manufacturing process Methods 0.000 description 8
- 230000000694 effects Effects 0.000 description 6
- 239000010408 film Substances 0.000 description 5
- 238000001465 metallisation Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 239000000463 material Substances 0.000 description 4
- 238000012512 characterization method Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- 230000002829 reductive effect Effects 0.000 description 3
- 235000012239 silicon dioxide Nutrition 0.000 description 3
- 239000000377 silicon dioxide Substances 0.000 description 3
- 239000010936 titanium Substances 0.000 description 3
- 238000006243 chemical reaction Methods 0.000 description 2
- 239000004020 conductor Substances 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 238000011031 large-scale manufacturing process Methods 0.000 description 2
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 2
- 230000009467 reduction Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 239000004642 Polyimide Substances 0.000 description 1
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000008020 evaporation Effects 0.000 description 1
- 238000001704 evaporation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000000670 limiting effect Effects 0.000 description 1
- 238000002044 microwave spectrum Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 238000012536 packaging technology Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000007736 thin film deposition technique Methods 0.000 description 1
- 230000036962 time dependent Effects 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F19/00—Fixed transformers or mutual inductances of the signal type
- H01F19/04—Transformers or mutual inductances suitable for handling frequencies considerably beyond the audio range
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F17/00—Fixed inductances of the signal type
- H01F17/0006—Printed inductances
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Multimedia (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Semiconductor Integrated Circuits (AREA)
- Coils Or Transformers For Communication (AREA)
- Fixed Capacitors And Capacitor Manufacturing Machines (AREA)
Abstract
Un transformateur destiné à des applications à hautes fréquences, comportant une structure multicouche en couches fines et un matériau diélectrique disposé entre les enroulements, augmente le couplage par induction tout en réduisant le couplage capacitif entre les enroulements du transformateur. Une première spirale métallique (301) encapsulée par une couche d'isolant polymère (601) est déposée sur un substrat de verre (201). Une seconde spirale métallique (701) est déposée sur la couche de polymère, et le même processus se répète avec la couche de polymère suivante. L'interconnexion des spirales métalliques dans les différentes couches est réalisée grâce à des rainures gravées sélectivement dans lesquelles sont disposés des vias (902). L'invention concerne particulièrement un symétriseur. L'utilisation du polymère, de préférence le benzocyclobutène, comme diélectrique a pour avantage fonctionnel une très faible perte par absorption aux hyperfréquences et aux A.F., bien que cet isolant donne par ailleurs un excellent couplage par induction tout en réduisant nettement le couplage capacitif entre les différentes couches du dispositif.
Applications Claiming Priority (5)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US610825 | 1984-05-15 | ||
| US708995P | 1995-10-31 | 1995-10-31 | |
| US600708 | 1995-10-31 | ||
| US61082596A | 1996-03-07 | 1996-03-07 | |
| PCT/US1996/016876 WO1997016836A1 (fr) | 1995-10-31 | 1996-10-21 | Transformateur a.f. utilisant des structures polymeres metalliques multicouches |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| EP0858666A1 true EP0858666A1 (fr) | 1998-08-19 |
Family
ID=26676489
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| EP96937708A Withdrawn EP0858666A1 (fr) | 1995-10-31 | 1996-10-21 | Transformateur a.f. utilisant des structures polymeres metalliques multicouches |
Country Status (5)
| Country | Link |
|---|---|
| EP (1) | EP0858666A1 (fr) |
| JP (1) | JP2000508116A (fr) |
| KR (1) | KR100452022B1 (fr) |
| AU (1) | AU7518496A (fr) |
| WO (1) | WO1997016836A1 (fr) |
Families Citing this family (18)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US6249039B1 (en) | 1998-09-10 | 2001-06-19 | Bourns, Inc. | Integrated inductive components and method of fabricating such components |
| US6384461B1 (en) * | 1999-10-15 | 2002-05-07 | Xerox Corporation | Dual dielectric structure for suppressing lateral leakage current in high fill factor arrays |
| US20020170677A1 (en) * | 2001-04-07 | 2002-11-21 | Tucker Steven D. | RF power process apparatus and methods |
| US7176550B2 (en) | 2001-08-14 | 2007-02-13 | Nxp B.V. | Method and device for forming a winding on a non-planar substrate |
| US7852186B2 (en) | 2006-08-28 | 2010-12-14 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Coil transducer with reduced arcing and improved high voltage breakdown performance characteristics |
| US8427844B2 (en) | 2006-08-28 | 2013-04-23 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Widebody coil isolators |
| US9105391B2 (en) | 2006-08-28 | 2015-08-11 | Avago Technologies General Ip (Singapore) Pte. Ltd. | High voltage hold-off coil transducer |
| US7791900B2 (en) * | 2006-08-28 | 2010-09-07 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Galvanic isolator |
| US9019057B2 (en) | 2006-08-28 | 2015-04-28 | Avago Technologies General Ip (Singapore) Pte. Ltd. | Galvanic isolators and coil transducers |
| US20080278275A1 (en) | 2007-05-10 | 2008-11-13 | Fouquet Julie E | Miniature Transformers Adapted for use in Galvanic Isolators and the Like |
| US8093983B2 (en) | 2006-08-28 | 2012-01-10 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Narrowbody coil isolator |
| US8061017B2 (en) | 2006-08-28 | 2011-11-22 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Methods of making coil transducers |
| US7948067B2 (en) | 2009-06-30 | 2011-05-24 | Avago Technologies Ecbu Ip (Singapore) Pte. Ltd. | Coil transducer isolator packages |
| US8385043B2 (en) | 2006-08-28 | 2013-02-26 | Avago Technologies ECBU IP (Singapoare) Pte. Ltd. | Galvanic isolator |
| US8258911B2 (en) | 2008-03-31 | 2012-09-04 | Avago Technologies ECBU IP (Singapor) Pte. Ltd. | Compact power transformer components, devices, systems and methods |
| US20100301987A1 (en) * | 2009-05-27 | 2010-12-02 | Stmicroelectronics S.A. | Millimeter wave transformer with a high transformation factor and a low insertion loss |
| US8552829B2 (en) | 2010-11-19 | 2013-10-08 | Infineon Technologies Austria Ag | Transformer device and method for manufacturing a transformer device |
| KR20130058340A (ko) * | 2011-11-25 | 2013-06-04 | 삼성전기주식회사 | 인덕터 및 그 제조 방법 |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2897091B2 (ja) * | 1992-07-09 | 1999-05-31 | 株式会社村田製作所 | ライントランス |
-
1996
- 1996-10-21 WO PCT/US1996/016876 patent/WO1997016836A1/fr active IP Right Grant
- 1996-10-21 EP EP96937708A patent/EP0858666A1/fr not_active Withdrawn
- 1996-10-21 KR KR10-1998-0703513A patent/KR100452022B1/ko not_active IP Right Cessation
- 1996-10-21 JP JP9517392A patent/JP2000508116A/ja active Pending
- 1996-10-21 AU AU75184/96A patent/AU7518496A/en not_active Abandoned
Non-Patent Citations (1)
| Title |
|---|
| See references of WO9716836A1 * |
Also Published As
| Publication number | Publication date |
|---|---|
| WO1997016836A1 (fr) | 1997-05-09 |
| JP2000508116A (ja) | 2000-06-27 |
| KR100452022B1 (ko) | 2004-12-14 |
| KR19990067493A (ko) | 1999-08-25 |
| AU7518496A (en) | 1997-05-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PUAI | Public reference made under article 153(3) epc to a published international application that has entered the european phase |
Free format text: ORIGINAL CODE: 0009012 |
|
| 17P | Request for examination filed |
Effective date: 19980424 |
|
| AK | Designated contracting states |
Kind code of ref document: A1 Designated state(s): DE FR GB IT NL |
|
| RIN1 | Information on inventor provided before grant (corrected) |
Inventor name: NORTON, DAVID ELIOT, 28 GLENWOOD GROVE Inventor name: CHINOY, PERCY, B. |
|
| 17Q | First examination report despatched |
Effective date: 19990625 |
|
| STAA | Information on the status of an ep patent application or granted ep patent |
Free format text: STATUS: THE APPLICATION IS DEEMED TO BE WITHDRAWN |
|
| 18D | Application deemed to be withdrawn |
Effective date: 20000718 |